AT311419B - Verfahren zur Getterung schnell diffundierender Verunreinigungen in Halbleiterkristallscheiben - Google Patents
Verfahren zur Getterung schnell diffundierender Verunreinigungen in HalbleiterkristallscheibenInfo
- Publication number
- AT311419B AT311419B AT1180269A AT1180269A AT311419B AT 311419 B AT311419 B AT 311419B AT 1180269 A AT1180269 A AT 1180269A AT 1180269 A AT1180269 A AT 1180269A AT 311419 B AT311419 B AT 311419B
- Authority
- AT
- Austria
- Prior art keywords
- gettering
- semiconductor crystal
- crystal wafers
- diffusing impurities
- rapidly diffusing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
- H10P95/40—Treatments of semiconductor bodies to modify their internal properties, e.g. to produce internal imperfections
- H10P95/408—Treatments of semiconductor bodies to modify their internal properties, e.g. to produce internal imperfections of Group III-V semiconductors, e.g. to render them semi-insulating
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01D—HARVESTING; MOWING
- A01D19/00—Digging machines with centrifugal wheels, drums or spinners
- A01D19/04—Digging machines with centrifugal wheels, drums or spinners with working tools rotating around a horizontal axis arranged parallel to the direction of travel
- A01D19/06—Digging machines with centrifugal wheels, drums or spinners with working tools rotating around a horizontal axis arranged parallel to the direction of travel with scoop wheels or drums
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P36/00—Gettering within semiconductor bodies
- H10P36/03—Gettering within semiconductor bodies within silicon bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
- H10W74/43—Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Environmental Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19681816083 DE1816083C3 (de) | 1968-12-20 | Verfahren zur Getterung schnell diffundierender Verunreinigungen in Halbleiterkristallscheiben |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AT311419B true AT311419B (de) | 1973-11-12 |
Family
ID=5716946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT1180269A AT311419B (de) | 1968-12-20 | 1969-12-18 | Verfahren zur Getterung schnell diffundierender Verunreinigungen in Halbleiterkristallscheiben |
Country Status (6)
| Country | Link |
|---|---|
| AT (1) | AT311419B (enExample) |
| CH (1) | CH522290A (enExample) |
| FR (1) | FR2026656B1 (enExample) |
| GB (1) | GB1267700A (enExample) |
| NL (1) | NL6918858A (enExample) |
| SE (1) | SE363243B (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1307546A (en) * | 1970-05-22 | 1973-02-21 | Mullard Ltd | Methods of manufacturing semiconductor devices |
| KR890011023A (ko) * | 1987-12-30 | 1989-08-12 | 아놀드 하비 콜 | 갈륨 아세나이드 다결정체의 게터링 |
-
1969
- 1969-12-16 CH CH1869869A patent/CH522290A/de not_active IP Right Cessation
- 1969-12-16 NL NL6918858A patent/NL6918858A/xx unknown
- 1969-12-17 GB GB61408/69A patent/GB1267700A/en not_active Expired
- 1969-12-17 FR FR6943692A patent/FR2026656B1/fr not_active Expired
- 1969-12-18 AT AT1180269A patent/AT311419B/de not_active IP Right Cessation
- 1969-12-19 SE SE17667/69A patent/SE363243B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| SE363243B (enExample) | 1974-01-14 |
| CH522290A (de) | 1972-06-15 |
| NL6918858A (enExample) | 1970-06-23 |
| DE1816083B2 (de) | 1976-05-13 |
| DE1816083A1 (de) | 1970-06-25 |
| FR2026656A1 (enExample) | 1970-09-18 |
| GB1267700A (en) | 1972-03-22 |
| FR2026656B1 (enExample) | 1975-04-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ELJ | Ceased due to non-payment of the annual fee |