CH514932A - Korpuskularstrahl-Bearbeitungsgerät mit einem Objekttisch und Ablenkmitteln für den Strahl - Google Patents

Korpuskularstrahl-Bearbeitungsgerät mit einem Objekttisch und Ablenkmitteln für den Strahl

Info

Publication number
CH514932A
CH514932A CH1416169A CH1416169A CH514932A CH 514932 A CH514932 A CH 514932A CH 1416169 A CH1416169 A CH 1416169A CH 1416169 A CH1416169 A CH 1416169A CH 514932 A CH514932 A CH 514932A
Authority
CH
Switzerland
Prior art keywords
processing device
deflection means
object table
corpuscular
beam processing
Prior art date
Application number
CH1416169A
Other languages
English (en)
Inventor
Hans Dipl Phys Rehme
Kurt Dipl Phys Toegel
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH514932A publication Critical patent/CH514932A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/39—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using a combination of the means covered by at least two of the preceding groups G05B19/21, G05B19/27 and G05B19/33

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Electron Beam Exposure (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CH1416169A 1968-10-18 1969-09-19 Korpuskularstrahl-Bearbeitungsgerät mit einem Objekttisch und Ablenkmitteln für den Strahl CH514932A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681804646 DE1804646B2 (de) 1968-10-18 1968-10-18 Korpuskularstrahl-bearbeitungsgeraet

Publications (1)

Publication Number Publication Date
CH514932A true CH514932A (de) 1971-10-31

Family

ID=5711258

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1416169A CH514932A (de) 1968-10-18 1969-09-19 Korpuskularstrahl-Bearbeitungsgerät mit einem Objekttisch und Ablenkmitteln für den Strahl

Country Status (7)

Country Link
US (1) US3651303A (de)
AT (1) AT296448B (de)
CH (1) CH514932A (de)
DE (1) DE1804646B2 (de)
FR (1) FR2021033A1 (de)
GB (1) GB1280328A (de)
NL (1) NL6915306A (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3842236A (en) * 1970-03-28 1974-10-15 Steigerwald Strahltech Process to control the movement of a workpiece with respect to a beam of a stock processing machine operating by means of controllable power irradiation
US4021675A (en) * 1973-02-20 1977-05-03 Hughes Aircraft Company System for controlling ion implantation dosage in electronic materials
US3849659A (en) * 1973-09-10 1974-11-19 Westinghouse Electric Corp Alignment of a patterned electron beam with a member by electron backscatter
US3886421A (en) * 1973-09-10 1975-05-27 Ibm Precision tool and workpiece positioning apparatus with ringout detection
US4019015A (en) * 1973-09-10 1977-04-19 International Business Machines Corporation Precision tool and workpiece positioning apparatus with ringout detection
US4016396A (en) * 1973-09-10 1977-04-05 Ibm Corporation Precision tool and workpiece positioning apparatus
US3904945A (en) * 1973-09-10 1975-09-09 Ibm Precision tool and workpiece positioning apparatus
US3900736A (en) * 1974-01-28 1975-08-19 Ibm Method and apparatus for positioning a beam of charged particles
US3875415A (en) * 1974-01-28 1975-04-01 Ibm Method and apparatus for detecting a registration mark on a target such as a semiconductor wafer
US3901814A (en) * 1974-06-27 1975-08-26 Ibm Method and apparatus for detecting a registration mark on a target such as a semiconductor wafer
US4097745A (en) * 1976-10-13 1978-06-27 General Electric Company High resolution matrix lens electron optical system
JPS5548949A (en) * 1978-10-02 1980-04-08 Jones Geraint A C Scribing device and method
US4310743A (en) * 1979-09-24 1982-01-12 Hughes Aircraft Company Ion beam lithography process and apparatus using step-and-repeat exposure
KR100462532B1 (ko) * 1995-02-01 2005-04-22 더 리전트 오브 더 유니버시티 오브 캘리포니아 초고진공집중이온빔마이크로밀과이로부터얻어진제품
US5721687A (en) * 1995-02-01 1998-02-24 The Regents Of The University Of California Office Of Technology Transfer Ultrahigh vacuum focused ion beam micromill and articles therefrom
DE102013217068A1 (de) * 2013-08-27 2015-03-19 Tyco Electronics Amp Gmbh Elektronenstrahlunterstützte Herstellung von elektrischen Bauelementen

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US27005A (en) * 1860-01-31 Machine for shaping hair-brush blocks
NL259047A (de) * 1960-02-27
NL257531A (de) * 1960-03-30
US3196246A (en) * 1962-11-29 1965-07-20 Rca Corp Means for observing a workpiece in electron beam machining apparatus
GB1065060A (en) * 1963-04-19 1967-04-12 United Aircraft Corp Improvements in and relating to apparatus for working articles with energised beams
US3301949A (en) * 1964-03-02 1967-01-31 United Aircraft Corp Stored image control system for beam machining
US3326176A (en) * 1964-10-27 1967-06-20 Nat Res Corp Work-registration device including ionic beam probe
US3519788A (en) * 1967-01-13 1970-07-07 Ibm Automatic registration of an electron beam
US3491236A (en) * 1967-09-28 1970-01-20 Gen Electric Electron beam fabrication of microelectronic circuit patterns

Also Published As

Publication number Publication date
GB1280328A (en) 1972-07-05
DE1804646B2 (de) 1973-03-22
NL6915306A (de) 1970-04-21
US3651303A (en) 1972-03-21
DE1804646A1 (de) 1970-09-17
DE1804646C3 (de) 1973-10-11
FR2021033A1 (de) 1970-07-17
AT296448B (de) 1972-02-10

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Legal Events

Date Code Title Description
PL Patent ceased