JPS6319566U - - Google Patents
Info
- Publication number
- JPS6319566U JPS6319566U JP10985486U JP10985486U JPS6319566U JP S6319566 U JPS6319566 U JP S6319566U JP 10985486 U JP10985486 U JP 10985486U JP 10985486 U JP10985486 U JP 10985486U JP S6319566 U JPS6319566 U JP S6319566U
- Authority
- JP
- Japan
- Prior art keywords
- strip
- chamber
- belt
- hung
- vacuum processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Heat Treatment Of Strip Materials And Filament Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10985486U JPS6319566U (de) | 1986-07-17 | 1986-07-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10985486U JPS6319566U (de) | 1986-07-17 | 1986-07-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6319566U true JPS6319566U (de) | 1988-02-09 |
Family
ID=30988338
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10985486U Pending JPS6319566U (de) | 1986-07-17 | 1986-07-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6319566U (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07166245A (ja) * | 1993-12-10 | 1995-06-27 | Chugai Ro Co Ltd | 連続熱処理炉の開口部シール装置 |
-
1986
- 1986-07-17 JP JP10985486U patent/JPS6319566U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07166245A (ja) * | 1993-12-10 | 1995-06-27 | Chugai Ro Co Ltd | 連続熱処理炉の開口部シール装置 |
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