ATE536530T1 - Reduzierung der magnetfeld-gradienten- empfindlichkeit eines mems-gyroskops - Google Patents
Reduzierung der magnetfeld-gradienten- empfindlichkeit eines mems-gyroskopsInfo
- Publication number
- ATE536530T1 ATE536530T1 AT10157439T AT10157439T ATE536530T1 AT E536530 T1 ATE536530 T1 AT E536530T1 AT 10157439 T AT10157439 T AT 10157439T AT 10157439 T AT10157439 T AT 10157439T AT E536530 T1 ATE536530 T1 AT E536530T1
- Authority
- AT
- Austria
- Prior art keywords
- electrically conducting
- magnetic field
- tuning fork
- proof mass
- fork gyroscope
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5726—Signal processing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16466209P | 2009-03-30 | 2009-03-30 | |
US12/723,964 US8664951B2 (en) | 2009-03-30 | 2010-03-15 | MEMS gyroscope magnetic sensitivity reduction |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE536530T1 true ATE536530T1 (de) | 2011-12-15 |
Family
ID=42235171
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT10157439T ATE536530T1 (de) | 2009-03-30 | 2010-03-23 | Reduzierung der magnetfeld-gradienten- empfindlichkeit eines mems-gyroskops |
Country Status (5)
Country | Link |
---|---|
US (1) | US8664951B2 (de) |
EP (1) | EP2236982B1 (de) |
JP (2) | JP5671245B2 (de) |
KR (1) | KR20100109456A (de) |
AT (1) | ATE536530T1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9528830B2 (en) * | 2013-07-17 | 2016-12-27 | Ramot At Tel-Aviv University Ltd. | Angular rate sensor |
US9513347B2 (en) * | 2013-10-31 | 2016-12-06 | Invensense, Inc. | Device with magnetic sensors with permanent magnets |
TWI538096B (zh) | 2013-12-31 | 2016-06-11 | 財團法人工業技術研究院 | 具pn界面的微機電裝置 |
CN103884355B (zh) * | 2014-03-25 | 2016-06-01 | 北京航天控制仪器研究所 | 一种三浮陀螺标定测试系统 |
US10180445B2 (en) | 2016-06-08 | 2019-01-15 | Honeywell International Inc. | Reducing bias in an accelerometer via current adjustment |
US20200292313A1 (en) * | 2019-03-11 | 2020-09-17 | Honeywell International Inc. | In-plane non-degenerate coriolis vibratory gyroscope |
US11693065B2 (en) | 2021-03-11 | 2023-07-04 | Trustees Of Boston University | System and method for measuring second order and higher gradients |
US11714102B2 (en) | 2021-06-08 | 2023-08-01 | Analog Devices, Inc. | Fully differential accelerometer |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE9500729L (sv) * | 1995-02-27 | 1996-08-28 | Gert Andersson | Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan |
JP3000891B2 (ja) * | 1995-06-27 | 2000-01-17 | 株式会社村田製作所 | 振動ジャイロ |
KR100327481B1 (ko) * | 1995-12-27 | 2002-06-24 | 윤종용 | 마이크로 자이로스코프 |
WO1997037195A1 (fr) * | 1996-03-29 | 1997-10-09 | Ngk Insulators, Ltd. | Capteur gyroscopique d'oscillations, capteur composite et procede de production d'un capteur gyroscopique |
US5992233A (en) * | 1996-05-31 | 1999-11-30 | The Regents Of The University Of California | Micromachined Z-axis vibratory rate gyroscope |
US6250156B1 (en) * | 1996-05-31 | 2001-06-26 | The Regents Of The University Of California | Dual-mass micromachined vibratory rate gyroscope |
GB2322196B (en) * | 1997-02-18 | 2000-10-18 | British Aerospace | A vibrating structure gyroscope |
US5911156A (en) * | 1997-02-24 | 1999-06-08 | The Charles Stark Draper Laboratory, Inc. | Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices |
US6257059B1 (en) * | 1999-09-24 | 2001-07-10 | The Charles Stark Draper Laboratory, Inc. | Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation |
JP3771100B2 (ja) * | 2000-01-19 | 2006-04-26 | アルプス電気株式会社 | 静電容量検出型センサおよびジャイロスコープならびに入力装置 |
US6837108B2 (en) | 2002-04-23 | 2005-01-04 | Honeywell International Inc. | Increasing the dynamic range of a MEMS gyroscope |
US6718823B2 (en) * | 2002-04-30 | 2004-04-13 | Honeywell International Inc. | Pulse width modulation drive signal for a MEMS gyroscope |
US6860151B2 (en) * | 2003-02-07 | 2005-03-01 | Honeywell International Inc. | Methods and systems for controlling movement within MEMS structures |
EP1664815A1 (de) * | 2003-09-23 | 2006-06-07 | Qinetiq Limited | Resonanz-magnetometer-einrichtung |
US7036373B2 (en) * | 2004-06-29 | 2006-05-02 | Honeywell International, Inc. | MEMS gyroscope with horizontally oriented drive electrodes |
US7231824B2 (en) | 2005-03-22 | 2007-06-19 | Honeywell International Inc. | Use of electrodes to cancel lift effects in inertial sensors |
JP2007108072A (ja) | 2005-10-14 | 2007-04-26 | Toyota Motor Corp | 力学量検出素子及び力学量検出装置 |
US7359059B2 (en) * | 2006-05-18 | 2008-04-15 | Honeywell International Inc. | Chip scale atomic gyroscope |
US7383729B2 (en) | 2006-10-12 | 2008-06-10 | Honeywell International, Inc. | Tuning fork gyro with sense plate read-out |
JP2009060478A (ja) * | 2007-09-03 | 2009-03-19 | Nippon Dempa Kogyo Co Ltd | 圧電振動片の製造方法及び音叉型圧電振動片 |
EP2098823B1 (de) * | 2008-03-05 | 2016-10-19 | Colibrys S.A. | Beschleunigungsmesser mit Versatzkompensation |
US7984648B2 (en) * | 2008-04-10 | 2011-07-26 | Honeywell International Inc. | Systems and methods for acceleration and rotational determination from an in-plane and out-of-plane MEMS device |
US8187902B2 (en) * | 2008-07-09 | 2012-05-29 | The Charles Stark Draper Laboratory, Inc. | High performance sensors and methods for forming the same |
-
2010
- 2010-03-15 US US12/723,964 patent/US8664951B2/en active Active
- 2010-03-23 EP EP10157439A patent/EP2236982B1/de active Active
- 2010-03-23 AT AT10157439T patent/ATE536530T1/de active
- 2010-03-24 JP JP2010068048A patent/JP5671245B2/ja not_active Expired - Fee Related
- 2010-03-29 KR KR1020100027954A patent/KR20100109456A/ko unknown
-
2014
- 2014-11-06 JP JP2014225959A patent/JP2015072277A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP2236982A1 (de) | 2010-10-06 |
KR20100109456A (ko) | 2010-10-08 |
JP2015072277A (ja) | 2015-04-16 |
EP2236982B1 (de) | 2011-12-07 |
JP2010237204A (ja) | 2010-10-21 |
US20100244819A1 (en) | 2010-09-30 |
US8664951B2 (en) | 2014-03-04 |
JP5671245B2 (ja) | 2015-02-18 |
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