ATE138501T1 - Schichten von supraleiteroxyden mit hohem tc und verfahren zu deren herstellung - Google Patents

Schichten von supraleiteroxyden mit hohem tc und verfahren zu deren herstellung

Info

Publication number
ATE138501T1
ATE138501T1 AT88103367T AT88103367T ATE138501T1 AT E138501 T1 ATE138501 T1 AT E138501T1 AT 88103367 T AT88103367 T AT 88103367T AT 88103367 T AT88103367 T AT 88103367T AT E138501 T1 ATE138501 T1 AT E138501T1
Authority
AT
Austria
Prior art keywords
rare earth
superconducting
metals
superconductivity
vapour deposition
Prior art date
Application number
AT88103367T
Other languages
German (de)
English (en)
Inventor
Praveen Nmn Chaudhari
Richard Joseph Gambino
Roger Hilsen Koch
James Andrew Lacey
Robert Benjamin Laibowitz
Joseph Michael Viggiano
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=21838570&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE138501(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of ATE138501T1 publication Critical patent/ATE138501T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0548—Processes for depositing or forming copper oxide superconductor layers by deposition and subsequent treatment, e.g. oxidation of pre-deposited material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/80—Constructional details
    • H10N60/85—Superconducting active materials
    • H10N60/855—Ceramic superconductors
    • H10N60/857—Ceramic superconductors comprising copper oxide
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0381—Processes for depositing or forming copper oxide superconductor layers by evaporation, e.g. MBE
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9265—Special properties
    • Y10S428/93—Electric superconducting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/702—Josephson junction present
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/732—Evaporative coating with superconducting material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/742—Annealing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
AT88103367T 1987-03-18 1988-03-04 Schichten von supraleiteroxyden mit hohem tc und verfahren zu deren herstellung ATE138501T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US2758487A 1987-03-18 1987-03-18

Publications (1)

Publication Number Publication Date
ATE138501T1 true ATE138501T1 (de) 1996-06-15

Family

ID=21838570

Family Applications (2)

Application Number Title Priority Date Filing Date
AT88103367T ATE138501T1 (de) 1987-03-18 1988-03-04 Schichten von supraleiteroxyden mit hohem tc und verfahren zu deren herstellung
AT95104274T ATE183021T1 (de) 1987-03-18 1988-03-04 Filme aus oxydischen supraleitern mit hohem tc

Family Applications After (1)

Application Number Title Priority Date Filing Date
AT95104274T ATE183021T1 (de) 1987-03-18 1988-03-04 Filme aus oxydischen supraleitern mit hohem tc

Country Status (7)

Country Link
US (2) US5447906A (en:Method)
EP (2) EP0282839B2 (en:Method)
JP (1) JP2711253B2 (en:Method)
AT (2) ATE138501T1 (en:Method)
CA (1) CA1335954C (en:Method)
DE (2) DE3855305T3 (en:Method)
ES (1) ES2134370T3 (en:Method)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5204318A (en) * 1987-03-27 1993-04-20 Massachusetts Institute Of Technology Preparation of superconducting oxides and oxide-metal composites
JPH0753638B2 (ja) * 1987-03-30 1995-06-07 住友電気工業株式会社 超電導薄膜の形成方法
CA1332324C (en) * 1987-03-30 1994-10-11 Jun Shioya Method for producing thin film of oxide superconductor
JPH0778000B2 (ja) * 1987-03-31 1995-08-23 住友電気工業株式会社 酸化物超電導薄膜の製造方法
JPS63244529A (ja) * 1987-03-30 1988-10-12 Sumitomo Electric Ind Ltd 超電導薄膜の形成方法
JP2702711B2 (ja) * 1987-04-13 1998-01-26 松下電器産業株式会社 薄膜超電導体の製造方法
FR2625614A1 (fr) * 1987-05-22 1989-07-07 Massachusetts Inst Technology Pellicules minces d'oxydes supraconducteurs
US4925829A (en) * 1987-05-26 1990-05-15 Sumitomo Electric Industries, Ltd. Method for preparing thin film of compound oxide superconductor by ion beam techniques
DE3815185A1 (de) * 1987-08-05 1989-02-16 Siemens Ag Verfahren zur herstellung einer hybridstruktur mit halbleitendem und supraleitendem material
KR910007382B1 (ko) * 1987-08-07 1991-09-25 가부시기가이샤 히다찌세이사꾸쇼 초전도 재료 및 초전도 박막의 제조방법
EP0326087A3 (en) * 1988-01-27 1990-08-01 Fujitsu Limited Method of fabricating a superconductive film
US8309118B2 (en) * 2001-09-28 2012-11-13 Mcneil-Ppc, Inc. Film forming compositions containing sucralose
EP1422313A1 (de) 2002-11-05 2004-05-26 Theva Dünnschichttechnik GmbH Vorrichtung und Verfahren zum Aufdampfen eines Beschichtungsmaterials im Vakuum mit kontinuierlicher Materialnachführung
US20050159298A1 (en) * 2004-01-16 2005-07-21 American Superconductor Corporation Oxide films with nanodot flux pinning centers
JP5243800B2 (ja) * 2004-12-23 2013-07-24 スーパーコンダクター・テクノロジーズ・インコーポレイテッド ＲＦ特性最適化（ＲＥ）Ｂａ２Ｃｕ３Ｏ７−δ超伝導薄膜物品
US8954125B2 (en) 2011-07-28 2015-02-10 International Business Machines Corporation Low-loss superconducting devices
WO2017136925A1 (en) * 2016-02-08 2017-08-17 Thunder Bay Regional Health Research Institute Amorphous lead oxide based energy detection devices and methods of manufacture thereof
WO2017176952A1 (en) 2016-04-08 2017-10-12 Schlumberger Technology Corporation Polymer gel for water control applications
CN115485422B (zh) * 2020-05-20 2024-07-02 Hrl实验室有限责任公司 在硅衬底上生长通过结晶光学膜氢化而在红外光谱中可选地具有极小光损耗的结晶光学膜的方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4316785A (en) * 1979-11-05 1982-02-23 Nippon Telegraph & Telephone Public Corporation Oxide superconductor Josephson junction and fabrication method therefor
JPS60173885A (ja) * 1984-02-18 1985-09-07 Nippon Telegr & Teleph Corp <Ntt> 酸化物超伝導材料およびその製造方法
JPS6161555A (ja) * 1984-08-31 1986-03-29 Norinosuke Kojima ダイアル式電話機利用の自動通報方法
JPS6161556A (ja) * 1984-08-31 1986-03-29 Norinosuke Kojima ダイアル式電話機利用の自動通報装置
US6638894B1 (en) * 1987-01-09 2003-10-28 Lucent Technologies Inc. Devices and systems based on novel superconducting material
US5151406A (en) * 1987-02-26 1992-09-29 Sumitomo Electric Industries, Ltd. Laminated superconductor
JP2567386B2 (ja) * 1987-02-26 1996-12-25 住友電気工業株式会社 超電導導体
JP2645489B2 (ja) * 1987-03-12 1997-08-25 株式会社 半導体エネルギー研究所 超電導体の作製方法
DE3854626T2 (de) * 1987-03-12 1996-07-04 Semiconductor Energy Lab Verfahren zur Herstellung von Komponenten aus supraleitenden oxidkeramischen Materialien.
JPS63241823A (ja) * 1987-03-27 1988-10-07 Nissin Electric Co Ltd 超電導薄膜の製造方法
CA1332324C (en) * 1987-03-30 1994-10-11 Jun Shioya Method for producing thin film of oxide superconductor

Also Published As

Publication number Publication date
ATE183021T1 (de) 1999-08-15
CA1335954C (en) 1995-06-20
DE3855305D1 (de) 1996-06-27
EP0662724A3 (en:Method) 1995-08-09
DE3855305T2 (de) 1996-12-05
JPS63237313A (ja) 1988-10-03
DE3856357T2 (de) 2000-02-24
ES2134370T3 (es) 1999-10-01
US5447906A (en) 1995-09-05
JP2711253B2 (ja) 1998-02-10
EP0282839A2 (en) 1988-09-21
EP0282839B1 (en) 1996-05-22
DE3856357D1 (de) 1999-09-09
DE3855305T3 (de) 2005-10-06
EP0282839B2 (en) 2005-03-09
EP0282839A3 (en) 1990-07-25
US5863869A (en) 1999-01-26
EP0662724A2 (en) 1995-07-12
EP0662724B1 (en) 1999-08-04

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