AT313381B - Objektkühleinrichtung für Rasterelektronenmikroskope - Google Patents

Objektkühleinrichtung für Rasterelektronenmikroskope

Info

Publication number
AT313381B
AT313381B AT790071A AT790071A AT313381B AT 313381 B AT313381 B AT 313381B AT 790071 A AT790071 A AT 790071A AT 790071 A AT790071 A AT 790071A AT 313381 B AT313381 B AT 313381B
Authority
AT
Austria
Prior art keywords
cooling device
scanning electron
electron microscopes
object cooling
microscopes
Prior art date
Application number
AT790071A
Other languages
English (en)
Inventor
Erwin Hoerl Dr
Gerhard Groboth Ing
Scholze Peter
Original Assignee
Oesterr Studien Atomenergie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oesterr Studien Atomenergie filed Critical Oesterr Studien Atomenergie
Priority to AT790071A priority Critical patent/AT313381B/de
Priority to DE19722243869 priority patent/DE2243869C3/de
Priority to JP9116872A priority patent/JPS4862374A/ja
Priority to GB4204772A priority patent/GB1344028A/en
Application granted granted Critical
Publication of AT313381B publication Critical patent/AT313381B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
AT790071A 1971-09-10 1971-09-10 Objektkühleinrichtung für Rasterelektronenmikroskope AT313381B (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AT790071A AT313381B (de) 1971-09-10 1971-09-10 Objektkühleinrichtung für Rasterelektronenmikroskope
DE19722243869 DE2243869C3 (de) 1971-09-10 1972-09-07 Objektkühleinrichtung für Rasterelektronenmikroskope
JP9116872A JPS4862374A (de) 1971-09-10 1972-09-11
GB4204772A GB1344028A (en) 1971-09-10 1972-09-11 Cooling device for the object in a scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT790071A AT313381B (de) 1971-09-10 1971-09-10 Objektkühleinrichtung für Rasterelektronenmikroskope

Publications (1)

Publication Number Publication Date
AT313381B true AT313381B (de) 1974-02-11

Family

ID=3600547

Family Applications (1)

Application Number Title Priority Date Filing Date
AT790071A AT313381B (de) 1971-09-10 1971-09-10 Objektkühleinrichtung für Rasterelektronenmikroskope

Country Status (3)

Country Link
JP (1) JPS4862374A (de)
AT (1) AT313381B (de)
GB (1) GB1344028A (de)

Also Published As

Publication number Publication date
JPS4862374A (de) 1973-08-31
GB1344028A (en) 1974-01-16
DE2243869A1 (de) 1973-03-29
DE2243869B2 (de) 1977-02-24

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