ATE262262T1 - Elektrostatischer elektroakustischer wandler - Google Patents
Elektrostatischer elektroakustischer wandlerInfo
- Publication number
- ATE262262T1 ATE262262T1 AT01982214T AT01982214T ATE262262T1 AT E262262 T1 ATE262262 T1 AT E262262T1 AT 01982214 T AT01982214 T AT 01982214T AT 01982214 T AT01982214 T AT 01982214T AT E262262 T1 ATE262262 T1 AT E262262T1
- Authority
- AT
- Austria
- Prior art keywords
- electroacoustic transducer
- electrode plate
- electrostatic electroacoustic
- recesses
- electrostatic
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/02—Loudspeakers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
- Audible-Bandwidth Dynamoelectric Transducers Other Than Pickups (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00118349 | 2000-08-24 | ||
PCT/EP2001/009766 WO2002017677A2 (en) | 2000-08-24 | 2001-08-23 | Electrostatic electroacoustical transducer |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE262262T1 true ATE262262T1 (de) | 2004-04-15 |
Family
ID=8169629
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT01982214T ATE262262T1 (de) | 2000-08-24 | 2001-08-23 | Elektrostatischer elektroakustischer wandler |
Country Status (6)
Country | Link |
---|---|
US (1) | US6753583B2 (de) |
EP (1) | EP1312241B1 (de) |
AT (1) | ATE262262T1 (de) |
AU (1) | AU2002213857A1 (de) |
DE (1) | DE60102390D1 (de) |
WO (1) | WO2002017677A2 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7795695B2 (en) | 2005-01-27 | 2010-09-14 | Analog Devices, Inc. | Integrated microphone |
US20070071268A1 (en) * | 2005-08-16 | 2007-03-29 | Analog Devices, Inc. | Packaged microphone with electrically coupled lid |
US7825484B2 (en) * | 2005-04-25 | 2010-11-02 | Analog Devices, Inc. | Micromachined microphone and multisensor and method for producing same |
US7449356B2 (en) * | 2005-04-25 | 2008-11-11 | Analog Devices, Inc. | Process of forming a microphone using support member |
US7885423B2 (en) | 2005-04-25 | 2011-02-08 | Analog Devices, Inc. | Support apparatus for microphone diaphragm |
US20070040231A1 (en) * | 2005-08-16 | 2007-02-22 | Harney Kieran P | Partially etched leadframe packages having different top and bottom topologies |
WO2007024909A1 (en) * | 2005-08-23 | 2007-03-01 | Analog Devices, Inc. | Multi-microphone system |
US7961897B2 (en) * | 2005-08-23 | 2011-06-14 | Analog Devices, Inc. | Microphone with irregular diaphragm |
US7923893B2 (en) * | 2005-09-26 | 2011-04-12 | Siemens Medical Solutions Usa, Inc. | 3-1 mode capacitive membrane ultrasound transducer |
WO2007115350A1 (en) * | 2006-04-10 | 2007-10-18 | Immersion Technology Property Limited | An electrostatic loudspeaker |
WO2008003051A2 (en) * | 2006-06-29 | 2008-01-03 | Analog Devices, Inc. | Stress mitigation in packaged microchips |
JP4951067B2 (ja) * | 2006-07-25 | 2012-06-13 | アナログ デバイシス, インコーポレイテッド | 複数のマイクロホンシステム |
TW200847827A (en) * | 2006-11-30 | 2008-12-01 | Analog Devices Inc | Microphone system with silicon microphone secured to package lid |
US7694610B2 (en) * | 2007-06-27 | 2010-04-13 | Siemens Medical Solutions Usa, Inc. | Photo-multiplier tube removal tool |
CN101888583B (zh) * | 2009-05-12 | 2013-03-20 | 志丰电子股份有限公司 | 具有电容性致动器的耳机 |
FR2945890B1 (fr) * | 2009-05-20 | 2011-06-10 | Didson | Dispositif de generation d'ondes acoustiques, et installation incluant plusieurs de ces dispositifs |
US9676614B2 (en) | 2013-02-01 | 2017-06-13 | Analog Devices, Inc. | MEMS device with stress relief structures |
US10167189B2 (en) | 2014-09-30 | 2019-01-01 | Analog Devices, Inc. | Stress isolation platform for MEMS devices |
US10131538B2 (en) | 2015-09-14 | 2018-11-20 | Analog Devices, Inc. | Mechanically isolated MEMS device |
US11496820B2 (en) * | 2016-12-29 | 2022-11-08 | Gmems Tech Shenzhen Limited | MEMS device with quadrilateral trench and insert |
US10524060B2 (en) * | 2016-12-29 | 2019-12-31 | GMEMS Technologies International Limited | MEMS device having novel air flow restrictor |
US11417611B2 (en) | 2020-02-25 | 2022-08-16 | Analog Devices International Unlimited Company | Devices and methods for reducing stress on circuit components |
US11981560B2 (en) | 2020-06-09 | 2024-05-14 | Analog Devices, Inc. | Stress-isolated MEMS device comprising substrate having cavity and method of manufacture |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3827002A (en) * | 1973-05-18 | 1974-07-30 | Us Navy | Tunable electroacoustic transducers |
US4006317A (en) * | 1975-02-14 | 1977-02-01 | Freeman Miller L | Electrostatic transducer and acoustic and electric signal integrator |
US4006917A (en) * | 1975-07-14 | 1977-02-08 | Caterpillar Tractor Co. | Energy absorbing pull hook for construction vehicles |
SG68630A1 (en) * | 1996-10-18 | 1999-11-16 | Eg & G Int | Isolation process for surface micromachined sensors and actuators |
DE19800574B4 (de) * | 1998-01-09 | 2013-11-14 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
US6249586B1 (en) * | 1998-01-21 | 2001-06-19 | Fachhochschule Furtwangen | Slot microphone |
US6175636B1 (en) * | 1998-06-26 | 2001-01-16 | American Technology Corporation | Electrostatic speaker with moveable diaphragm edges |
ATE409398T1 (de) * | 1998-07-08 | 2008-10-15 | Infineon Technologies Ag | Verfahren zur herstellung einer integrierten schaltungsanordnung umfassend einen hohlraum in einer materialschicht, sowie eine durch das verfahren erzeugte integrierte schaltungsanordnung |
-
2001
- 2001-08-23 AT AT01982214T patent/ATE262262T1/de not_active IP Right Cessation
- 2001-08-23 EP EP01982214A patent/EP1312241B1/de not_active Expired - Lifetime
- 2001-08-23 DE DE60102390T patent/DE60102390D1/de not_active Expired - Lifetime
- 2001-08-23 AU AU2002213857A patent/AU2002213857A1/en not_active Abandoned
- 2001-08-23 WO PCT/EP2001/009766 patent/WO2002017677A2/en active IP Right Grant
-
2003
- 2003-02-24 US US10/372,984 patent/US6753583B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO2002017677A2 (en) | 2002-02-28 |
AU2002213857A1 (en) | 2002-03-04 |
EP1312241B1 (de) | 2004-03-17 |
US20030151105A1 (en) | 2003-08-14 |
DE60102390D1 (de) | 2004-04-22 |
US6753583B2 (en) | 2004-06-22 |
WO2002017677A3 (en) | 2002-09-26 |
EP1312241A2 (de) | 2003-05-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |