ATE511494T1 - Mikromechanisches teil aus einem silizium-metall- verbund und herstellungsverfahren dafür - Google Patents

Mikromechanisches teil aus einem silizium-metall- verbund und herstellungsverfahren dafür

Info

Publication number
ATE511494T1
ATE511494T1 AT08848955T AT08848955T ATE511494T1 AT E511494 T1 ATE511494 T1 AT E511494T1 AT 08848955 T AT08848955 T AT 08848955T AT 08848955 T AT08848955 T AT 08848955T AT E511494 T1 ATE511494 T1 AT E511494T1
Authority
AT
Austria
Prior art keywords
layer
silicon
substrate
metal composite
metal
Prior art date
Application number
AT08848955T
Other languages
English (en)
Inventor
Jean-Charles Fiaccabrino
Marco Verardo
Thierry Conus
Jean-Philippe Thiebaud
Jean-Bernard Peters
Original Assignee
Nivarox Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=39420509&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE511494(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Nivarox Sa filed Critical Nivarox Sa
Application granted granted Critical
Publication of ATE511494T1 publication Critical patent/ATE511494T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10—Electroplating with more than one layer of the same or of different metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/0095—Aspects relating to the manufacture of substrate-free structures, not covered by groups B81C99/008 - B81C99/009
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/08—Perforated or foraminous objects, e.g. sieves
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H55/00—Elements with teeth or friction surfaces for conveying motion; Worms, pulleys or sheaves for gearing mechanisms
    • F16H55/02—Toothed members; Worms
    • F16H55/06—Use of materials; Use of treatments of toothed members or worms to affect their intrinsic material properties
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B13/00—Gearwork
    • G04B13/02—Wheels; Pinions; Spindles; Pivots
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B13/00—Gearwork
    • G04B13/02—Wheels; Pinions; Spindles; Pivots
    • G04B13/021—Wheels; Pinions; Spindles; Pivots elastic fitting with a spindle, axis or shaft
    • G04B13/022—Wheels; Pinions; Spindles; Pivots elastic fitting with a spindle, axis or shaft with parts made of hard material, e.g. silicon, diamond, sapphire, quartz and the like
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B19/00—Indicating the time by visual means
    • G04B19/04—Hands; Discs with a single mark or the like
    • G04B19/042—Construction and manufacture of the hands; arrangements for increasing reading accuracy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/035—Microgears
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/0197—Processes for making multi-layered devices not provided for in groups B81C2201/0176 - B81C2201/0192
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/19—Gearing
    • Y10T74/1987—Rotary bodies

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
AT08848955T 2007-11-16 2008-11-12 Mikromechanisches teil aus einem silizium-metall- verbund und herstellungsverfahren dafür ATE511494T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07120883A EP2060534A1 (de) 2007-11-16 2007-11-16 Mikromechanisches Bauteil aus Silizium-Metall-Verbundmaterial und Verfahren zu dessen Herstellung
PCT/EP2008/065347 WO2009062943A1 (fr) 2007-11-16 2008-11-12 Pièce de micromécanique composite silicium-métal et son procédé de fabrication

Publications (1)

Publication Number Publication Date
ATE511494T1 true ATE511494T1 (de) 2011-06-15

Family

ID=39420509

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08848955T ATE511494T1 (de) 2007-11-16 2008-11-12 Mikromechanisches teil aus einem silizium-metall- verbund und herstellungsverfahren dafür

Country Status (9)

Country Link
US (2) US8486279B2 (de)
EP (2) EP2060534A1 (de)
JP (1) JP5478498B2 (de)
KR (1) KR20100084527A (de)
CN (1) CN101861281B (de)
AT (1) ATE511494T1 (de)
RU (1) RU2474532C2 (de)
TW (1) TWI436939B (de)
WO (1) WO2009062943A1 (de)

