ATE529542T1 - Verfahren zum herstellen metallischer beschichtungen aus flüssigen lösungen mittels eines kalten plasmas - Google Patents

Verfahren zum herstellen metallischer beschichtungen aus flüssigen lösungen mittels eines kalten plasmas

Info

Publication number
ATE529542T1
ATE529542T1 AT02258609T AT02258609T ATE529542T1 AT E529542 T1 ATE529542 T1 AT E529542T1 AT 02258609 T AT02258609 T AT 02258609T AT 02258609 T AT02258609 T AT 02258609T AT E529542 T1 ATE529542 T1 AT E529542T1
Authority
AT
Austria
Prior art keywords
substrate
plasma
metals
platinum
acetylacetonate
Prior art date
Application number
AT02258609T
Other languages
English (en)
Inventor
Stephen P Conover
Ashok K Sharma
Original Assignee
Amt Holdings Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Amt Holdings Inc filed Critical Amt Holdings Inc
Application granted granted Critical
Publication of ATE529542T1 publication Critical patent/ATE529542T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/08—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
    • C23C18/145—Radiation by charged particles, e.g. electron beams or ion irradiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Chemically Coating (AREA)
  • Chemical Vapour Deposition (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
AT02258609T 2001-12-13 2002-12-13 Verfahren zum herstellen metallischer beschichtungen aus flüssigen lösungen mittels eines kalten plasmas ATE529542T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US33974601P 2001-12-13 2001-12-13

Publications (1)

Publication Number Publication Date
ATE529542T1 true ATE529542T1 (de) 2011-11-15

Family

ID=23330400

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02258609T ATE529542T1 (de) 2001-12-13 2002-12-13 Verfahren zum herstellen metallischer beschichtungen aus flüssigen lösungen mittels eines kalten plasmas

Country Status (3)

Country Link
US (1) US7258899B1 (de)
EP (1) EP1323846B1 (de)
AT (1) ATE529542T1 (de)

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FR2852973B1 (fr) * 2003-03-28 2006-05-26 Atofina Procede de formation d'un revetement d'oxydes metalliques sur un substrat electroconducteur; cathode activee en resultant et son utilisation pour l'electrolyse de solutions acqueuses de chorures de meteaux alcalins.
FR2869032B1 (fr) * 2004-04-15 2006-06-02 Commissariat Energie Atomique Procede de preparation de particules d'argile conductrices de protons et materiau comprenant de telles particules
US7633231B2 (en) 2007-04-23 2009-12-15 Cold Plasma Medical Technologies, Inc. Harmonic cold plasma device and associated methods
DE102008018939A1 (de) 2008-04-15 2009-10-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Herstellen einer elektrisch leitenden Struktur auf einem temperaturempfindlichen Foliensubstrat
EP2351872B1 (de) * 2008-10-03 2021-06-09 Hidekazu Miyahara Behandlungsverfahren mit plasma
EP2207407A1 (de) * 2009-01-13 2010-07-14 Stichting Dutch Polymer Institute Verfahren zur Erzeugung von elektrisch leitenden Oberflächenstrukturen, Vorrichtung und Verwendung dafür
EP2501466A4 (de) * 2009-11-11 2016-08-17 Nano Nouvelle Pty Ltd Poröse materialien
WO2012028695A2 (en) 2010-09-01 2012-03-08 Facultes Universitaires Notre-Dame De La Paix Method for depositing nanoparticles on substrates
EP2723492A1 (de) * 2011-06-21 2014-04-30 Umicore AG & Co. KG Verfahren zur abscheidung von metallen auf trägeroxiden
EP2756517B1 (de) 2011-09-15 2018-05-02 Cold Plasma Medical Technologies, Inc. Kaltplasmabehandlungsvorrichtungen
US9117636B2 (en) 2013-02-11 2015-08-25 Colorado State University Research Foundation Plasma catalyst chemical reaction apparatus
CN103527979B (zh) * 2013-10-12 2016-03-30 深圳市华星光电技术有限公司 背光模组及液晶显示器
TWI565681B (zh) * 2013-10-15 2017-01-11 中原大學 多孔二氧化矽氣凝膠複合薄膜及其製造方法以及二氧化碳吸收裝置
US9339770B2 (en) 2013-11-19 2016-05-17 Applied Membrane Technologies, Inc. Organosiloxane films for gas separations
KR20170073656A (ko) 2014-10-21 2017-06-28 오렐테크 엘티디. 패터닝된 금속 박막을 기판 상에 형성하기 위한 잉크 조성물
EP3115098A1 (de) 2015-07-06 2017-01-11 Applied Membrane Technologies Inc. Organosiloxanfilme für gastrennungen
US10441349B2 (en) 2015-10-29 2019-10-15 Covidien Lp Non-stick coated electrosurgical instruments and method for manufacturing the same
US10368939B2 (en) 2015-10-29 2019-08-06 Covidien Lp Non-stick coated electrosurgical instruments and method for manufacturing the same
EP3510179A4 (de) * 2016-09-12 2020-06-10 Oreltech Ltd. Bildung einer aktiven metallkomponente in hybridmaterialien
CN110462098A (zh) * 2017-01-24 2019-11-15 奥雷尔科技有限公司 用于形成金属层的方法
US10103056B2 (en) * 2017-03-08 2018-10-16 Lam Research Corporation Methods for wet metal seed deposition for bottom up gapfill of features
US10709497B2 (en) 2017-09-22 2020-07-14 Covidien Lp Electrosurgical tissue sealing device with non-stick coating
US11432869B2 (en) 2017-09-22 2022-09-06 Covidien Lp Method for coating electrosurgical tissue sealing device with non-stick coating
CN113383046A (zh) * 2018-12-07 2021-09-10 奥雷尔科技有限公司 用于在基板上形成带图案的金属膜的组合物
US11207124B2 (en) 2019-07-08 2021-12-28 Covidien Lp Electrosurgical system for use with non-stick coated electrodes
US11369427B2 (en) 2019-12-17 2022-06-28 Covidien Lp System and method of manufacturing non-stick coated electrodes
US11712667B2 (en) 2021-03-23 2023-08-01 Applied Membrane Technology, Inc. Anti-microbial metal coatings for filters

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US4464416A (en) * 1981-03-11 1984-08-07 The United States Of America As Represented By The Depart Of Energy Method of forming metallic coatings on polymeric substrates
US4824444A (en) 1986-04-11 1989-04-25 Applied Membrane Technology, Inc. Gas permselective composite membrane prepared by plasma polymerization coating techniques
US5610274A (en) 1991-11-20 1997-03-11 Cpg, Inc. Production and use of magnetic porous inorganic materials
US5308533A (en) 1991-11-29 1994-05-03 The United States Of America As Represented By The Secretary Of The Air Force Aerogel mesh getter
US5403799A (en) 1992-12-21 1995-04-04 W. R. Grace & Co.-Conn. Process upset-resistant inorganic supports for bioremediation
US5648582A (en) 1993-08-20 1997-07-15 Regents Of The University Of Minnesota Stable, ultra-low residence time partial oxidation
US5516458A (en) * 1994-08-30 1996-05-14 Eastman Kodak Company Coating composition used to prepare an electrically-conductive layer formed by a glow discharge process containing tin carboxylate, antimony alkoxide and film-forming binder
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US6426126B1 (en) * 1997-12-19 2002-07-30 Amt Holdings, Inc. Preparation of metal coatings
US6136389A (en) 1997-12-19 2000-10-24 Amt Holdings, Inc. Preparation of metal coatings

Also Published As

Publication number Publication date
US7258899B1 (en) 2007-08-21
EP1323846A3 (de) 2004-10-20
US20070184208A1 (en) 2007-08-09
EP1323846B1 (de) 2011-10-19
EP1323846A2 (de) 2003-07-02

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