DE69200828D1 - Anlage zum Pumpen von Gasen mit Pumpengeschwindigkeitsregelung. - Google Patents

Anlage zum Pumpen von Gasen mit Pumpengeschwindigkeitsregelung.

Info

Publication number
DE69200828D1
DE69200828D1 DE69200828T DE69200828T DE69200828D1 DE 69200828 D1 DE69200828 D1 DE 69200828D1 DE 69200828 T DE69200828 T DE 69200828T DE 69200828 T DE69200828 T DE 69200828T DE 69200828 D1 DE69200828 D1 DE 69200828D1
Authority
DE
Germany
Prior art keywords
bellows
speed control
pump speed
delivery outlet
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69200828T
Other languages
English (en)
Other versions
DE69200828T2 (de
Inventor
Jean-Marc Paquet
Luc Mathieu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Application granted granted Critical
Publication of DE69200828D1 publication Critical patent/DE69200828D1/de
Publication of DE69200828T2 publication Critical patent/DE69200828T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
    • F04B49/225—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves with throttling valves or valves varying the pump inlet opening or the outlet opening

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of The Air-Fuel Ratio Of Carburetors (AREA)
  • Gas Separation By Absorption (AREA)
DE69200828T 1991-10-07 1992-09-29 Anlage zum Pumpen von Gasen mit Pumpengeschwindigkeitsregelung. Expired - Fee Related DE69200828T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9112310A FR2682164B1 (fr) 1991-10-07 1991-10-07 Installation de pompage de gaz avec regulation de la vitesse de pompage.

Publications (2)

Publication Number Publication Date
DE69200828D1 true DE69200828D1 (de) 1995-01-19
DE69200828T2 DE69200828T2 (de) 1995-04-13

Family

ID=9417654

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69200828T Expired - Fee Related DE69200828T2 (de) 1991-10-07 1992-09-29 Anlage zum Pumpen von Gasen mit Pumpengeschwindigkeitsregelung.

Country Status (7)

Country Link
US (1) US5244353A (de)
EP (1) EP0537051B1 (de)
JP (1) JP3251983B2 (de)
AT (1) ATE115242T1 (de)
DE (1) DE69200828T2 (de)
DK (1) DK0537051T3 (de)
FR (1) FR2682164B1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030236489A1 (en) 2002-06-21 2003-12-25 Baxter International, Inc. Method and apparatus for closed-loop flow control system
FR2971018A1 (fr) * 2011-01-27 2012-08-03 Alcatel Vacuum Technology France Pompe a vide primaire, installation pour le traitement de substrats et procede de pompage
CN102155386A (zh) * 2011-05-27 2011-08-17 开平太平洋绝缘材料有限公司 液环式真空泵
GB2508396B (en) * 2012-11-30 2015-10-07 Edwards Ltd Improvements in and relating to vacuum conduits
CN107250558B (zh) * 2015-02-23 2019-12-20 豪顿罗茨有限责任公司 用于调节工作流体的流动的装置
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1948907A (en) * 1931-04-18 1934-02-27 Egli Eugen Compressor
US2951633A (en) * 1955-07-14 1960-09-06 Wagner Electric Corp System and method of lubricating air compressors and the like
US2935242A (en) * 1955-07-23 1960-05-03 Heraeus Gmbh W C Pumping apparatus
CH470589A (de) * 1968-10-11 1969-03-31 Balzers Patent Beteilig Ag Anordnung zur Evakuierung von Rezipienten
US3680980A (en) * 1970-02-20 1972-08-01 Hans U Bart Fuel pump
US3922110A (en) * 1974-01-28 1975-11-25 Henry Huse Multi-stage vacuum pump
US4596518A (en) * 1984-02-03 1986-06-24 Diesel Kiki Co., Ltd. Swash-plate type compressor
JPS60171989U (ja) * 1984-04-25 1985-11-14 株式会社ボッシュオートモーティブ　システム カ−ク−ラ用ベ−ン型圧縮機
US4563134A (en) * 1985-06-24 1986-01-07 General Motors Corporation Cylinder head with pressure regulator valve
JPS63263282A (ja) * 1987-04-22 1988-10-31 Toyota Autom Loom Works Ltd カ−エアコン用圧縮機の能力制御機構
US4850806A (en) * 1988-05-24 1989-07-25 The Boc Group, Inc. Controlled by-pass for a booster pump

Also Published As

Publication number Publication date
FR2682164B1 (fr) 1995-01-20
DE69200828T2 (de) 1995-04-13
ATE115242T1 (de) 1994-12-15
FR2682164A1 (fr) 1993-04-09
JPH05231371A (ja) 1993-09-07
EP0537051B1 (de) 1994-12-07
US5244353A (en) 1993-09-14
EP0537051A1 (de) 1993-04-14
JP3251983B2 (ja) 2002-01-28
DK0537051T3 (da) 1995-03-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee