ATE115242T1 - Anlage zum pumpen von gasen mit pumpengeschwindigkeitsregelung. - Google Patents
Anlage zum pumpen von gasen mit pumpengeschwindigkeitsregelung.Info
- Publication number
- ATE115242T1 ATE115242T1 AT92402669T AT92402669T ATE115242T1 AT E115242 T1 ATE115242 T1 AT E115242T1 AT 92402669 T AT92402669 T AT 92402669T AT 92402669 T AT92402669 T AT 92402669T AT E115242 T1 ATE115242 T1 AT E115242T1
- Authority
- AT
- Austria
- Prior art keywords
- bellows
- speed control
- pump speed
- delivery outlet
- wall
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
- F04B49/225—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves with throttling valves or valves varying the pump inlet opening or the outlet opening
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Reciprocating Pumps (AREA)
- Control Of The Air-Fuel Ratio Of Carburetors (AREA)
- Gas Separation By Absorption (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9112310A FR2682164B1 (fr) | 1991-10-07 | 1991-10-07 | Installation de pompage de gaz avec regulation de la vitesse de pompage. |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE115242T1 true ATE115242T1 (de) | 1994-12-15 |
Family
ID=9417654
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT92402669T ATE115242T1 (de) | 1991-10-07 | 1992-09-29 | Anlage zum pumpen von gasen mit pumpengeschwindigkeitsregelung. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5244353A (de) |
EP (1) | EP0537051B1 (de) |
JP (1) | JP3251983B2 (de) |
AT (1) | ATE115242T1 (de) |
DE (1) | DE69200828T2 (de) |
DK (1) | DK0537051T3 (de) |
FR (1) | FR2682164B1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030236489A1 (en) | 2002-06-21 | 2003-12-25 | Baxter International, Inc. | Method and apparatus for closed-loop flow control system |
FR2971018A1 (fr) * | 2011-01-27 | 2012-08-03 | Alcatel Vacuum Technology France | Pompe a vide primaire, installation pour le traitement de substrats et procede de pompage |
CN102155386A (zh) * | 2011-05-27 | 2011-08-17 | 开平太平洋绝缘材料有限公司 | 液环式真空泵 |
GB2508396B (en) | 2012-11-30 | 2015-10-07 | Edwards Ltd | Improvements in and relating to vacuum conduits |
WO2016137887A1 (en) | 2015-02-23 | 2016-09-01 | Howden Roots Llc | Device for conditioning flow of working fluids |
US11815095B2 (en) * | 2019-01-10 | 2023-11-14 | Elival Co., Ltd | Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1948907A (en) * | 1931-04-18 | 1934-02-27 | Egli Eugen | Compressor |
US2951633A (en) * | 1955-07-14 | 1960-09-06 | Wagner Electric Corp | System and method of lubricating air compressors and the like |
US2935242A (en) * | 1955-07-23 | 1960-05-03 | Heraeus Gmbh W C | Pumping apparatus |
CH470589A (de) * | 1968-10-11 | 1969-03-31 | Balzers Patent Beteilig Ag | Anordnung zur Evakuierung von Rezipienten |
US3680980A (en) * | 1970-02-20 | 1972-08-01 | Hans U Bart | Fuel pump |
US3922110A (en) * | 1974-01-28 | 1975-11-25 | Henry Huse | Multi-stage vacuum pump |
US4596518A (en) * | 1984-02-03 | 1986-06-24 | Diesel Kiki Co., Ltd. | Swash-plate type compressor |
JPS60171989U (ja) * | 1984-04-25 | 1985-11-14 | 株式会社ボッシュオートモーティブ システム | カ−ク−ラ用ベ−ン型圧縮機 |
US4563134A (en) * | 1985-06-24 | 1986-01-07 | General Motors Corporation | Cylinder head with pressure regulator valve |
JPS63263282A (ja) * | 1987-04-22 | 1988-10-31 | Toyota Autom Loom Works Ltd | カ−エアコン用圧縮機の能力制御機構 |
US4850806A (en) * | 1988-05-24 | 1989-07-25 | The Boc Group, Inc. | Controlled by-pass for a booster pump |
-
1991
- 1991-10-07 FR FR9112310A patent/FR2682164B1/fr not_active Expired - Fee Related
-
1992
- 1992-09-29 EP EP92402669A patent/EP0537051B1/de not_active Expired - Lifetime
- 1992-09-29 DE DE69200828T patent/DE69200828T2/de not_active Expired - Fee Related
- 1992-09-29 AT AT92402669T patent/ATE115242T1/de not_active IP Right Cessation
- 1992-09-29 DK DK92402669.3T patent/DK0537051T3/da active
- 1992-10-05 US US07/956,243 patent/US5244353A/en not_active Expired - Fee Related
- 1992-10-07 JP JP26865192A patent/JP3251983B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5244353A (en) | 1993-09-14 |
EP0537051A1 (de) | 1993-04-14 |
FR2682164A1 (fr) | 1993-04-09 |
DE69200828D1 (de) | 1995-01-19 |
DK0537051T3 (da) | 1995-03-06 |
JP3251983B2 (ja) | 2002-01-28 |
FR2682164B1 (fr) | 1995-01-20 |
EP0537051B1 (de) | 1994-12-07 |
DE69200828T2 (de) | 1995-04-13 |
JPH05231371A (ja) | 1993-09-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE602004024932D1 (de) | Vorrichtung zum Fördern von pulverförmigem Material durch Rohrleitungen | |
ATE180314T1 (de) | Kryopumpe | |
DE69200828D1 (de) | Anlage zum Pumpen von Gasen mit Pumpengeschwindigkeitsregelung. | |
KR930021841A (ko) | 계속 주행중인 다수의 사의 흡인장치 | |
ATE145967T1 (de) | Dampfturbine | |
DE69829546D1 (de) | Pumpsystem für Flüssigkeiten | |
SE9703940D0 (sv) | Pumpanordning vid tryckkalibrering för generering av vakuum och tryck | |
DE69510588D1 (de) | Freikolbenmaschine | |
SE7906445L (sv) | Centrifugalpump | |
GB945265A (en) | Mechanical seal with controlled leakage | |
SE8603887D0 (sv) | Regulator valve, and double-acting valve device including such a valve | |
FR2346621A1 (fr) | Dispositif de commande du debit d'un liquide | |
JPS5569716A (en) | Secondary air controlling apparatus | |
GB1159173A (en) | Improvements in and relating to the Desorption of Foreign Molecules from the Inner Wall Surface of a Receptacle | |
JPS5799233A (en) | Supercharger of motorcycle | |
SE9201527D0 (sv) | Anordning med en oeverladdad foerbraenningsmotor och trycklufttank | |
JPS5549599A (en) | Vacuum generating valve | |
JPS55139566A (en) | Valve device | |
GB2008805A (en) | Valve for controlling respiratory gas | |
GB2001702A (en) | Valve control arrangement | |
EP0075275A3 (de) | Endoskop | |
FR2332565A1 (fr) | Regulateur de pression | |
JPS56138433A (en) | Reducing device of harmful exhaust from diesel engine | |
JPS57165696A (en) | Compressor pressure control system | |
ES132778U (es) | Bomba con camara de presion que regula la uniformidad del caudal. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification | ||
REN | Ceased due to non-payment of the annual fee |