AR018448A1 - Metodo para fabricar una estructura de guia de ondas opticas difundida en un substrato, guia de ondas opticas difundida obtenida y dispositivooptico que la contiene - Google Patents
Metodo para fabricar una estructura de guia de ondas opticas difundida en un substrato, guia de ondas opticas difundida obtenida y dispositivooptico que la contieneInfo
- Publication number
- AR018448A1 AR018448A1 ARP990102644A ARP990102644A AR018448A1 AR 018448 A1 AR018448 A1 AR 018448A1 AR P990102644 A ARP990102644 A AR P990102644A AR P990102644 A ARP990102644 A AR P990102644A AR 018448 A1 AR018448 A1 AR 018448A1
- Authority
- AR
- Argentina
- Prior art keywords
- optical
- diffused
- substrate
- acoustic
- photo
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1342—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using diffusion
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12176—Etching
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
- G02F1/125—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves in an optical waveguide structure
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
La invencion se refiere a un método de fabricacion de una guía de ondas opticas difundida (6) en un substrato plano (1). Una capa metálica (7)y una substancia fotoendurecible (8) son depositadas sobre un substrato (1) en ese orden. Porciones de esa substancia fotoendurecible (8) son retiradas demodo que queda una estructura de substancia fotoendurecible (8) correspondiente a la estructura de guía de ondas deseada. Las porciones expuestas de lacapa metálica (7) son retiradas por una técnica de mordentado químico/físico después de lo cual se retira la substancia fotoendurecible remanente (8)y se difunde la capa metálica remanente (7) en el substrato (1) por medio de un tratamiento térmico. El uso de un método de mordentado químico/físico pararetirar porciones de la capa metálica (7) dan por resultado variaciones más pequenas en el ancho de la guía de ondas después de la difusion. Tales guíasde onda son particularmente ventajosas cuando se usan en conexion con dispositivos acusto-opticos.Las guías de ondas opticas de acuerdo con lainvencion también se pueden usar con otros dispositivos opticos integrados. Como ser un convertidor de modo acustico-optico, un conmutador acusto-optico, un filtro acusto-optico, un divisor de energía optico, un modulador de Mach-Zendec, un divisor de polarizacion o un conmutador electro-optico. Serevelan también una estructura de guía de ondas opticas difundida en un substrato plano y un dispositivo optico que comprende al menos una estructura deguíade ondas opticas difundidas.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP98110178 | 1998-06-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
AR018448A1 true AR018448A1 (es) | 2001-11-14 |
Family
ID=8232056
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ARP990102644A AR018448A1 (es) | 1998-06-04 | 1999-06-04 | Metodo para fabricar una estructura de guia de ondas opticas difundida en un substrato, guia de ondas opticas difundida obtenida y dispositivooptico que la contiene |
Country Status (7)
Country | Link |
---|---|
US (1) | US6718110B2 (es) |
JP (1) | JP2000137125A (es) |
AR (1) | AR018448A1 (es) |
AU (1) | AU3320399A (es) |
BR (1) | BR9912359A (es) |
CA (1) | CA2273646A1 (es) |
NZ (1) | NZ336142A (es) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3858995B2 (ja) * | 2002-07-02 | 2006-12-20 | オムロン株式会社 | 光導波路装置の製造方法 |
US20040067017A1 (en) * | 2002-10-08 | 2004-04-08 | Ionov Stanislav I. | Technique and method for manufacturing distributed feedback structures in Ti:LiNbO3 waveguides |
WO2006090863A1 (ja) * | 2005-02-22 | 2006-08-31 | Ngk Insulators, Ltd. | 光変調器 |
CN103869415A (zh) * | 2012-12-17 | 2014-06-18 | 鸿富锦精密工业(深圳)有限公司 | 脊型光波导的制造方法 |
KR101789026B1 (ko) | 2015-10-23 | 2017-10-23 | 한국생산기술연구원 | 광변조기용 리튬나오베이트(LiNbO3)기판의 제조 방법 |
US10281646B2 (en) | 2016-09-20 | 2019-05-07 | Honeywell International Inc. | Etchless acoustic waveguiding in integrated acousto-optic waveguides |
US10254481B2 (en) | 2016-09-20 | 2019-04-09 | Honeywell International Inc. | Integrated waveguide with reduced brillouin gain and a corresponding reduction in the magnitude of an induced stokes wave |
US10429677B2 (en) | 2016-09-20 | 2019-10-01 | Honeywell International Inc. | Optical waveguide having a wide brillouin bandwidth |
US10312658B2 (en) | 2017-06-22 | 2019-06-04 | Honeywell International Inc. | Brillouin gain spectral position control of claddings for tuning acousto-optic waveguides |
JP2022082851A (ja) * | 2020-11-24 | 2022-06-03 | 沖電気工業株式会社 | グレーティング素子及び光デバイス |
CN113009637B (zh) * | 2021-02-04 | 2022-04-26 | 中国科学院长春光学精密机械与物理研究所 | 基于树形分支的n×n型硅基波导光开关 |
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US3850503A (en) | 1972-10-26 | 1974-11-26 | Texas Instruments Inc | Asymmetric waveguide pair acoustic surface wave switch |
US4284663A (en) * | 1976-05-10 | 1981-08-18 | Bell Telephone Laboratories, Incorporated | Fabrication of optical waveguides by indiffusion of metals |
FR2432560A1 (fr) | 1978-08-02 | 1980-02-29 | Texas Instruments Inc | Procede de decapage de metaux, en particulier d'aluminium, au plasma de tetrachlorure de silicium |
US4376138A (en) * | 1982-01-04 | 1983-03-08 | Bell Telephone Laboratories, Incorporated | Optical waveguides in InGaAsP and InP |
JPS58211106A (ja) * | 1982-06-01 | 1983-12-08 | Fujitsu Ltd | 導波路形成方法 |
JPS61198106A (ja) * | 1985-02-27 | 1986-09-02 | Fujitsu Ltd | 光導波路形成方法 |
GB8531262D0 (en) | 1985-12-19 | 1986-01-29 | British Telecomm | Lithium niobate waveguide structures |
JPS63192004A (ja) | 1987-02-05 | 1988-08-09 | Hitachi Ltd | 導波路形光学素子およびその製造方法 |
ATE122783T1 (de) | 1988-04-19 | 1995-06-15 | Litton Systems Inc | Sagnac-ring rotations-sensor und verfahren zu dessen verwendung. |
US5227011A (en) | 1990-06-22 | 1993-07-13 | Ibiden Co., Ltd. | Method for producing a second harmonic wave generating device |
US5119447A (en) | 1990-11-06 | 1992-06-02 | General Instrument Corporation | Apparatus and method for externally modulating an optical carrier |
FR2680276B1 (fr) | 1991-08-05 | 1997-04-25 | Matra Mhs | Procede de controle du profil de gravure d'une couche d'un circuit integre. |
US5168542A (en) | 1991-10-09 | 1992-12-01 | The Boeing Company | Low loss channel waveguide and method for making the same |
JPH05326517A (ja) | 1992-05-20 | 1993-12-10 | Fujitsu Ltd | 半導体装置の製造方法 |
JPH06174908A (ja) * | 1992-12-10 | 1994-06-24 | Hitachi Ltd | 導波路型回折格子の製造方法 |
JPH0727941A (ja) * | 1993-07-12 | 1995-01-31 | Sumitomo Electric Ind Ltd | 導波路の製造方法 |
US5452314A (en) | 1994-08-01 | 1995-09-19 | Hewlett-Packard Company | Controllable-birefringence, acousto-optic tunable filter and a laser tuned by the same |
US6167169A (en) * | 1994-09-09 | 2000-12-26 | Gemfire Corporation | Scanning method and architecture for display |
DE4433844A1 (de) | 1994-09-22 | 1996-03-28 | Fraunhofer Ges Forschung | TE/TM-Modenkonverter |
US5609775A (en) | 1995-03-17 | 1997-03-11 | Chartered Semiconductor Manufacturing Pte Ltd. | Dry etch process for titanium-tungsten films |
IT1273563B (it) | 1995-04-14 | 1997-07-08 | Pirelli Cavi Spa | Dispositivo acusto-ottico in guida d'onda di selezione in lunghezza d'onda |
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US6282332B1 (en) * | 1998-06-04 | 2001-08-28 | Pirelli Cavi E Sistemi S.P.A. | Waveguide structures in particular for use in acousto-optical mode converters and method for making same |
-
1999
- 1999-06-04 NZ NZ336142A patent/NZ336142A/en unknown
- 1999-06-04 BR BR9912359-2A patent/BR9912359A/pt not_active IP Right Cessation
- 1999-06-04 AR ARP990102644A patent/AR018448A1/es unknown
- 1999-06-04 AU AU33203/99A patent/AU3320399A/en not_active Abandoned
- 1999-06-04 JP JP11158660A patent/JP2000137125A/ja active Pending
- 1999-06-04 CA CA002273646A patent/CA2273646A1/en not_active Abandoned
-
2001
- 2001-06-12 US US09/878,414 patent/US6718110B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CA2273646A1 (en) | 1999-12-04 |
US20010046343A1 (en) | 2001-11-29 |
AU3320399A (en) | 1999-12-16 |
JP2000137125A (ja) | 2000-05-16 |
US6718110B2 (en) | 2004-04-06 |
NZ336142A (en) | 2000-06-23 |
BR9912359A (pt) | 2002-06-04 |
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