ATE35480T1 - Halbleitervorrichtung zur erzeugung eines elektronenstrahles. - Google Patents
Halbleitervorrichtung zur erzeugung eines elektronenstrahles.Info
- Publication number
- ATE35480T1 ATE35480T1 AT85200083T AT85200083T ATE35480T1 AT E35480 T1 ATE35480 T1 AT E35480T1 AT 85200083 T AT85200083 T AT 85200083T AT 85200083 T AT85200083 T AT 85200083T AT E35480 T1 ATE35480 T1 AT E35480T1
- Authority
- AT
- Austria
- Prior art keywords
- work function
- electron
- tip
- cathodes
- generation
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/308—Semiconductor cathodes, e.g. cathodes with PN junction layers
Landscapes
- Cold Cathode And The Manufacture (AREA)
- Recrystallisation Techniques (AREA)
- Lasers (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Electron Sources, Ion Sources (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8400297A NL8400297A (nl) | 1984-02-01 | 1984-02-01 | Halfgeleiderinrichting voor het opwekken van een elektronenbundel. |
EP85200083A EP0150885B1 (de) | 1984-02-01 | 1985-01-28 | Halbleitervorrichtung zur Erzeugung eines Elektronenstrahles |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE35480T1 true ATE35480T1 (de) | 1988-07-15 |
Family
ID=19843411
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT85200083T ATE35480T1 (de) | 1984-02-01 | 1985-01-28 | Halbleitervorrichtung zur erzeugung eines elektronenstrahles. |
Country Status (9)
Country | Link |
---|---|
US (1) | US4766340A (de) |
EP (1) | EP0150885B1 (de) |
JP (1) | JPS60180040A (de) |
AT (1) | ATE35480T1 (de) |
CA (1) | CA1234411A (de) |
DE (2) | DE3563577D1 (de) |
HK (1) | HK84091A (de) |
NL (1) | NL8400297A (de) |
SG (1) | SG51890G (de) |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1272504A (en) * | 1986-11-18 | 1990-08-07 | Franz Prein | Surface for electric discharge |
DE3642749A1 (de) * | 1986-12-15 | 1988-06-23 | Eltro Gmbh | Oberflaechen fuer elektrische entladungen |
US5201681A (en) * | 1987-02-06 | 1993-04-13 | Canon Kabushiki Kaisha | Method of emitting electrons |
US5176557A (en) * | 1987-02-06 | 1993-01-05 | Canon Kabushiki Kaisha | Electron emission element and method of manufacturing the same |
JP2612571B2 (ja) * | 1987-03-27 | 1997-05-21 | キヤノン株式会社 | 電子放出素子 |
DE3855482T2 (de) * | 1987-02-06 | 1997-03-20 | Canon Kk | Elektronen emittierendes Element und dessen Herstellungsverfahren |
JP2788243B2 (ja) * | 1988-02-27 | 1998-08-20 | キヤノン株式会社 | 半導体電子放出素子及び半導体電子放出装置 |
EP0416558B1 (de) * | 1989-09-04 | 1996-07-31 | Canon Kabushiki Kaisha | Elektronen emittierendes Element und Verfahren zur Herstellung desselben |
EP0416626B1 (de) * | 1989-09-07 | 1994-06-01 | Canon Kabushiki Kaisha | Elektronenemittierende Halbleitervorrichtung |
US5814832A (en) * | 1989-09-07 | 1998-09-29 | Canon Kabushiki Kaisha | Electron emitting semiconductor device |
US5204581A (en) * | 1990-07-12 | 1993-04-20 | Bell Communications Research, Inc. | Device including a tapered microminiature silicon structure |
US5201992A (en) * | 1990-07-12 | 1993-04-13 | Bell Communications Research, Inc. | Method for making tapered microminiature silicon structures |
US5083958A (en) * | 1990-07-16 | 1992-01-28 | Hughes Aircraft Company | Field emitter structure and fabrication process providing passageways for venting of outgassed materials from active electronic area |
US5063323A (en) * | 1990-07-16 | 1991-11-05 | Hughes Aircraft Company | Field emitter structure providing passageways for venting of outgassed materials from active electronic area |
DE69027611T2 (de) * | 1990-07-18 | 1997-01-23 | Ibm | Herstellungsverfahren und struktur einer integrierten vakuum-mikroelektronischen vorrichtung |
US5203731A (en) * | 1990-07-18 | 1993-04-20 | International Business Machines Corporation | Process and structure of an integrated vacuum microelectronic device |
US5089292A (en) * | 1990-07-20 | 1992-02-18 | Coloray Display Corporation | Field emission cathode array coated with electron work function reducing material, and method |
US5163328A (en) * | 1990-08-06 | 1992-11-17 | Colin Electronics Co., Ltd. | Miniature pressure sensor and pressure sensor arrays |
US5012482A (en) * | 1990-09-12 | 1991-04-30 | The United States Of America As Represented By The Secretary Of The Navy | Gas laser and pumping method therefor using a field emitter array |
US5150019A (en) * | 1990-10-01 | 1992-09-22 | National Semiconductor Corp. | Integrated circuit electronic grid device and method |
DE4041276C1 (de) * | 1990-12-21 | 1992-02-27 | Siemens Ag, 8000 Muenchen, De | |
DE69211581T2 (de) * | 1991-03-13 | 1997-02-06 | Sony Corp | Anordnung von Feldemissionskathoden |
US5468169A (en) * | 1991-07-18 | 1995-11-21 | Motorola | Field emission device employing a sequential emitter electrode formation method |
JP2635879B2 (ja) * | 1992-02-07 | 1997-07-30 | 株式会社東芝 | 電子放出素子及びこれを用いた平面ディスプレイ装置 |
US5696028A (en) * | 1992-02-14 | 1997-12-09 | Micron Technology, Inc. | Method to form an insulative barrier useful in field emission displays for reducing surface leakage |
US5753130A (en) * | 1992-05-15 | 1998-05-19 | Micron Technology, Inc. | Method for forming a substantially uniform array of sharp tips |
US5391259A (en) * | 1992-05-15 | 1995-02-21 | Micron Technology, Inc. | Method for forming a substantially uniform array of sharp tips |
US5302238A (en) * | 1992-05-15 | 1994-04-12 | Micron Technology, Inc. | Plasma dry etch to produce atomically sharp asperities useful as cold cathodes |
US5584740A (en) * | 1993-03-31 | 1996-12-17 | The United States Of America As Represented By The Secretary Of The Navy | Thin-film edge field emitter device and method of manufacture therefor |
EP0619495B1 (de) * | 1993-04-05 | 1997-05-21 | Siemens Aktiengesellschaft | Verfahren zur Herstellung von Tunneleffekt-Sensoren |
JPH07111868B2 (ja) * | 1993-04-13 | 1995-11-29 | 日本電気株式会社 | 電界放出冷陰極素子 |
US5536988A (en) * | 1993-06-01 | 1996-07-16 | Cornell Research Foundation, Inc. | Compound stage MEM actuator suspended for multidimensional motion |
US5532177A (en) | 1993-07-07 | 1996-07-02 | Micron Display Technology | Method for forming electron emitters |
KR0176423B1 (ko) * | 1993-07-26 | 1999-05-15 | 박경팔 | 전계 방출 어레이 및 그의 제조 방법 |
US5394006A (en) * | 1994-01-04 | 1995-02-28 | Industrial Technology Research Institute | Narrow gate opening manufacturing of gated fluid emitters |
US5844251A (en) * | 1994-01-05 | 1998-12-01 | Cornell Research Foundation, Inc. | High aspect ratio probes with self-aligned control electrodes |
JPH07254354A (ja) * | 1994-01-28 | 1995-10-03 | Toshiba Corp | 電界電子放出素子、電界電子放出素子の製造方法およびこの電界電子放出素子を用いた平面ディスプレイ装置 |
EP0675519A1 (de) * | 1994-03-30 | 1995-10-04 | AT&T Corp. | Vorrichtung mit Feldeffekt-Emittern |
US5572042A (en) * | 1994-04-11 | 1996-11-05 | National Semiconductor Corporation | Integrated circuit vertical electronic grid device and method |
US5550426A (en) * | 1994-06-30 | 1996-08-27 | Motorola | Field emission device |
EP0706196B1 (de) * | 1994-10-05 | 2000-03-01 | Matsushita Electric Industrial Co., Ltd. | Elektronenemissionskathode; eine Elektronenemissionsvorrichtung, eine flache Anzeigevorrichtung, eine damit versehene thermoelektrische Kühlvorrichtung, und ein Verfahren zur Herstellung dieser Elektronenemissionskathode |
US5773920A (en) * | 1995-07-03 | 1998-06-30 | The United States Of America As Represented By The Secretary Of The Navy | Graded electron affinity semiconductor field emitter |
US5864200A (en) * | 1996-01-18 | 1999-01-26 | Micron Display Technology, Inc. | Method for formation of a self-aligned emission grid for field emission devices and device using same |
US5695658A (en) * | 1996-03-07 | 1997-12-09 | Micron Display Technology, Inc. | Non-photolithographic etch mask for submicron features |
US6022256A (en) * | 1996-11-06 | 2000-02-08 | Micron Display Technology, Inc. | Field emission display and method of making same |
US6130106A (en) | 1996-11-14 | 2000-10-10 | Micron Technology, Inc. | Method for limiting emission current in field emission devices |
JP3764906B2 (ja) * | 1997-03-11 | 2006-04-12 | 独立行政法人産業技術総合研究所 | 電界放射型カソード |
WO1999065050A1 (en) | 1998-06-11 | 1999-12-16 | Petr Viscor | Planar electron emitter (pee) |
JP2000021287A (ja) * | 1998-06-30 | 2000-01-21 | Sharp Corp | 電界放出型電子源及びその製造方法 |
US6391670B1 (en) | 1999-04-29 | 2002-05-21 | Micron Technology, Inc. | Method of forming a self-aligned field extraction grid |
US6384520B1 (en) * | 1999-11-24 | 2002-05-07 | Sony Corporation | Cathode structure for planar emitter field emission displays |
EP1274111B1 (de) * | 2001-07-06 | 2005-09-07 | ICT, Integrated Circuit Testing GmbH | Elektronenemissionsvorrichtung |
US6800563B2 (en) * | 2001-10-11 | 2004-10-05 | Ovonyx, Inc. | Forming tapered lower electrode phase-change memories |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3339274A (en) * | 1964-03-16 | 1967-09-05 | Hughes Aircraft Co | Top contact for surface protected semiconductor devices |
US3475661A (en) * | 1966-02-09 | 1969-10-28 | Sony Corp | Semiconductor device including polycrystalline areas among monocrystalline areas |
US3581151A (en) * | 1968-09-16 | 1971-05-25 | Bell Telephone Labor Inc | Cold cathode structure comprising semiconductor whisker elements |
NL7007171A (de) * | 1970-05-16 | 1971-11-18 | ||
GB1444544A (en) * | 1972-09-22 | 1976-08-04 | Mullard Ltd | Semiconductor photocathode |
JPS5325632B2 (de) * | 1973-03-22 | 1978-07-27 | ||
US3970887A (en) * | 1974-06-19 | 1976-07-20 | Micro-Bit Corporation | Micro-structure field emission electron source |
JPS5436828B2 (de) * | 1974-08-16 | 1979-11-12 | ||
US3921022A (en) * | 1974-09-03 | 1975-11-18 | Rca Corp | Field emitting device and method of making same |
US4168213A (en) * | 1976-04-29 | 1979-09-18 | U.S. Philips Corporation | Field emission device and method of forming same |
NL184589C (nl) * | 1979-07-13 | 1989-09-01 | Philips Nv | Halfgeleiderinrichting voor het opwekken van een elektronenbundel en werkwijze voor het vervaardigen van een dergelijke halfgeleiderinrichting. |
JPS56160740A (en) * | 1980-05-12 | 1981-12-10 | Sony Corp | Manufacture of thin-film field type cold cathode |
US4307507A (en) * | 1980-09-10 | 1981-12-29 | The United States Of America As Represented By The Secretary Of The Navy | Method of manufacturing a field-emission cathode structure |
US4410832A (en) * | 1980-12-15 | 1983-10-18 | The United States Of America As Represented By The Secretary Of The Army | EBS Device with cold-cathode |
NL8104893A (nl) * | 1981-10-29 | 1983-05-16 | Philips Nv | Kathodestraalbuis en halfgeleiderinrichting voor toepassing in een dergelijke kathodestraalbuis. |
US4578614A (en) * | 1982-07-23 | 1986-03-25 | The United States Of America As Represented By The Secretary Of The Navy | Ultra-fast field emitter array vacuum integrated circuit switching device |
US4513308A (en) * | 1982-09-23 | 1985-04-23 | The United States Of America As Represented By The Secretary Of The Navy | p-n Junction controlled field emitter array cathode |
-
1984
- 1984-02-01 NL NL8400297A patent/NL8400297A/nl not_active Application Discontinuation
-
1985
- 1985-01-28 AT AT85200083T patent/ATE35480T1/de active
- 1985-01-28 EP EP85200083A patent/EP0150885B1/de not_active Expired
- 1985-01-28 DE DE8585200083T patent/DE3563577D1/de not_active Expired
- 1985-01-30 DE DE8502305U patent/DE8502305U1/de not_active Expired
- 1985-02-01 JP JP60018483A patent/JPS60180040A/ja active Pending
- 1985-02-01 CA CA000473433A patent/CA1234411A/en not_active Expired
-
1987
- 1987-03-02 US US07/021,564 patent/US4766340A/en not_active Expired - Fee Related
-
1990
- 1990-07-04 SG SG518/90A patent/SG51890G/en unknown
-
1991
- 1991-10-24 HK HK840/91A patent/HK84091A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
SG51890G (en) | 1990-08-31 |
DE3563577D1 (en) | 1988-08-04 |
HK84091A (en) | 1991-11-01 |
EP0150885B1 (de) | 1988-06-29 |
DE8502305U1 (de) | 1985-09-19 |
JPS60180040A (ja) | 1985-09-13 |
CA1234411A (en) | 1988-03-22 |
EP0150885A3 (en) | 1985-08-28 |
EP0150885A2 (de) | 1985-08-07 |
US4766340A (en) | 1988-08-23 |
NL8400297A (nl) | 1985-09-02 |
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