ZA708430B - Electrodeposition of copper from acidic baths - Google Patents
Electrodeposition of copper from acidic bathsInfo
- Publication number
- ZA708430B ZA708430B ZA708430A ZA708430A ZA708430B ZA 708430 B ZA708430 B ZA 708430B ZA 708430 A ZA708430 A ZA 708430A ZA 708430 A ZA708430 A ZA 708430A ZA 708430 B ZA708430 B ZA 708430B
- Authority
- ZA
- South Africa
- Prior art keywords
- electrodeposition
- copper
- acidic baths
- baths
- acidic
- Prior art date
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title 1
- 230000002378 acidificating effect Effects 0.000 title 1
- 229910052802 copper Inorganic materials 0.000 title 1
- 239000010949 copper Substances 0.000 title 1
- 238000004070 electrodeposition Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electroplating Methods And Accessories (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US1102470A | 1970-02-12 | 1970-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ZA708430B true ZA708430B (en) | 1971-09-29 |
Family
ID=21748527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ZA708430A ZA708430B (en) | 1970-02-12 | 1970-12-14 | Electrodeposition of copper from acidic baths |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5118894B1 (enrdf_load_stackoverflow) |
| BR (1) | BR7100263D0 (enrdf_load_stackoverflow) |
| FR (1) | FR2079372B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1313197A (enrdf_load_stackoverflow) |
| NL (1) | NL172085C (enrdf_load_stackoverflow) |
| ZA (1) | ZA708430B (enrdf_load_stackoverflow) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ZA739310B (en) * | 1972-12-14 | 1974-11-27 | M & T Chemicals Inc | Electrode position of copper |
| JPS53114596U (enrdf_load_stackoverflow) * | 1977-02-14 | 1978-09-12 | ||
| CA1105045A (en) * | 1977-05-04 | 1981-07-14 | Hans G. Creutz (Deceased) | Electrodeposition of copper |
| AU559896B2 (en) * | 1983-06-10 | 1987-03-26 | Omi International Corp. | Electrolytic copper depositing processes |
| US7316772B2 (en) * | 2002-03-05 | 2008-01-08 | Enthone Inc. | Defect reduction in electrodeposited copper for semiconductor applications |
| US8002962B2 (en) | 2002-03-05 | 2011-08-23 | Enthone Inc. | Copper electrodeposition in microelectronics |
| CN103397354B (zh) * | 2013-08-08 | 2016-10-26 | 上海新阳半导体材料股份有限公司 | 一种用于减少硅通孔技术镀铜退火后空洞的添加剂 |
| CN114351195A (zh) * | 2022-03-19 | 2022-04-15 | 深圳市创智成功科技有限公司 | 一种脉冲通孔填孔的电镀铜配方及其电镀工艺 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1246347B (de) * | 1966-03-08 | 1967-08-03 | Schering Ag | Saures galvanisches Kupferbad |
| US3328273A (en) * | 1966-08-15 | 1967-06-27 | Udylite Corp | Electro-deposition of copper from acidic baths |
-
1970
- 1970-12-14 ZA ZA708430A patent/ZA708430B/xx unknown
- 1970-12-17 GB GB5998270A patent/GB1313197A/en not_active Expired
-
1971
- 1971-01-11 NL NLAANVRAGE7100321,A patent/NL172085C/xx not_active IP Right Cessation
- 1971-01-15 BR BR263/71A patent/BR7100263D0/pt unknown
- 1971-01-22 FR FR717102162A patent/FR2079372B1/fr not_active Expired
- 1971-02-09 JP JP46005046A patent/JPS5118894B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR2079372A1 (enrdf_load_stackoverflow) | 1971-11-12 |
| NL7100321A (enrdf_load_stackoverflow) | 1971-08-16 |
| BR7100263D0 (pt) | 1973-05-24 |
| JPS5118894B1 (enrdf_load_stackoverflow) | 1976-06-14 |
| FR2079372B1 (enrdf_load_stackoverflow) | 1974-02-22 |
| DE2105472B2 (de) | 1975-11-20 |
| DE2105472A1 (de) | 1971-08-26 |
| GB1313197A (en) | 1973-04-11 |
| NL172085C (nl) | 1983-07-01 |
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