ATE433870T1 - Verfahren zur herstellung eines tintenstrahldruckkopfs - Google Patents
Verfahren zur herstellung eines tintenstrahldruckkopfsInfo
- Publication number
- ATE433870T1 ATE433870T1 AT05824322T AT05824322T ATE433870T1 AT E433870 T1 ATE433870 T1 AT E433870T1 AT 05824322 T AT05824322 T AT 05824322T AT 05824322 T AT05824322 T AT 05824322T AT E433870 T1 ATE433870 T1 AT E433870T1
- Authority
- AT
- Austria
- Prior art keywords
- layer
- nozzle plate
- ink jet
- producing
- print head
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000010410 layer Substances 0.000 abstract 6
- 238000000151 deposition Methods 0.000 abstract 4
- 230000004888 barrier function Effects 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 2
- 230000008021 deposition Effects 0.000 abstract 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract 2
- 229910010271 silicon carbide Inorganic materials 0.000 abstract 2
- 239000011247 coating layer Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1606—Coating the nozzle area or the ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1625—Manufacturing processes electroforming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2005/013999 WO2007073755A1 (en) | 2005-12-23 | 2005-12-23 | Method of manufacturing an inkjet printhead |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE433870T1 true ATE433870T1 (de) | 2009-07-15 |
Family
ID=36928322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05824322T ATE433870T1 (de) | 2005-12-23 | 2005-12-23 | Verfahren zur herstellung eines tintenstrahldruckkopfs |
Country Status (5)
Country | Link |
---|---|
US (1) | US8112889B2 (de) |
EP (1) | EP1973741B1 (de) |
AT (1) | ATE433870T1 (de) |
DE (1) | DE602005015040D1 (de) |
WO (1) | WO2007073755A1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5357768B2 (ja) * | 2006-12-01 | 2013-12-04 | フジフィルム ディマティックス, インコーポレイテッド | 液体吐出装置上への非湿潤性コーティング |
KR102011450B1 (ko) * | 2012-06-21 | 2019-08-19 | 삼성디스플레이 주식회사 | 잉크젯 프린트 헤드 및 이의 제조 방법 |
JP2014043029A (ja) * | 2012-08-25 | 2014-03-13 | Ricoh Co Ltd | 液体吐出ヘッド及び画像形成装置 |
JP2017132244A (ja) * | 2016-01-27 | 2017-08-03 | 株式会社リコー | ノズル板、液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置、ノズル板の製造方法 |
US20170210129A1 (en) * | 2016-01-27 | 2017-07-27 | Tomohiro Tamai | Nozzle plate, liquid discharge head, liquid discharge device, liquid discharge apparatus, and method of making nozzle plate |
US10654270B2 (en) | 2016-07-12 | 2020-05-19 | Hewlett-Packard Development Company, L.P. | Printhead comprising a thin film passivation layer |
WO2019012828A1 (ja) * | 2017-07-10 | 2019-01-17 | コニカミノルタ株式会社 | インクジェットヘッド、インクジェット記録装置及びインクジェットヘッドの製造方法 |
JP7059604B2 (ja) * | 2017-12-07 | 2022-04-26 | 株式会社リコー | 液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置 |
WO2019215851A1 (ja) * | 2018-05-09 | 2019-11-14 | コニカミノルタ株式会社 | インクジェットヘッド及び画像形成方法 |
JP7127409B2 (ja) * | 2018-07-31 | 2022-08-30 | 株式会社リコー | 液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置及び液体吐出ヘッドの製造方法 |
WO2020222768A1 (en) | 2019-04-29 | 2020-11-05 | Hewlett-Packard Development Company, L.P. | Conductive elements electrically coupled to fluidic dies |
CN116056901A (zh) * | 2020-09-10 | 2023-05-02 | 柯尼卡美能达株式会社 | 喷墨头以及喷墨头的制造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59128281A (ja) * | 1982-12-29 | 1984-07-24 | 信越化学工業株式会社 | 炭化けい素被覆物の製造方法 |
JPS59176054A (ja) * | 1983-03-25 | 1984-10-05 | Matsushita Electric Ind Co Ltd | インクジェット記録装置 |
US4623906A (en) * | 1985-10-31 | 1986-11-18 | International Business Machines Corporation | Stable surface coating for ink jet nozzles |
US5800878A (en) | 1996-10-24 | 1998-09-01 | Applied Materials, Inc. | Reducing hydrogen concentration in pecvd amorphous silicon carbide films |
US6290337B1 (en) | 1996-10-31 | 2001-09-18 | Hewlett-Packard Company | Print head for ink-jet printing and a method for making print heads |
US6155674A (en) * | 1997-03-04 | 2000-12-05 | Hewlett-Packard Company | Structure to effect adhesion between substrate and ink barrier in ink jet printhead |
US6155675A (en) | 1997-08-28 | 2000-12-05 | Hewlett-Packard Company | Printhead structure and method for producing the same |
US6126277A (en) | 1998-04-29 | 2000-10-03 | Hewlett-Packard Company | Non-kogating, low turn on energy thin film structure for very low drop volume thermal ink jet pens |
US6821571B2 (en) * | 1999-06-18 | 2004-11-23 | Applied Materials Inc. | Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers |
US6561624B1 (en) * | 1999-11-17 | 2003-05-13 | Konica Corporation | Method of processing nozzle plate, nozzle plate, ink jet head and image forming apparatus |
US6440878B1 (en) | 2000-04-03 | 2002-08-27 | Sharp Laboratories Of America, Inc. | Method to enhance the adhesion of silicon nitride to low-k fluorinated amorphous carbon using a silicon carbide adhesion promoter layer |
TW550177B (en) * | 2000-05-19 | 2003-09-01 | Hewlett Packard Co | Alloy and orifice plate for an ink-jet pen using the same |
KR100552660B1 (ko) * | 2001-08-09 | 2006-02-20 | 삼성전자주식회사 | 버블 젯 방식의 잉크 젯 프린트 헤드 |
US6610165B2 (en) | 2001-09-17 | 2003-08-26 | Illinois Tool Works Inc. | Method for coating an orifice plate |
US6797628B2 (en) | 2002-01-16 | 2004-09-28 | Micron Technology, Inc. | Methods of forming integrated circuitry, semiconductor processing methods, and processing method of forming MRAM circuitry |
US6905909B2 (en) | 2003-10-22 | 2005-06-14 | Lsi Logic Corporation | Ultra low dielectric constant thin film |
-
2005
- 2005-12-23 AT AT05824322T patent/ATE433870T1/de not_active IP Right Cessation
- 2005-12-23 EP EP05824322A patent/EP1973741B1/de active Active
- 2005-12-23 DE DE602005015040T patent/DE602005015040D1/de active Active
- 2005-12-23 WO PCT/EP2005/013999 patent/WO2007073755A1/en active Application Filing
- 2005-12-23 US US12/158,939 patent/US8112889B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20080313901A1 (en) | 2008-12-25 |
DE602005015040D1 (de) | 2009-07-30 |
US8112889B2 (en) | 2012-02-14 |
EP1973741A1 (de) | 2008-10-01 |
WO2007073755A1 (en) | 2007-07-05 |
EP1973741B1 (de) | 2009-06-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |