ATE126628T1 - Mikroverbindungsvorrichtung aus hochtemperatursupraleiter mit gestufter kante zur kante sns verbindung. - Google Patents

Mikroverbindungsvorrichtung aus hochtemperatursupraleiter mit gestufter kante zur kante sns verbindung.

Info

Publication number
ATE126628T1
ATE126628T1 AT92100564T AT92100564T ATE126628T1 AT E126628 T1 ATE126628 T1 AT E126628T1 AT 92100564 T AT92100564 T AT 92100564T AT 92100564 T AT92100564 T AT 92100564T AT E126628 T1 ATE126628 T1 AT E126628T1
Authority
AT
Austria
Prior art keywords
planar substrate
substrate surface
axis
edge
exposed
Prior art date
Application number
AT92100564T
Other languages
English (en)
Inventor
Mark S Diiorio
Shozo Yoshizumi
Kai-Yueh Yang
Original Assignee
Biomagnetic Tech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Biomagnetic Tech Inc filed Critical Biomagnetic Tech Inc
Application granted granted Critical
Publication of ATE126628T1 publication Critical patent/ATE126628T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/10—Junction-based devices
    • H10N60/12—Josephson-effect devices
    • H10N60/124—Josephson-effect devices comprising high-Tc ceramic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • H10N60/0941—Manufacture or treatment of Josephson-effect devices comprising high-Tc ceramic materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/702—Josephson junction present
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/731—Sputter coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/742—Annealing

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Measuring Magnetic Variables (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
AT92100564T 1991-01-22 1992-01-15 Mikroverbindungsvorrichtung aus hochtemperatursupraleiter mit gestufter kante zur kante sns verbindung. ATE126628T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/644,905 US5134117A (en) 1991-01-22 1991-01-22 High tc microbridge superconductor device utilizing stepped edge-to-edge sns junction

Publications (1)

Publication Number Publication Date
ATE126628T1 true ATE126628T1 (de) 1995-09-15

Family

ID=24586835

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92100564T ATE126628T1 (de) 1991-01-22 1992-01-15 Mikroverbindungsvorrichtung aus hochtemperatursupraleiter mit gestufter kante zur kante sns verbindung.

Country Status (8)

Country Link
US (3) US5134117A (de)
EP (1) EP0496259B1 (de)
JP (2) JP3330969B2 (de)
AT (1) ATE126628T1 (de)
DE (1) DE69204080T2 (de)
DK (1) DK0496259T3 (de)
ES (1) ES2076564T3 (de)
GR (1) GR3017972T3 (de)

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EP0544036B1 (de) * 1990-05-31 1997-02-12 Osaka Gas Co., Ltd. Josephson-Einrichtung und Prozess zu deren Herstellung
USRE37587E1 (en) * 1990-12-28 2002-03-19 Sumitomo Electric Industries Ltd. Superconducting quantum interference device formed of oxide superconductor thin film
US5134117A (en) * 1991-01-22 1992-07-28 Biomagnetic Technologies, Inc. High tc microbridge superconductor device utilizing stepped edge-to-edge sns junction
US5612290A (en) * 1992-05-29 1997-03-18 Sumitomo Electric Industries, Ltd. Josephson junction device formed of oxide superconductor
JPH05335638A (ja) * 1992-05-29 1993-12-17 Sumitomo Electric Ind Ltd ジョセフソン接合構造体およびその作製方法
JP3568547B2 (ja) * 1992-05-29 2004-09-22 住友電気工業株式会社 ジョセフソン接合構造体
US5600242A (en) * 1994-09-26 1997-02-04 The Boeing Company Electrically small broadband high linear dynamic range deceiver including a plurality of active antenna elements
US5994891A (en) * 1994-09-26 1999-11-30 The Boeing Company Electrically small, wideband, high dynamic range antenna having a serial array of optical modulators
US6362617B1 (en) * 1994-09-26 2002-03-26 The Boeing Company Wideband, high dynamic range antenna
US5567673A (en) * 1994-10-17 1996-10-22 E. I. Du Pont De Nemours And Company Process of forming multilayered Tl-containing superconducting composites
US5667650A (en) * 1995-02-14 1997-09-16 E. I. Du Pont De Nemours And Company High flow gas manifold for high rate, off-axis sputter deposition
DE19516611C1 (de) * 1995-05-10 1996-09-05 Forschungszentrum Juelich Gmbh Hochtemperatur Supraleiter-Normalleiter-Supraleiter-(HTSL-SNS-)Kontakt, Verfahren zu seiner Herstellung sowie dessen Verwendung
JPH098368A (ja) * 1995-06-23 1997-01-10 Oki Electric Ind Co Ltd 高温超電導ジョセフソン素子およびその製造方法
US6476413B1 (en) 1995-10-24 2002-11-05 The Regents Of The University Of California High temperature superconducting Josephson junctions and SQUIDs
DE19608564C2 (de) * 1996-03-07 1999-09-02 Forschungszentrum Juelich Gmbh Supraleiter/Halbleiter/ Supraleiter-Stufenkontakt
US5776863A (en) * 1996-07-08 1998-07-07 Trw Inc. In-situ fabrication of a superconductor hetero-epitaxial Josephson junction
CN1111314C (zh) * 1996-10-31 2003-06-11 南开大学 高温超导薄膜衬底台阶本征约瑟夫森结阵及其制备方法
US5892243A (en) * 1996-12-06 1999-04-06 Trw Inc. High-temperature SSNS and SNS Josephson junction and method of making junction
US20040134967A1 (en) * 1997-05-22 2004-07-15 Conductis, Inc. Interface engineered high-Tc Josephson junctions
US20040266627A1 (en) * 1997-05-22 2004-12-30 Moeckly Brian H. High-temperature superconductor devices and methods of forming the same
DE10158096B4 (de) * 2001-11-27 2006-01-12 Forschungszentrum Jülich GmbH Bauteil für ein SQUID-Mikroskop für Raumtemperaturproben sowie zugehörige Verwendung
US7615385B2 (en) 2006-09-20 2009-11-10 Hypres, Inc Double-masking technique for increasing fabrication yield in superconducting electronics
RU2538931C2 (ru) * 2013-05-06 2015-01-10 Общество с ограниченной ответственностью "Инженерные решения" СПОСОБ ФОРМИРОВАНИЯ YBa2Cu3O7-x-Х ПЛЕНОК С ВЫСОКОЙ ТОКОНЕСУЩЕЙ СПОСОБНОСТЬЮ НА ЗОЛОТОМ БУФЕРНОМ ПОДСЛОЕ
KR102619270B1 (ko) * 2019-02-15 2023-12-29 마이크로소프트 테크놀로지 라이센싱, 엘엘씨 각진 퇴적 및 음영 벽을 사용한 제조 방법

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Publication number Priority date Publication date Assignee Title
JPS5588382A (en) * 1978-12-27 1980-07-04 Fujitsu Ltd Preparation of tunnel junction type josephson element
US4264916A (en) * 1979-12-26 1981-04-28 Bell Telephone Laboratories, Incorporated Semiconductor barrier Josephson junction
US4414738A (en) * 1981-02-02 1983-11-15 The United States Of America As Represented By The Secretary Of The Navy Optical lithographic technique for fabricating submicron-sized Josephson microbridges
US4454522A (en) * 1981-11-05 1984-06-12 The Board Of Trustees Of The Leland Stanford Junior University Microbridge superconducting device having support with stepped parallel surfaces
US4630081A (en) * 1984-12-19 1986-12-16 Eaton Corporation MOMOM tunnel emission transistor
US4831421A (en) * 1985-10-11 1989-05-16 International Business Machines Corporation Superconducting device
EP0292958B1 (de) * 1987-05-26 1993-12-29 Sumitomo Electric Industries Limited Verfahren zur Herstellung einer dünnen Schicht aus supraleitendem Mischoxid
JPS63314850A (ja) * 1987-06-18 1988-12-22 Fujitsu Ltd 半導体装置
JP2624690B2 (ja) * 1987-07-03 1997-06-25 株式会社日立製作所 酸化物超電導装置およびその製造方法
JPS6411378A (en) * 1987-07-06 1989-01-13 Hitachi Ltd Formation of josephson element
JPH01161881A (ja) * 1987-12-18 1989-06-26 Nec Corp ジョセフソン素子およびその製造方法
JPH01241874A (ja) * 1988-03-23 1989-09-26 Mitsubishi Electric Corp ジョゼフソン接合素子
JPH02184087A (ja) * 1989-01-11 1990-07-18 Agency Of Ind Science & Technol 超電導弱結合素子の製造方法
US5100694A (en) * 1989-08-01 1992-03-31 The United States Of America As Represented By The Administrator National Aeronautics And Space Administration Method for producing edge geometry superconducting tunnel junctions utilizing an NbN/MgO/NbN thin film structure
DE69119022T2 (de) * 1990-10-08 1996-10-31 Sumitomo Electric Industries Supraleitende Einrichtung mit ultradünnem Kanal aus oxydisch supraleitendem Material und Verfahren zu deren Herstellung
US5134117A (en) * 1991-01-22 1992-07-28 Biomagnetic Technologies, Inc. High tc microbridge superconductor device utilizing stepped edge-to-edge sns junction

Also Published As

Publication number Publication date
EP0496259B1 (de) 1995-08-16
DE69204080D1 (de) 1995-09-21
JP3330969B2 (ja) 2002-10-07
US5134117A (en) 1992-07-28
US5595959A (en) 1997-01-21
US5367178A (en) 1994-11-22
JPH0582845A (ja) 1993-04-02
DE69204080T2 (de) 1996-01-11
JP3589656B2 (ja) 2004-11-17
JP2003051626A (ja) 2003-02-21
ES2076564T3 (es) 1995-11-01
GR3017972T3 (en) 1996-02-29
EP0496259A1 (de) 1992-07-29
DK0496259T3 (da) 1995-12-18

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UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee