JP2012188671A - ビニルエーテル架橋剤を用いた反射防止膜 - Google Patents
ビニルエーテル架橋剤を用いた反射防止膜 Download PDFInfo
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- JP2012188671A JP2012188671A JP2012106641A JP2012106641A JP2012188671A JP 2012188671 A JP2012188671 A JP 2012188671A JP 2012106641 A JP2012106641 A JP 2012106641A JP 2012106641 A JP2012106641 A JP 2012106641A JP 2012188671 A JP2012188671 A JP 2012188671A
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- 125000006239 protecting group Chemical group 0.000 claims description 5
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- WVXLLHWEQSZBLW-UHFFFAOYSA-N 2-(4-acetyl-2-methoxyphenoxy)acetic acid Chemical compound COC1=CC(C(C)=O)=CC=C1OCC(O)=O WVXLLHWEQSZBLW-UHFFFAOYSA-N 0.000 claims description 2
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- 125000001931 aliphatic group Chemical group 0.000 claims description 2
- 125000003545 alkoxy group Chemical group 0.000 claims description 2
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- 239000011148 porous material Substances 0.000 claims 2
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- 125000000524 functional group Chemical group 0.000 abstract description 7
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- 238000009877 rendering Methods 0.000 abstract 1
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- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 8
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- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 2
- FENFUOGYJVOCRY-UHFFFAOYSA-N 1-propoxypropan-2-ol Chemical compound CCCOCC(C)O FENFUOGYJVOCRY-UHFFFAOYSA-N 0.000 description 2
- UJOBWOGCFQCDNV-UHFFFAOYSA-N 9H-carbazole Chemical compound C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-VAWYXSNFSA-N AIBN Substances N#CC(C)(C)\N=N\C(C)(C)C#N OZAIFHULBGXAKX-VAWYXSNFSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical group C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
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- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical group C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 2
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 2
- MJYSISMEPNOHEG-UHFFFAOYSA-N anthracen-9-ylmethyl 2-methylprop-2-enoate Chemical compound C1=CC=C2C(COC(=O)C(=C)C)=C(C=CC=C3)C3=CC2=C1 MJYSISMEPNOHEG-UHFFFAOYSA-N 0.000 description 2
- ULDHMXUKGWMISQ-UHFFFAOYSA-N carvone Chemical compound CC(=C)C1CC=C(C)C(=O)C1 ULDHMXUKGWMISQ-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
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- 238000011161 development Methods 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 125000000623 heterocyclic group Chemical group 0.000 description 2
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- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 2
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- JHJLBTNAGRQEKS-UHFFFAOYSA-M sodium bromide Chemical compound [Na+].[Br-] JHJLBTNAGRQEKS-UHFFFAOYSA-M 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
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- YWQIVUUGLJFRHG-UHFFFAOYSA-N 3,7-dihydroxynaphthalene-1-carboxylic acid Chemical compound C1=C(O)C=C2C(C(=O)O)=CC(O)=CC2=C1 YWQIVUUGLJFRHG-UHFFFAOYSA-N 0.000 description 1
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- 208000005199 Miyoshi muscular dystrophy 3 Diseases 0.000 description 1
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C43/00—Ethers; Compounds having groups, groups or groups
- C07C43/02—Ethers
- C07C43/03—Ethers having all ether-oxygen atoms bound to acyclic carbon atoms
- C07C43/14—Unsaturated ethers
- C07C43/164—Unsaturated ethers containing six-membered aromatic rings
- C07C43/166—Unsaturated ethers containing six-membered aromatic rings having unsaturation outside the aromatic rings
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
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Abstract
【解決手段】酸官能基を有し、架橋剤および光酸発生剤と共に溶媒系に可溶なポリマーおよび/またはオリゴマーを含み、酸官能基はカルボン酸であり、架橋剤はビニルエーテル架橋剤である。これらの組成物は基盤に適用され、熱で架橋され、露光すると、硬化した(cured)組成物は脱架橋され、典型的なフォトレジスト現像溶液(例えばアルカリ現像液)に可溶となる。
【選択図】なし
Description
本発明は米国陸軍宇宙ミサイル防衛軍団により与えられた契約番号DASG60‐01‐C‐0047の契約に基づき、政府の支持を受け成し遂げられた。米国政府は本発明について、一定の権利を有する。
関連した出願
本願は、2004年4月29日に出願されたシリアルナンバー60/566,329、ビニルエーテル架橋剤を用いた反射防止膜という名称の仮出願の優先権を主張し、引用することで本明細書の一部となす。
本発明は、新規な湿式現像性反射防止膜組成物およびその使用方法に関する。
特徴的大きさを110nm以下に収縮するため、半導体産業により掲げられる目標を達成する新たなより進歩した材料が必要とされる。高解像度のリソグラフ印刷標的を達成するためにフォトレジストおよび基板の反射防止皮膜の両方の改良が必要とされる。例えば、新たなレジストは古い世代の材料よりもさらに薄いため、基底の反射防止膜および基盤エッチング工程に起こるレジストの厚みの損失が決定的な問題となる。レジストの厚さが減少する一方で、基底の反射防止膜の厚さが同じ比率で減少することは予期されておらず、このことはレジストの損失という問題をいっそう複雑にする。この問題への解決策は、湿式現像性基底反射防止膜によって、基底反射膜形成のエッチング工程を取り除くことである。
R-(X-O-CH=CH2)n
で表され、Rはアリール基(好ましくはC6‐C12)およびアルキル基(好ましくはC1‐C18、およびより好ましくはC1‐C10)から選択され、Xはそれぞれ、アルキル基(好ましくはC1‐C18、およびより好ましくはC1‐C10);アルコキシル基(好ましくはC1‐C18、およびより好ましくはC1‐C10);カルボキシル基;および前述の2またはそれ以上の組合せからなる群から選択され、nは2−6である。もっとも好ましいビニルエーテル架橋剤は、エチレングリコールビニルエーテル、トリメチロールプロパントリビニルエーテル、1、4‐シクロヘキサン ジメタノール ジビニル エーテル、およびそれらの組合せからなる群から選択される。もうひとつの好ましいビニルエーテル架橋剤は、
以下の例は、本発明による好ましい方法について述べる。しかし、これらの例は実例を示すためのものであり、その内容のいかなるものも発明全体の適用範囲を制約するものではない。
1. 四官能ビニルエーテル架橋剤の所内(in house)製造
酸反応性の基のないポリマー組成物
メタクリロイルオキシエチルフタラート(28.9mol、アルドリッチより入手)および2、2’‐アゾビスイソブチロニトリル(“AIBN”、0.58mmolラジカル開始剤、アルドリッチより入手)が窒素雰囲気下、50mlテトラヒドロフラン中で混合され(“THF”、アルドリッチより入手)、15時間加熱還流された。反応系は冷却され、約25mlに濃縮され、その後、200mlヘキサン中に沈殿された。ろ過、乾燥後、約8gの残留白色粉末が回収された。ホモポリマー分子量(“Mw”)がポリスチレン標準およびゲルパーミエーションクロマトグラフィー(“GPC”)を用いて測定され、68,400と決定された。
発色団、酸、および溶解性増加剤(Dissolution Enhancer)含有基底反射防止膜
メタクリル酸(“MAA”、31.2mmol、アルドリッチより入手)、tert‐ブチルメタクリレート(“tBMA”、26.0mmol、アルドリッチより入手)、9‐アントラセンメチルメタクリレート(“9‐AMMA”、14.5mmol、St‐Jean Photochemicals Inc.より入手)、およびAIBN(1.4mmol)が窒素雰囲気下で、60mlTHF中に混合され、19時間加熱還流された。反応系は冷却され、約35mlに濃縮され、それから150mlヘキサン中へ沈殿された。ろ過、乾燥後、10gの明るい黄色の粉末が回収された。ポリスチレン標準およびGPCを用いて、ポリマーMwが測定され、23,800と決定された。
ポリマー組成物による光学特性の制御
いくつかのポリマーは、溶解特性を保持しながら基底反射防止膜の光学特性の制御を例示するために、例2の工程およびさまざまな量の発色団(9‐AMMA)を使って調整された。PGME,PGMEA、上記所内で製造された10%四官能性ビニルエーテル架橋剤、および4%トリフェニルスルホニウムトリフラートPAGを含有する3%固体調剤が調整され、0.1ミクロン終点のフィルターを通してろ過された。
フェノール性ポリマーでの比較例
比較例は、フェノール樹脂とのビニルエーテル架橋がフォトレジスト溶媒によるストリッピングを防ぐために十分な架橋度を提供しないことを例証するために行われた。
Claims (46)
- マイクロ電子デバイスを形成するのに有効な組成物において、前記組成物は:
ポリマー、オリゴマー、およびそれらの混合物からなる群から選択される化合物を含み、前記化合物は、フェノール性基以外の酸性基を含み;
ビニルエーテル架橋剤を含み;並びに
溶媒系を含み、前記化合物および架橋剤は前記溶媒系に溶解、または分散しており、
前記組成物は湿式現像性であることを特徴とする組成物。 - 前記化合物が酸発生剤を含む請求項1記載の組成物。
- 前記酸発生剤が、光酸発生剤である請求項2に記載の組成物。
- 前記組成物が、酸反応性でない請求項1記載の組成物。
- 前記酸性基が、保護基を持たない請求項1記載の組成物。
- 前記化合物が、保護された酸性基および保護されていない酸性基を含み、保護された酸性基と保護されていない酸性基とのモル比が、約1:3から約3:1である請求項1記載の組成物。
- 前記組成物が、さらに発色団を含む請求項1記載の組成物。
- 前記発色団が、前記化合物に結合している請求項7記載の組成物。
- 前記発色団が、化合物の総重量を100重量%として、約5−50重量%のレベルで存在する請求項7記載の組成物。
- 前記ビニルエーテル架橋剤が、式R-(X-O-CH=CH2)nをもち、そこではRはアリールおよびアルキルからなる群から選択され、それぞれXはアルキル、アルコキシ、カルボキシ、および二つかそれ以上のそれらの組合せからなる群から個別に選択され、nが2−6である請求項1記載の組成物。
- 前記ビニルエーテル架橋剤が、エチレングリコールビニルエーテル、トリメチロールプロパントリビニルエーテル、1,4‐シクロヘキサンジメタノールジビニルエーテル、
- 前記酸性基が、カルボン酸である請求項1記載の組成物。
- 前記ポリマーが、脂肪族ポリマー、アクリル酸ポリエステル、メタクリル酸ポリエステル、ポリカーボネート、ノボラック、ポリアミド酸、およびそれらの混合物からなる群から選択される請求項1記載の組成物。
- マイクロエレクトロニクス構造を形成する方法において、前記方法が:
表面を有する基盤を用意し;
前記表面に組成物を塗布し、前記組成物がポリマー、オリゴマー、およびそれらの混合物からなる群から選択される化合物を含み、前記化合物がフェノール性基以外の酸性基、ビニルエーテル架橋剤、および溶媒系を含み、前記化合物および架橋剤は、前記溶媒系に溶解または分散し;
前記組成物中の化合物を架橋し;
前記組成物の露光部を生成するために前記組成物を露光し;並びに
前記表面から前記露光部を取り除くために前記組成物を現像液に浸漬する工程を含む方法。 - 前記架橋する工程が、前記化合物を熱架橋することを含む請求項14記載の方法。
- 前記架橋する工程が、フォトレジスト溶媒に実質的に溶解しない組成物の層を生成する請求項14記載の方法。
- 前記架橋する工程が、以下の式を有する連鎖(linkages)を含む架橋化合物を生成する請求項16記載の方法。
- 前記露光工程が、フォトレジスト現像液に実質的に溶解する組成物の層を生成する請求項14記載の方法。
- 前記露光工程が以下の式を有する連鎖の結合(*)を切断する結果となる請求項17記載の方法。
- 前記基盤がマイクロエレクトロニクス基盤である請求項14記載の方法。
- 前記基盤がシリコン、アルミニウム、タングステン、ケイ化タングステン、ヒ化ガリウム、ゲルマニウム、タンタル、亜硝酸タンタル、SiGe、イオン注入層、低誘電率(low-k)誘電層、および誘電層からなる群から選択される請求項20記載の方法。
- 前記基盤がさらに、空孔(hole)を画する構造を含み、前記構造がサイドウォール(sidewalls)およびボトムウォール(bottom wall)を有し;並びに
前記塗布工程が、前記空孔サイドウォールおよびボトムウォールの少なくとも一部に組成物を塗布することを含む請求項14記載の方法。 - 前記基盤がイオン注入層を含み、前記塗布工程が前記イオン注入層に隣接する前記組成物の層を形成することを含む請求項14記載の方法。
- さらに、前記露光工程に先行してフォトレジスト層を塗布する工程を含む、請求項14記載の方法。
- マイクロエレクトロニクス構造を形成する方法において、前記方法が:
表面を有する基盤を用意し;
前記表面に組成物を塗布し、前記組成物が溶媒系に溶解、または分散した化合物を含み、前記化合物がポリマー、オリゴマー、およびそれらの混合物からなる群から選択され、前記化合物がカルボン酸基を含み;
前記組成物中の化合物を架橋し;並びに
前記化合物を脱架橋するように前記組成物を露光する工程を含む方法。 - 前記架橋工程が、前記化合物を熱的に架橋することを含む請求項25記載の方法。
- 前記架橋工程が、フォトレジスト溶媒に実質的に不溶である組成物の層を生成する請求項25記載の方法。
- 前記架橋工程が、以下の式を有する連鎖を含む架橋化合物を生成する請求項25記載の方法。
- 前記露光工程が、フォトレジスト現像液に実質的に溶解する組成物の層を生成する請求項25記載の方法。
- 前記露光工程が、以下の式を有する連鎖の結合(*)の切断をもたらす請求項28記載の方法。
- 前記基盤がマイクロエレクトロニクス基盤である請求項25記載の方法。
- 前記基盤が、シリコン、アルミニウム、タングステン、ケイ化タングステン、ヒ化ガリウム、ゲルマニウム、タンタル、亜硝酸タンタル、SiGe、イオン注入層、低誘電率(low-k)誘電層、および誘電層からなる群から選択される請求項31記載の方法。
- さらに、前記基盤が空孔を画する構造を含み、前記構造がサイドウォールおよびボトムウォールを含み;並びに
前記塗布工程が組成物を前記空孔サイドウォールおよびボトムウォールの少なくとも一部に塗布することを含む請求項25記載の方法。 - 前記基盤がイオン注入層を含み、および前記塗布工程が前記イオン注入層に隣接する前記組成物の層を形成することを含む請求項25記載の方法。
- さらに、前記露光工程に先行してフォトレジスト層を塗布する工程を含む請求項25記載の方法。
- 基盤;および
前記基盤に隣接した層の組み合わせであって、前記層が、以下の式を有する連鎖を含む架橋された化合物を含むことを特徴とする、組合せ。
- 前記基盤がマイクロエレクトロニクス基盤である請求項36記載の組合せ。
- 前記基盤が、シリコン、アルミニウム、タングステン、ケイ化タングステン、ヒ化ガリウム、ゲルマニウム、タンタル、亜硝酸タンタル、SiGe、イオン注入層、低誘電率(low-k)誘電層、および誘電層からなる群から選択される請求項37記載の組合せ。
- 前記層が実質的にフォトレジスト溶媒に不溶である請求項36記載の組合せ。
- さらに、前記層に隣接したフォトレジストを含む請求項36記載の組合せ。
- 基盤;および
前記基盤に隣接した層の組み合わせであって、前記層がポリマー、オリゴマー、およびそれらの混合体からなる群から選択される化合物を含み、前記化合物が酸性基、アルコールおよびアセチルアルデヒドを含む層であることを特徴とする、組合せ。 - 前記基盤がマイクロエレクトロニクス基盤である請求項41記載の組合せ。
- 前記基盤が、シリコン、アルミニウム、タングステン、ケイ化タングステン、ヒ化ガリウム、ゲルマニウム、タンタル、亜硝酸タンタル、SiGe、イオン注入層、低誘電率(low-k)誘電層、および誘電層からなる群から選択される請求項42記載の組合せ。
- 前記層が実質的にフォトレジスト現像液に溶解する請求項41記載の組合せ。
- さらに、前記層に隣接したフォトレジストを含む請求項41記載の組合せ。
- 以下の式を有する化合物。
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WO2019065476A1 (ja) * | 2017-09-29 | 2019-04-04 | 富士フイルム株式会社 | 着色感光性組成物および光学フィルタの製造方法 |
KR20200043453A (ko) * | 2017-09-29 | 2020-04-27 | 후지필름 가부시키가이샤 | 착색 감광성 조성물 및 광학 필터의 제조 방법 |
JPWO2019065476A1 (ja) * | 2017-09-29 | 2020-11-05 | 富士フイルム株式会社 | 着色感光性組成物および光学フィルタの製造方法 |
KR102374880B1 (ko) | 2017-09-29 | 2022-03-16 | 후지필름 가부시키가이샤 | 착색 감광성 조성물 및 광학 필터의 제조 방법 |
JP7390189B2 (ja) | 2017-09-29 | 2023-12-01 | 富士フイルム株式会社 | 着色感光性組成物および光学フィルタの製造方法 |
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US20050255410A1 (en) | 2005-11-17 |
JP2007536389A (ja) | 2007-12-13 |
CN1981240B (zh) | 2012-09-26 |
KR101308281B1 (ko) | 2013-09-13 |
WO2005111719A2 (en) | 2005-11-24 |
US9110372B2 (en) | 2015-08-18 |
EP1743219A4 (en) | 2010-04-28 |
WO2005111719A3 (en) | 2006-11-09 |
EP1743219B1 (en) | 2015-12-09 |
CN1981240A (zh) | 2007-06-13 |
TWI387612B (zh) | 2013-03-01 |
US20120156613A1 (en) | 2012-06-21 |
EP1743219A2 (en) | 2007-01-17 |
CN101916051A (zh) | 2010-12-15 |
US20090317747A1 (en) | 2009-12-24 |
KR20120015360A (ko) | 2012-02-21 |
CN101916051B (zh) | 2014-07-23 |
US20070117049A1 (en) | 2007-05-24 |
KR20070012812A (ko) | 2007-01-29 |
JP5972510B2 (ja) | 2016-08-17 |
US7601483B2 (en) | 2009-10-13 |
TW200615312A (en) | 2006-05-16 |
JP5511887B2 (ja) | 2014-06-04 |
KR101308191B1 (ko) | 2013-09-13 |
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