ATE545948T1 - Glühlampe und vorrichtung zur wärmebehandlung mittels lichtbestrahlung - Google Patents
Glühlampe und vorrichtung zur wärmebehandlung mittels lichtbestrahlungInfo
- Publication number
- ATE545948T1 ATE545948T1 AT09010678T AT09010678T ATE545948T1 AT E545948 T1 ATE545948 T1 AT E545948T1 AT 09010678 T AT09010678 T AT 09010678T AT 09010678 T AT09010678 T AT 09010678T AT E545948 T1 ATE545948 T1 AT E545948T1
- Authority
- AT
- Austria
- Prior art keywords
- light emitting
- hermetically sealed
- metal foils
- sealed portions
- emitting tube
- Prior art date
Links
- 238000010438 heat treatment Methods 0.000 title 1
- 230000005855 radiation Effects 0.000 title 1
- 239000011888 foil Substances 0.000 abstract 4
- 239000002184 metal Substances 0.000 abstract 4
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K1/00—Details
- H01K1/38—Seals for leading-in conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K1/00—Details
- H01K1/40—Leading-in conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K5/00—Lamps for general lighting
- H01K5/02—Lamps for general lighting with connections made at opposite ends, e.g. tubular lamp with axially arranged filament
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K7/00—Lamps for purposes other than general lighting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K9/00—Lamps having two or more incandescent bodies separately heated
- H01K9/08—Lamps having two or more incandescent bodies separately heated to provide selectively different light effects, e.g. for automobile headlamp
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
- H05B3/0038—Heating devices using lamps for industrial applications
- H05B3/0047—Heating devices using lamps for industrial applications for semiconductor manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Resistance Heating (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008216265A JP4821819B2 (ja) | 2008-08-26 | 2008-08-26 | フィラメントランプおよび光照射式加熱処理装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE545948T1 true ATE545948T1 (de) | 2012-03-15 |
Family
ID=41416244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT09010678T ATE545948T1 (de) | 2008-08-26 | 2009-08-19 | Glühlampe und vorrichtung zur wärmebehandlung mittels lichtbestrahlung |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8145045B2 (de) |
| EP (1) | EP2159824B1 (de) |
| JP (1) | JP4821819B2 (de) |
| KR (1) | KR20100024892A (de) |
| CN (1) | CN101661868A (de) |
| AT (1) | ATE545948T1 (de) |
| TW (1) | TW201009901A (de) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5282409B2 (ja) * | 2008-02-25 | 2013-09-04 | ウシオ電機株式会社 | 光照射式加熱方法及び光照射式加熱装置 |
| JP2009238552A (ja) * | 2008-03-27 | 2009-10-15 | Ushio Inc | フィラメントランプ |
| JP5338723B2 (ja) * | 2010-03-16 | 2013-11-13 | ウシオ電機株式会社 | 加熱装置 |
| FR3008019B1 (fr) * | 2013-07-04 | 2015-07-17 | Sidel Participations | Module de chauffage comportant une lampe et une lentille fixee par une bride sur une partie non emissive de la lampe |
| WO2016126381A1 (en) * | 2015-02-05 | 2016-08-11 | Applied Materials, Inc. | Rapid thermal processing chamber with linear control lamps |
| JP6759983B2 (ja) * | 2016-11-01 | 2020-09-23 | ウシオ電機株式会社 | 加熱用光源ユニット |
| JP2020136118A (ja) * | 2019-02-21 | 2020-08-31 | 東芝ライテック株式会社 | ヒータ |
| JP7232415B2 (ja) * | 2019-07-17 | 2023-03-03 | ウシオ電機株式会社 | 加熱用フィラメントランプ |
| US11680338B2 (en) | 2019-12-19 | 2023-06-20 | Applied Materials, Inc. | Linear lamp array for improved thermal uniformity and profile control |
| KR20210095059A (ko) * | 2020-01-21 | 2021-07-30 | 에이에스엠 아이피 홀딩 비.브이. | 불균일한 열 출력의 필라멘트 램프를 갖는 반도체 처리 챔버 |
| CN114126101B (zh) * | 2021-11-02 | 2024-01-26 | Tcl华星光电技术有限公司 | 石英红外加热装置及其对基板加热的方法 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE544825A (de) * | 1953-08-24 | |||
| US3483609A (en) * | 1967-10-31 | 1969-12-16 | Gen Electric | Incandescent lamp manufacture |
| GB8308103D0 (en) * | 1983-03-24 | 1983-05-05 | Emi Plc Thorn | Quartz infra-red lamps |
| CN1005176B (zh) * | 1985-04-09 | 1989-09-13 | 菲利普白炽灯有限公司 | 电灯 |
| US4710676A (en) * | 1985-08-15 | 1987-12-01 | Gte Products Corporation | Multi-level fuser lamp |
| JPS63263719A (ja) * | 1987-04-21 | 1988-10-31 | エイジー プロセッシング テクノロジーズ インコーポレーテッド | 半導体ウエ−ハの熱処理用加熱装置 |
| US5008592A (en) * | 1988-11-15 | 1991-04-16 | U.S. Philips Corporation | Halogen incandescent lamp and method of manufacturing a halogen incandescent lamp |
| GB8926139D0 (en) * | 1989-11-18 | 1990-01-10 | Emi Plc Thorn | Tungsten halogen lamp |
| US6399955B1 (en) * | 1999-02-19 | 2002-06-04 | Mark G. Fannon | Selective electromagnetic wavelength conversion device |
| JP3837255B2 (ja) * | 1999-04-16 | 2006-10-25 | 松下電器産業株式会社 | 赤外線電球 |
| JP3873635B2 (ja) * | 2001-03-02 | 2007-01-24 | ウシオ電機株式会社 | 加熱ローラ用ヒータランプ装置 |
| JP2005032552A (ja) * | 2003-07-14 | 2005-02-03 | Ushio Inc | 熱源用ヒータランプ |
| JP2006279008A (ja) * | 2005-03-02 | 2006-10-12 | Ushio Inc | ヒータ及びヒータを備えた加熱装置 |
| JP4692249B2 (ja) * | 2005-11-30 | 2011-06-01 | ウシオ電機株式会社 | フィラメントランプ |
| JP2008108504A (ja) * | 2006-10-24 | 2008-05-08 | Harison Toshiba Lighting Corp | 管型白熱電球、管型白熱電球の製造方法、加熱装置 |
| KR20080081250A (ko) | 2005-12-22 | 2008-09-09 | 하리슨 도시바 라이팅 가부시키가이샤 | 히터 램프 |
| DE102006024238A1 (de) * | 2006-05-23 | 2007-11-29 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Hochdruckentladungslampe |
| JP4935417B2 (ja) * | 2007-02-26 | 2012-05-23 | ウシオ電機株式会社 | 光照射式加熱処理装置 |
| JP4893474B2 (ja) * | 2007-05-29 | 2012-03-07 | ウシオ電機株式会社 | フィラメントランプおよび光照射式加熱処理装置 |
-
2008
- 2008-08-26 JP JP2008216265A patent/JP4821819B2/ja not_active Expired - Fee Related
-
2009
- 2009-06-08 TW TW098119054A patent/TW201009901A/zh unknown
- 2009-07-14 KR KR1020090064192A patent/KR20100024892A/ko active IP Right Grant
- 2009-08-19 EP EP09010678A patent/EP2159824B1/de not_active Not-in-force
- 2009-08-19 AT AT09010678T patent/ATE545948T1/de active
- 2009-08-20 US US12/544,385 patent/US8145045B2/en not_active Expired - Fee Related
- 2009-08-21 CN CN200910163491A patent/CN101661868A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US8145045B2 (en) | 2012-03-27 |
| EP2159824B1 (de) | 2012-02-15 |
| US20100054719A1 (en) | 2010-03-04 |
| TW201009901A (en) | 2010-03-01 |
| KR20100024892A (ko) | 2010-03-08 |
| JP2010055763A (ja) | 2010-03-11 |
| CN101661868A (zh) | 2010-03-03 |
| JP4821819B2 (ja) | 2011-11-24 |
| EP2159824A3 (de) | 2010-12-01 |
| EP2159824A2 (de) | 2010-03-03 |
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