AU2001249331A1 - A workpiece carrier with adjustable pressure zones and barriers - Google Patents

A workpiece carrier with adjustable pressure zones and barriers

Info

Publication number
AU2001249331A1
AU2001249331A1 AU2001249331A AU4933101A AU2001249331A1 AU 2001249331 A1 AU2001249331 A1 AU 2001249331A1 AU 2001249331 A AU2001249331 A AU 2001249331A AU 4933101 A AU4933101 A AU 4933101A AU 2001249331 A1 AU2001249331 A1 AU 2001249331A1
Authority
AU
Australia
Prior art keywords
barriers
workpiece carrier
adjustable pressure
pressure zones
zones
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001249331A
Inventor
James L. Farmer
John D. Herb
Nikolay N. Korovin
Stephen C. Schultz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Speedfam IPEC Corp
Original Assignee
Speedfam IPEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedfam IPEC Corp filed Critical Speedfam IPEC Corp
Publication of AU2001249331A1 publication Critical patent/AU2001249331A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B24B37/32—Retaining rings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
AU2001249331A 2000-03-31 2001-03-20 A workpiece carrier with adjustable pressure zones and barriers Abandoned AU2001249331A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09540476 2000-03-31
US09/540,476 US6390905B1 (en) 2000-03-31 2000-03-31 Workpiece carrier with adjustable pressure zones and barriers
PCT/US2001/009099 WO2001074534A2 (en) 2000-03-31 2001-03-20 A workpiece carrier with adjustable pressure zones and barriers

Publications (1)

Publication Number Publication Date
AU2001249331A1 true AU2001249331A1 (en) 2001-10-15

Family

ID=24155608

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001249331A Abandoned AU2001249331A1 (en) 2000-03-31 2001-03-20 A workpiece carrier with adjustable pressure zones and barriers

Country Status (8)

Country Link
US (5) US6390905B1 (en)
JP (1) JP2004500251A (en)
KR (1) KR100729982B1 (en)
AU (1) AU2001249331A1 (en)
DE (1) DE10196003T1 (en)
GB (1) GB2376908A (en)
TW (1) TWI223318B (en)
WO (1) WO2001074534A2 (en)

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US20040067717A1 (en) 2004-04-08
US20020111122A1 (en) 2002-08-15
US20040259476A1 (en) 2004-12-23
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WO2001074534A3 (en) 2002-02-07
DE10196003T1 (en) 2003-06-05
US7014541B2 (en) 2006-03-21
JP2004500251A (en) 2004-01-08
GB0222298D0 (en) 2002-10-30
US6659850B2 (en) 2003-12-09
GB2376908A (en) 2002-12-31
US20020061716A1 (en) 2002-05-23
US6390905B1 (en) 2002-05-21
WO2001074534A2 (en) 2001-10-11
US6612903B2 (en) 2003-09-02
KR100729982B1 (en) 2007-06-20
US7025664B2 (en) 2006-04-11
TWI223318B (en) 2004-11-01

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