ATE515720T1 - Verfahren zum zurückhalten einer in einer strahlungsquelle erzeugten substanz mit hilfe eines filters - Google Patents

Verfahren zum zurückhalten einer in einer strahlungsquelle erzeugten substanz mit hilfe eines filters

Info

Publication number
ATE515720T1
ATE515720T1 AT04744709T AT04744709T ATE515720T1 AT E515720 T1 ATE515720 T1 AT E515720T1 AT 04744709 T AT04744709 T AT 04744709T AT 04744709 T AT04744709 T AT 04744709T AT E515720 T1 ATE515720 T1 AT E515720T1
Authority
AT
Austria
Prior art keywords
filter
radiation source
retenting
substance generated
radiation
Prior art date
Application number
AT04744709T
Other languages
English (en)
Inventor
Rolf Apetz
Jeroen Jonkers
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE515720T1 publication Critical patent/ATE515720T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G03F7/70166—Capillary or channel elements, e.g. nested extreme ultraviolet [EUV] mirrors or shells, optical fibers or light guides

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Atmospheric Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Public Health (AREA)
  • Epidemiology (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Filters (AREA)
AT04744709T 2003-08-13 2004-08-02 Verfahren zum zurückhalten einer in einer strahlungsquelle erzeugten substanz mit hilfe eines filters ATE515720T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03102518 2003-08-13
PCT/IB2004/051360 WO2005017624A1 (en) 2003-08-13 2004-08-02 Filter for retaining a substance originating from a radiation source and method for the manufacture of the same

Publications (1)

Publication Number Publication Date
ATE515720T1 true ATE515720T1 (de) 2011-07-15

Family

ID=34178561

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04744709T ATE515720T1 (de) 2003-08-13 2004-08-02 Verfahren zum zurückhalten einer in einer strahlungsquelle erzeugten substanz mit hilfe eines filters

Country Status (5)

Country Link
US (1) US20060245044A1 (de)
EP (1) EP1656591B1 (de)
AT (1) ATE515720T1 (de)
TW (1) TW200510921A (de)
WO (1) WO2005017624A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7262423B2 (en) * 2005-12-02 2007-08-28 Asml Netherlands B.V. Radiation system and lithographic apparatus
US7772570B2 (en) 2006-12-22 2010-08-10 Asml Netherlands B.V. Assembly for blocking a beam of radiation and method of blocking a beam of radiation
US8018578B2 (en) * 2007-04-19 2011-09-13 Asml Netherlands B.V. Pellicle, lithographic apparatus and device manufacturing method
DE102008041436A1 (de) * 2007-10-02 2009-04-09 Carl Zeiss Smt Ag Optisches Membranelement
WO2009061192A1 (en) * 2007-11-08 2009-05-14 Asml Netherlands B.V. Radiation system and method, and a spectral purity filter
CN101713120B (zh) * 2009-11-27 2011-05-04 天津工业大学 一种格栅型预制件的三维整体编织方法及其制品
DE102012204295A1 (de) * 2012-03-19 2013-03-28 Carl Zeiss Smt Gmbh Filterelement
EP3871044A1 (de) * 2018-10-22 2021-09-01 ASML Netherlands B.V. Strahlungsfilter für einen strahlungssensor

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4178509A (en) * 1978-06-02 1979-12-11 The Bendix Corporation Sensitivity proportional counter window
US4939763A (en) * 1988-10-03 1990-07-03 Crystallume Method for preparing diamond X-ray transmissive elements
JP3025545B2 (ja) * 1991-03-18 2000-03-27 キヤノン株式会社 Ｘ線リソグラフィ用マスクおよびｘ線リソグラフィ露光装置
JP2000349009A (ja) 1999-06-04 2000-12-15 Nikon Corp 露光方法及び装置
JP2002214400A (ja) * 2001-01-12 2002-07-31 Toyota Macs Inc レーザープラズマｅｕｖ光源装置及びそれに用いられるターゲット
DE50207927D1 (de) * 2001-01-26 2006-10-05 Zeiss Carl Smt Ag Schmalbandiger spektralfilter und seine verwendung
JP2003022950A (ja) * 2001-07-05 2003-01-24 Canon Inc Ｘ線光源用デブリ除去装置及び、デブリ除去装置を用いた露光装置
JP4298336B2 (ja) 2002-04-26 2009-07-15 キヤノン株式会社 露光装置、光源装置及びデバイス製造方法

Also Published As

Publication number Publication date
EP1656591B1 (de) 2011-07-06
EP1656591A1 (de) 2006-05-17
TW200510921A (en) 2005-03-16
US20060245044A1 (en) 2006-11-02
WO2005017624A1 (en) 2005-02-24

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Legal Events

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