ATE268229T1 - Abgedichtete schleuse für eine vakuumkammer - Google Patents

Abgedichtete schleuse für eine vakuumkammer

Info

Publication number
ATE268229T1
ATE268229T1 AT98870258T AT98870258T ATE268229T1 AT E268229 T1 ATE268229 T1 AT E268229T1 AT 98870258 T AT98870258 T AT 98870258T AT 98870258 T AT98870258 T AT 98870258T AT E268229 T1 ATE268229 T1 AT E268229T1
Authority
AT
Austria
Prior art keywords
rollers
strip
vacuum chamber
regulating
sealed lock
Prior art date
Application number
AT98870258T
Other languages
English (en)
Inventor
Brande Pierre Vanden
Alain Weymeersch
Original Assignee
Cockerill Rech & Dev
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8237125&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE268229(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Cockerill Rech & Dev filed Critical Cockerill Rech & Dev
Application granted granted Critical
Publication of ATE268229T1 publication Critical patent/ATE268229T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0073—Seals
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
    • C21D9/54—Furnaces for treating strips or wire
    • C21D9/56—Continuous furnaces for strip or wire
    • C21D9/562—Details
    • C21D9/565—Sealing arrangements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B45/00—Devices for surface or other treatment of work, specially combined with or arranged in, or specially adapted for use in connection with, metal-rolling mills
    • B21B45/004—Heating the product
    • B21B2045/006—Heating the product in vacuum or in inert atmosphere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B9/00—Measures for carrying out rolling operations under special conditions, e.g. in vacuum or inert atmosphere to prevent oxidation of work; Special measures for removing fumes from rolling mills
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/04—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
    • F27B9/042—Vacuum furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/28—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity for treating continuous lengths of work
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0073—Seals
    • F27D2099/0078—Means to minimize the leakage of the furnace atmosphere during charging or discharging
    • F27D2099/008—Using an air-lock

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
  • Discharge Heating (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Mechanical Pencils And Projecting And Retracting Systems Therefor, And Multi-System Writing Instruments (AREA)
  • Eye Examination Apparatus (AREA)
  • Sowing (AREA)
  • Sealing Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • Heat Treatment Of Strip Materials And Filament Materials (AREA)
AT98870258T 1998-11-26 1998-11-26 Abgedichtete schleuse für eine vakuumkammer ATE268229T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP98870258A EP1004369B2 (de) 1998-11-26 1998-11-26 Abgedichtete Schleuse für eine Vakuumkammer

Publications (1)

Publication Number Publication Date
ATE268229T1 true ATE268229T1 (de) 2004-06-15

Family

ID=8237125

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98870258T ATE268229T1 (de) 1998-11-26 1998-11-26 Abgedichtete schleuse für eine vakuumkammer

Country Status (8)

