AT393367B - Schichtverbundwerkstoff, insbesondere fuer gleit- und reibelemente, sowie verfahren zu seiner herstellung - Google Patents
Schichtverbundwerkstoff, insbesondere fuer gleit- und reibelemente, sowie verfahren zu seiner herstellung Download PDFInfo
- Publication number
- AT393367B AT393367B AT88/87A AT8887A AT393367B AT 393367 B AT393367 B AT 393367B AT 88/87 A AT88/87 A AT 88/87A AT 8887 A AT8887 A AT 8887A AT 393367 B AT393367 B AT 393367B
- Authority
- AT
- Austria
- Prior art keywords
- diffusion barrier
- layer
- barrier layer
- sputtering
- substrate
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 17
- 239000002131 composite material Substances 0.000 title claims description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000010410 layer Substances 0.000 claims description 130
- 238000009792 diffusion process Methods 0.000 claims description 78
- 230000004888 barrier function Effects 0.000 claims description 71
- 238000004544 sputter deposition Methods 0.000 claims description 42
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 35
- 239000002346 layers by function Substances 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 21
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 18
- 229910052802 copper Inorganic materials 0.000 claims description 18
- 239000010949 copper Substances 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 18
- 239000012791 sliding layer Substances 0.000 claims description 15
- 239000013078 crystal Substances 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 10
- 230000002441 reversible effect Effects 0.000 claims description 10
- 238000005530 etching Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 229910001128 Sn alloy Inorganic materials 0.000 claims description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- CLDVQCMGOSGNIW-UHFFFAOYSA-N nickel tin Chemical compound [Ni].[Sn] CLDVQCMGOSGNIW-UHFFFAOYSA-N 0.000 claims description 6
- 239000010959 steel Substances 0.000 claims description 6
- 230000002159 abnormal effect Effects 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
- 230000005291 magnetic effect Effects 0.000 claims description 3
- 239000011241 protective layer Substances 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims description 3
- 238000007733 ion plating Methods 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 239000002245 particle Substances 0.000 description 8
- 239000011265 semifinished product Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000007872 degassing Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229910000906 Bronze Inorganic materials 0.000 description 3
- 239000010974 bronze Substances 0.000 description 3
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000001953 recrystallisation Methods 0.000 description 3
- 229910017132 AlSn Inorganic materials 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910000978 Pb alloy Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 239000001996 bearing alloy Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000003631 expected effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000004881 precipitation hardening Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000005292 vacuum distillation Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D69/00—Friction linings; Attachment thereof; Selection of coacting friction substances or surfaces
- F16D69/02—Composition of linings ; Methods of manufacturing
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
- C23C28/021—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/14—Special methods of manufacture; Running-in
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2223/00—Surface treatments; Hardening; Coating
- F16C2223/30—Coating surfaces
- F16C2223/60—Coating surfaces by vapour deposition, e.g. PVD, CVD
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D69/00—Friction linings; Attachment thereof; Selection of coacting friction substances or surfaces
- F16D2069/005—Friction linings; Attachment thereof; Selection of coacting friction substances or surfaces having a layered structure
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3601439A DE3601439C1 (de) | 1986-01-20 | 1986-01-20 | Schichtverbundwerkstoff,insbesondere fuer Gleit- und Reibelemente,sowie Verfahren zu seiner Herstellung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| ATA8887A ATA8887A (de) | 1991-03-15 |
| AT393367B true AT393367B (de) | 1991-10-10 |
Family
ID=6292158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT88/87A AT393367B (de) | 1986-01-20 | 1987-01-19 | Schichtverbundwerkstoff, insbesondere fuer gleit- und reibelemente, sowie verfahren zu seiner herstellung |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US4832809A (en, 2012) |
| JP (1) | JPS62170335A (en, 2012) |
| AT (1) | AT393367B (en, 2012) |
| BR (1) | BR8700174A (en, 2012) |
| CH (1) | CH672318A5 (en, 2012) |
| DE (1) | DE3601439C1 (en, 2012) |
| FR (1) | FR2593115B1 (en, 2012) |
| GB (1) | GB2185496B (en, 2012) |
| IT (1) | IT1201169B (en, 2012) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4961831A (en) * | 1986-12-23 | 1990-10-09 | Balzers Aktiengesellschaft | Composite material having a slide layer applied by cathode sputtering |
| DE3806124A1 (de) * | 1988-02-26 | 1989-09-07 | Leybold Ag | Verfahren zum herstellen von scheiben aus mineralglas mit hohem transmissionsverhalten im sichtbaren spektralbereich und mit niedriger sonnenenergietransmission sowie durch das verfahren hergestellte scheiben |
| DE4223631C2 (de) * | 1991-07-18 | 1998-04-30 | Honda Motor Co Ltd | Gleitelement |
| AT400040B (de) * | 1993-06-02 | 1995-09-25 | Andritz Patentverwaltung | Verfahren und vorrichtung zur beschichtung von metallsubstraten, insbesondere stahl- oder aluminiumbblechen in bandform |
| US5520752A (en) * | 1994-06-20 | 1996-05-28 | The United States Of America As Represented By The Secretary Of The Army | Composite solders |
| US5685797A (en) * | 1995-05-17 | 1997-11-11 | United Technologies Corporation | Coated planet gear journal bearing and process of making same |
| US20030031928A1 (en) * | 1999-05-20 | 2003-02-13 | Saint-Gobain Vitrage | Electrochemical device |
| DE10337029B4 (de) * | 2003-08-12 | 2009-06-04 | Federal-Mogul Wiesbaden Gmbh | Schichtverbundwerkstoff, Herstellung und Verwendung |
| DE102010011083B3 (de) * | 2010-03-12 | 2011-06-16 | Ks Gleitlager Gmbh | Gleitlagerverbundwerkstoff |
| CN101922513B (zh) * | 2010-08-03 | 2012-05-09 | 广州安达汽车零部件股份有限公司 | 具有真空溅镀镀层的轴瓦及其生产方法 |
| JP2012062941A (ja) * | 2010-09-15 | 2012-03-29 | Daido Metal Co Ltd | 摺動部材 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB706672A (en) * | 1952-03-05 | 1954-03-31 | Glacier Co Ltd | Improvements in or relating to plain bearings |
| GB733212A (en) * | 1953-01-16 | 1955-07-06 | Glacier Co Ltd | Improvements in or relating to plain bearings |
| US3307926A (en) * | 1964-10-02 | 1967-03-07 | Detroit Aluminum & Brass Corp | Bearing construction |
| GB1600951A (en) * | 1977-05-16 | 1981-10-21 | Glyco Metall Werke | Sliding bearing with an anti friction layer of an alloy with a lead-tin-copper base |
| GB2117403A (en) * | 1982-03-15 | 1983-10-12 | Shell Int Research | Composite antifriction bearing |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3365777A (en) * | 1966-02-14 | 1968-01-30 | Clevite Corp | Method for producing a multi-layer bearing |
| FR1530559A (fr) * | 1967-05-16 | 1968-06-28 | Ct Stephanois De Rech Mecaniqu | Traitement anti-usure par formation, sur un métal ou un alliage, d'une couche composite par cuisson |
| US4035208A (en) * | 1974-09-03 | 1977-07-12 | Texas Instruments Incorporated | Method of patterning Cr-Pt-Au metallization for silicon devices |
| US4140592A (en) * | 1978-03-30 | 1979-02-20 | The United States Of America As Represented By The Secretary Of The Air Force | Gas bearing surface coating |
| US4245008A (en) * | 1978-10-30 | 1981-01-13 | International Business Machines Corporation | Corrosion resistant magnetic recording media |
| GB2040315B (en) * | 1978-12-13 | 1983-05-11 | Glyco Metall Werke | Laminar material or element and a process for its manufacture |
| DE2853724C3 (de) * | 1978-12-13 | 1981-07-16 | Glyco-Metall-Werke Daelen & Loos Gmbh, 6200 Wiesbaden | Schichtwerkstoff oder Schichtwerkstück sowie Verfahren zu dessen Herstellung |
| DE2914618C2 (de) * | 1979-04-11 | 1983-09-29 | Glyco-Metall-Werke Daelen & Loos Gmbh, 6200 Wiesbaden | Schichtwerkstoff mit auf einer Trägerschicht im Drahtexplosionsverfahren oder Kathodenzerstäubung (Sputtering) aufgebrachter Gleit- oder Reibschicht, Verfahren zu seiner Herstellung und Target zur Durchführung des Verfahrens |
| DE2926708C2 (de) * | 1979-07-03 | 1984-02-16 | Glyco-Metall-Werke Daelen & Loos Gmbh, 6200 Wiesbaden | Gleitelement, das mit extrem hohem Flächendruck und bzw. oder Reibung bzw. Verschleiß und bzw. oder hoher Temperatur beanspruchbar ist, und Verfahren zu seiner Herstellung |
| US4495252A (en) * | 1980-01-16 | 1985-01-22 | Imperial Clevite Inc. | Wear-resistant metallic article |
| US4336118A (en) * | 1980-03-21 | 1982-06-22 | Battelle Memorial Institute | Methods for making deposited films with improved microstructures |
| US4290876A (en) * | 1980-06-05 | 1981-09-22 | Murata Manufacturing Co., Ltd. | Sputtering apparatus |
| US4448854A (en) * | 1980-10-30 | 1984-05-15 | The United States Of America As Represented By The United States Department Of Energy | Coherent multilayer crystals and method of making |
| US4342632A (en) * | 1981-05-01 | 1982-08-03 | The United States Of America As Represented By The Secretary Of The Army | Method of metallizing a ceramic substrate |
| DE3304740C2 (de) * | 1983-02-11 | 1985-02-21 | Glyco-Metall-Werke Daelen & Loos Gmbh, 6200 Wiesbaden | Mehrschichten-Gleitlager |
| DE3335716A1 (de) * | 1983-10-01 | 1985-05-02 | Glyco-Metall-Werke Daelen & Loos Gmbh, 6200 Wiesbaden | Gleitlager und verfahren zu seiner herstellung |
| ATE47504T1 (de) * | 1983-12-05 | 1989-11-15 | Leybold Ag | Magnetronkatode zum zerstaeuben ferromagnetischer targets. |
| DE3480145D1 (en) * | 1983-12-05 | 1989-11-16 | Leybold Ag | Magnetron cathode for the sputtering of ferromagnetic targets |
| US4552820A (en) * | 1984-04-25 | 1985-11-12 | Lin Data Corporation | Disc media |
-
1986
- 1986-01-20 DE DE3601439A patent/DE3601439C1/de not_active Expired
- 1986-12-29 GB GB8630977A patent/GB2185496B/en not_active Expired - Lifetime
-
1987
- 1987-01-12 US US07/002,647 patent/US4832809A/en not_active Expired - Fee Related
- 1987-01-16 BR BR8700174A patent/BR8700174A/pt unknown
- 1987-01-19 CH CH167/87A patent/CH672318A5/de not_active IP Right Cessation
- 1987-01-19 FR FR878700618A patent/FR2593115B1/fr not_active Expired
- 1987-01-19 AT AT88/87A patent/AT393367B/de not_active IP Right Cessation
- 1987-01-20 IT IT19113/87A patent/IT1201169B/it active
- 1987-01-20 JP JP62009185A patent/JPS62170335A/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB706672A (en) * | 1952-03-05 | 1954-03-31 | Glacier Co Ltd | Improvements in or relating to plain bearings |
| GB733212A (en) * | 1953-01-16 | 1955-07-06 | Glacier Co Ltd | Improvements in or relating to plain bearings |
| US3307926A (en) * | 1964-10-02 | 1967-03-07 | Detroit Aluminum & Brass Corp | Bearing construction |
| GB1600951A (en) * | 1977-05-16 | 1981-10-21 | Glyco Metall Werke | Sliding bearing with an anti friction layer of an alloy with a lead-tin-copper base |
| GB2117403A (en) * | 1982-03-15 | 1983-10-12 | Shell Int Research | Composite antifriction bearing |
Also Published As
| Publication number | Publication date |
|---|---|
| ATA8887A (de) | 1991-03-15 |
| FR2593115A1 (fr) | 1987-07-24 |
| IT1201169B (it) | 1989-01-27 |
| CH672318A5 (en, 2012) | 1989-11-15 |
| GB2185496B (en) | 1990-02-07 |
| DE3601439C1 (de) | 1987-04-09 |
| GB8630977D0 (en) | 1987-02-04 |
| BR8700174A (pt) | 1987-12-08 |
| GB2185496A (en) | 1987-07-22 |
| US4832809A (en) | 1989-05-23 |
| JPS62170335A (ja) | 1987-07-27 |
| IT8719113A0 (it) | 1987-01-20 |
| FR2593115B1 (fr) | 1989-02-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ELJ | Ceased due to non-payment of the annual fee | ||
| EEIH | Change in the person of patent owner | ||
| REN | Ceased due to non-payment of the annual fee |