EA201170668A1 - Емкостный датчик на основе мэмс для использования в системе сейсмической разведки - Google Patents

Емкостный датчик на основе мэмс для использования в системе сейсмической разведки

Info

Publication number
EA201170668A1
EA201170668A1 EA201170668A EA201170668A EA201170668A1 EA 201170668 A1 EA201170668 A1 EA 201170668A1 EA 201170668 A EA201170668 A EA 201170668A EA 201170668 A EA201170668 A EA 201170668A EA 201170668 A1 EA201170668 A1 EA 201170668A1
Authority
EA
Eurasian Patent Office
Prior art keywords
signal
sensor
mems
capacitive sensor
sensor based
Prior art date
Application number
EA201170668A
Other languages
English (en)
Other versions
EA022833B1 (ru
Inventor
Ханс Паулсон
Original Assignee
Джеко Текнолоджи Б.В.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Джеко Текнолоджи Б.В. filed Critical Джеко Текнолоджи Б.В.
Publication of EA201170668A1 publication Critical patent/EA201170668A1/ru
Publication of EA022833B1 publication Critical patent/EA022833B1/ru

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/162—Details
    • G01V1/164—Circuits therefore

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Environmental & Geological Engineering (AREA)
  • Geology (AREA)
  • Remote Sensing (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geophysics (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Vibration Prevention Devices (AREA)
  • Data Exchanges In Wide-Area Networks (AREA)

Abstract

Устройство включает в себя систему сейсмической разведки, которая включает в себя акселерометр. Акселерометр включает в себя емкостный датчик на основе МЭМС, контроллер и электрометрический усилитель. Датчик включает в себя чувствительную массу; входные клеммы для приема первого сигнала и выходную клемму, которая электрически соединяется с чувствительной массой, чтобы предоставить второй сигнал. Первый сигнал, который регулируется контроллером, управляет силой восстановления равновесия для датчика и побуждает датчик предоставить второй сигнал. Электрометрический усилитель предоставляет третий сигнал, который указывает положение чувствительной массы. Электрометрический усилитель имеет входную клемму для непрерывного приема второго сигнала в течение периода времени, в котором первый сигнал управляет силой восстановления равновесия и побуждает датчик предоставить второй сигнал.
EA201170668A 2008-11-10 2009-11-06 Емкостный датчик на основе мэмс для использования в системе сейсмической разведки EA022833B1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/268,064 US8104346B2 (en) 2008-11-10 2008-11-10 MEMS-based capacitive sensor
PCT/US2009/063579 WO2010054216A2 (en) 2008-11-10 2009-11-06 Mems-based capacitive sensor for use in a seismic acquisition system

Publications (2)

Publication Number Publication Date
EA201170668A1 true EA201170668A1 (ru) 2011-12-30
EA022833B1 EA022833B1 (ru) 2016-03-31

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EA201170668A EA022833B1 (ru) 2008-11-10 2009-11-06 Емкостный датчик на основе мэмс для использования в системе сейсмической разведки

Country Status (10)

Country Link
US (1) US8104346B2 (ru)
EP (1) EP2353034A4 (ru)
JP (2) JP2012508381A (ru)
CN (1) CN102265184B (ru)
AU (1) AU2009313393B2 (ru)
CA (1) CA2743088C (ru)
EA (1) EA022833B1 (ru)
EG (1) EG26753A (ru)
MX (1) MX2011004965A (ru)
WO (1) WO2010054216A2 (ru)

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Also Published As

Publication number Publication date
WO2010054216A2 (en) 2010-05-14
WO2010054216A3 (en) 2010-07-22
US8104346B2 (en) 2012-01-31
JP2016145837A (ja) 2016-08-12
EP2353034A4 (en) 2014-02-19
EG26753A (en) 2014-08-04
JP2012508381A (ja) 2012-04-05
CA2743088C (en) 2015-05-26
EP2353034A2 (en) 2011-08-10
AU2009313393B2 (en) 2015-04-09
MX2011004965A (es) 2011-07-29
AU2009313393A1 (en) 2010-05-14
CN102265184A (zh) 2011-11-30
US20100116054A1 (en) 2010-05-13
CN102265184B (zh) 2015-01-14
EA022833B1 (ru) 2016-03-31
CA2743088A1 (en) 2010-05-14

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MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): RU