ATE247836T1 - Herstellung von hohlkehlen in planarem optischen siliziumdioxid-wellenleiter - Google Patents
Herstellung von hohlkehlen in planarem optischen siliziumdioxid-wellenleiterInfo
- Publication number
- ATE247836T1 ATE247836T1 AT00931398T AT00931398T ATE247836T1 AT E247836 T1 ATE247836 T1 AT E247836T1 AT 00931398 T AT00931398 T AT 00931398T AT 00931398 T AT00931398 T AT 00931398T AT E247836 T1 ATE247836 T1 AT E247836T1
- Authority
- AT
- Austria
- Prior art keywords
- core
- glass
- layer
- intended
- fillets
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12145—Switch
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12159—Interferometer
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
- G02F1/0113—Glass-based, e.g. silica-based, optical waveguides
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Optical Integrated Circuits (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP99303961A EP1058135A1 (de) | 1999-05-21 | 1999-05-21 | Planarer optischer Siliziumdioxid Wellenleiter zwischen zwei Nuten |
EP99303963 | 1999-05-21 | ||
EP99303964A EP1054272A1 (de) | 1999-05-21 | 1999-05-21 | Wellenleiter- Array -Gitter mit Nuten |
EP99303962A EP1058136A1 (de) | 1999-05-21 | 1999-05-21 | Planarer optischer Siliziumdioxid-Wellenleiter mit Nuten |
PCT/GB2000/001915 WO2000072060A1 (en) | 1999-05-21 | 2000-05-19 | Making grooves in planar silica optical waveguides |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE247836T1 true ATE247836T1 (de) | 2003-09-15 |
Family
ID=27443843
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00935273T ATE282837T1 (de) | 1999-05-21 | 2000-05-19 | Wellenleiter-array-gitter |
AT00935272T ATE243853T1 (de) | 1999-05-21 | 2000-05-19 | Planare optische wellenleiter mit zwei nuten |
AT00931398T ATE247836T1 (de) | 1999-05-21 | 2000-05-19 | Herstellung von hohlkehlen in planarem optischen siliziumdioxid-wellenleiter |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00935273T ATE282837T1 (de) | 1999-05-21 | 2000-05-19 | Wellenleiter-array-gitter |
AT00935272T ATE243853T1 (de) | 1999-05-21 | 2000-05-19 | Planare optische wellenleiter mit zwei nuten |
Country Status (7)
Country | Link |
---|---|
US (3) | US6625371B1 (de) |
EP (3) | EP1183561B1 (de) |
AT (3) | ATE282837T1 (de) |
AU (4) | AU5084000A (de) |
CA (3) | CA2373546C (de) |
DE (3) | DE60015961T2 (de) |
WO (4) | WO2000072060A1 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6976792B1 (en) * | 2000-09-26 | 2005-12-20 | International Business Machines Corporation | Optical fiber space transformation |
US6580843B2 (en) * | 2001-04-05 | 2003-06-17 | Fujitsu Limited | Optical device |
US6709105B2 (en) | 2001-04-10 | 2004-03-23 | Johnson & Johnson Vision Care, Inc. | Progressive addition lenses |
JP2003075666A (ja) * | 2001-06-22 | 2003-03-12 | Furukawa Electric Co Ltd:The | アレイ導波路回折格子型光合分波器 |
DE20121935U1 (de) | 2001-11-26 | 2003-09-25 | HEGLA Fahrzeug- und Maschinenbau GmbH & Co. KG, 37688 Beverungen | Verbundglasschneidanlage |
JP2004287093A (ja) * | 2003-03-20 | 2004-10-14 | Fujitsu Ltd | 光導波路、光デバイスおよび光導波路の製造方法 |
US7609931B2 (en) * | 2003-04-18 | 2009-10-27 | Enablence, Inc. | Planar waveguide structure with tightly curved waveguides |
US7218812B2 (en) * | 2003-10-27 | 2007-05-15 | Rpo Pty Limited | Planar waveguide with patterned cladding and method for producing the same |
DE102005016435A1 (de) * | 2005-04-05 | 2006-10-12 | Würth Elektronik Rot am See GmbH & Co. KG | Optische Leiterplatte und Verfahren zu ihrer Herstellung |
KR100687742B1 (ko) * | 2005-06-03 | 2007-02-27 | 한국전자통신연구원 | 온도 무관 폴리머 광도파로열격자 소자 및 제조 방법 |
GB0707304D0 (en) * | 2007-04-16 | 2007-05-23 | Univ Southampton | Evanescent field optical waveguide devices |
RU2011145576A (ru) * | 2009-04-10 | 2013-05-20 | Конинклейке Филипс Электроникс Н.В. | Изогнутый световод с криволинейными щелями |
JP5488226B2 (ja) | 2010-06-10 | 2014-05-14 | 富士通オプティカルコンポーネンツ株式会社 | マッハツェンダ型の光変調器 |
JP5180341B2 (ja) * | 2011-04-19 | 2013-04-10 | 日本電信電話株式会社 | 光部品 |
CN102183821A (zh) * | 2011-05-17 | 2011-09-14 | 武汉光迅科技股份有限公司 | 一种阵列波导光栅波分复用器 |
JPWO2016125747A1 (ja) * | 2015-02-04 | 2017-11-09 | 日本碍子株式会社 | 光導波路基板 |
JP2017129744A (ja) * | 2016-01-20 | 2017-07-27 | フォトンリサーチ株式会社 | 光合波装置 |
WO2017135436A1 (ja) * | 2016-02-04 | 2017-08-10 | 古河電気工業株式会社 | 光素子及びその製造方法、並びに光変調器 |
JP7002092B2 (ja) * | 2016-07-13 | 2022-02-04 | 学校法人法政大学 | 屈曲部を有する誘電体光導波路 |
JPWO2019082347A1 (ja) * | 2017-10-26 | 2020-05-28 | フォトンリサーチ株式会社 | 導光装置、光導波装置、及びマルチ波長光源モジュール |
EP3797324A4 (de) * | 2018-05-22 | 2022-03-02 | Fluxus, Inc. | Herstellung von wellenleiterstrukturen |
US11067751B2 (en) * | 2019-10-09 | 2021-07-20 | Globalfoundries U.S. Inc. | Trench-based optical components for photonics chips |
JP7298076B2 (ja) * | 2020-01-24 | 2023-06-27 | 日本電信電話株式会社 | 導波路型光スイッチ回路の駆動方法 |
JP2022123252A (ja) * | 2021-02-12 | 2022-08-24 | 古河電気工業株式会社 | 光半導体装置 |
WO2024079860A1 (ja) * | 2022-10-13 | 2024-04-18 | 日本電信電話株式会社 | 導波路型光スイッチ回路 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS59202407A (ja) * | 1983-05-02 | 1984-11-16 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路の製造方法 |
US4810049A (en) * | 1987-04-02 | 1989-03-07 | American Telephone And Telegraph Company, At&T Bell Laboratories | Reducing bend and coupling losses in integrated optical waveguides |
JPH0718964B2 (ja) | 1987-06-29 | 1995-03-06 | 日本電信電話株式会社 | 集積光デバイスおよびその製造方法 |
FR2633401B1 (fr) * | 1988-06-24 | 1990-10-05 | Labo Electronique Physique | Dispositif semiconducteur comprenant un guide de lumiere integre qui presente au moins une partie rectiligne et une partie courbe |
JPH0313906A (ja) * | 1989-06-12 | 1991-01-22 | Nippon Telegr & Teleph Corp <Ntt> | 光集積回路 |
US5136671A (en) * | 1991-08-21 | 1992-08-04 | At&T Bell Laboratories | Optical switch, multiplexer, and demultiplexer |
JPH05107568A (ja) * | 1991-10-14 | 1993-04-30 | Nippon Telegr & Teleph Corp <Ntt> | 光スイツチ |
