ATE178162T1 - Elektronendetektor zur verwendung in einer gasförmigen umgebung - Google Patents

Elektronendetektor zur verwendung in einer gasförmigen umgebung

Info

Publication number
ATE178162T1
ATE178162T1 AT89912794T AT89912794T ATE178162T1 AT E178162 T1 ATE178162 T1 AT E178162T1 AT 89912794 T AT89912794 T AT 89912794T AT 89912794 T AT89912794 T AT 89912794T AT E178162 T1 ATE178162 T1 AT E178162T1
Authority
AT
Austria
Prior art keywords
electron detector
concentric arc
arc segments
detector
electron
Prior art date
Application number
AT89912794T
Other languages
English (en)
Inventor
Gerasimos D Danilatos
Original Assignee
Philips Electronics Na
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics Na filed Critical Philips Electronics Na
Application granted granted Critical
Publication of ATE178162T1 publication Critical patent/ATE178162T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24475—Scattered electron detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
AT89912794T 1988-10-14 1989-10-13 Elektronendetektor zur verwendung in einer gasförmigen umgebung ATE178162T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/257,754 US4897545A (en) 1987-05-21 1988-10-14 Electron detector for use in a gaseous environment

Publications (1)

Publication Number Publication Date
ATE178162T1 true ATE178162T1 (de) 1999-04-15

Family

ID=22977611

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89912794T ATE178162T1 (de) 1988-10-14 1989-10-13 Elektronendetektor zur verwendung in einer gasförmigen umgebung

Country Status (13)

Country Link
US (1) US4897545A (de)
EP (1) EP0444085B1 (de)
JP (1) JPH0650615B2 (de)
KR (1) KR940009764B1 (de)
CN (1) CN1018308B (de)
AT (1) ATE178162T1 (de)
AU (1) AU4528489A (de)
CA (1) CA2000571C (de)
DE (1) DE68928958T2 (de)
IL (1) IL91971A (de)
MX (1) MX163919B (de)
WO (1) WO1990004261A1 (de)
ZA (1) ZA897751B (de)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06168695A (ja) * 1992-11-30 1994-06-14 Nikon Corp 荷電粒子顕微鏡
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
JP3291880B2 (ja) * 1993-12-28 2002-06-17 株式会社日立製作所 走査形電子顕微鏡
JPH07262959A (ja) * 1994-03-24 1995-10-13 Nikon Corp 走査型電子顕微鏡
US5644132A (en) * 1994-06-20 1997-07-01 Opan Technologies Ltd. System for high resolution imaging and measurement of topographic and material features on a specimen
JP3723260B2 (ja) * 1994-12-19 2005-12-07 アプライド マテリアルズ イスラエル リミティド 粒子ビーム・コラム
US5677531A (en) * 1995-08-08 1997-10-14 Nikon Corporation Scanning electron microscope
US5900667A (en) * 1996-10-04 1999-05-04 Etec Systems, Inc. Operating a solid state particle detector within a magnetic deflection field so as to minimize eddy currents
US6396063B1 (en) 1997-11-24 2002-05-28 Gerasimos Daniel Danilatos Radiofrequency gaseous detection device (RF-GDD)
US5945672A (en) * 1998-01-29 1999-08-31 Fei Company Gaseous backscattered electron detector for an environmental scanning electron microscope
DE19845329C2 (de) * 1998-03-10 2001-09-27 Erik Essers Rasterelektronenmikroskop
WO1999046797A1 (de) * 1998-03-10 1999-09-16 Erik Essers Rasterelektronenmikroskop
EP1117125B1 (de) * 1998-09-25 2014-04-16 Hitachi, Ltd. Rasterelektronenmikroskop
JP4093662B2 (ja) * 1999-01-04 2008-06-04 株式会社日立製作所 走査形電子顕微鏡
EP1116932A3 (de) * 2000-01-14 2003-04-16 Leica Microsystems Wetzlar GmbH Messgerät und Verfahren zun Vermessen von Strukturen auf einem Substrat
US6392231B1 (en) * 2000-02-25 2002-05-21 Hermes-Microvision, Inc. Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method
GB0005717D0 (en) * 2000-03-09 2000-05-03 Univ Cambridge Tech Scanning electron microscope
CZ302126B6 (cs) * 2000-07-07 2010-11-03 Leo Elektronenmikroskopie Gmbh Detektor pro prístroje vyzarující korpuskulární zárení, prístroj vyzarující korpuskulární zárení a zpusob detekování existence produktu vzájemného pusobení v tomto prístroji
AUPQ932200A0 (en) * 2000-08-11 2000-08-31 Danilatos, Gerasimos Daniel Environmental scanning electron microscope
DE10256718B4 (de) * 2002-12-04 2004-10-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Probenuntersuchung mittels eines atmosphärischen oder druckvariablen Rasterelektronenmikroskops
DE10331137B4 (de) * 2003-07-09 2008-04-30 Carl Zeiss Nts Gmbh Detektorsystem für ein Rasterelektronenmikroskop und Rasterelektronenmikroskop mit einem entsprechenden Detektorsystem
JP4292068B2 (ja) * 2003-12-11 2009-07-08 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
JP4636897B2 (ja) 2005-02-18 2011-02-23 株式会社日立ハイテクサイエンスシステムズ 走査電子顕微鏡
JP4732917B2 (ja) * 2006-02-15 2011-07-27 株式会社日立ハイテクノロジーズ 走査型電子顕微鏡及び欠陥検出装置
JP4597077B2 (ja) * 2006-03-14 2010-12-15 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
WO2007117397A2 (en) * 2006-03-31 2007-10-18 Fei Company Improved detector for charged particle beam instrument
US20080017811A1 (en) * 2006-07-18 2008-01-24 Collart Erik J H Beam stop for an ion implanter
DE102006043895B9 (de) 2006-09-19 2012-02-09 Carl Zeiss Nts Gmbh Elektronenmikroskop zum Inspizieren und Bearbeiten eines Objekts mit miniaturisierten Strukturen
JP5054990B2 (ja) 2007-01-30 2012-10-24 株式会社日立ハイテクノロジーズ 走査形電子顕微鏡
EP1953791A1 (de) * 2007-02-05 2008-08-06 FEI Company Vorrichtung zum Betrachten einer Probe mit einem Teilchenstrahl und einem optischen Mikroskop
US8921811B2 (en) * 2007-02-06 2014-12-30 Fei Company High pressure charged particle beam system
JP5276860B2 (ja) * 2008-03-13 2013-08-28 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
EP2105944A1 (de) 2008-03-28 2009-09-30 FEI Company "Environmental Cell" für eine TeilchenoptischeVorrichtung
US7791020B2 (en) * 2008-03-31 2010-09-07 Fei Company Multistage gas cascade amplifier
JP4597207B2 (ja) * 2008-03-31 2010-12-15 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
US8299432B2 (en) * 2008-11-04 2012-10-30 Fei Company Scanning transmission electron microscope using gas amplification
US8222600B2 (en) * 2009-05-24 2012-07-17 El-Mul Technologies Ltd. Charged particle detection system and method
US8791426B2 (en) 2009-11-24 2014-07-29 Lawrence Livermore National Security, Llc. Electron beam diagnostic system using computed tomography and an annular sensor
JP5386596B2 (ja) * 2010-01-20 2014-01-15 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP5542537B2 (ja) * 2010-06-16 2014-07-09 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US9679741B2 (en) 2010-11-09 2017-06-13 Fei Company Environmental cell for charged particle beam system
JP5622779B2 (ja) * 2012-03-26 2014-11-12 株式会社東芝 試料分析装置および試料分析方法
US9383460B2 (en) 2012-05-14 2016-07-05 Bwxt Nuclear Operations Group, Inc. Beam imaging sensor
US9535100B2 (en) 2012-05-14 2017-01-03 Bwxt Nuclear Operations Group, Inc. Beam imaging sensor and method for using same
EP2682978B1 (de) * 2012-07-05 2016-10-19 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Verunreinigungsverringerungselektrode für Partikeldetektor
PL224742B1 (pl) * 2012-06-06 2017-01-31 Politechnika Wroclawska Zespolony detektor kierunkowy elektronów
EP2706554B1 (de) * 2012-09-10 2016-05-25 Fei Company Verfahren zur Verwendung einer kombnierten teilchenoptischen Linse
JP5909431B2 (ja) * 2012-09-27 2016-04-26 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US9190241B2 (en) * 2013-03-25 2015-11-17 Hermes-Microvision, Inc. Charged particle beam apparatus
WO2015053262A1 (ja) * 2013-10-08 2015-04-16 株式会社日立ハイテクノロジーズ 荷電粒子線装置、荷電粒子線装置の制御方法
DE102014226985B4 (de) 2014-12-23 2024-02-08 Carl Zeiss Microscopy Gmbh Verfahren zum Analysieren eines Objekts, Computerprogrammprodukt sowie Teilchenstrahlgerät zur Durchführung des Verfahrens
US9842724B2 (en) * 2015-02-03 2017-12-12 Kla-Tencor Corporation Method and system for imaging of a photomask through a pellicle
US10236156B2 (en) 2015-03-25 2019-03-19 Hermes Microvision Inc. Apparatus of plural charged-particle beams
US10262832B2 (en) 2015-08-18 2019-04-16 Gerasimos Daniel Danilatos Wide field atmospheric scanning electron microscope
US10068744B2 (en) 2015-12-01 2018-09-04 Carl Zeiss Microscopy Gmbh Charged particle optical apparatus for through-the lens detection of particles
CN111247618B (zh) * 2017-09-26 2023-02-17 Asml荷兰有限公司 通过反向散射粒子对掩埋特征的检测
JP7179839B2 (ja) * 2017-09-29 2022-11-29 エーエスエムエル ネザーランズ ビー．ブイ． 荷電粒子のためのマルチセル検出器
CN107976458A (zh) * 2017-10-10 2018-05-01 中国科学院自动化研究所 低能量背散射电子探测器
WO2019100600A1 (en) * 2017-11-21 2019-05-31 Focus-Ebeam Technology (Beijing) Co., Ltd. Low voltage scanning electron microscope and method for specimen observation
CN109030518B (zh) * 2018-06-04 2020-04-28 西安交通大学 一种适用于电子致解吸产额测试装置的可替代电子源
EP4117016A1 (de) * 2021-07-05 2023-01-11 ASML Netherlands B.V. Detektor für geladene teilchen

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US27005A (en) * 1860-01-31 Machine for shaping hair-brush blocks
US3612859A (en) * 1968-01-31 1971-10-12 Westinghouse Electric Corp Method for measuring and controlling the density of a metallic vapor
US4068123A (en) * 1973-07-27 1978-01-10 Nihon Denshi Kabushiki Kaisha Scanning electron microscope
DE2921151C2 (de) * 1979-05-25 1982-12-02 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Vorrichtung zum Nachweis von in einem Abtast-Elektronenstrahlmikroskop von einer Probe ausgehenden Rückstreuelektronen
AU534811B2 (en) * 1979-07-03 1984-02-16 Unisearch Limited Atmospheric scanning electron microscope
US4596929A (en) * 1983-11-21 1986-06-24 Nanometrics Incorporated Three-stage secondary emission electron detection in electron microscopes
US4720633A (en) * 1986-01-17 1988-01-19 Electro-Scan Corporation Scanning electron microscope for visualization of wet samples
GB8604004D0 (en) * 1986-02-18 1986-03-26 Cambridge Instr Ltd Specimen chamber
GB8607222D0 (en) * 1986-03-24 1986-04-30 Welding Inst Charged particle collection
US4785182A (en) * 1987-05-21 1988-11-15 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere

Also Published As

Publication number Publication date
DE68928958T2 (de) 1999-09-23
MX163919B (es) 1992-06-30
CN1018308B (zh) 1992-09-16
WO1990004261A1 (en) 1990-04-19
CA2000571C (en) 1994-05-31
JPH0650615B2 (ja) 1994-06-29
EP0444085A1 (de) 1991-09-04
CN1042029A (zh) 1990-05-09
ZA897751B (en) 1991-06-26
EP0444085A4 (en) 1992-06-10
EP0444085B1 (de) 1999-03-24
DE68928958D1 (de) 1999-04-29
KR940009764B1 (ko) 1994-10-17
IL91971A (en) 1994-06-24
US4897545A (en) 1990-01-30
IL91971A0 (en) 1990-07-12
CA2000571A1 (en) 1990-04-14
AU4528489A (en) 1990-05-01
KR900702558A (ko) 1990-12-07
JPH04504325A (ja) 1992-07-30

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties