ATE460436T1 - Fluorierte polymere mit polycyclischen gruppen mit annelierten 4-gliedrigen heterocyclischen ringen, die zur verwendung als photoresists geeignet sind, und mikrolithographieverfahren - Google Patents

Fluorierte polymere mit polycyclischen gruppen mit annelierten 4-gliedrigen heterocyclischen ringen, die zur verwendung als photoresists geeignet sind, und mikrolithographieverfahren

Info

Publication number
ATE460436T1
ATE460436T1 AT03785133T AT03785133T ATE460436T1 AT E460436 T1 ATE460436 T1 AT E460436T1 AT 03785133 T AT03785133 T AT 03785133T AT 03785133 T AT03785133 T AT 03785133T AT E460436 T1 ATE460436 T1 AT E460436T1
Authority
AT
Austria
Prior art keywords
microlithograpy
annated
membed
photoresists
methods
Prior art date
Application number
AT03785133T
Other languages
English (en)
Inventor
Andrew Feiring
Frank Schadt
Viacheslav Alexandrovich Petrov
Bruce Smart
William Farnham
Original Assignee
Du Pont
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Du Pont filed Critical Du Pont
Application granted granted Critical
Publication of ATE460436T1 publication Critical patent/ATE460436T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F14/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F14/18—Monomers containing fluorine
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F214/18—Monomers containing fluorine
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F214/18—Monomers containing fluorine
    • C08F214/26—Tetrafluoroethene
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/22—Esters containing halogen
    • C08F220/24—Esters containing halogen containing perhaloalkyl radicals
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F232/00—Copolymers of cyclic compounds containing no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system
    • C08F232/08—Copolymers of cyclic compounds containing no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system having condensed rings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G03F7/0395—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having a backbone with alicyclic moieties
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/108—Polyolefin or halogen containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/111—Polymer of unsaturated acid or ester

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Polymers & Plastics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Materials For Photolithography (AREA)
  • Polymerisation Methods In General (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
AT03785133T 2002-08-09 2003-08-08 Fluorierte polymere mit polycyclischen gruppen mit annelierten 4-gliedrigen heterocyclischen ringen, die zur verwendung als photoresists geeignet sind, und mikrolithographieverfahren ATE460436T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US40235002P 2002-08-09 2002-08-09
US44050403P 2003-01-16 2003-01-16
PCT/US2003/025022 WO2004014964A2 (en) 2002-08-09 2003-08-08 PHOTORESISTS, FLUORINATED POLYMERS AND PROCESSES FOR 157 nm MICROLITHOGRAPHY

Publications (1)

Publication Number Publication Date
ATE460436T1 true ATE460436T1 (de) 2010-03-15

Family

ID=31720593

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03785133T ATE460436T1 (de) 2002-08-09 2003-08-08 Fluorierte polymere mit polycyclischen gruppen mit annelierten 4-gliedrigen heterocyclischen ringen, die zur verwendung als photoresists geeignet sind, und mikrolithographieverfahren

Country Status (10)

Country Link
US (1) US7264914B2 (de)
EP (1) EP1546221B1 (de)
JP (1) JP4610335B2 (de)
KR (1) KR20050069979A (de)
CN (1) CN1675264A (de)
AT (1) ATE460436T1 (de)
AU (1) AU2003259727A1 (de)
DE (1) DE60331667D1 (de)
TW (1) TW200418883A (de)
WO (1) WO2004014964A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101700992B (zh) * 2003-03-06 2013-10-30 日本电气株式会社 脂环族不饱和化合物、聚合物、化学增幅抗蚀剂组合物及采用所述组合物形成图案的方法
US7867697B2 (en) 2003-07-24 2011-01-11 Fujifilm Corporation Positive photosensitive composition and method of forming resist pattern
JP2008535950A (ja) * 2005-03-11 2008-09-04 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー 光画像形成可能な熱硬化性フッ素化レジスト
JP5225555B2 (ja) * 2006-04-27 2013-07-03 東京応化工業株式会社 液浸露光用レジスト組成物およびレジストパターン形成方法
JP4862033B2 (ja) * 2007-12-19 2012-01-25 旭化成株式会社 光吸収性を有するモールド、該モールドを利用する感光性樹脂のパターン形成方法、及び印刷版の製造方法
JP5449909B2 (ja) * 2008-08-04 2014-03-19 東京応化工業株式会社 ポジ型レジスト組成物及びレジストパターン形成方法
JP2010106118A (ja) * 2008-10-29 2010-05-13 Sumitomo Chemical Co Ltd 重合体及びフォトレジスト組成物
EP2655306B1 (de) * 2010-12-21 2018-06-27 Solvay Specialty Polymers Italy S.p.A. Verfahren zur herstellung von fluorierten organischen verbindungen
WO2015187413A1 (en) * 2014-06-03 2015-12-10 The Chemours Company Fc, Llc Passivation layer comprising a photocrosslinked fluoropolymer

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2928865A (en) 1957-03-25 1960-03-15 Du Pont Fluorinated tricyclononanes and tetracycloundecanes
US5229473A (en) 1989-07-07 1993-07-20 Daikin Industries Ltd. Fluorine-containing copolymer and method of preparing the same
WO1991000880A1 (fr) * 1989-07-07 1991-01-24 Daikin Industries, Ltd. Copolymere fluore et son procede de production
US6232417B1 (en) * 1996-03-07 2001-05-15 The B. F. Goodrich Company Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
WO2000017712A1 (en) * 1998-09-23 2000-03-30 E.I. Du Pont De Nemours And Company Photoresists, polymers and processes for microlithography
AU2001296737A1 (en) * 2000-10-12 2002-04-22 North Carolina State University Co2-processes photoresists, polymers, and photoactive compounds for microlithography
KR20040004403A (ko) * 2000-10-18 2004-01-13 이 아이 듀폰 디 네모아 앤드 캄파니 마이크로리소그래피용 조성물
EP1478977A2 (de) * 2000-11-29 2004-11-24 E. I. du Pont de Nemours and Company Polymermischungen und ihre verwendung in den photoresistzusammensetzungen für die mikrolithographie
AU2002239350A1 (en) * 2000-11-29 2002-06-11 E.I. Du Pont De Nemours And Company Multilayer elements containing photoresist compositions and their use in microlithography
EP1246013A3 (de) * 2001-03-30 2003-11-19 E.I. Du Pont De Nemours And Company Photoresists, Polymere und Verfahren für die Mikrolithographie
KR20040018342A (ko) * 2001-03-30 2004-03-03 이 아이 듀폰 디 네모아 앤드 캄파니 미세석판인쇄를 위한 폴리시클릭 불소-함유 중합체 및포토레지스트
JP2003252928A (ja) * 2002-02-27 2003-09-10 Nec Corp フッ素含有アセタールまたはケタール構造を有する単量体、重合体、ならびに化学増幅型レジスト組成物
AU2003259728A1 (en) * 2002-08-09 2004-02-25 E. I. Du Pont De Nemours And Company Fluorinated monomers, fluorinated polymers having polycyclic groups with fused 4-membered heterocyclic rings, useful as photoresists, and processes for microlithography

Also Published As

Publication number Publication date
WO2004014964A2 (en) 2004-02-19
EP1546221A2 (de) 2005-06-29
KR20050069979A (ko) 2005-07-05
EP1546221B1 (de) 2010-03-10
DE60331667D1 (de) 2010-04-22
US20050277052A1 (en) 2005-12-15
AU2003259727A8 (en) 2004-02-25
JP2005535753A (ja) 2005-11-24
AU2003259727A1 (en) 2004-02-25
JP4610335B2 (ja) 2011-01-12
CN1675264A (zh) 2005-09-28
WO2004014964A3 (en) 2004-03-18
US7264914B2 (en) 2007-09-04
EP1546221A4 (de) 2008-06-18
TW200418883A (en) 2004-10-01

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