US5243672A (en) * | 1992-08-04 | 1993-09-07 | At&T Bell Laboratories | Planar waveguide having optimized bend |
JPH08505707A (ja) * | 1993-01-08 | 1996-06-18 | マサチユセツツ・インスチチユート・オブ・テクノロジー | 低損失光及び光電子集積回路 |
US5835458A (en) * | 1994-09-09 | 1998-11-10 | Gemfire Corporation | Solid state optical data reader using an electric field for routing control |
JPH0886990A (ja) * | 1994-09-14 | 1996-04-02 | Kobe Steel Ltd | 導波路型光制御素子 |
JP3204359B2 (ja) | 1995-04-28 | 2001-09-04 | 日本電信電話株式会社 | フレキシブル高分子光導波路 |
JP3203178B2 (ja) | 1996-02-27 | 2001-08-27 | 日立電線株式会社 | 光導波路、光モジュール及び光システム |
US5949934A (en) * | 1996-04-05 | 1999-09-07 | Fujikura, Ltd. | Optical waveguide grating and production method therefor |
JP3446929B2 (ja) * | 1996-09-18 | 2003-09-16 | 日本電信電話株式会社 | 半導体偏波回転素子 |
DE59712346D1 (de) | 1996-09-19 | 2005-07-21 | Infineon Technologies Ag | Optischer Wellenleiter und Verfahren zu seiner Herstellung |
CN101052906A (zh) * | 2000-10-13 | 2007-10-10 | 马萨诸塞州技术研究院 | 带有沟槽结构的光波导 |
-
2000
- 2000-05-19 US US09/959,322 patent/US6625371B1/en not_active Expired - Lifetime
- 2000-05-19 AT AT00935273T patent/ATE282837T1/de not_active IP Right Cessation
- 2000-05-19 WO PCT/GB2000/001915 patent/WO2000072060A1/en active IP Right Grant
- 2000-05-19 US US09/959,329 patent/US6773615B1/en not_active Expired - Lifetime
- 2000-05-19 AU AU50840/00A patent/AU5084000A/en not_active Abandoned
- 2000-05-19 CA CA002373546A patent/CA2373546C/en not_active Expired - Fee Related
- 2000-05-19 WO PCT/GB2000/001916 patent/WO2000072061A1/en active IP Right Grant
- 2000-05-19 DE DE60015961T patent/DE60015961T2/de not_active Expired - Lifetime
- 2000-05-19 AU AU49354/00A patent/AU779758B2/en not_active Ceased
- 2000-05-19 AU AU50830/00A patent/AU776921C/en not_active Ceased
- 2000-05-19 EP EP00931398A patent/EP1183561B1/de not_active Expired - Lifetime
- 2000-05-19 CA CA002372581A patent/CA2372581C/en not_active Expired - Fee Related
- 2000-05-19 US US09/959,334 patent/US6571037B1/en not_active Expired - Lifetime
- 2000-05-19 EP EP00935272A patent/EP1181591B1/de not_active Expired - Lifetime
- 2000-05-19 WO PCT/GB2000/001935 patent/WO2000072062A1/en active Application Filing
- 2000-05-19 WO PCT/GB2000/001919 patent/WO2000072066A1/en active IP Right Grant
- 2000-05-19 EP EP00935273A patent/EP1181592B1/de not_active Expired - Lifetime
- 2000-05-19 AT AT00935272T patent/ATE243853T1/de not_active IP Right Cessation
- 2000-05-19 AT AT00931398T patent/ATE247836T1/de not_active IP Right Cessation
- 2000-05-19 DE DE60004664T patent/DE60004664T2/de not_active Expired - Fee Related
- 2000-05-19 DE DE60003551T patent/DE60003551T2/de not_active Expired - Lifetime
- 2000-05-19 CA CA002372401A patent/CA2372401C/en not_active Expired - Fee Related
- 2000-05-19 AU AU50829/00A patent/AU779759B2/en not_active Ceased
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |