JPS5790605A - Optical waveguide and its production - Google Patents

Optical waveguide and its production

Info

Publication number
JPS5790605A
JPS5790605A JP55167477A JP16747780A JPS5790605A JP S5790605 A JPS5790605 A JP S5790605A JP 55167477 A JP55167477 A JP 55167477A JP 16747780 A JP16747780 A JP 16747780A JP S5790605 A JPS5790605 A JP S5790605A
Authority
JP
Japan
Prior art keywords
titanium
oxide
substrate
waveguides
ion etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55167477A
Other languages
Japanese (ja)
Inventor
Minoru Kiyono
Hiroki Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55167477A priority Critical patent/JPS5790605A/en
Publication of JPS5790605A publication Critical patent/JPS5790605A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1342—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using diffusion

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To form projecting regions diffused with titanium and to make the effect to confining light more powerful by forming diffusion type optical waveguide by diffusing titanium in a lithium niobate substrate then applying ion etching from the substrate surface. CONSTITUTION:Titanium (oxide) 2 is selectively stuck on the prescribed regions of a lithium niobate substrate 1 and heat treatment is applied to diffuse the titanium into the substrate 1, whereby optical waveguides 3 of diffusion type are formed. Thence, with the rmaining titanium (oxide) 2 as an etching mask, ion etching is carried out by using Argon or the like. Thereby projecting regions 4 are formed under the titaninum (oxide) 2 because the titanium (oxide) 2 is smaller in etching rate as compared to the substrate 1 and the waveguides 3. If necessary, further the ion etching is continued to remove the remaining titanium (oxide), whereby the intended waveguides 3 is obtained.
JP55167477A 1980-11-28 1980-11-28 Optical waveguide and its production Pending JPS5790605A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55167477A JPS5790605A (en) 1980-11-28 1980-11-28 Optical waveguide and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55167477A JPS5790605A (en) 1980-11-28 1980-11-28 Optical waveguide and its production

Publications (1)

Publication Number Publication Date
JPS5790605A true JPS5790605A (en) 1982-06-05

Family

ID=15850399

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55167477A Pending JPS5790605A (en) 1980-11-28 1980-11-28 Optical waveguide and its production

Country Status (1)

Country Link
JP (1) JPS5790605A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63239404A (en) * 1987-03-27 1988-10-05 Sumitomo Metal Mining Co Ltd Production of light guide type optical device
CN112259677A (en) * 2020-10-19 2021-01-22 济南晶正电子科技有限公司 Film bonding body with pattern, preparation method and electronic device
CN112259676A (en) * 2020-10-19 2021-01-22 济南晶正电子科技有限公司 Film bonding body with pattern, preparation method and electronic device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63239404A (en) * 1987-03-27 1988-10-05 Sumitomo Metal Mining Co Ltd Production of light guide type optical device
CN112259677A (en) * 2020-10-19 2021-01-22 济南晶正电子科技有限公司 Film bonding body with pattern, preparation method and electronic device
CN112259676A (en) * 2020-10-19 2021-01-22 济南晶正电子科技有限公司 Film bonding body with pattern, preparation method and electronic device
CN112259676B (en) * 2020-10-19 2022-11-01 济南晶正电子科技有限公司 Film bonding body with pattern, preparation method and electronic device

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