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EP2230206B1 (de) * 2009-03-13 2013-07-17 Nivarox-FAR S.A. Form für Galvanoplastik und ihr Herstellungsverfahren
EP2230207A1 (de) * 2009-03-13 2010-09-22 Nivarox-FAR S.A. Form für Galvanoplastik und ihr Herstellungsverfahren
EP2263971A1 (de) * 2009-06-09 2010-12-22 Nivarox-FAR S.A. Mikromechanisches Verbundbauteil und sein Herstellungsverfahren
EP2309342A1 (de) * 2009-10-07 2011-04-13 Nivarox-FAR S.A. Freilauf-Triebfeder aus mikro-bearbeitbarem Material und ihr Herstellungsverfahren
CH702156B1 (fr) * 2009-11-13 2017-08-31 Nivarox Far Sa Résonateur balancier-spiral pour une pièce d'horlogerie.
DE102010004269B4 (de) 2010-01-09 2018-06-28 Micromotion Gmbh Verzahnungspaarung und Getriebe, insbesondere Exzentergetriebe, Umlaufrädergetriebe oder Spannungswellengetriebe
EP2405300A1 (de) 2010-07-09 2012-01-11 Mimotec S.A. Herstellungsverfahren von mehrschichtigen Metallteilen mit Hilfe eines Verfahrens vom Typ LIGA, und mit dieser Methode hergestellte Teile
EP2484629B1 (de) * 2011-02-03 2013-06-26 Nivarox-FAR S.A. Komplexes durchbrochenes mikromechanisches Bauteil
EP2484628A1 (de) * 2011-02-03 2012-08-08 Nivarox-FAR S.A. Mikromechanisches Bauteil mit geringer Oberflächenrauheit
CN102167282A (zh) * 2011-04-07 2011-08-31 天津海鸥表业集团有限公司 一种硅与金属复合材料的微结构加工方法
CH705228A1 (fr) * 2011-07-06 2013-01-15 Suisse Electronique Microtech Pièce mécanique en composite silicium-métal et son procéde de fabrication.
EP2579104B1 (de) * 2011-10-07 2014-06-25 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Herstellungsverfahren eines Verbunduhrwerks
CH705724B9 (fr) 2011-11-03 2016-05-13 Sigatec Sa Pièce de micromécanique, notamment pour l'horlogerie.
JP6345493B2 (ja) * 2014-02-25 2018-06-20 シチズン時計株式会社 ひげぜんまい
EP2937311B1 (de) * 2014-04-25 2019-08-21 Rolex Sa Herstellungsverfahren einer verstärkten uhrkomponente, entsprechende uhrkomponente und entsprechende uhr
EP2952979B1 (de) 2014-06-03 2017-03-01 Nivarox-FAR S.A. Uhrkomponente aus fotostrukturierbarem glas
CH709729A2 (fr) * 2014-06-03 2015-12-15 Swatch Group Res & Dev Ltd Pièce d'habillage à base de verre photostructurable.
CH710107B1 (fr) * 2014-09-09 2019-06-14 Seiko Instr Lnc Composant mécanique, mouvement, pièce d'horlogerie et méthode de fabrication du composant mécanique.
EP3232277B1 (de) * 2014-12-12 2021-04-21 Citizen Watch Co., Ltd. Uhrkomponente und verfahren zur herstellung einer uhrkomponente
EP3034461B1 (de) 2014-12-19 2020-07-01 Rolex Sa Herstellung einer mehrstufigen Uhrenkomponente
EP3035125B1 (de) 2014-12-19 2018-01-10 Rolex Sa Herstellungsverfahren einer mehrstufigen Uhrenkomponente
EP3181515A1 (de) 2015-12-15 2017-06-21 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Uhr aus verbundmaterial und ihr herstellungsverfahren
EP3202708B1 (de) 2016-02-03 2023-05-03 Rolex Sa Verfahren zur herstellung einer hybrid-uhrenkomponente
CH712210B1 (fr) * 2016-03-14 2020-02-14 Nivarox Sa Procédé de fabrication d'un composant d'affichage d'horlogerie.
EP3249474B1 (de) 2016-05-26 2019-03-13 ETA SA Manufacture Horlogère Suisse Analoger zeiger
EP3266738B1 (de) * 2016-07-06 2019-03-06 The Swatch Group Research and Development Ltd. Herstellungsverfahren für ein uhrenbauteil, das mit einer mehrstufigen habillage ausgestattet ist
EP3764167A1 (de) * 2019-07-10 2021-01-13 Patek Philippe SA Genève Verfahren zum erhalten einer uhrenkomponente, deren oberfläche zumindest zum teil mit einer farbschicht beschichtet ist
EP3839625A1 (de) * 2019-12-18 2021-06-23 Nivarox-FAR S.A. Verfahren zur herstellung einer uhrkomponente und nach diesem verfahren hergestellte komponente
JP7527184B2 (ja) * 2020-02-28 2024-08-02 シチズン時計株式会社 電鋳品の製造方法及び電鋳品

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RU2137249C1 (ru) * 1998-03-31 1999-09-10 Санкт-Петербургский государственный электротехнический университет Способ изготовления микромеханических приборов
DE19817311B4 (de) * 1998-04-18 2007-03-22 Robert Bosch Gmbh Herstellungsverfahren für mikromechanisches Bauelement
US6887391B1 (en) * 2000-03-24 2005-05-03 Analog Devices, Inc. Fabrication and controlled release of structures using etch-stop trenches
DE10055421A1 (de) * 2000-11-09 2002-05-29 Bosch Gmbh Robert Verfahren zur Erzeugung einer mikromechanischen Struktur und mikromechanische Struktur
US6506620B1 (en) * 2000-11-27 2003-01-14 Microscan Systems Incorporated Process for manufacturing micromechanical and microoptomechanical structures with backside metalization
FR2852111B1 (fr) * 2003-03-05 2005-06-24 Univ Franche Comte Dispositif d'horloge utilisant la technologie mems
JP2006064575A (ja) * 2004-08-27 2006-03-09 Seiko Epson Corp 時計用部品、時計用組立部品、および時計
US7204737B2 (en) * 2004-09-23 2007-04-17 Temic Automotive Of North America, Inc. Hermetically sealed microdevice with getter shield
EP1722281A1 (de) * 2005-05-12 2006-11-15 ETA SA Manufacture Horlogère Suisse Analoger Anzeiger aus kristallenem Material, Uhr mit solchem Anzeiger, und Herstellungsverfahren dafür
EP1780612A1 (de) * 2005-10-25 2007-05-02 ETA SA Manufacture Horlogère Suisse Analogic display device including a planet gear drive
TWI276805B (en) * 2005-11-10 2007-03-21 Mjc Probe Inc Probe of probe card and manufacturing method thereof
EP1843225B1 (de) * 2006-04-07 2009-07-15 ETA SA Manufacture Horlogère Suisse Mechanischer Wechsler zum Drehantreiben eines Rades aus einer einzelnen Richtung
JP5231769B2 (ja) * 2007-02-27 2013-07-10 セイコーインスツル株式会社 電鋳型、電鋳型の製造方法、時計用部品、および時計
CH714952B1 (fr) * 2007-05-08 2019-10-31 Patek Philippe Sa Geneve Composant horloger, son procédé de fabrication et application de ce procédé.

Also Published As

Publication number Publication date
HK1144190A1 (en) 2011-02-02
CN101861281A (zh) 2010-10-13
TW200927640A (en) 2009-07-01
JP2011514846A (ja) 2011-05-12
US20130279307A1 (en) 2013-10-24
KR20100084527A (ko) 2010-07-26
JP5478498B2 (ja) 2014-04-23
TWI436939B (zh) 2014-05-11
US8486279B2 (en) 2013-07-16
EP2060534A1 (de) 2009-05-20
CN101861281B (zh) 2012-11-21
EP2259997B1 (de) 2011-06-01
RU2474532C2 (ru) 2013-02-10
RU2010124426A (ru) 2011-12-27
US20100243603A1 (en) 2010-09-30
EP2259997A1 (de) 2010-12-15
WO2009062943A1 (fr) 2009-05-22
EP2259997B2 (de) 2015-09-30

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