ATE81233T1 - Vorrichtung und verfahren zur halterung eines laseroptischen elements. - Google Patents
Vorrichtung und verfahren zur halterung eines laseroptischen elements.Info
- Publication number
- ATE81233T1 ATE81233T1 AT88900521T AT88900521T ATE81233T1 AT E81233 T1 ATE81233 T1 AT E81233T1 AT 88900521 T AT88900521 T AT 88900521T AT 88900521 T AT88900521 T AT 88900521T AT E81233 T1 ATE81233 T1 AT E81233T1
- Authority
- AT
- Austria
- Prior art keywords
- optical element
- laser optical
- support member
- holding
- laser
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Lasers (AREA)
- Optical Couplings Of Light Guides (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/941,802 US4777639A (en) | 1986-12-15 | 1986-12-15 | Laser optical element mounting arrangement and method |
EP88900521A EP0338011B1 (de) | 1986-12-15 | 1987-12-14 | Vorrichtung und verfahren zur halterung eines laseroptischen elements |
PCT/US1987/003293 WO1988004846A1 (en) | 1986-12-15 | 1987-12-14 | Laser optical element mounting arrangement and method |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE81233T1 true ATE81233T1 (de) | 1992-10-15 |
Family
ID=25477084
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT88900521T ATE81233T1 (de) | 1986-12-15 | 1987-12-14 | Vorrichtung und verfahren zur halterung eines laseroptischen elements. |
Country Status (8)
Country | Link |
---|---|
US (1) | US4777639A (de) |
EP (1) | EP0338011B1 (de) |
JP (1) | JPH07120829B2 (de) |
AT (1) | ATE81233T1 (de) |
AU (1) | AU594859B2 (de) |
CA (1) | CA1298642C (de) |
DE (1) | DE3782065T2 (de) |
WO (1) | WO1988004846A1 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4890296A (en) * | 1989-01-19 | 1989-12-26 | Amoco Corporation | Housing for the output coupler of a laser |
JPH04276672A (ja) * | 1991-03-05 | 1992-10-01 | Nec Corp | レーザ共振器 |
US5237583A (en) * | 1991-10-28 | 1993-08-17 | Lumonics Inc. | Excimer laser assembly and an optic mount therefor |
US5247537A (en) * | 1991-11-19 | 1993-09-21 | Spectra-Physics Lasers, Inc. | Rotatable vacuum sealed mount for optical element, endbell assembly for gas discharge tube using said mount and gas discharge tube for ion laser using said mount |
US5406578A (en) * | 1992-08-06 | 1995-04-11 | Carl-Zeiss-Stiftung | Unstable laser resonator for generating a stable fundamental mode beam profile |
JP3378103B2 (ja) * | 1994-12-28 | 2003-02-17 | 富士写真フイルム株式会社 | レーザーダイオード励起固体レーザー |
GB2313472B (en) * | 1996-05-22 | 2000-10-18 | Avimo Ltd | Laser resonators |
US5960025A (en) * | 1997-10-06 | 1999-09-28 | Honeywell Inc. | Device and method for achieving beam path alignment of an optical cavity |
JP3351339B2 (ja) * | 1998-03-12 | 2002-11-25 | 住友電気工業株式会社 | レーザ用曲率可変鏡 |
KR100524293B1 (ko) | 1999-05-27 | 2005-10-26 | 삼성토탈 주식회사 | 에틸렌 중합 및 공중합용 촉매 |
CN1167715C (zh) | 1999-10-23 | 2004-09-22 | 三星阿托菲纳株式会社 | 用于烯烃均聚和共聚反应的改进的催化剂 |
KR100361224B1 (ko) * | 1999-12-01 | 2002-11-29 | 삼성종합화학주식회사 | 에틸렌 중합 및 공중합용 촉매의 제조방법 |
US6310904B1 (en) * | 2000-05-31 | 2001-10-30 | Honeywell International, Inc. | Measurement method to facilitate production of self-aligning laser gyroscope block |
KR100359932B1 (ko) | 2000-06-15 | 2002-11-07 | 삼성종합화학주식회사 | 에틸렌 중합 및 공중합용 촉매 |
KR100387734B1 (ko) * | 2000-06-17 | 2003-06-18 | 삼성종합화학주식회사 | 올레핀 중합용 촉매 및 중합방법 |
US6577457B1 (en) | 2000-08-10 | 2003-06-10 | Nikon Corporation | Catadioptric lens barrel structure having a kinematic alignment structure and method for aligning two planar surfaces |
KR100389477B1 (ko) * | 2000-11-09 | 2003-06-27 | 삼성종합화학주식회사 | 에틸렌 중합체 및 공중합체 제조방법 |
KR100389475B1 (ko) * | 2000-11-09 | 2003-06-27 | 삼성종합화학주식회사 | 에틸렌 중합 또는 공중합용 촉매의 제조 방법 |
KR100389476B1 (ko) * | 2000-11-09 | 2003-06-27 | 삼성종합화학주식회사 | 에틸렌 중합체 및 공중합체 제조방법 |
KR100389962B1 (ko) * | 2000-11-10 | 2003-07-02 | 삼성종합화학주식회사 | 에틸렌 중합 또는 공중합용 촉매의 제조 방법 |
KR100421551B1 (ko) * | 2000-12-16 | 2004-03-09 | 삼성아토피나주식회사 | 올레핀 전중합 촉매 및 이를 이용한 올레핀 중합방법 |
EP1358223A4 (de) * | 2000-12-22 | 2005-01-05 | Samsung General Chemicals Co | Chelatkatalysator für die olefinpolymerisation und olefinpolymerisiationsverfahren unter verwendung des chelatkatalysators |
US20040082696A1 (en) * | 2000-12-22 | 2004-04-29 | Sok-Won Kim | Polypropylene resin composition with improved surface hardness and scratch resistance properties |
US7067576B2 (en) * | 2000-12-22 | 2006-06-27 | Samsung Atofina, Co., Ltd. | Flame retardant polypropylene resin composition |
ATE305490T1 (de) * | 2000-12-22 | 2005-10-15 | Samsung General Chemicals Co | Polyolefinharzzusammensetzung |
KR100530794B1 (ko) * | 2001-06-21 | 2005-11-23 | 삼성토탈 주식회사 | 에틸렌 중합 및 공중합용 촉매 |
KR100496776B1 (ko) * | 2001-06-21 | 2005-06-22 | 삼성토탈 주식회사 | 에틸렌 중합 및 공중합용 촉매 |
DE10151587A1 (de) * | 2001-10-23 | 2003-05-22 | Trumpf Lasertechnik Gmbh | Vorrichtung zur Strahlführung eines Laserstrahls |
KR100530795B1 (ko) * | 2001-12-26 | 2005-11-23 | 삼성토탈 주식회사 | 에틸렌 중합 및 공중합 방법 |
DE10239522B4 (de) | 2002-08-23 | 2016-02-11 | Leica Geosystems Ag | Halteeinrichtung für ein optisches Element |
US20060222034A1 (en) * | 2005-03-31 | 2006-10-05 | Cymer, Inc. | 6 Khz and above gas discharge laser system |
JP5868670B2 (ja) * | 2011-11-28 | 2016-02-24 | ギガフォトン株式会社 | ホルダ装置、チャンバ装置、および、極端紫外光生成装置 |
WO2015120889A1 (de) | 2014-02-13 | 2015-08-20 | Trumpf Laser- Und Systemtechnik Gmbh | Einrichtung und verfahren zum schutz einer vakuum-umgebung vor leckage und euv-strahlungserzeugungsvorrichtung |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3090116A (en) * | 1957-11-04 | 1963-05-21 | Gen Electric Co Ltd | Method of cold bonding metallic parts |
US3471800A (en) * | 1964-12-17 | 1969-10-07 | Hughes Aircraft Co | Resonant reflector for laser beam output |
US3777281A (en) * | 1970-08-03 | 1973-12-04 | U Hochuli | Seal and method of making same |
US3921885A (en) * | 1973-06-28 | 1975-11-25 | Rca Corp | Method of bonding two bodies together |
US4018374A (en) * | 1976-06-01 | 1977-04-19 | Ford Aerospace & Communications Corporation | Method for forming a bond between sapphire and glass |
US4153317A (en) * | 1977-12-02 | 1979-05-08 | The Singer Company | Indium seal for gas laser |
US4677639A (en) * | 1977-12-12 | 1987-06-30 | Laser Photonics, Inc. | Laser device |
US4504956A (en) * | 1982-09-29 | 1985-03-12 | Laser Manufacturing Technologies, Inc. | Laser resonator cavity |
US4685110A (en) * | 1984-09-24 | 1987-08-04 | Spectra-Physics, Inc. | Optical component of a laser |
US4653063A (en) * | 1985-01-25 | 1987-03-24 | Litton Systems, Inc. | Laser apparatus |
US4677640A (en) * | 1985-09-24 | 1987-06-30 | Spectra-Physics, Inc. | Crystalline quartz laser window assembly |
US4679204A (en) * | 1985-12-31 | 1987-07-07 | Amada Engineering Service Co., Inc. | Rear mirror holder device for a laser generator |
US4706256A (en) * | 1986-06-20 | 1987-11-10 | Spectra-Physics, Inc. | Fritless endbell assembly |
-
1986
- 1986-12-15 US US06/941,802 patent/US4777639A/en not_active Expired - Lifetime
-
1987
- 1987-12-11 CA CA000554158A patent/CA1298642C/en not_active Expired - Lifetime
- 1987-12-14 AU AU10825/88A patent/AU594859B2/en not_active Ceased
- 1987-12-14 JP JP63501189A patent/JPH07120829B2/ja not_active Expired - Fee Related
- 1987-12-14 AT AT88900521T patent/ATE81233T1/de not_active IP Right Cessation
- 1987-12-14 DE DE8888900521T patent/DE3782065T2/de not_active Expired - Fee Related
- 1987-12-14 EP EP88900521A patent/EP0338011B1/de not_active Expired
- 1987-12-14 WO PCT/US1987/003293 patent/WO1988004846A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
CA1298642C (en) | 1992-04-07 |
AU1082588A (en) | 1988-07-15 |
US4777639A (en) | 1988-10-11 |
DE3782065D1 (de) | 1992-11-05 |
EP0338011B1 (de) | 1992-09-30 |
JPH02501691A (ja) | 1990-06-07 |
AU594859B2 (en) | 1990-03-15 |
WO1988004846A1 (en) | 1988-06-30 |
EP0338011A4 (de) | 1990-02-20 |
DE3782065T2 (de) | 1993-03-18 |
JPH07120829B2 (ja) | 1995-12-20 |
EP0338011A1 (de) | 1989-10-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification | ||
REN | Ceased due to non-payment of the annual fee |