CH520332A - Vorrichtung für die Elektronen-Rastermikroskopie und die Elektronenstrahl-Mikroanalyse - Google Patents
Vorrichtung für die Elektronen-Rastermikroskopie und die Elektronenstrahl-MikroanalyseInfo
- Publication number
- CH520332A CH520332A CH336371A CH336371A CH520332A CH 520332 A CH520332 A CH 520332A CH 336371 A CH336371 A CH 336371A CH 336371 A CH336371 A CH 336371A CH 520332 A CH520332 A CH 520332A
- Authority
- CH
- Switzerland
- Prior art keywords
- electron beam
- beam microanalysis
- scanning electron
- electron microscopy
- microscopy
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2448—Secondary particle detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24495—Signal processing, e.g. mixing of two or more signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2011193A DE2011193C3 (de) | 1970-03-10 | 1970-03-10 | Vorrichtung für die Elektronen-Rastermikroskopie und die Elektronenstrahl-Mikroanalyse |
Publications (1)
Publication Number | Publication Date |
---|---|
CH520332A true CH520332A (de) | 1972-03-15 |
Family
ID=5764619
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH336371A CH520332A (de) | 1970-03-10 | 1971-03-08 | Vorrichtung für die Elektronen-Rastermikroskopie und die Elektronenstrahl-Mikroanalyse |
Country Status (5)
Country | Link |
---|---|
US (1) | US3714424A (de) |
CH (1) | CH520332A (de) |
DE (1) | DE2011193C3 (de) |
FR (1) | FR2084337A5 (de) |
GB (1) | GB1293716A (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2903077C2 (de) * | 1979-01-26 | 1986-07-17 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur berührungslosen Potentialmessung an einem elektronischen Bauelement und Anordnung zur Durchführung des Verfahrens |
DE2921151C2 (de) * | 1979-05-25 | 1982-12-02 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Vorrichtung zum Nachweis von in einem Abtast-Elektronenstrahlmikroskop von einer Probe ausgehenden Rückstreuelektronen |
JPS5932145A (ja) * | 1982-08-16 | 1984-02-21 | Hitachi Ltd | 電位検出装置 |
JPS607049A (ja) * | 1983-06-24 | 1985-01-14 | Hitachi Ltd | 電位測定装置 |
GB8515250D0 (en) * | 1985-06-17 | 1985-07-17 | Texas Instruments Ltd | Testing of integrated circuits |
DE3602366A1 (de) * | 1986-01-27 | 1987-07-30 | Siemens Ag | Verfahren und anordnung zum nachweis der auf einer probe von einem primaeren korpuskularstrahl ausgeloesten sekundaerkorpuskeln |
US5412210A (en) * | 1990-10-12 | 1995-05-02 | Hitachi, Ltd. | Scanning electron microscope and method for production of semiconductor device by using the same |
US5594245A (en) * | 1990-10-12 | 1997-01-14 | Hitachi, Ltd. | Scanning electron microscope and method for dimension measuring by using the same |
US5866904A (en) * | 1990-10-12 | 1999-02-02 | Hitachi, Ltd. | Scanning electron microscope and method for dimension measuring by using the same |
US5412211A (en) * | 1993-07-30 | 1995-05-02 | Electroscan Corporation | Environmental scanning electron microscope |
US6633034B1 (en) * | 2000-05-04 | 2003-10-14 | Applied Materials, Inc. | Method and apparatus for imaging a specimen using low profile electron detector for charged particle beam imaging apparatus including electrostatic mirrors |
WO2010148423A1 (en) * | 2009-06-22 | 2010-12-29 | The University Of Western Australia | An imaging detector for a scanning charged particle microscope |
US9190241B2 (en) * | 2013-03-25 | 2015-11-17 | Hermes-Microvision, Inc. | Charged particle beam apparatus |
US10236156B2 (en) | 2015-03-25 | 2019-03-19 | Hermes Microvision Inc. | Apparatus of plural charged-particle beams |
US11933668B2 (en) * | 2020-02-03 | 2024-03-19 | Rohde & Schwarz Gmbh & Co. Kg | Sampling assembly and testing instrument |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3535516A (en) * | 1966-10-17 | 1970-10-20 | Hitachi Ltd | Electron microscope employing a modulated scanning beam and a phase sensitive detector to improve the signal to noise ratio |
-
1970
- 1970-03-10 DE DE2011193A patent/DE2011193C3/de not_active Expired
-
1971
- 1971-03-08 CH CH336371A patent/CH520332A/de not_active IP Right Cessation
- 1971-03-09 FR FR7108019A patent/FR2084337A5/fr not_active Expired
- 1971-03-10 US US00122785A patent/US3714424A/en not_active Expired - Lifetime
- 1971-04-19 GB GB22775/71A patent/GB1293716A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2011193C3 (de) | 1974-03-28 |
GB1293716A (en) | 1972-10-25 |
DE2011193A1 (de) | 1971-09-23 |
FR2084337A5 (de) | 1971-12-17 |
US3714424A (en) | 1973-01-30 |
DE2011193B2 (de) | 1973-08-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |