DE69210337D1 - Schnelle Atomstrahlquelle - Google Patents
Schnelle AtomstrahlquelleInfo
- Publication number
- DE69210337D1 DE69210337D1 DE69210337T DE69210337T DE69210337D1 DE 69210337 D1 DE69210337 D1 DE 69210337D1 DE 69210337 T DE69210337 T DE 69210337T DE 69210337 T DE69210337 T DE 69210337T DE 69210337 D1 DE69210337 D1 DE 69210337D1
- Authority
- DE
- Germany
- Prior art keywords
- fast atom
- atom beam
- emitting
- cathode
- beam source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
- H05H3/02—Molecular or atomic beam generation
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Sources, Ion Sources (AREA)
- Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3261231A JP2509488B2 (ja) | 1991-09-12 | 1991-09-12 | 高速原子線源 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69210337D1 true DE69210337D1 (de) | 1996-06-05 |
DE69210337T2 DE69210337T2 (de) | 1996-12-05 |
Family
ID=17358964
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69210337T Expired - Fee Related DE69210337T2 (de) | 1991-09-12 | 1992-09-08 | Schnelle Atomstrahlquelle |
Country Status (5)
Country | Link |
---|---|
US (1) | US5640009A (de) |
EP (1) | EP0531949B1 (de) |
JP (1) | JP2509488B2 (de) |
AT (1) | ATE137634T1 (de) |
DE (1) | DE69210337T2 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3504290B2 (ja) * | 1993-04-20 | 2004-03-08 | 株式会社荏原製作所 | 低エネルギー中性粒子線発生方法及び装置 |
US5519213A (en) * | 1993-08-20 | 1996-05-21 | Ebara Corporation | Fast atom beam source |
JPH07169746A (ja) * | 1993-12-14 | 1995-07-04 | Ebara Corp | 低エネルギー中性粒子線を用いた微細加工装置 |
US5989779A (en) * | 1994-10-18 | 1999-11-23 | Ebara Corporation | Fabrication method employing and energy beam source |
JP3328498B2 (ja) * | 1996-02-16 | 2002-09-24 | 株式会社荏原製作所 | 高速原子線源 |
RU2094896C1 (ru) * | 1996-03-25 | 1997-10-27 | Научно-производственное предприятие "Новатех" | Источник быстрых нейтральных молекул |
IL118638A (en) * | 1996-06-12 | 2002-02-10 | Fruchtman Amnon | Beam source |
JPH1153731A (ja) * | 1997-08-01 | 1999-02-26 | Ebara Corp | 磁気ディスク及びその作製方法 |
US6671034B1 (en) * | 1998-04-30 | 2003-12-30 | Ebara Corporation | Microfabrication of pattern imprinting |
US6468598B1 (en) | 1998-10-02 | 2002-10-22 | Ebara Corporation | Magnetic disk and method of making thereof |
JP4042817B2 (ja) * | 2001-03-26 | 2008-02-06 | 株式会社荏原製作所 | 中性粒子ビーム処理装置 |
JP3912993B2 (ja) * | 2001-03-26 | 2007-05-09 | 株式会社荏原製作所 | 中性粒子ビーム処理装置 |
GB2437820B (en) | 2006-04-27 | 2011-06-22 | Matsushita Electric Ind Co Ltd | Fast atom bombardment source, fast atom beam emission method, and surface modification apparatus |
CN112366126A (zh) * | 2020-11-11 | 2021-02-12 | 成都理工大学工程技术学院 | 一种霍尔离子源及其放电系统 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4734622A (en) * | 1986-05-14 | 1988-03-29 | Ball Corporation | Dissociator for atomic masers |
JPH0766760B2 (ja) * | 1986-08-07 | 1995-07-19 | 日本電信電話株式会社 | 収束性高速原子線源 |
JPH01161699A (ja) * | 1987-12-18 | 1989-06-26 | Nippon Telegr & Teleph Corp <Ntt> | 高速原子線源 |
JP2574857B2 (ja) * | 1988-03-09 | 1997-01-22 | 日本電信電話株式会社 | 高速原子線源 |
JPH0330297A (ja) * | 1989-06-28 | 1991-02-08 | Copal Electron Co Ltd | 高速原子線源装置 |
JPH03112100A (ja) * | 1989-09-27 | 1991-05-13 | Ebara Corp | 高速原子線放射装置 |
JPH0715839B2 (ja) * | 1989-11-22 | 1995-02-22 | 株式会社荏原製作所 | 高速原子線放射装置 |
US5055672A (en) * | 1990-11-20 | 1991-10-08 | Ebara Corporation | Fast atom beam source |
JPH0724240B2 (ja) * | 1991-03-05 | 1995-03-15 | 株式会社荏原製作所 | 高速原子線源 |
-
1991
- 1991-09-12 JP JP3261231A patent/JP2509488B2/ja not_active Expired - Fee Related
-
1992
- 1992-09-08 AT AT92115358T patent/ATE137634T1/de not_active IP Right Cessation
- 1992-09-08 DE DE69210337T patent/DE69210337T2/de not_active Expired - Fee Related
- 1992-09-08 EP EP92115358A patent/EP0531949B1/de not_active Expired - Lifetime
- 1992-09-11 US US07/943,569 patent/US5640009A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0531949B1 (de) | 1996-05-01 |
EP0531949A2 (de) | 1993-03-17 |
US5640009A (en) | 1997-06-17 |
JP2509488B2 (ja) | 1996-06-19 |
DE69210337T2 (de) | 1996-12-05 |
EP0531949A3 (en) | 1993-06-30 |
ATE137634T1 (de) | 1996-05-15 |
JPH05121194A (ja) | 1993-05-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |