ATE537540T1 - Messung der beugungsordnung - Google Patents

Messung der beugungsordnung

Info

Publication number
ATE537540T1
ATE537540T1 AT08708248T AT08708248T ATE537540T1 AT E537540 T1 ATE537540 T1 AT E537540T1 AT 08708248 T AT08708248 T AT 08708248T AT 08708248 T AT08708248 T AT 08708248T AT E537540 T1 ATE537540 T1 AT E537540T1
Authority
AT
Austria
Prior art keywords
master disc
quality
material layer
master
measurement
Prior art date
Application number
AT08708248T
Other languages
English (en)
Inventor
Josephus Wijn
Jelm Franse
Original Assignee
Singulus Mastering B V
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Singulus Mastering B V filed Critical Singulus Mastering B V
Application granted granted Critical
Publication of ATE537540T1 publication Critical patent/ATE537540T1/de

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/082—Aligning the head or the light source relative to the record carrier otherwise than during transducing, e.g. adjusting tilt set screw during assembly of head

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Manufacturing Optical Record Carriers (AREA)
AT08708248T 2007-03-02 2008-01-28 Messung der beugungsordnung ATE537540T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07103431A EP1965383A1 (de) 2007-03-02 2007-03-02 Messung der Beugungsordnung
PCT/EP2008/050925 WO2008107228A1 (en) 2007-03-02 2008-01-28 Diffraction order measurement

Publications (1)

Publication Number Publication Date
ATE537540T1 true ATE537540T1 (de) 2011-12-15

Family

ID=38330186

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08708248T ATE537540T1 (de) 2007-03-02 2008-01-28 Messung der beugungsordnung

Country Status (7)

Country Link
US (1) US20100136468A1 (de)
EP (2) EP1965383A1 (de)
KR (1) KR20100028524A (de)
CN (1) CN101647069A (de)
AT (1) ATE537540T1 (de)
TW (1) TW200839759A (de)
WO (1) WO2008107228A1 (de)

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2108707B (en) * 1981-07-08 1985-06-19 Pioneer Electronic Corp Method and system for developing a photo-resist material used as a recording medium
JPS58162953A (ja) * 1982-03-23 1983-09-27 Hitachi Ltd 現像処理の制御装置
JPH01286145A (ja) * 1988-05-12 1989-11-17 Nec Corp 現像方法
JPS6426102A (en) * 1988-07-08 1989-01-27 Toshiba Corp Shape measuring instrument
JPH04370707A (ja) * 1991-06-20 1992-12-24 Nippon Columbia Co Ltd トラックピッチ測定装置
JPH052777A (ja) * 1991-06-26 1993-01-08 Seiko Epson Corp レジストコート方法
NL9201825A (nl) * 1992-10-21 1994-05-16 Od & Me Bv Inrichting voor het vervaardigen van een matrijs voor een schijfvormige registratiedrager.
JPH06162577A (ja) * 1992-11-16 1994-06-10 Sony Corp 光ディスク用原盤製造装置
JPH06267117A (ja) * 1993-03-10 1994-09-22 Matsushita Electric Ind Co Ltd 光ディスク用原盤の製造方法
GB9307239D0 (en) * 1993-04-07 1993-06-02 Nimbus Communications Int Ltd Method and apparatus for process control
JPH07192319A (ja) * 1993-12-28 1995-07-28 Sony Disc Technol:Kk 光ディスク用スタンパーの検査方法
JPH08329534A (ja) * 1995-06-01 1996-12-13 Hitachi Maxell Ltd 光ディスク用原盤の製造方法
JPH09134550A (ja) * 1995-11-07 1997-05-20 Sony Corp スタンパの作成方法及び光デイスク原盤
US6348294B1 (en) * 1997-06-13 2002-02-19 Sony Corporation Glassmastering photoresist read after write method and system
JP2001176137A (ja) * 1999-12-14 2001-06-29 Fuji Photo Film Co Ltd 記録媒体の製造方法
JP2001208517A (ja) * 2000-01-28 2001-08-03 Victor Co Of Japan Ltd 光ディスク検査装置
AU2002222484A8 (en) * 2000-12-12 2012-02-02 Consellation Trid Inc Photolithographic method including measurement of the latent image
US6560020B1 (en) * 2001-01-16 2003-05-06 Holotek, Llc Surface-relief diffraction grating
US20050130335A1 (en) * 2003-12-15 2005-06-16 Eiichi Ito Method of manufacturing master of optical information recording medium, method of manufacturing stamper of optical information recording medium, master and stamper of an optical information recording medium, and optical information recording medium
JP4312616B2 (ja) * 2004-01-26 2009-08-12 Ｎｅｃエレクトロニクス株式会社 半導体装置
JP4282500B2 (ja) * 2004-01-29 2009-06-24 株式会社東芝 構造検査方法及び半導体装置の製造方法
MX2007008194A (es) * 2005-01-06 2007-08-22 Koninkl Philips Electronics Nv Metodos de masterizacion y substrato de masterizacion.

Also Published As

Publication number Publication date
TW200839759A (en) 2008-10-01
CN101647069A (zh) 2010-02-10
US20100136468A1 (en) 2010-06-03
EP2132739B1 (de) 2011-12-14
WO2008107228A1 (en) 2008-09-12
KR20100028524A (ko) 2010-03-12
EP1965383A1 (de) 2008-09-03
EP2132739A1 (de) 2009-12-16

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