ATE137634T1 - Schnelle atomstrahlquelle - Google Patents

Schnelle atomstrahlquelle

Info

Publication number
ATE137634T1
ATE137634T1 AT92115358T AT92115358T ATE137634T1 AT E137634 T1 ATE137634 T1 AT E137634T1 AT 92115358 T AT92115358 T AT 92115358T AT 92115358 T AT92115358 T AT 92115358T AT E137634 T1 ATE137634 T1 AT E137634T1
Authority
AT
Austria
Prior art keywords
emitting
cathode
beam source
fast atom
plasma
Prior art date
Application number
AT92115358T
Other languages
English (en)
Inventor
Masahiro Hatakeyama
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of ATE137634T1 publication Critical patent/ATE137634T1/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
    • H05H3/02—Molecular or atomic beam generation

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Particle Accelerators (AREA)
AT92115358T 1991-09-12 1992-09-08 Schnelle atomstrahlquelle ATE137634T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3261231A JP2509488B2 (ja) 1991-09-12 1991-09-12 高速原子線源

Publications (1)

Publication Number Publication Date
ATE137634T1 true ATE137634T1 (de) 1996-05-15

Family

ID=17358964

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92115358T ATE137634T1 (de) 1991-09-12 1992-09-08 Schnelle atomstrahlquelle

Country Status (5)

Country Link
US (1) US5640009A (de)
EP (1) EP0531949B1 (de)
JP (1) JP2509488B2 (de)
AT (1) ATE137634T1 (de)
DE (1) DE69210337T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3504290B2 (ja) * 1993-04-20 2004-03-08 株式会社荏原製作所 低エネルギー中性粒子線発生方法及び装置
US5519213A (en) * 1993-08-20 1996-05-21 Ebara Corporation Fast atom beam source
JPH07169746A (ja) * 1993-12-14 1995-07-04 Ebara Corp 低エネルギー中性粒子線を用いた微細加工装置
US5989779A (en) * 1994-10-18 1999-11-23 Ebara Corporation Fabrication method employing and energy beam source
JP3328498B2 (ja) * 1996-02-16 2002-09-24 株式会社荏原製作所 高速原子線源
RU2094896C1 (ru) * 1996-03-25 1997-10-27 Научно-производственное предприятие "Новатех" Источник быстрых нейтральных молекул
IL118638A (en) * 1996-06-12 2002-02-10 Fruchtman Amnon Beam source
JPH1153731A (ja) * 1997-08-01 1999-02-26 Ebara Corp 磁気ディスク及びその作製方法
US6671034B1 (en) * 1998-04-30 2003-12-30 Ebara Corporation Microfabrication of pattern imprinting
US6468598B1 (en) 1998-10-02 2002-10-22 Ebara Corporation Magnetic disk and method of making thereof
JP4042817B2 (ja) * 2001-03-26 2008-02-06 株式会社荏原製作所 中性粒子ビーム処理装置
JP3912993B2 (ja) 2001-03-26 2007-05-09 株式会社荏原製作所 中性粒子ビーム処理装置
GB2437820B (en) * 2006-04-27 2011-06-22 Matsushita Electric Ind Co Ltd Fast atom bombardment source, fast atom beam emission method, and surface modification apparatus
CN112366126A (zh) * 2020-11-11 2021-02-12 成都理工大学工程技术学院 一种霍尔离子源及其放电系统

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4734622A (en) * 1986-05-14 1988-03-29 Ball Corporation Dissociator for atomic masers
JPH0766760B2 (ja) * 1986-08-07 1995-07-19 日本電信電話株式会社 収束性高速原子線源
JPH01161699A (ja) * 1987-12-18 1989-06-26 Nippon Telegr & Teleph Corp <Ntt> 高速原子線源
JP2574857B2 (ja) * 1988-03-09 1997-01-22 日本電信電話株式会社 高速原子線源
JPH0330297A (ja) * 1989-06-28 1991-02-08 Copal Electron Co Ltd 高速原子線源装置
JPH03112100A (ja) * 1989-09-27 1991-05-13 Ebara Corp 高速原子線放射装置
JPH0715839B2 (ja) * 1989-11-22 1995-02-22 株式会社荏原製作所 高速原子線放射装置
US5055672A (en) * 1990-11-20 1991-10-08 Ebara Corporation Fast atom beam source
JPH0724240B2 (ja) * 1991-03-05 1995-03-15 株式会社荏原製作所 高速原子線源

Also Published As

Publication number Publication date
JPH05121194A (ja) 1993-05-18
EP0531949B1 (de) 1996-05-01
DE69210337T2 (de) 1996-12-05
EP0531949A2 (de) 1993-03-17
EP0531949A3 (en) 1993-06-30
DE69210337D1 (de) 1996-06-05
JP2509488B2 (ja) 1996-06-19
US5640009A (en) 1997-06-17

Similar Documents

Publication Publication Date Title
ATE137634T1 (de) Schnelle atomstrahlquelle
RU2004101768A (ru) Плазменный ускоритель
WO2004027825A3 (en) Beam plasma source
CA2162748A1 (en) Ion generating source for use in an ion implanter
KR930003248A (ko) 확산 이차 방출 전자샤워
SE8801145D0 (sv) Ion plasma electron gun with dose rate control via amplitude modulation of the plasma discharge
WO2004042772A3 (en) Methods and apparatus for ion beam neutralization in magnets
DE69207616T2 (de) Schnelle Atomstrahlquelle
KR950007207A (ko) 고속 원자빔 공급원
JPS6433833A (en) Electron emitting element
ATE106176T1 (de) Dynamischer elektronenemitter.
IT1252811B (it) Generatore di ioni con camera di ionizzazione costruita o rivestita con materiale ad alto coefficiente di emissione secondaria
US3546513A (en) High yield ion source
US4211983A (en) High energy electron beam driven laser
DE69115451D1 (de) Ionenstrahlgenerator mit elektronischer Umschaltung zwischen mehreren Kathoden
Tomimasu et al. Update of the FELI project design study of IR-and UV-FEL facilities for industrial use
JPH0514400B2 (de)
JPS5713175A (en) Ion etching method
Petrovich The ionization processes and striking of discharge in acceleration gap of sources of electrons with the plasma big cross section emitter
Hurtley Light-based particle accelerators
Hegeler et al. Efficient electron beam deposition for repetitively pulsed krypton fluoride lasers
Apollonov et al. Large-aperture CO2 amplifier
Abdullin et al. High current vacuum diodes for production of large-cross-section electron beams
SU1102407A1 (ru) Лазерно-плазменный источник электронов
Bardsley Relativistic Dynamics of Photoelectrons

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties