ATE310241T1 - Verfahren zur konzentrationsmessung von verunreinigungen in helium durch ionenmobilitäts- spektrometrie - Google Patents

Verfahren zur konzentrationsmessung von verunreinigungen in helium durch ionenmobilitäts- spektrometrie

Info

Publication number
ATE310241T1
ATE310241T1 AT02711200T AT02711200T ATE310241T1 AT E310241 T1 ATE310241 T1 AT E310241T1 AT 02711200 T AT02711200 T AT 02711200T AT 02711200 T AT02711200 T AT 02711200T AT E310241 T1 ATE310241 T1 AT E310241T1
Authority
AT
Austria
Prior art keywords
helium
impurities
concentration
ion mobility
mobility spectrometry
Prior art date
Application number
AT02711200T
Other languages
English (en)
Inventor
Luca Pusterla
Marco Succi
Antonio Bonucci
Robert Stimac
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa filed Critical Getters Spa
Application granted granted Critical
Publication of ATE310241T1 publication Critical patent/ATE310241T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/622—Ion mobility spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/64—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Electrochemistry (AREA)
  • Immunology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Toxicology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
AT02711200T 2001-01-08 2002-01-08 Verfahren zur konzentrationsmessung von verunreinigungen in helium durch ionenmobilitäts- spektrometrie ATE310241T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT2001MI000018A ITMI20010018A1 (it) 2001-01-08 2001-01-08 Metodo per la misura della concentrazione di impurezze in elio mediante spettroscopia di mobilita' ionica
PCT/IT2002/000004 WO2002054058A1 (en) 2001-01-08 2002-01-08 A method for measuring the concentration of impurities in helium by ion mobility spectrometry

Publications (1)

Publication Number Publication Date
ATE310241T1 true ATE310241T1 (de) 2005-12-15

Family

ID=11446399

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02711200T ATE310241T1 (de) 2001-01-08 2002-01-08 Verfahren zur konzentrationsmessung von verunreinigungen in helium durch ionenmobilitäts- spektrometrie

Country Status (12)

Country Link
US (1) US20040053420A1 (de)
EP (1) EP1350093B1 (de)
JP (1) JP3964787B2 (de)
KR (1) KR100809148B1 (de)
CN (1) CN1261758C (de)
AT (1) ATE310241T1 (de)
CA (1) CA2432026A1 (de)
DE (1) DE60207377T2 (de)
IL (2) IL156379A0 (de)
IT (1) ITMI20010018A1 (de)
MY (1) MY139604A (de)
WO (1) WO2002054058A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6734061B2 (ja) * 2016-01-29 2020-08-05 アジレント・テクノロジーズ・インクＡｇｉｌｅｎｔ Ｔｅｃｈｎｏｌｏｇｉｅｓ， Ｉｎｃ． プラズマ分光分析装置
CN115598266A (zh) * 2022-12-12 2023-01-13 山东非金属材料研究所（Cn） 一种惰性气体分析方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2640518B2 (ja) * 1987-11-04 1997-08-13 サエス・ゲッテルス・ソシエタ・ペル・アチオニ 水素ガスを精製する方法と装置
IT1227219B (it) * 1988-09-26 1991-03-27 Getters Spa Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno
US4942019A (en) * 1988-09-28 1990-07-17 Ergenics, Inc. Gas purifier
DE4005695A1 (de) * 1990-02-20 1991-08-29 Hydrid Wasserstofftech Chemiesorptionsfaehige metallegierung und verfahren zur gasreinigung
JP2980425B2 (ja) * 1990-09-14 1999-11-22 日本パイオニクス株式会社 希ガスの精製方法
US5541519A (en) * 1991-02-28 1996-07-30 Stearns; Stanley D. Photoionization detector incorporating a dopant and carrier gas flow
IT1270875B (it) * 1993-04-29 1997-05-13 Getters Spa Procedimento di purificazione dell'idrogeno e purificatore relativo
US5238469A (en) * 1992-04-02 1993-08-24 Saes Pure Gas, Inc. Method and apparatus for removing residual hydrogen from a purified gas
RU2123971C1 (ru) * 1993-04-29 1998-12-27 Саес Геттерс С.П.А. Способ удаления газообразных примесей из потока водорода и устройство для его осуществления
US5457316A (en) * 1994-12-23 1995-10-10 Pcp, Inc. Method and apparatus for the detection and identification of trace gases
IT1277458B1 (it) * 1995-08-07 1997-11-10 Getters Spa Processo per la rimozione di ossigeno da ammoniaca a temperatura ambiente
US5955886A (en) * 1997-07-10 1999-09-21 Pcp, Inc. Microliter-sized ionization device and method
US6068685A (en) * 1997-10-15 2000-05-30 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device
JP4400973B2 (ja) * 1999-01-25 2010-01-20 大陽日酸株式会社 ガス中の微量不純物の分析方法及び装置
US6239428B1 (en) * 1999-03-03 2001-05-29 Massachusetts Institute Of Technology Ion mobility spectrometers and methods
US6639214B1 (en) 2000-05-09 2003-10-28 Air Products And Chemicals, Inc. Method of improving the performance of an ion mobility spectrometer used to detect trace atmospheric impurities in gases

Also Published As

Publication number Publication date
ITMI20010018A1 (it) 2002-07-08
KR20030072590A (ko) 2003-09-15
JP2004517320A (ja) 2004-06-10
KR100809148B1 (ko) 2008-02-29
DE60207377D1 (de) 2005-12-22
CA2432026A1 (en) 2002-07-11
JP3964787B2 (ja) 2007-08-22
MY139604A (en) 2009-10-30
DE60207377T2 (de) 2006-07-27
EP1350093A1 (de) 2003-10-08
EP1350093B1 (de) 2005-11-16
US20040053420A1 (en) 2004-03-18
IL156379A0 (en) 2004-01-04
CN1484763A (zh) 2004-03-24
CN1261758C (zh) 2006-06-28
IL156379A (en) 2006-04-10
WO2002054058A1 (en) 2002-07-11

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