ATE35053T1 - Vorrichtung und verfahren zum messen von verschiebungen. - Google Patents

Vorrichtung und verfahren zum messen von verschiebungen.

Info

Publication number
ATE35053T1
ATE35053T1 AT85301077T AT85301077T ATE35053T1 AT E35053 T1 ATE35053 T1 AT E35053T1 AT 85301077 T AT85301077 T AT 85301077T AT 85301077 T AT85301077 T AT 85301077T AT E35053 T1 ATE35053 T1 AT E35053T1
Authority
AT
Austria
Prior art keywords
photodetectors
grating
measuring apparatus
displacement measuring
scale grating
Prior art date
Application number
AT85301077T
Other languages
English (en)
Inventor
Robert Martin Pettigrew
Original Assignee
Heidenhain Gmbh Dr Johannes
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heidenhain Gmbh Dr Johannes filed Critical Heidenhain Gmbh Dr Johannes
Application granted granted Critical
Publication of ATE35053T1 publication Critical patent/ATE35053T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
AT85301077T 1984-05-31 1985-02-19 Vorrichtung und verfahren zum messen von verschiebungen. ATE35053T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB848413955A GB8413955D0 (en) 1984-05-31 1984-05-31 Displacement measuring apparatus
EP85301077A EP0163362B1 (de) 1984-05-31 1985-02-19 Vorrichtung und Verfahren zum Messen von Verschiebungen

Publications (1)

Publication Number Publication Date
ATE35053T1 true ATE35053T1 (de) 1988-06-15

Family

ID=10561773

Family Applications (1)

Application Number Title Priority Date Filing Date
AT85301077T ATE35053T1 (de) 1984-05-31 1985-02-19 Vorrichtung und verfahren zum messen von verschiebungen.

Country Status (8)

Country Link
US (1) US4776701A (de)
EP (1) EP0163362B1 (de)
JP (1) JPH0697171B2 (de)
AT (1) ATE35053T1 (de)
DE (1) DE3563266D1 (de)
ES (1) ES8703018A1 (de)
GB (1) GB8413955D0 (de)
SU (1) SU1560068A3 (de)

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US9866924B2 (en) 2013-03-14 2018-01-09 Immersion Corporation Systems and methods for enhanced television interaction
JP6386337B2 (ja) 2014-10-23 2018-09-05 株式会社ミツトヨ 光学式エンコーダ
CN104567696B (zh) * 2015-01-09 2017-06-13 哈尔滨工业大学 一种基于衍射光栅的二维位移测量装置
CN104596424B (zh) * 2015-01-09 2017-04-05 哈尔滨工业大学 一种使用双频激光和衍射光栅的二维位移测量装置
DE102015204165A1 (de) 2015-03-09 2016-09-15 Dr. Johannes Heidenhain Gmbh Optische Winkelmesseinrichtung
DE102018212719A1 (de) 2018-07-31 2020-02-20 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung
EP3886677B1 (de) 2018-11-29 2024-02-28 Leica Microsystems Inc. Kompakte beugungsbegrenzte nahinfrarot (nir)-spektrometer
US12117333B2 (en) * 2019-03-26 2024-10-15 Nec Corporation Displacement measurement apparatus for structure
CN110285761B (zh) * 2019-07-03 2021-02-23 哈尔滨工业大学 一种结构紧凑的光栅三维位移测量装置
GB201916641D0 (en) 2019-11-15 2020-01-01 Renishaw Plc Position measurement device
GB201916662D0 (en) 2019-11-15 2020-01-01 Renishaw Plc Encoder apparatus
EP4390325A1 (de) 2022-12-20 2024-06-26 Renishaw PLC Kodiergerät
EP4390327A1 (de) 2022-12-20 2024-06-26 Renishaw PLC Kodiergerät
CN120641722A (zh) 2022-12-20 2025-09-12 瑞尼斯豪公司 编码器设备
EP4390326A1 (de) 2022-12-20 2024-06-26 Renishaw PLC Kodiergerät

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Also Published As

Publication number Publication date
ES543537A0 (es) 1987-01-16
DE3563266D1 (en) 1988-07-14
JPH0697171B2 (ja) 1994-11-30
GB8413955D0 (en) 1984-07-04
ES8703018A1 (es) 1987-01-16
SU1560068A3 (ru) 1990-04-23
EP0163362B1 (de) 1988-06-08
EP0163362A1 (de) 1985-12-04
JPS60260813A (ja) 1985-12-24
US4776701A (en) 1988-10-11

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