JPS5118894B1 - - Google Patents

Info

Publication number
JPS5118894B1
JPS5118894B1 JP46005046A JP504671A JPS5118894B1 JP S5118894 B1 JPS5118894 B1 JP S5118894B1 JP 46005046 A JP46005046 A JP 46005046A JP 504671 A JP504671 A JP 504671A JP S5118894 B1 JPS5118894 B1 JP S5118894B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP46005046A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5118894B1 publication Critical patent/JPS5118894B1/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/38—Electroplating: Baths therefor from solutions of copper

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)
JP46005046A 1970-02-12 1971-02-09 Pending JPS5118894B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US1102470A 1970-02-12 1970-02-12

Publications (1)

Publication Number Publication Date
JPS5118894B1 true JPS5118894B1 (enrdf_load_stackoverflow) 1976-06-14

Family

ID=21748527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46005046A Pending JPS5118894B1 (enrdf_load_stackoverflow) 1970-02-12 1971-02-09

Country Status (6)

Country Link
JP (1) JPS5118894B1 (enrdf_load_stackoverflow)
BR (1) BR7100263D0 (enrdf_load_stackoverflow)
FR (1) FR2079372B1 (enrdf_load_stackoverflow)
GB (1) GB1313197A (enrdf_load_stackoverflow)
NL (1) NL172085C (enrdf_load_stackoverflow)
ZA (1) ZA708430B (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53114596U (enrdf_load_stackoverflow) * 1977-02-14 1978-09-12
JP2004043957A (ja) * 2002-03-05 2004-02-12 Enthone Inc 半導体用途のための電着銅における欠陥の減少

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ZA739310B (en) * 1972-12-14 1974-11-27 M & T Chemicals Inc Electrode position of copper
CA1105045A (en) * 1977-05-04 1981-07-14 Hans G. Creutz (Deceased) Electrodeposition of copper
AU559896B2 (en) * 1983-06-10 1987-03-26 Omi International Corp. Electrolytic copper depositing processes
US8002962B2 (en) 2002-03-05 2011-08-23 Enthone Inc. Copper electrodeposition in microelectronics
CN103397354B (zh) * 2013-08-08 2016-10-26 上海新阳半导体材料股份有限公司 一种用于减少硅通孔技术镀铜退火后空洞的添加剂
CN114351195A (zh) * 2022-03-19 2022-04-15 深圳市创智成功科技有限公司 一种脉冲通孔填孔的电镀铜配方及其电镀工艺

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1246347B (de) * 1966-03-08 1967-08-03 Schering Ag Saures galvanisches Kupferbad
US3328273A (en) * 1966-08-15 1967-06-27 Udylite Corp Electro-deposition of copper from acidic baths

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53114596U (enrdf_load_stackoverflow) * 1977-02-14 1978-09-12
JP2004043957A (ja) * 2002-03-05 2004-02-12 Enthone Inc 半導体用途のための電着銅における欠陥の減少

Also Published As

Publication number Publication date
BR7100263D0 (pt) 1973-05-24
FR2079372A1 (enrdf_load_stackoverflow) 1971-11-12
ZA708430B (en) 1971-09-29
FR2079372B1 (enrdf_load_stackoverflow) 1974-02-22
DE2105472A1 (de) 1971-08-26
NL7100321A (enrdf_load_stackoverflow) 1971-08-16
DE2105472B2 (de) 1975-11-20
NL172085C (nl) 1983-07-01
GB1313197A (en) 1973-04-11

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