EP0537051A1 - Anlage zum Pumpen von Gasen mit Pumpengeschwindigkeitsregelung - Google Patents

Anlage zum Pumpen von Gasen mit Pumpengeschwindigkeitsregelung Download PDF

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Publication number
EP0537051A1
EP0537051A1 EP92402669A EP92402669A EP0537051A1 EP 0537051 A1 EP0537051 A1 EP 0537051A1 EP 92402669 A EP92402669 A EP 92402669A EP 92402669 A EP92402669 A EP 92402669A EP 0537051 A1 EP0537051 A1 EP 0537051A1
Authority
EP
European Patent Office
Prior art keywords
bellows
machine
roots
gas
roots machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP92402669A
Other languages
English (en)
French (fr)
Other versions
EP0537051B1 (de
Inventor
Jean-Marc Paquet
Luc Mathieu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Publication of EP0537051A1 publication Critical patent/EP0537051A1/de
Application granted granted Critical
Publication of EP0537051B1 publication Critical patent/EP0537051B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
    • F04B49/225—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves with throttling valves or valves varying the pump inlet opening or the outlet opening

Definitions

  • the present invention relates to a gas pumping installation comprising the series connection of a machine of the ROOTS type and of a primary pump, a suction inlet part of the ROOTS machine being connected to an enclosure to be emptied.
  • ROOTS type machines as they are currently used, are limited in terms of their flow rate in the high pressure range, in particular due to their coupling with a primary pump, the flow rate of which is lower at high pressure pressures. as well as the limited power of their motor.
  • the invention aims to provide an installation of the type mentioned at the beginning allowing automatic regulation of the pumping speed of the ROOTS machine by simple means, compact, economical, efficient and secure.
  • the installation according to the invention comprises, in the inlet part of the ROOTS machine, a device for regulating the cross section of the gas as a function of the difference between the pressures prevailing, respectively, in said part. inlet and outlet part of the ROOTS machine, so as to adapt the flow of this machine to that of the primary pump.
  • the regulating device preferably comprises a bellows of generally elongated shape, arranged transversely with respect to the flow of gas in the inlet part of the ROOTS machine, the cross section of this bellows being substantially equal to or greater than the inner section of said inlet part, a first end of the bellows being fixed in a sealed manner in a wall of said inlet part, the second end of the bellows being closed and movable in the longitudinal direction of the bellows so as to modify the gas passage section.
  • This second end is subjected, on its outer side, to the pressure prevailing in the inlet part of the ROOTS machine and, on its inner side, directly or by means of a mechanical member, through an opening in the wall supporting said first end and through a channel connecting this opening to the discharge outlet part of the ROOTS machine, at the pressure prevailing in this outlet part.
  • a spring such as a helical tension spring, can be arranged to act on said movable end of the bellows, so as to compensate for the stiffness of the latter and to maintain it in an equilibrium position, when said pressure difference is substantially zero.
  • the bellows used preferably has a generally cylindrical shape and has a diameter greater than the largest dimension of the internal section of the entry part of the ROOTS machine, said bellows being disposed in a transverse cylindrical housing formed in said part. inlet, so that the bellows is guided during its deformation and allows the passage of gas only through the space between the walls of said housing and the external surface of the bellows.
  • the mechanical member transmitting the pressure through said wall of the entry part of the ROOTS machine can be a rod, one end of which is fixed to the movable end of the bellows and which passes through said opening of the wall of said part. entry.
  • Fig. 1 is a schematic representation, in longitudinal section, of a ROOTS machine, comprising a device for regulating the cross section of the gas in its inlet part.
  • Fig. 2 is a view in axial section of the inlet part of the ROOTS machine, showing the open position of the regulating device, and
  • Fig. 3 is a section along the plane III-III of FIG. 2.
  • the ROOTS machine shown diagrammatically in FIG. 1 comprises an inlet part, designated as a whole by the reference 1, and an outlet part designated by 2, between which is disposed a pumping structure 3 with rotary pistons 4, 5.
  • the opening 6 of the part d he input of the machine is intended to be put in communication with an enclosure to be emptied.
  • the discharge outlet 7 of the ROOTS machine is connected to a primary pump indicated diagrammatically by a block 8.
  • a bellows 9 of generally cylindrical shape is arranged transversely in the inlet part 1 of the ROOTS machine.
  • One end 10 of this bellows is tightly fixed in the wall of this inlet part, the other end 11 being able to engage in the position of maximum elongation of the bellows in a hollow portion 12 of the wall of said input portion.
  • the bellows In the retracted position of the bellows, shown in FIG. 2, the bellows is folded into a hollow part 13 of the wall diametrically opposite to the part 12.
  • FIG. 3 shows that the input part of the machine forms an essentially cylindrical housing 14, in which the bellows is guided during its movement.
  • the diameter of this housing is slightly larger than the outside diameter of the bellows, and substantially larger than the diameter of the inlet opening 6, so that in the position of maximum extension of the bellows, the sucked gas can only pass between the space between the external surface of the bellows and the surface of the housing 14 as well as, if necessary, in the space between the parts 11 and 12.
  • the bellows is provided with an actuating rod 20 passing through a fixing portion 15 to enter a chamber 16, which is connected by a channel 17 to the volume 18 of the outlet portion of machine discharge.
  • the bellows 9 is thus subjected to the difference between the pressures prevailing, respectively, in the inlet part and in the outlet part of the ROOTS machine.
  • a helical tension spring 19 can be provided inside the bellows 9 to compensate for the stiffness of the latter, and to maintain it in an equilibrium position when said pressure difference is substantially zero.
  • the ROOTS machine and the primary pump start to operate simultaneously and the bellows is opened according to the position in Fig. 2. Since the flow rate of the ROOTS machine is higher than that of the primary pump, the pressure in the chamber 18 and, consequently, in the chamber 16, becomes higher than the pressure in the inlet part of the machine , and the bellows closes. Consequently, the flow rate of the ROOTS machine decreases and the position of the bellows stabilizes when the flow rate of the ROOTS machine is compatible with that of the primary pump, the bellows being ajar to allow only the amount of gas corresponding to this regime to pass. stable.
  • the stiffness of the helical spring is chosen so as to compensate and preferably be slightly greater than that of the bellows itself, so that at rest the bellows returns to the position shown in FIG. 2.
  • the regulation device which has just been described is particularly simple and does not require any additional monitoring or actuation device.
  • the channel 17 only serving to put the chamber 18 and the chamber 16 in communication, and therefore having no gas flow rate, its section can be relatively small, which allows a gain in bulk of the ROOTS machine compared to a bypass machine with the same pumping rate.
  • the calibration of the stiffness and the preload of the spring 19 makes it possible to adapt the flow rate of the ROOTS machine to the maximum flow rate of the primary pump.
  • a particular advantage lies in the fact that the closure of the inlet part is never complete and the operation of the ROOTS machine is not interrupted, so that the passage of gas between the grooves of the bellows allows avoid deposits and sticking of solid particles contained in the gas. Furthermore, it appears from the above that there is no gas recycling from the chamber 18 to the inlet part of the ROOTS device, which makes it possible to avoid pollution of the enclosure to be emptied.
  • the bellows is only subjected to low pressure corrosion which is relatively mild. In the event of a bellows failure, the installation as a whole remains sealed, so that the pumped gases present no risk to the operator.
  • the present invention thus achieves considerable advantages over the usual installations of the type mentioned at the start.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of The Air-Fuel Ratio Of Carburetors (AREA)
  • Gas Separation By Absorption (AREA)
EP92402669A 1991-10-07 1992-09-29 Anlage zum Pumpen von Gasen mit Pumpengeschwindigkeitsregelung Expired - Lifetime EP0537051B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9112310A FR2682164B1 (fr) 1991-10-07 1991-10-07 Installation de pompage de gaz avec regulation de la vitesse de pompage.
FR9112310 1991-10-07

Publications (2)

Publication Number Publication Date
EP0537051A1 true EP0537051A1 (de) 1993-04-14
EP0537051B1 EP0537051B1 (de) 1994-12-07

Family

ID=9417654

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92402669A Expired - Lifetime EP0537051B1 (de) 1991-10-07 1992-09-29 Anlage zum Pumpen von Gasen mit Pumpengeschwindigkeitsregelung

Country Status (7)

Country Link
US (1) US5244353A (de)
EP (1) EP0537051B1 (de)
JP (1) JP3251983B2 (de)
AT (1) ATE115242T1 (de)
DE (1) DE69200828T2 (de)
DK (1) DK0537051T3 (de)
FR (1) FR2682164B1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102155386A (zh) * 2011-05-27 2011-08-17 开平太平洋绝缘材料有限公司 液环式真空泵
FR2971018A1 (fr) * 2011-01-27 2012-08-03 Alcatel Vacuum Technology France Pompe a vide primaire, installation pour le traitement de substrats et procede de pompage
WO2014083307A1 (en) * 2012-11-30 2014-06-05 Edwards Limited Improvements in and relating to vacuum conduits

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030236489A1 (en) 2002-06-21 2003-12-25 Baxter International, Inc. Method and apparatus for closed-loop flow control system
EP3262304A4 (de) * 2015-02-23 2018-08-01 Howden Roots LLC Vorrichtung zur konditionierung des flusses von arbeitsfluiden
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH470589A (de) * 1968-10-11 1969-03-31 Balzers Patent Beteilig Ag Anordnung zur Evakuierung von Rezipienten
US3922110A (en) * 1974-01-28 1975-11-25 Henry Huse Multi-stage vacuum pump
US4596518A (en) * 1984-02-03 1986-06-24 Diesel Kiki Co., Ltd. Swash-plate type compressor
EP0206539A2 (de) * 1985-06-24 1986-12-30 General Motors Corporation Überdruckpumpe mit Zylinderkopfbau
EP0343914A1 (de) * 1988-05-24 1989-11-29 The Boc Group, Inc. Vorrichtung und Verfahren zur Erzeugung eines Vakuums

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1948907A (en) * 1931-04-18 1934-02-27 Egli Eugen Compressor
US2951633A (en) * 1955-07-14 1960-09-06 Wagner Electric Corp System and method of lubricating air compressors and the like
US2935242A (en) * 1955-07-23 1960-05-03 Heraeus Gmbh W C Pumping apparatus
US3680980A (en) * 1970-02-20 1972-08-01 Hans U Bart Fuel pump
JPS60171989U (ja) * 1984-04-25 1985-11-14 株式会社ボッシュオートモーティブ　システム カ−ク−ラ用ベ−ン型圧縮機
JPS63263282A (ja) * 1987-04-22 1988-10-31 Toyota Autom Loom Works Ltd カ−エアコン用圧縮機の能力制御機構

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH470589A (de) * 1968-10-11 1969-03-31 Balzers Patent Beteilig Ag Anordnung zur Evakuierung von Rezipienten
US3922110A (en) * 1974-01-28 1975-11-25 Henry Huse Multi-stage vacuum pump
US4596518A (en) * 1984-02-03 1986-06-24 Diesel Kiki Co., Ltd. Swash-plate type compressor
EP0206539A2 (de) * 1985-06-24 1986-12-30 General Motors Corporation Überdruckpumpe mit Zylinderkopfbau
EP0343914A1 (de) * 1988-05-24 1989-11-29 The Boc Group, Inc. Vorrichtung und Verfahren zur Erzeugung eines Vakuums

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN (M-796)10 Février 1989 & JP-A-63 263 282 ( TOYOTA AUTOM LOOM WORKS ) 31 Octobre 1988 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2971018A1 (fr) * 2011-01-27 2012-08-03 Alcatel Vacuum Technology France Pompe a vide primaire, installation pour le traitement de substrats et procede de pompage
CN102155386A (zh) * 2011-05-27 2011-08-17 开平太平洋绝缘材料有限公司 液环式真空泵
WO2014083307A1 (en) * 2012-11-30 2014-06-05 Edwards Limited Improvements in and relating to vacuum conduits
CN104813025A (zh) * 2012-11-30 2015-07-29 爱德华兹有限公司 在真空管道中的与之相关的改进
CN104813025B (zh) * 2012-11-30 2018-03-30 爱德华兹有限公司 在真空管道中的与之相关的改进
US10539123B2 (en) 2012-11-30 2020-01-21 Edwards Limited Pressure regulating apparatus including conduit

Also Published As

Publication number Publication date
US5244353A (en) 1993-09-14
FR2682164A1 (fr) 1993-04-09
JP3251983B2 (ja) 2002-01-28
DK0537051T3 (da) 1995-03-06
DE69200828D1 (de) 1995-01-19
FR2682164B1 (fr) 1995-01-20
JPH05231371A (ja) 1993-09-07
EP0537051B1 (de) 1994-12-07
ATE115242T1 (de) 1994-12-15
DE69200828T2 (de) 1995-04-13

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