ATE529886T1 - Herstellungsverfahren für eine elektroleitfähige kupferstrukturierungsschicht durch laserbestrahlung - Google Patents
Herstellungsverfahren für eine elektroleitfähige kupferstrukturierungsschicht durch laserbestrahlungInfo
- Publication number
- ATE529886T1 ATE529886T1 AT08778929T AT08778929T ATE529886T1 AT E529886 T1 ATE529886 T1 AT E529886T1 AT 08778929 T AT08778929 T AT 08778929T AT 08778929 T AT08778929 T AT 08778929T AT E529886 T1 ATE529886 T1 AT E529886T1
- Authority
- AT
- Austria
- Prior art keywords
- copper
- patterning layer
- particles
- based particle
- production process
- Prior art date
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title abstract 12
- 229910052802 copper Inorganic materials 0.000 title abstract 12
- 239000010949 copper Substances 0.000 title abstract 12
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000005855 radiation Effects 0.000 title 1
- 239000002245 particle Substances 0.000 abstract 9
- 238000000059 patterning Methods 0.000 abstract 7
- 239000006185 dispersion Substances 0.000 abstract 2
- 238000002360 preparation method Methods 0.000 abstract 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 abstract 1
- 239000005751 Copper oxide Substances 0.000 abstract 1
- 229910000431 copper oxide Inorganic materials 0.000 abstract 1
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/102—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by bonding of conductive powder, i.e. metallic powder
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/105—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by conversion of non-conductive material on or in the support into conductive material, e.g. by using an energy beam
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1283—After-treatment of the printed patterns, e.g. sintering or curing methods
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
- H05K1/097—Inks comprising nanoparticles and specially adapted for being sintered at low temperature
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0209—Inorganic, non-metallic particles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
- H05K2203/107—Using laser light
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
- H05K2203/1131—Sintering, i.e. fusing of metal particles to achieve or improve electrical conductivity
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- High Energy & Nuclear Physics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Manufacturing Of Electric Cables (AREA)
- Conductive Materials (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20070075340 | 2007-07-26 | ||
KR1020080022135A KR100951320B1 (ko) | 2007-07-26 | 2008-03-10 | 레이저 조사에 의한 전기전도성 구리 패턴층의 형성방법 |
PCT/KR2008/004340 WO2009014391A2 (en) | 2007-07-26 | 2008-07-24 | Preparation method of electroconductive copper patterning layer by laser irradiation |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE529886T1 true ATE529886T1 (de) | 2011-11-15 |
Family
ID=40683078
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT08778929T ATE529886T1 (de) | 2007-07-26 | 2008-07-24 | Herstellungsverfahren für eine elektroleitfähige kupferstrukturierungsschicht durch laserbestrahlung |
Country Status (7)
Country | Link |
---|---|
US (1) | US8394465B2 (de) |
EP (1) | EP2183767B1 (de) |
JP (1) | JP5449154B2 (de) |
KR (1) | KR100951320B1 (de) |
CN (1) | CN101790777B (de) |
AT (1) | ATE529886T1 (de) |
WO (1) | WO2009014391A2 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014067617A (ja) * | 2012-09-26 | 2014-04-17 | Fujifilm Corp | 導電膜の製造方法および導電膜形成用組成物 |
WO2014087945A1 (ja) * | 2012-12-07 | 2014-06-12 | 富士フイルム株式会社 | 導電膜の製造方法、プリント配線基板 |
EP3621416B1 (de) | 2013-02-18 | 2022-11-30 | Orbotech Ltd. | Zweistufige lasermetallisierung mit direktschreibvorgang |
US10622244B2 (en) | 2013-02-18 | 2020-04-14 | Orbotech Ltd. | Pulsed-mode direct-write laser metallization |
JP2014199720A (ja) * | 2013-03-29 | 2014-10-23 | 富士フイルム株式会社 | 導電膜形成用組成物およびこれを用いる導電膜の製造方法 |
TWI471071B (zh) * | 2013-05-21 | 2015-01-21 | Innolux Corp | 導電線路之製備方法、以及具有導電線路之裝置 |
CN104185378A (zh) * | 2013-05-21 | 2014-12-03 | 群创光电股份有限公司 | 导电线路的制备方法、以及具有导电线路的装置 |
US10537027B2 (en) | 2013-08-02 | 2020-01-14 | Orbotech Ltd. | Method producing a conductive path on a substrate |
JP2015050107A (ja) * | 2013-09-03 | 2015-03-16 | 富士フイルム株式会社 | 導電膜の製造方法 |
US20170105287A1 (en) * | 2015-10-12 | 2017-04-13 | Tyco Electronics Corporation | Process of Producing Electronic Component and an Electronic Component |
WO2018044930A1 (en) | 2016-08-29 | 2018-03-08 | Board Of Trustees Of The University Of Arkansas | Light-directed electrochemical patterning of copper structures |
JP7130631B2 (ja) * | 2017-05-18 | 2022-09-05 | 株式会社ダイセル | 導体の製造方法、配線基板の製造方法及び導体形成用組成物の製造方法 |
WO2019017363A1 (ja) | 2017-07-18 | 2019-01-24 | 旭化成株式会社 | 導電性パターン領域を有する構造体及びその製造方法、積層体及びその製造方法、並びに、銅配線 |
WO2019022230A1 (ja) * | 2017-07-27 | 2019-01-31 | 旭化成株式会社 | 酸化銅インク及びこれを用いた導電性基板の製造方法、塗膜を含む製品及びこれを用いた製品の製造方法、導電性パターン付製品の製造方法、並びに、導電性パターン付製品 |
JP7430483B2 (ja) * | 2017-11-10 | 2024-02-13 | 旭化成株式会社 | 導電性パターン領域付構造体及びその製造方法 |
DE102019006709A1 (de) * | 2019-09-25 | 2021-03-25 | Heraeus Deutschland GmbH & Co. KG | Kontaktierung flexibler Elektroden |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH03262187A (ja) * | 1990-03-13 | 1991-11-21 | Fujitsu Ltd | パターン形成方法 |
JPH0537126A (ja) * | 1991-07-30 | 1993-02-12 | Toshiba Corp | 金属酸化物を用いた配線基板および情報記録媒体 |
JPH05335725A (ja) * | 1992-05-29 | 1993-12-17 | Kusuo Sato | レーザ光線照射による電気回路形成方法 |
US20030148024A1 (en) * | 2001-10-05 | 2003-08-07 | Kodas Toivo T. | Low viscosity precursor compositons and methods for the depositon of conductive electronic features |
TW476073B (en) * | 1999-12-09 | 2002-02-11 | Ebara Corp | Solution containing metal component, method of and apparatus for forming thin metal film |
JP2001167633A (ja) | 1999-12-09 | 2001-06-22 | Ebara Corp | 金属成分含有溶液及び金属薄膜形成方法 |
JP2003073591A (ja) * | 2001-09-03 | 2003-03-12 | Fuji Photo Film Co Ltd | インク組成物およびインクジェット記録方法 |
AU2003284539A1 (en) * | 2002-12-03 | 2004-06-23 | Asahi Kasei Kabushiki Kaisha | Copper oxide ultrafine particle |
JP2004277868A (ja) * | 2003-03-19 | 2004-10-07 | Mitsubishi Paper Mills Ltd | 導電性組成物の作製方法 |
JP2005079010A (ja) * | 2003-09-02 | 2005-03-24 | Seiko Epson Corp | 導電膜パターンの形成方法、電気光学装置及び電子機器 |
JP2005281781A (ja) * | 2004-03-30 | 2005-10-13 | Kenji Sumiyama | 銅ナノ粒子の製造方法 |
JP2006013321A (ja) | 2004-06-29 | 2006-01-12 | Chubu Electric Power Co Inc | プリント配線板の製造装置及びプリント配線板の製造方法 |
JP2006096655A (ja) | 2004-09-06 | 2006-04-13 | Fuji Photo Film Co Ltd | 酸化第一銅粒子の製造方法及び酸化第一銅粒子 |
JP4782397B2 (ja) | 2004-09-27 | 2011-09-28 | 京セラ株式会社 | 導体ペーストおよびそれを用いた配線基板の製造方法 |
JP2006201538A (ja) * | 2005-01-21 | 2006-08-03 | Seiko Epson Corp | マスク、マスクの製造方法、パターン形成方法、配線パターン形成方法 |
JP4337744B2 (ja) * | 2005-02-04 | 2009-09-30 | セイコーエプソン株式会社 | 膜パターンの形成方法、アクティブマトリクス基板の製造方法 |
KR100727451B1 (ko) * | 2005-04-26 | 2007-06-13 | 주식회사 잉크테크 | 금속 잉크 조성물 |
WO2006093398A1 (en) * | 2005-03-04 | 2006-09-08 | Inktec Co., Ltd. | Conductive inks and manufacturing method thereof |
-
2008
- 2008-03-10 KR KR1020080022135A patent/KR100951320B1/ko active IP Right Grant
- 2008-07-24 JP JP2010518120A patent/JP5449154B2/ja active Active
- 2008-07-24 US US12/452,812 patent/US8394465B2/en active Active
- 2008-07-24 EP EP08778929A patent/EP2183767B1/de active Active
- 2008-07-24 WO PCT/KR2008/004340 patent/WO2009014391A2/en active Application Filing
- 2008-07-24 CN CN2008800256237A patent/CN101790777B/zh active Active
- 2008-07-24 AT AT08778929T patent/ATE529886T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP5449154B2 (ja) | 2014-03-19 |
EP2183767A2 (de) | 2010-05-12 |
US20100129566A1 (en) | 2010-05-27 |
US8394465B2 (en) | 2013-03-12 |
WO2009014391A3 (en) | 2009-03-19 |
EP2183767B1 (de) | 2011-10-19 |
JP2010534932A (ja) | 2010-11-11 |
KR100951320B1 (ko) | 2010-04-05 |
CN101790777B (zh) | 2012-05-02 |
EP2183767A4 (de) | 2011-01-05 |
CN101790777A (zh) | 2010-07-28 |
KR20090012029A (ko) | 2009-02-02 |
WO2009014391A2 (en) | 2009-01-29 |
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Legal Events
Date | Code | Title | Description |
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RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |