JPS4862374A - - Google Patents
Info
- Publication number
- JPS4862374A JPS4862374A JP9116872A JP9116872A JPS4862374A JP S4862374 A JPS4862374 A JP S4862374A JP 9116872 A JP9116872 A JP 9116872A JP 9116872 A JP9116872 A JP 9116872A JP S4862374 A JPS4862374 A JP S4862374A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT790071A AT313381B (de) | 1971-09-10 | 1971-09-10 | Objektkühleinrichtung für Rasterelektronenmikroskope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4862374A true JPS4862374A (de) | 1973-08-31 |
Family
ID=3600547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9116872A Pending JPS4862374A (de) | 1971-09-10 | 1972-09-11 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS4862374A (de) |
| AT (1) | AT313381B (de) |
| GB (1) | GB1344028A (de) |
-
1971
- 1971-09-10 AT AT790071A patent/AT313381B/de active
-
1972
- 1972-09-11 GB GB4204772A patent/GB1344028A/en not_active Expired
- 1972-09-11 JP JP9116872A patent/JPS4862374A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1344028A (en) | 1974-01-16 |
| DE2243869A1 (de) | 1973-03-29 |
| AT313381B (de) | 1974-02-11 |
| DE2243869B2 (de) | 1977-02-24 |