ATE232772T1 - Polierkissen und verfahren zum herstellen von polierkissen mit langgestreckten mikrosäulen - Google Patents

Polierkissen und verfahren zum herstellen von polierkissen mit langgestreckten mikrosäulen

Info

Publication number
ATE232772T1
ATE232772T1 AT97945409T AT97945409T ATE232772T1 AT E232772 T1 ATE232772 T1 AT E232772T1 AT 97945409 T AT97945409 T AT 97945409T AT 97945409 T AT97945409 T AT 97945409T AT E232772 T1 ATE232772 T1 AT E232772T1
Authority
AT
Austria
Prior art keywords
polishing pad
elongated
microcolumns
producing
throughout
Prior art date
Application number
AT97945409T
Other languages
English (en)
Inventor
Trung Tri Doan
Scott G Meikle
Original Assignee
Micron Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micron Technology Inc filed Critical Micron Technology Inc
Application granted granted Critical
Publication of ATE232772T1 publication Critical patent/ATE232772T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S451/00—Abrading
    • Y10S451/921—Pad for lens shaping tool

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
AT97945409T 1996-09-30 1997-09-30 Polierkissen und verfahren zum herstellen von polierkissen mit langgestreckten mikrosäulen ATE232772T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/723,901 US5795218A (en) 1996-09-30 1996-09-30 Polishing pad with elongated microcolumns
PCT/US1997/017679 WO1998014304A1 (en) 1996-09-30 1997-09-30 Polishing pad and method for making polishing pad with elongated microcolumns

Publications (1)

Publication Number Publication Date
ATE232772T1 true ATE232772T1 (de) 2003-03-15

Family

ID=24908176

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97945409T ATE232772T1 (de) 1996-09-30 1997-09-30 Polierkissen und verfahren zum herstellen von polierkissen mit langgestreckten mikrosäulen

Country Status (8)

Country Link
US (2) US5795218A (de)
EP (1) EP1009588B1 (de)
JP (1) JP4147330B2 (de)
KR (1) KR100495199B1 (de)
AT (1) ATE232772T1 (de)
AU (1) AU4661997A (de)
DE (1) DE69719225T2 (de)
WO (1) WO1998014304A1 (de)

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Also Published As

Publication number Publication date
EP1009588B1 (de) 2003-02-19
DE69719225D1 (de) 2003-03-27
KR20000048753A (ko) 2000-07-25
AU4661997A (en) 1998-04-24
WO1998014304A1 (en) 1998-04-09
JP4147330B2 (ja) 2008-09-10
US5795218A (en) 1998-08-18
KR100495199B1 (ko) 2005-06-14
DE69719225T2 (de) 2003-12-04
US5989470A (en) 1999-11-23
EP1009588A1 (de) 2000-06-21
JP2001501544A (ja) 2001-02-06

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