JP2006050314A5 - - Google Patents

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Publication number
JP2006050314A5
JP2006050314A5 JP2004229379A JP2004229379A JP2006050314A5 JP 2006050314 A5 JP2006050314 A5 JP 2006050314A5 JP 2004229379 A JP2004229379 A JP 2004229379A JP 2004229379 A JP2004229379 A JP 2004229379A JP 2006050314 A5 JP2006050314 A5 JP 2006050314A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP2004229379A
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JP4746291B2 (ja
JP2006050314A (ja
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Priority to JP2004229379A priority Critical patent/JP4746291B2/ja
Priority claimed from JP2004229379A external-priority patent/JP4746291B2/ja
Priority to PCT/JP2005/013190 priority patent/WO2006013717A1/ja
Priority to EP05766367.6A priority patent/EP1781067B1/en
Publication of JP2006050314A publication Critical patent/JP2006050314A/ja
Priority to US11/702,277 priority patent/US20070161896A1/en
Publication of JP2006050314A5 publication Critical patent/JP2006050314A5/ja
Application granted granted Critical
Publication of JP4746291B2 publication Critical patent/JP4746291B2/ja
Expired - Fee Related legal-status Critical Current
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JP2004229379A 2004-08-05 2004-08-05 静電容量型超音波振動子、及びその製造方法 Expired - Fee Related JP4746291B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2004229379A JP4746291B2 (ja) 2004-08-05 2004-08-05 静電容量型超音波振動子、及びその製造方法
PCT/JP2005/013190 WO2006013717A1 (ja) 2004-08-05 2005-07-15 静電容量型超音波振動子、及びその製造方法
EP05766367.6A EP1781067B1 (en) 2004-08-05 2005-07-15 CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (cMUT) AND ITS PRODUCTION METHOD
US11/702,277 US20070161896A1 (en) 2004-08-05 2007-02-05 Capacitive micromachined ultrasonic transducer (cMUT) and its production method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004229379A JP4746291B2 (ja) 2004-08-05 2004-08-05 静電容量型超音波振動子、及びその製造方法

Publications (3)

Publication Number Publication Date
JP2006050314A JP2006050314A (ja) 2006-02-16
JP2006050314A5 true JP2006050314A5 (ja) 2007-07-26
JP4746291B2 JP4746291B2 (ja) 2011-08-10

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004229379A Expired - Fee Related JP4746291B2 (ja) 2004-08-05 2004-08-05 静電容量型超音波振動子、及びその製造方法

Country Status (4)

Country Link
US (1) US20070161896A1 (ja)
EP (1) EP1781067B1 (ja)
JP (1) JP4746291B2 (ja)
WO (1) WO2006013717A1 (ja)

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