DE2246865C3 - - Google Patents

Info

Publication number
DE2246865C3
DE2246865C3 DE2246865A DE2246865A DE2246865C3 DE 2246865 C3 DE2246865 C3 DE 2246865C3 DE 2246865 A DE2246865 A DE 2246865A DE 2246865 A DE2246865 A DE 2246865A DE 2246865 C3 DE2246865 C3 DE 2246865C3
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2246865A
Other versions
DE2246865A1 (de
DE2246865B2 (de
Inventor
Erwin Dr. Hoerl
Peter Scholze
Eduard Muengschl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oesterreichische Studiengesellschaft fur Atomenergie Wien GmbH
Original Assignee
Oesterreichische Studiengesellschaft fur Atomenergie Wien GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oesterreichische Studiengesellschaft fur Atomenergie Wien GmbH filed Critical Oesterreichische Studiengesellschaft fur Atomenergie Wien GmbH
Publication of DE2246865A1 publication Critical patent/DE2246865A1/de
Publication of DE2246865B2 publication Critical patent/DE2246865B2/de
Application granted granted Critical
Publication of DE2246865C3 publication Critical patent/DE2246865C3/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE2246865A 1971-10-05 1972-09-23 Kathodolumineszenzeinnchtung fur Rasterelektronenmikroskope Granted DE2246865B2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT860371A AT306804B (de) 1971-10-05 1971-10-05 Kathodolumineszenzeinrichtung für Rasterelektronenmikroskope

Publications (3)

Publication Number Publication Date
DE2246865A1 DE2246865A1 (de) 1973-04-19
DE2246865B2 DE2246865B2 (de) 1973-10-18
DE2246865C3 true DE2246865C3 (de) 1974-05-16

Family

ID=3606958

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2246865A Granted DE2246865B2 (de) 1971-10-05 1972-09-23 Kathodolumineszenzeinnchtung fur Rasterelektronenmikroskope

Country Status (5)

Country Link
US (1) US3790781A (de)
JP (2) JPS4846265A (de)
AT (1) AT306804B (de)
DE (1) DE2246865B2 (de)
GB (1) GB1369314A (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7902963A (nl) * 1979-04-13 1980-10-15 Philips Nv Detektor voor elektronenmikroskoop.
AU534811B2 (en) * 1979-07-03 1984-02-16 Unisearch Limited Atmospheric scanning electron microscope
JPS57103747A (en) * 1980-12-20 1982-06-28 Hitachi Kiden Kogyo Ltd Automatic press device
JPS58117058U (ja) * 1982-02-04 1983-08-10 日本電子株式会社 走査電子顕微鏡用カソ−ドルミネツセンス装置
US4546254A (en) * 1983-03-24 1985-10-08 Shimadzu Corporation Charged particle energy analyzer
US4578584A (en) * 1984-01-23 1986-03-25 International Business Machines Corporation Thermal wave microscopy using areal infrared detection
JPS6195722A (ja) * 1984-10-18 1986-05-14 Nippon Kokan Kk <Nkk> プレスブレ−キの材料追従装置
US4831267A (en) * 1987-02-16 1989-05-16 Siemens Aktiengesellschaft Detector for charged particles
DE3729846A1 (de) * 1987-09-05 1989-03-23 Zeiss Carl Fa Kathodolumineszenzdetektor
JPH07108414B2 (ja) * 1988-01-05 1995-11-22 鋼鈑工業株式会社 プレスブレーキ用材料供給装置
US4979199A (en) * 1989-10-31 1990-12-18 General Electric Company Microfocus X-ray tube with optical spot size sensing means
US5264704A (en) * 1992-11-17 1993-11-23 National University Of Singapore High efficiency cathodoluminescence detector with high discrimination against backscattered electrons
US5468967A (en) * 1994-08-26 1995-11-21 National University Of Singapore Double reflection cathodoluminescence detector with extremely high discrimination against backscattered electrons
US5569920A (en) * 1995-06-14 1996-10-29 National University Of Singapore Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens
US5724131A (en) * 1995-06-14 1998-03-03 The National University Of Singapore Integrated emission microscope for panchromatic imaging, continuous wavelength spectroscopy and selective area spectroscopic mapping
JP4824527B2 (ja) * 2006-11-01 2011-11-30 株式会社トプコン 試料分析装置
GB2478900A (en) 2009-09-10 2011-09-28 Univ Sheffield Collection of electromagnetic radiation emitted from particle irradiated samples
DE102009046211B4 (de) 2009-10-30 2017-08-24 Carl Zeiss Microscopy Gmbh Detektionsvorrichtung und Teilchenstrahlgerät mit Detektionsvorrichtung
US9322776B2 (en) * 2014-08-19 2016-04-26 The Boeing Company Method and system for imaging a target
EP3462475A3 (de) * 2017-09-29 2019-11-20 Horiba, Ltd. Lumineszenzsammelvorrichtung
JP7141874B2 (ja) * 2017-09-29 2022-09-26 株式会社堀場製作所 ルミネッセンス採光装置
US11114274B2 (en) * 2019-12-23 2021-09-07 Carl Zeiss Smt Gmbh Method and system for testing an integrated circuit
CN113675060A (zh) * 2020-05-13 2021-11-19 聚束科技（北京）有限公司 一种扫描电子显微镜

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3319071A (en) * 1964-11-27 1967-05-09 Gen Motors Corp Infrared gas analysis absorption chamber having a highly reflective specular internal surface
JPS517072A (de) * 1974-07-08 1976-01-21 Satsuki Kitani

Also Published As

Publication number Publication date
AT306804B (de) 1973-04-25
JPS4846265A (de) 1973-07-02
JPS5310255U (de) 1978-01-27
DE2246865A1 (de) 1973-04-19
DE2246865B2 (de) 1973-10-18
GB1369314A (en) 1974-10-02
US3790781A (en) 1974-02-05

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee