AT296448B - Korpuskularstrahl-Bearbeitungsgerät - Google Patents
Korpuskularstrahl-BearbeitungsgerätInfo
- Publication number
- AT296448B AT296448B AT895869A AT895869A AT296448B AT 296448 B AT296448 B AT 296448B AT 895869 A AT895869 A AT 895869A AT 895869 A AT895869 A AT 895869A AT 296448 B AT296448 B AT 296448B
- Authority
- AT
- Austria
- Prior art keywords
- processing device
- beam processing
- corpuscular beam
- corpuscular
- processing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
- G05B19/39—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using a combination of the means covered by at least two of the preceding groups G05B19/21, G05B19/27 and G05B19/33
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Electron Beam Exposure (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19681804646 DE1804646B2 (de) | 1968-10-18 | 1968-10-18 | Korpuskularstrahl-bearbeitungsgeraet |
Publications (1)
Publication Number | Publication Date |
---|---|
AT296448B true AT296448B (de) | 1972-02-10 |
Family
ID=5711258
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT895869A AT296448B (de) | 1968-10-18 | 1969-09-22 | Korpuskularstrahl-Bearbeitungsgerät |
Country Status (7)
Country | Link |
---|---|
US (1) | US3651303A (de) |
AT (1) | AT296448B (de) |
CH (1) | CH514932A (de) |
DE (1) | DE1804646B2 (de) |
FR (1) | FR2021033A1 (de) |
GB (1) | GB1280328A (de) |
NL (1) | NL6915306A (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3842236A (en) * | 1970-03-28 | 1974-10-15 | Steigerwald Strahltech | Process to control the movement of a workpiece with respect to a beam of a stock processing machine operating by means of controllable power irradiation |
US4021675A (en) * | 1973-02-20 | 1977-05-03 | Hughes Aircraft Company | System for controlling ion implantation dosage in electronic materials |
US3904945A (en) * | 1973-09-10 | 1975-09-09 | Ibm | Precision tool and workpiece positioning apparatus |
US3849659A (en) * | 1973-09-10 | 1974-11-19 | Westinghouse Electric Corp | Alignment of a patterned electron beam with a member by electron backscatter |
US3886421A (en) * | 1973-09-10 | 1975-05-27 | Ibm | Precision tool and workpiece positioning apparatus with ringout detection |
US4016396A (en) * | 1973-09-10 | 1977-04-05 | Ibm Corporation | Precision tool and workpiece positioning apparatus |
US4019015A (en) * | 1973-09-10 | 1977-04-19 | International Business Machines Corporation | Precision tool and workpiece positioning apparatus with ringout detection |
US3875415A (en) * | 1974-01-28 | 1975-04-01 | Ibm | Method and apparatus for detecting a registration mark on a target such as a semiconductor wafer |
US3900736A (en) * | 1974-01-28 | 1975-08-19 | Ibm | Method and apparatus for positioning a beam of charged particles |
US3901814A (en) * | 1974-06-27 | 1975-08-26 | Ibm | Method and apparatus for detecting a registration mark on a target such as a semiconductor wafer |
US4097745A (en) * | 1976-10-13 | 1978-06-27 | General Electric Company | High resolution matrix lens electron optical system |
JPS5548949A (en) * | 1978-10-02 | 1980-04-08 | Jones Geraint A C | Scribing device and method |
US4310743A (en) * | 1979-09-24 | 1982-01-12 | Hughes Aircraft Company | Ion beam lithography process and apparatus using step-and-repeat exposure |
KR100462532B1 (ko) * | 1995-02-01 | 2005-04-22 | 더 리전트 오브 더 유니버시티 오브 캘리포니아 | 초고진공집중이온빔마이크로밀과이로부터얻어진제품 |
US5721687A (en) * | 1995-02-01 | 1998-02-24 | The Regents Of The University Of California Office Of Technology Transfer | Ultrahigh vacuum focused ion beam micromill and articles therefrom |
DE102013217068A1 (de) * | 2013-08-27 | 2015-03-19 | Tyco Electronics Amp Gmbh | Elektronenstrahlunterstützte Herstellung von elektrischen Bauelementen |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US27005A (en) * | 1860-01-31 | Machine for shaping hair-brush blocks | ||
NL259047A (de) * | 1960-02-27 | |||
NL257531A (de) * | 1960-03-30 | |||
US3196246A (en) * | 1962-11-29 | 1965-07-20 | Rca Corp | Means for observing a workpiece in electron beam machining apparatus |
GB1065060A (en) * | 1963-04-19 | 1967-04-12 | United Aircraft Corp | Improvements in and relating to apparatus for working articles with energised beams |
US3301949A (en) * | 1964-03-02 | 1967-01-31 | United Aircraft Corp | Stored image control system for beam machining |
US3326176A (en) * | 1964-10-27 | 1967-06-20 | Nat Res Corp | Work-registration device including ionic beam probe |
US3519788A (en) * | 1967-01-13 | 1970-07-07 | Ibm | Automatic registration of an electron beam |
US3491236A (en) * | 1967-09-28 | 1970-01-20 | Gen Electric | Electron beam fabrication of microelectronic circuit patterns |
-
1968
- 1968-10-18 DE DE19681804646 patent/DE1804646B2/de active Granted
-
1969
- 1969-09-19 CH CH1416169A patent/CH514932A/de not_active IP Right Cessation
- 1969-09-22 AT AT895869A patent/AT296448B/de not_active IP Right Cessation
- 1969-10-09 NL NL6915306A patent/NL6915306A/xx unknown
- 1969-10-17 FR FR6935746A patent/FR2021033A1/fr not_active Withdrawn
- 1969-10-17 GB GB51063/69A patent/GB1280328A/en not_active Expired
- 1969-10-20 US US867781A patent/US3651303A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
FR2021033A1 (de) | 1970-07-17 |
DE1804646C3 (de) | 1973-10-11 |
GB1280328A (en) | 1972-07-05 |
NL6915306A (de) | 1970-04-21 |
CH514932A (de) | 1971-10-31 |
DE1804646A1 (de) | 1970-09-17 |
US3651303A (en) | 1972-03-21 |
DE1804646B2 (de) | 1973-03-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
NL162253B (nl) | Halfgeleiderinrichting. | |
CH483672A (de) | Mikro-programmgesteuerte Datenverarbeitungseinrichtung | |
BR6911817D0 (pt) | Di-oxidos de benzotiazina | |
SE383816B (sv) | Tradradiosystem | |
DE1921280B2 (de) | Laservorrichtung | |
BR6909966D0 (pt) | Dispositivo | |
AT296448B (de) | Korpuskularstrahl-Bearbeitungsgerät | |
NL164710C (nl) | Laser-inrichting. | |
AT291648B (de) | Tiefenlockerungsgerät | |
SE397265B (sv) | Intrauterint preventivmedel | |
AT256197B (de) | Elektronenstrahlgerät | |
AT320025B (de) | Halbleitervorrichtung | |
CH481817A (de) | Sortieranlage | |
CH511527A (de) | Lasereinrichtung | |
AT300961B (de) | Halbleiteranordnung | |
CH487504A (de) | Halbleitervorrichtung | |
BR7019715D0 (pt) | Dispositivo de manipulacao | |
AT272421B (de) | Elektronenstrahlgerät | |
FI53273C (fi) | Krutdriven bultfaestanordning | |
BR6913139D0 (pt) | Dispositivo traqueal | |
NL145959B (nl) | Analyse-inrichting. | |
CH460960A (de) | Elektronenstrahlgerät | |
AT298108B (de) | Mikrotom | |
CH485323A (de) | Halbleiteranordnung | |
CH510346A (de) | Halbleiteranordnung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ELJ | Ceased due to non-payment of the annual fee |