ATE500615T1 - Methode zur steuerung des herstellungsverfahrens einer photoelektrischen umwandlungsvorrichtung - Google Patents

Methode zur steuerung des herstellungsverfahrens einer photoelektrischen umwandlungsvorrichtung

Info

Publication number
ATE500615T1
ATE500615T1 AT00104449T AT00104449T ATE500615T1 AT E500615 T1 ATE500615 T1 AT E500615T1 AT 00104449 T AT00104449 T AT 00104449T AT 00104449 T AT00104449 T AT 00104449T AT E500615 T1 ATE500615 T1 AT E500615T1
Authority
AT
Austria
Prior art keywords
controlling
manufacturing process
photoelectric conversion
conversion device
mark
Prior art date
Application number
AT00104449T
Other languages
English (en)
Inventor
Masafumi Hiraishi
Kazunori Sawai
Original Assignee
Kaneka Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP27490799A external-priority patent/JP2001102604A/ja
Priority claimed from JP28566499A external-priority patent/JP4414521B2/ja
Application filed by Kaneka Corp filed Critical Kaneka Corp
Application granted granted Critical
Publication of ATE500615T1 publication Critical patent/ATE500615T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042PV modules or arrays of single PV cells
    • H01L31/0445PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
    • H01L31/046PV modules composed of a plurality of thin film solar cells deposited on the same substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/544Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02SGENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S50/00Monitoring or testing of PV systems, e.g. load balancing or fault identification
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544Marks applied to semiconductor devices or parts
    • H01L2223/54406Marks applied to semiconductor devices or parts comprising alphanumeric information
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544Marks applied to semiconductor devices or parts
    • H01L2223/54413Marks applied to semiconductor devices or parts comprising digital information, e.g. bar codes, data matrix
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544Marks applied to semiconductor devices or parts
    • H01L2223/54433Marks applied to semiconductor devices or parts containing identification or tracking information
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Electromagnetism (AREA)
  • Photovoltaic Devices (AREA)
  • Light Receiving Elements (AREA)
AT00104449T 1999-09-28 2000-03-06 Methode zur steuerung des herstellungsverfahrens einer photoelektrischen umwandlungsvorrichtung ATE500615T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP27490799A JP2001102604A (ja) 1999-09-28 1999-09-28 光電変換装置の製造工程管理方法
JP28566499A JP4414521B2 (ja) 1999-10-06 1999-10-06 光電変換装置および光電変換装置の品質管理システム

Publications (1)

Publication Number Publication Date
ATE500615T1 true ATE500615T1 (de) 2011-03-15

Family

ID=26551246

Family Applications (2)

Application Number Title Priority Date Filing Date
AT07112029T ATE516598T1 (de) 1999-09-28 2000-03-06 Verfahren zur steuerung des herstellungsprozesses einer photoelektrischen wandlervorrichtung
AT00104449T ATE500615T1 (de) 1999-09-28 2000-03-06 Methode zur steuerung des herstellungsverfahrens einer photoelektrischen umwandlungsvorrichtung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT07112029T ATE516598T1 (de) 1999-09-28 2000-03-06 Verfahren zur steuerung des herstellungsprozesses einer photoelektrischen wandlervorrichtung

Country Status (6)

Country Link
US (1) US6578764B1 (de)
EP (2) EP1089346B1 (de)
AT (2) ATE516598T1 (de)
AU (1) AU776867C (de)
DE (1) DE60045678D1 (de)
ES (1) ES2360031T3 (de)

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JP4091310B2 (ja) 2001-02-15 2008-05-28 株式会社カネカ シリコン薄膜太陽電池の製造方法
TWI342459B (en) * 2004-03-26 2011-05-21 Chimei Innolux Corp Glass substrate
CN100377074C (zh) * 2004-03-27 2008-03-26 鸿富锦精密工业(深圳)有限公司 玻璃基板
PT1989740E (pt) * 2006-02-28 2010-01-11 Cells Se Q Método de marcação de células solares e célula solar
DE102007032283A1 (de) * 2007-07-11 2009-01-15 Stein, Wilhelm, Dr. Dünnschichtsolarzellen-Modul und Verfahren zu dessen Herstellung
KR101301664B1 (ko) * 2007-08-06 2013-08-29 주성엔지니어링(주) 박막형 태양전지 제조방법 및 그 방법에 의해 제조된박막형 태양전지
EP2198367A1 (de) * 2007-08-31 2010-06-23 Applied Materials, Inc. Photovoltaik-produktionslinie
US20100047954A1 (en) * 2007-08-31 2010-02-25 Su Tzay-Fa Jeff Photovoltaic production line
EP3333280A1 (de) * 2007-09-12 2018-06-13 Flisom AG Verfahren zur herstellung eines verbindungsschichtes mit zusammensetzungsgradierung
US20090188603A1 (en) * 2008-01-25 2009-07-30 Applied Materials, Inc. Method and apparatus for controlling laminator temperature on a solar cell
JP2009206279A (ja) * 2008-02-27 2009-09-10 Sharp Corp 薄膜太陽電池およびその製造方法
US7981778B2 (en) * 2009-07-22 2011-07-19 Applied Materials, Inc. Directional solid phase crystallization of thin amorphous silicon for solar cell applications
KR20110059724A (ko) * 2008-08-26 2011-06-03 어플라이드 머티어리얼스, 인코포레이티드 레이저 재료 제거 방법 및 장치
DE102008043750A1 (de) * 2008-11-14 2010-05-20 Q-Cells Se Verfahren zur Makierung/Codierung einer Solarzelle und Solarzelle
KR101520044B1 (ko) * 2009-01-30 2015-05-14 삼성에스디아이 주식회사 태양전지 모듈 및 이의 제조 방법
CN102725859B (zh) * 2009-02-04 2016-01-27 应用材料公司 太阳能生产线的计量与检测套组
US20100330711A1 (en) * 2009-06-26 2010-12-30 Applied Materials, Inc. Method and apparatus for inspecting scribes in solar modules
US20110005458A1 (en) * 2009-07-13 2011-01-13 Applied Materials, Inc. Method and apparatus for improving scribe accuracy in solar cell modules
US20110008947A1 (en) * 2009-07-13 2011-01-13 Applied Materials, Inc. Apparatus and method for performing multifunction laser processes
US20110065227A1 (en) * 2009-09-15 2011-03-17 Applied Materials, Inc. Common laser module for a photovoltaic production line
DE102010060908A1 (de) * 2010-11-30 2012-05-31 Q-Cells Se Verfahren zur Kennzeichnung von Wafersolarzellen oder zur Kennzeichnung von Vorprodukten von Wafersolarzellen
CN103000752A (zh) * 2011-09-19 2013-03-27 无锡尚德太阳能电力有限公司 薄膜太阳电池划线机及其方法
NL2014040B1 (en) * 2014-12-23 2016-10-12 Stichting Energieonderzoek Centrum Nederland Method of making a curent collecting grid for solar cells.
US10923606B2 (en) * 2016-10-26 2021-02-16 Kaneka Corporation Photoelectric conversion element
DE102019006090A1 (de) * 2019-08-29 2021-03-04 Azur Space Solar Power Gmbh Markierungsverfahren

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JP3805889B2 (ja) * 1997-06-20 2006-08-09 株式会社カネカ 太陽電池モジュールおよびその製造方法

Also Published As

Publication number Publication date
ES2360031T3 (es) 2011-05-31
AU2072500A (en) 2001-03-29
US6578764B1 (en) 2003-06-17
EP1089346B1 (de) 2011-03-02
EP1868249A2 (de) 2007-12-19
DE60045678D1 (de) 2011-04-14
AU776867C (en) 2005-06-16
ATE516598T1 (de) 2011-07-15
EP1868249A3 (de) 2008-11-12
EP1089346A3 (de) 2006-05-17
EP1089346A2 (de) 2001-04-04
AU776867B2 (en) 2004-09-23
EP1868249B1 (de) 2011-07-13

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