Country Link
US (1) US6334751B1 (de)
EP (1) EP1004369B2 (de)
JP (1) JP4319307B2 (de)
AT (1) ATE268229T1 (de)
DE (1) DE69824295T3 (de)
DK (1) DK1004369T4 (de)
ES (1) ES2222567T5 (de)
PT (1) PT1004369E (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7269982B2 (en) * 2000-11-14 2007-09-18 Invista North America S.Ar.L Steam seal for textile production
US6878207B2 (en) * 2003-02-19 2005-04-12 Energy Conversion Devices, Inc. Gas gate for isolating regions of differing gaseous pressure
EP1479789A1 (de) * 2003-05-23 2004-11-24 Recherche Et Developpement Du Groupe Cockerill Sambre Abgedichtete Schleuse für eine in-line Vakuumbeschichtungsanlage
KR101014776B1 (ko) * 2005-12-05 2011-02-14 가부시키가이샤 알박 진공장치용 구분 밸브
DE102006025751B4 (de) * 2006-05-31 2010-12-23 Von Ardenne Anlagentechnik Gmbh Verfahren zur Abdichtung einer Vakuumkammer und Schleuseneinrichtung für eine Vakuumkammer
DE602007002782D1 (de) * 2007-02-28 2009-11-26 Applied Materials Inc Zugangsversperrsystem, Netzverarbeitungsanlage und Anwendungsverfahren dafür
DE102009052873B4 (de) 2009-11-13 2017-08-17 THEVA DüNNSCHICHTTECHNIK GMBH Vorrichtung zum kontinuierlichen bewegten Einschleusen eines Bandsubstrats ins Hochvakuum
US20120178037A1 (en) * 2011-01-07 2012-07-12 Tangteck Equipment Inc. Roller sealing device and gas-sealing method thereof
SE536952C2 (sv) * 2012-06-25 2014-11-11 Impact Coatings Ab Kontinuerlig rulle-till-rulle-anordning
DE102018215101A1 (de) 2018-05-28 2019-11-28 Sms Group Gmbh Vakuumbeschichtungsanlage, und Verfahren zum Beschichten eines bandförmigen Materials
DE102018215102A1 (de) 2018-05-28 2019-11-28 Sms Group Gmbh Vakuumbeschichtungsanlage, und Verfahren zum Beschichten eines bandförmigen Materials
DE102018215100A1 (de) 2018-05-28 2019-11-28 Sms Group Gmbh Vakuumbeschichtungsanlage, und Verfahren zum Beschichten eines bandförmigen Materials
CN111593315B (zh) * 2020-03-30 2025-01-21 扬州中欣高分子材料有限公司 一种医用高分子材料制备用可抽真空装置
WO2024052712A1 (en) * 2022-09-05 2024-03-14 Arcelormittal Sealing airlock for deposition chamber
DE102024208547A1 (de) 2024-09-09 2026-03-12 Sms Group Gmbh Ein- und Ausschleusen eines Metallbands in eine und aus einer Behandlungskammer

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2972330A (en) * 1956-02-15 1961-02-21 Nat Steel Corp Vacuum seal for coating apparatus
US3158507A (en) * 1960-01-11 1964-11-24 Continental Can Co Floating roller seal
GB1126700A (en) * 1965-01-08 1968-09-11 United States Steel Corp Roll seal for vacuum strip-treating chamber
US3367667A (en) * 1965-07-16 1968-02-06 United States Steel Corp Roll seal for vacuum strip-treating chamber
BE792701A (de) * 1971-12-14 1973-03-30 Arbed
KR910005158B1 (ko) † 1987-06-05 1991-07-23 가부시기가이샤 히다찌세이사꾸쇼 진공연속 처리장치
KR920003591B1 (ko) † 1988-04-11 1992-05-04 미쯔비시주우고오교오 가부시기가이샤 연속진공증착장치
JP2691007B2 (ja) † 1989-03-20 1997-12-17 株式会社日立製作所 真空連続処理装置
DD289297B5 (de) † 1989-11-28 1993-12-16 Ardenne Anlagentech Gmbh Bandschleuse fuer vakuumbeschichtungsanlagen
US5314539A (en) † 1990-05-10 1994-05-24 Eastman Kodak Company Apparatus for plasma treatment of continuous material
GB9323034D0 (en) * 1993-11-09 1994-01-05 Gen Vacuum Equip Ltd Vacuum web coating
JP3315238B2 (ja) † 1994-02-10 2002-08-19 富士写真フイルム株式会社 感光材料用支持体の真空処理用シール方法及び装置

Also Published As

Publication number Publication date
EP1004369B1 (de) 2004-06-02
US6334751B1 (en) 2002-01-01
DK1004369T4 (da) 2009-03-09
DK1004369T3 (da) 2004-09-27
JP2000225331A (ja) 2000-08-15
JP4319307B2 (ja) 2009-08-26
DE69824295D1 (de) 2004-07-08
ES2222567T5 (es) 2009-04-16
DE69824295T2 (de) 2004-11-18
DE69824295T3 (de) 2009-07-30
ES2222567T3 (es) 2005-02-01
PT1004369E (pt) 2004-10-29
EP1004369A1 (de) 2000-05-31
EP1004369B2 (de) 2008-11-12

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