ZA904704B - Photosensitive compositions comprising selected photoactive materials,and their use in producing high resolution,photoresist images with near ultraviolet radiation - Google Patents

Photosensitive compositions comprising selected photoactive materials,and their use in producing high resolution,photoresist images with near ultraviolet radiation

Info

Publication number
ZA904704B
ZA904704B ZA904704A ZA904704A ZA904704B ZA 904704 B ZA904704 B ZA 904704B ZA 904704 A ZA904704 A ZA 904704A ZA 904704 A ZA904704 A ZA 904704A ZA 904704 B ZA904704 B ZA 904704B
Authority
ZA
South Africa
Prior art keywords
high resolution
ultraviolet radiation
producing high
near ultraviolet
photosensitive compositions
Prior art date
Application number
ZA904704A
Other languages
English (en)
Inventor
Wayne Edmund Feely
Edmund Feely Wayne
Original Assignee
Rohm & Haas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm & Haas filed Critical Rohm & Haas
Publication of ZA904704B publication Critical patent/ZA904704B/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/12—Nitrogen compound containing
    • Y10S430/121—Nitrogen in heterocyclic ring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/122—Sulfur compound containing
    • Y10S430/123—Sulfur in heterocyclic ring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/126—Halogen compound containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/127—Spectral sensitizer containing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Polymerisation Methods In General (AREA)
ZA904704A 1989-06-20 1990-06-18 Photosensitive compositions comprising selected photoactive materials,and their use in producing high resolution,photoresist images with near ultraviolet radiation ZA904704B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US36943889A 1989-06-20 1989-06-20

Publications (1)

Publication Number Publication Date
ZA904704B true ZA904704B (en) 1991-03-27

Family

ID=23455488

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA904704A ZA904704B (en) 1989-06-20 1990-06-18 Photosensitive compositions comprising selected photoactive materials,and their use in producing high resolution,photoresist images with near ultraviolet radiation

Country Status (13)

Country Link
US (1) US5391465A (fr)
EP (1) EP0404499A3 (fr)
JP (1) JP3026503B2 (fr)
KR (1) KR0155990B1 (fr)
CN (1) CN1048931A (fr)
AU (1) AU5764390A (fr)
BR (1) BR9002906A (fr)
CA (1) CA2017338A1 (fr)
FI (1) FI903096A0 (fr)
IE (1) IE902217A1 (fr)
IL (1) IL94799A (fr)
NO (1) NO902666L (fr)
ZA (1) ZA904704B (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69032077T2 (de) * 1989-10-17 1998-12-03 Shipley Co., Inc., Newton, Mass. Fotoresist für nahes U.V.
DE69131673T2 (de) * 1990-06-19 2000-04-20 Shipley Co., Inc. Säuregehärtete Photoresiste
EP0599779A1 (fr) * 1992-10-29 1994-06-01 OCG Microelectronic Materials AG Photoréserve négative à haute résolution ayant une latitude de traitement étendue
DE59600371D1 (de) * 1995-03-23 1998-09-03 Siemens Ag Verfahren zur Herstellung von Polybenzoxazol-Vorstufen und entsprechender Resistlösungen
JP3433017B2 (ja) * 1995-08-31 2003-08-04 株式会社東芝 感光性組成物
US5763134A (en) 1996-05-13 1998-06-09 Imation Corp Composition comprising photochemical acid progenitor and specific squarylium dye
US7147983B1 (en) * 1996-10-07 2006-12-12 Shipley Company, L.L.C. Dyed photoresists and methods and articles of manufacture comprising same
US6376149B2 (en) 1999-05-26 2002-04-23 Yale University Methods and compositions for imaging acids in chemically amplified photoresists using pH-dependent fluorophores
US6468712B1 (en) 2000-02-25 2002-10-22 Massachusetts Institute Of Technology Resist materials for 157-nm lithography
AU2001244719A1 (en) * 2000-04-04 2001-10-15 Daikin Industries Ltd. Novel fluoropolymer having acid-reactive group and chemical amplification type photoresist composition containing the same
US20040192876A1 (en) * 2002-11-18 2004-09-30 Nigel Hacker Novolac polymer planarization films with high temparature stability
WO2005017617A1 (fr) * 2003-07-17 2005-02-24 Honeywell International Inc. Films de planarisation pour dispositifs et applications en microelectronique avancee et procedes de production desdits films
US20050202352A1 (en) * 2004-03-11 2005-09-15 Worcester Polytechnic Institute Systems and methods for sub-wavelength imaging
US7638877B2 (en) * 2006-06-30 2009-12-29 Intel Corporation Alternative to desmear for build-up roughening and copper adhesion promotion
KR20130067332A (ko) * 2011-11-16 2013-06-24 삼성디스플레이 주식회사 노광용 마스크 및 그 마스크를 사용한 기판 제조 방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL16065C (fr) * 1924-04-24
US4343885A (en) * 1978-05-09 1982-08-10 Dynachem Corporation Phototropic photosensitive compositions containing fluoran colorformer
JPS54153889A (en) * 1978-05-24 1979-12-04 Toyo Ink Mfg Co Ltd Photosetting coating composition
US4442197A (en) * 1982-01-11 1984-04-10 General Electric Company Photocurable compositions
US4491628A (en) * 1982-08-23 1985-01-01 International Business Machines Corporation Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone
DE3248246A1 (de) * 1982-12-28 1984-06-28 Basf Ag, 6700 Ludwigshafen Positiv arbeitendes verfahren zur herstellung von relief- und druckformen
JPS59147001A (ja) * 1983-02-07 1984-08-23 ゼネラル・エレクトリツク・カンパニイ 光硬化性組成物
GB2137626B (en) * 1983-03-31 1986-10-15 Sericol Group Ltd Water based photopolymerisable compositions and their use
GB2139369B (en) * 1983-05-06 1987-01-21 Sericol Group Ltd Photosensitive systems showing visible indication of exposure
DK241885A (da) * 1984-06-01 1985-12-02 Rohm & Haas Fotosensible belaegningssammensaetninger, termisk stabile belaegninger fremstillet deraf og anvendelse af saadanne belaegninger til dannelse af termisk stabile polymerbilleder
US4632891A (en) * 1984-10-04 1986-12-30 Ciba-Geigy Corporation Process for the production of images
US5034304A (en) * 1986-01-13 1991-07-23 Rohm And Haas Company Photosensitive compounds and thermally stable and aqueous developable negative images
CA1307695C (fr) * 1986-01-13 1992-09-22 Wayne Edmund Feely Substances photosensibles et images negatives thermiquement stables et developpables en solution aqueuse
DE3710281A1 (de) * 1987-03-28 1988-10-06 Hoechst Ag Photopolymerisierbares gemisch und daraus hergestelltes aufzeichnungsmaterial

Also Published As

Publication number Publication date
CA2017338A1 (fr) 1990-12-20
KR0155990B1 (ko) 1998-11-16
CN1048931A (zh) 1991-01-30
KR910001455A (ko) 1991-01-30
JP3026503B2 (ja) 2000-03-27
NO902666L (no) 1990-12-21
JPH0387748A (ja) 1991-04-12
AU5764390A (en) 1991-01-03
EP0404499A2 (fr) 1990-12-27
FI903096A0 (fi) 1990-06-19
IE902217L (en) 1990-12-20
US5391465A (en) 1995-02-21
IE902217A1 (en) 1991-01-16
IL94799A (en) 1994-02-27
NO902666D0 (no) 1990-06-15
BR9002906A (pt) 1991-08-20
IL94799A0 (en) 1991-04-15
EP0404499A3 (fr) 1992-03-18

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