DE3782065D1 - Vorrichtung und verfahren zur halterung eines laseroptischen elements. - Google Patents

Vorrichtung und verfahren zur halterung eines laseroptischen elements.

Info

Publication number
DE3782065D1
DE3782065D1 DE8888900521T DE3782065T DE3782065D1 DE 3782065 D1 DE3782065 D1 DE 3782065D1 DE 8888900521 T DE8888900521 T DE 8888900521T DE 3782065 T DE3782065 T DE 3782065T DE 3782065 D1 DE3782065 D1 DE 3782065D1
Authority
DE
Germany
Prior art keywords
optical element
laser optical
support member
holding
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888900521T
Other languages
English (en)
Other versions
DE3782065T2 (de
Inventor
R Whitehouse
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PRC Corp
Original Assignee
PRC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PRC Corp filed Critical PRC Corp
Application granted granted Critical
Publication of DE3782065D1 publication Critical patent/DE3782065D1/de
Publication of DE3782065T2 publication Critical patent/DE3782065T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)
DE8888900521T 1986-12-15 1987-12-14 Vorrichtung und verfahren zur halterung eines laseroptischen elements. Expired - Fee Related DE3782065T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/941,802 US4777639A (en) 1986-12-15 1986-12-15 Laser optical element mounting arrangement and method
PCT/US1987/003293 WO1988004846A1 (en) 1986-12-15 1987-12-14 Laser optical element mounting arrangement and method

Publications (2)

Publication Number Publication Date
DE3782065D1 true DE3782065D1 (de) 1992-11-05
DE3782065T2 DE3782065T2 (de) 1993-03-18

Family

ID=25477084

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888900521T Expired - Fee Related DE3782065T2 (de) 1986-12-15 1987-12-14 Vorrichtung und verfahren zur halterung eines laseroptischen elements.

Country Status (8)

Country Link
US (1) US4777639A (de)
EP (1) EP0338011B1 (de)
JP (1) JPH07120829B2 (de)
AT (1) ATE81233T1 (de)
AU (1) AU594859B2 (de)
CA (1) CA1298642C (de)
DE (1) DE3782065T2 (de)
WO (1) WO1988004846A1 (de)

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US4890296A (en) * 1989-01-19 1989-12-26 Amoco Corporation Housing for the output coupler of a laser
JPH04276672A (ja) * 1991-03-05 1992-10-01 Nec Corp レーザ共振器
US5237583A (en) * 1991-10-28 1993-08-17 Lumonics Inc. Excimer laser assembly and an optic mount therefor
US5247537A (en) * 1991-11-19 1993-09-21 Spectra-Physics Lasers, Inc. Rotatable vacuum sealed mount for optical element, endbell assembly for gas discharge tube using said mount and gas discharge tube for ion laser using said mount
US5406578A (en) * 1992-08-06 1995-04-11 Carl-Zeiss-Stiftung Unstable laser resonator for generating a stable fundamental mode beam profile
JP3378103B2 (ja) * 1994-12-28 2003-02-17 富士写真フイルム株式会社 レーザーダイオード励起固体レーザー
GB2313472B (en) * 1996-05-22 2000-10-18 Avimo Ltd Laser resonators
US5960025A (en) * 1997-10-06 1999-09-28 Honeywell Inc. Device and method for achieving beam path alignment of an optical cavity
JP3351339B2 (ja) * 1998-03-12 2002-11-25 住友電気工業株式会社 レーザ用曲率可変鏡
KR100524293B1 (ko) 1999-05-27 2005-10-26 삼성토탈 주식회사 에틸렌 중합 및 공중합용 촉매
US6800580B1 (en) 1999-10-23 2004-10-05 Samsung General Chemicals Co., Ltd. Method for producing an improved catalyst for homo-and co-polymerization of olefin
KR100361224B1 (ko) * 1999-12-01 2002-11-29 삼성종합화학주식회사 에틸렌 중합 및 공중합용 촉매의 제조방법
US6310904B1 (en) * 2000-05-31 2001-10-30 Honeywell International, Inc. Measurement method to facilitate production of self-aligning laser gyroscope block
KR100359932B1 (ko) 2000-06-15 2002-11-07 삼성종합화학주식회사 에틸렌 중합 및 공중합용 촉매
KR100387734B1 (ko) * 2000-06-17 2003-06-18 삼성종합화학주식회사 올레핀 중합용 촉매 및 중합방법
US6577457B1 (en) 2000-08-10 2003-06-10 Nikon Corporation Catadioptric lens barrel structure having a kinematic alignment structure and method for aligning two planar surfaces
KR100389475B1 (ko) * 2000-11-09 2003-06-27 삼성종합화학주식회사 에틸렌 중합 또는 공중합용 촉매의 제조 방법
KR100389476B1 (ko) * 2000-11-09 2003-06-27 삼성종합화학주식회사 에틸렌 중합체 및 공중합체 제조방법
KR100389477B1 (ko) * 2000-11-09 2003-06-27 삼성종합화학주식회사 에틸렌 중합체 및 공중합체 제조방법
KR100389962B1 (ko) * 2000-11-10 2003-07-02 삼성종합화학주식회사 에틸렌 중합 또는 공중합용 촉매의 제조 방법
KR100421551B1 (ko) * 2000-12-16 2004-03-09 삼성아토피나주식회사 올레핀 전중합 촉매 및 이를 이용한 올레핀 중합방법
CN1220789C (zh) * 2000-12-22 2005-09-28 三星综合化学株式会社 阻燃聚丙烯树脂组合物
EP1362080B1 (de) * 2000-12-22 2005-09-28 Samsung General Chemicals Co., Ltd. Polyolefinharzzusammensetzung
WO2002051882A1 (en) * 2000-12-22 2002-07-04 Samsung General Chemicals Co., Ltd. Chelate catalyst for olefin polymerization and olefin polymerization method using the same
JP2004516379A (ja) * 2000-12-22 2004-06-03 サムソン ジェネラル ケミカルズ カンパニー リミテッド 表面硬度及び耐スクラッチ性が向上されたポリプロピレン樹脂組成物
KR100496776B1 (ko) * 2001-06-21 2005-06-22 삼성토탈 주식회사 에틸렌 중합 및 공중합용 촉매
KR100530794B1 (ko) * 2001-06-21 2005-11-23 삼성토탈 주식회사 에틸렌 중합 및 공중합용 촉매
DE10151587A1 (de) * 2001-10-23 2003-05-22 Trumpf Lasertechnik Gmbh Vorrichtung zur Strahlführung eines Laserstrahls
KR100530795B1 (ko) * 2001-12-26 2005-11-23 삼성토탈 주식회사 에틸렌 중합 및 공중합 방법
DE10239522B4 (de) * 2002-08-23 2016-02-11 Leica Geosystems Ag Halteeinrichtung für ein optisches Element
US20060222034A1 (en) * 2005-03-31 2006-10-05 Cymer, Inc. 6 Khz and above gas discharge laser system
JP5868670B2 (ja) * 2011-11-28 2016-02-24 ギガフォトン株式会社 ホルダ装置、チャンバ装置、および、極端紫外光生成装置
EP3106005B1 (de) 2014-02-13 2018-04-04 TRUMPF Laser-und Systemtechnik GmbH Einrichtung und verfahren zum schutz einer vakuum-umgebung vor leckage und euv-strahlungserzeugungsvorrichtung

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Publication number Priority date Publication date Assignee Title
US3090116A (en) * 1957-11-04 1963-05-21 Gen Electric Co Ltd Method of cold bonding metallic parts
US3471800A (en) * 1964-12-17 1969-10-07 Hughes Aircraft Co Resonant reflector for laser beam output
US3777281A (en) * 1970-08-03 1973-12-04 U Hochuli Seal and method of making same
US3921885A (en) * 1973-06-28 1975-11-25 Rca Corp Method of bonding two bodies together
US4018374A (en) * 1976-06-01 1977-04-19 Ford Aerospace & Communications Corporation Method for forming a bond between sapphire and glass
US4153317A (en) * 1977-12-02 1979-05-08 The Singer Company Indium seal for gas laser
US4677639A (en) * 1977-12-12 1987-06-30 Laser Photonics, Inc. Laser device
US4504956A (en) * 1982-09-29 1985-03-12 Laser Manufacturing Technologies, Inc. Laser resonator cavity
US4685110A (en) * 1984-09-24 1987-08-04 Spectra-Physics, Inc. Optical component of a laser
US4653063A (en) * 1985-01-25 1987-03-24 Litton Systems, Inc. Laser apparatus
US4677640A (en) * 1985-09-24 1987-06-30 Spectra-Physics, Inc. Crystalline quartz laser window assembly
US4679204A (en) * 1985-12-31 1987-07-07 Amada Engineering Service Co., Inc. Rear mirror holder device for a laser generator
US4706256A (en) * 1986-06-20 1987-11-10 Spectra-Physics, Inc. Fritless endbell assembly

Also Published As

Publication number Publication date
CA1298642C (en) 1992-04-07
DE3782065T2 (de) 1993-03-18
US4777639A (en) 1988-10-11
EP0338011B1 (de) 1992-09-30
EP0338011A4 (de) 1990-02-20
ATE81233T1 (de) 1992-10-15
JPH02501691A (ja) 1990-06-07
EP0338011A1 (de) 1989-10-25
WO1988004846A1 (en) 1988-06-30
JPH07120829B2 (ja) 1995-12-20
AU594859B2 (en) 1990-03-15
AU1082588A (en) 1988-07-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee