ATE520142T1 - Mikroelektronische vorrichtung mit mehrfacher elektronenstrahlenemission - Google Patents

Mikroelektronische vorrichtung mit mehrfacher elektronenstrahlenemission

Info

Publication number
ATE520142T1
ATE520142T1 AT06709431T AT06709431T ATE520142T1 AT E520142 T1 ATE520142 T1 AT E520142T1 AT 06709431 T AT06709431 T AT 06709431T AT 06709431 T AT06709431 T AT 06709431T AT E520142 T1 ATE520142 T1 AT E520142T1
Authority
AT
Austria
Prior art keywords
sources
electron beam
microelectronic device
beam emission
electron
Prior art date
Application number
AT06709431T
Other languages
English (en)
Inventor
Pierre Nicolas
Yohan Desieres
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE520142T1 publication Critical patent/ATE520142T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H01J1/3044—Point emitters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30469—Carbon nanotubes (CNTs)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31774—Multi-beam

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
AT06709431T 2005-01-27 2006-01-24 Mikroelektronische vorrichtung mit mehrfacher elektronenstrahlenemission ATE520142T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0550235A FR2881270B1 (fr) 2005-01-27 2005-01-27 Dispositif microelectronique emetteur d'electrons a plusieurs faisceaux
PCT/FR2006/050047 WO2006079741A2 (fr) 2005-01-27 2006-01-24 Dispositif microelectronique emetteur d'electrons a plusieurs faisceaux

Publications (1)

Publication Number Publication Date
ATE520142T1 true ATE520142T1 (de) 2011-08-15

Family

ID=35044594

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06709431T ATE520142T1 (de) 2005-01-27 2006-01-24 Mikroelektronische vorrichtung mit mehrfacher elektronenstrahlenemission

Country Status (6)

Country Link
US (1) US7800085B2 (de)
EP (1) EP1842220B1 (de)
JP (1) JP4773460B2 (de)
AT (1) ATE520142T1 (de)
FR (1) FR2881270B1 (de)
WO (1) WO2006079741A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8393011B2 (en) * 2008-05-13 2013-03-05 Nanoink, Inc. Piezoresistor height sensing cantilever
KR20160055926A (ko) * 2013-09-20 2016-05-18 어플라이드 머티어리얼스, 인코포레이티드 나노미터 스케일 피쳐들의 직접 형성을 위한 방법 및 장치
CN117850167B (zh) * 2023-11-28 2024-09-24 上海集成电路材料研究院有限公司 电子束直写器以及电子束直写系统

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2646558B1 (fr) 1989-04-26 1994-04-01 Commissariat A Energie Atomique Procede et machine d'interconnexion de composants electriques par elements de soudure
US5270611A (en) 1989-06-01 1993-12-14 U.S. Philips Corporation Electric discharge element
US5412285A (en) * 1990-12-06 1995-05-02 Seiko Epson Corporation Linear amplifier incorporating a field emission device having specific gap distances between gate and cathode
JP2806281B2 (ja) * 1994-12-19 1998-09-30 日本電気株式会社 可変多角形断面の電子線形成装置およびこれを用いた電子線描画装置
FR2748347B1 (fr) * 1996-05-06 1998-07-24 Pixtech Sa Anode d'ecran plat de visualisation a anneau de protection
JPH10125215A (ja) * 1996-10-18 1998-05-15 Nec Corp 電界放射薄膜冷陰極及びこれを用いた表示装置
US5892231A (en) * 1997-02-05 1999-04-06 Lockheed Martin Energy Research Corporation Virtual mask digital electron beam lithography
US6242304B1 (en) * 1998-05-29 2001-06-05 Micron Technology, Inc. Method and structure for textured surfaces in floating gate tunneling oxide devices
US6031657A (en) * 1998-10-15 2000-02-29 Memsolutions, Inc. Membrane-actuated charge controlled mirror (CCM) projection display
FR2809862B1 (fr) * 2000-05-30 2003-10-17 Pixtech Sa Ecran plat de visualisation a memoire d'adressage
FR2811799B1 (fr) * 2000-07-13 2003-06-13 Commissariat Energie Atomique Procede et dispositif de commande d'une source d'electrons a structure matricielle, avec regulation par la charge emise
EP1320864A2 (de) 2000-09-27 2003-06-25 Koninklijke Philips Electronics N.V. Katodenstrahlröhre
US6750461B2 (en) * 2001-10-03 2004-06-15 Si Diamond Technology, Inc. Large area electron source
CN1636256A (zh) * 2001-11-09 2005-07-06 皇家飞利浦电子股份有限公司 真空显示设备
AU2002366912A1 (en) * 2001-12-21 2003-07-09 Koninklijke Philips Electronics N.V. Vacuum electronic device
WO2005004196A2 (en) * 2002-08-23 2005-01-13 Sungho Jin Article comprising gated field emission structures with centralized nanowires and method for making the same
US6858521B2 (en) * 2002-12-31 2005-02-22 Samsung Electronics Co., Ltd. Method for fabricating spaced-apart nanostructures
KR100513720B1 (ko) * 2002-10-22 2005-09-07 삼성전자주식회사 2차전자를 이용한 전자 투사 노광장치
US20040245224A1 (en) * 2003-05-09 2004-12-09 Nano-Proprietary, Inc. Nanospot welder and method
KR100523840B1 (ko) * 2003-08-27 2005-10-27 한국전자통신연구원 전계 방출 소자

Also Published As

Publication number Publication date
JP4773460B2 (ja) 2011-09-14
EP1842220B1 (de) 2011-08-10
US20080169429A1 (en) 2008-07-17
JP2008529293A (ja) 2008-07-31
EP1842220A2 (de) 2007-10-10
US7800085B2 (en) 2010-09-21
WO2006079741A3 (fr) 2007-03-29
FR2881270B1 (fr) 2007-04-20
FR2881270A1 (fr) 2006-07-28
WO2006079741A2 (fr) 2006-08-03

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Legal Events

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