AT306804B - Kathodolumineszenzeinrichtung für Rasterelektronenmikroskope - Google Patents

Kathodolumineszenzeinrichtung für Rasterelektronenmikroskope

Info

Publication number
AT306804B
AT306804B AT860371A AT860371A AT306804B AT 306804 B AT306804 B AT 306804B AT 860371 A AT860371 A AT 860371A AT 860371 A AT860371 A AT 860371A AT 306804 B AT306804 B AT 306804B
Authority
AT
Austria
Prior art keywords
scanning electron
electron microscopes
cathodoluminescence device
cathodoluminescence
microscopes
Prior art date
Application number
AT860371A
Other languages
English (en)
Inventor
Erwin Dr Hoerl
Peter Scholze
Eduard Muegschl
Original Assignee
Oesterr Studien Atomenergie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oesterr Studien Atomenergie filed Critical Oesterr Studien Atomenergie
Priority to AT860371A priority Critical patent/AT306804B/de
Priority to DE2246865A priority patent/DE2246865B2/de
Priority to US00292954A priority patent/US3790781A/en
Priority to JP47098864A priority patent/JPS4846265A/ja
Priority to GB4565672A priority patent/GB1369314A/en
Application granted granted Critical
Publication of AT306804B publication Critical patent/AT306804B/de
Priority to JP1977090817U priority patent/JPS5310255U/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT860371A 1971-10-05 1971-10-05 Kathodolumineszenzeinrichtung für Rasterelektronenmikroskope AT306804B (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
AT860371A AT306804B (de) 1971-10-05 1971-10-05 Kathodolumineszenzeinrichtung für Rasterelektronenmikroskope
DE2246865A DE2246865B2 (de) 1971-10-05 1972-09-23 Kathodolumineszenzeinnchtung fur Rasterelektronenmikroskope
US00292954A US3790781A (en) 1971-10-05 1972-09-28 Cathodoluminescence device for scanning electron microscopes
JP47098864A JPS4846265A (de) 1971-10-05 1972-10-02
GB4565672A GB1369314A (en) 1971-10-05 1972-10-04 Scanning electron microscopes having cathodoluminescence devices
JP1977090817U JPS5310255U (de) 1971-10-05 1977-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT860371A AT306804B (de) 1971-10-05 1971-10-05 Kathodolumineszenzeinrichtung für Rasterelektronenmikroskope

Publications (1)

Publication Number Publication Date
AT306804B true AT306804B (de) 1973-04-25

Family

ID=3606958

Family Applications (1)

Application Number Title Priority Date Filing Date
AT860371A AT306804B (de) 1971-10-05 1971-10-05 Kathodolumineszenzeinrichtung für Rasterelektronenmikroskope

Country Status (5)

Country Link
US (1) US3790781A (de)
JP (2) JPS4846265A (de)
AT (1) AT306804B (de)
DE (1) DE2246865B2 (de)
GB (1) GB1369314A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0306790A2 (de) * 1987-09-05 1989-03-15 Firma Carl Zeiss Kathodolumineszenzdetektor

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7902963A (nl) * 1979-04-13 1980-10-15 Philips Nv Detektor voor elektronenmikroskoop.
AU534811B2 (en) * 1979-07-03 1984-02-16 Unisearch Limited Atmospheric scanning electron microscope
JPS57103747A (en) * 1980-12-20 1982-06-28 Hitachi Kiden Kogyo Ltd Automatic press device
JPS58117058U (ja) * 1982-02-04 1983-08-10 日本電子株式会社 走査電子顕微鏡用カソ−ドルミネツセンス装置
US4546254A (en) * 1983-03-24 1985-10-08 Shimadzu Corporation Charged particle energy analyzer
US4578584A (en) * 1984-01-23 1986-03-25 International Business Machines Corporation Thermal wave microscopy using areal infrared detection
JPS6195722A (ja) * 1984-10-18 1986-05-14 Nippon Kokan Kk <Nkk> プレスブレ−キの材料追従装置
US4831267A (en) * 1987-02-16 1989-05-16 Siemens Aktiengesellschaft Detector for charged particles
JPH07108414B2 (ja) * 1988-01-05 1995-11-22 鋼鈑工業株式会社 プレスブレーキ用材料供給装置
US4979199A (en) * 1989-10-31 1990-12-18 General Electric Company Microfocus X-ray tube with optical spot size sensing means
US5264704A (en) * 1992-11-17 1993-11-23 National University Of Singapore High efficiency cathodoluminescence detector with high discrimination against backscattered electrons
US5468967A (en) * 1994-08-26 1995-11-21 National University Of Singapore Double reflection cathodoluminescence detector with extremely high discrimination against backscattered electrons
US5724131A (en) * 1995-06-14 1998-03-03 The National University Of Singapore Integrated emission microscope for panchromatic imaging, continuous wavelength spectroscopy and selective area spectroscopic mapping
US5569920A (en) * 1995-06-14 1996-10-29 National University Of Singapore Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens
JP4824527B2 (ja) * 2006-11-01 2011-11-30 株式会社トプコン 試料分析装置
GB2478900A (en) 2009-09-10 2011-09-28 Univ Sheffield Collection of electromagnetic radiation emitted from particle irradiated samples
DE102009046211B4 (de) 2009-10-30 2017-08-24 Carl Zeiss Microscopy Gmbh Detektionsvorrichtung und Teilchenstrahlgerät mit Detektionsvorrichtung
US9322776B2 (en) * 2014-08-19 2016-04-26 The Boeing Company Method and system for imaging a target
JP7141874B2 (ja) * 2017-09-29 2022-09-26 株式会社堀場製作所 ルミネッセンス採光装置
EP3462475A3 (de) * 2017-09-29 2019-11-20 Horiba, Ltd. Lumineszenzsammelvorrichtung
US11114274B2 (en) * 2019-12-23 2021-09-07 Carl Zeiss Smt Gmbh Method and system for testing an integrated circuit
CN113675060A (zh) * 2020-05-13 2021-11-19 聚束科技（北京）有限公司 一种扫描电子显微镜

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3319071A (en) * 1964-11-27 1967-05-09 Gen Motors Corp Infrared gas analysis absorption chamber having a highly reflective specular internal surface
JPS517072A (de) * 1974-07-08 1976-01-21 Satsuki Kitani

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0306790A2 (de) * 1987-09-05 1989-03-15 Firma Carl Zeiss Kathodolumineszenzdetektor
EP0306790A3 (de) * 1987-09-05 1990-06-20 Firma Carl Zeiss Kathodolumineszenzdetektor

Also Published As

Publication number Publication date
JPS5310255U (de) 1978-01-27
DE2246865A1 (de) 1973-04-19
JPS4846265A (de) 1973-07-02
DE2246865B2 (de) 1973-10-18
GB1369314A (en) 1974-10-02
DE2246865C3 (de) 1974-05-16
US3790781A (en) 1974-02-05

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee