WO2024113096A1 - 微腔自动注液方法、系统及装置 - Google Patents

微腔自动注液方法、系统及装置 Download PDF

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Publication number
WO2024113096A1
WO2024113096A1 PCT/CN2022/134703 CN2022134703W WO2024113096A1 WO 2024113096 A1 WO2024113096 A1 WO 2024113096A1 CN 2022134703 W CN2022134703 W CN 2022134703W WO 2024113096 A1 WO2024113096 A1 WO 2024113096A1
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Prior art keywords
vacuum
vacuum box
pressure
preset
liquid injection
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PCT/CN2022/134703
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English (en)
French (fr)
Inventor
李闯
余雷
要军磊
张萌萌
云全新
黎宇翔
董宇亮
Original Assignee
深圳华大生命科学研究院
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Priority to PCT/CN2022/134703 priority Critical patent/WO2024113096A1/zh
Publication of WO2024113096A1 publication Critical patent/WO2024113096A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/10—Devices for withdrawing samples in the liquid or fluent state
    • G01N1/14—Suction devices, e.g. pumps; Ejector devices

Definitions

  • the invention belongs to the technical field of microcavity filling, and in particular to a method, system and device for automatic liquid injection into a microcavity.
  • nanopore sequencing technology In a microcavity filled with buffer, an insulating film with nanoscale pores (such as a phospholipid bilayer membrane, an artificial membrane, etc.) divides the cavity into two small chambers. When voltage is applied to the electrolyte chamber, ions or other small molecules can pass through the pores to form a stable and detectable ion current. By mastering the size and surface characteristics of the nanopores, the applied voltage and solution conditions, different types of biological molecules can be detected.
  • a sequencing chip can contain hundreds or thousands of microcavities with diameters ranging from tens to hundreds of microns. Due to the surface tension of the liquid and the hydrophobic nature of the internal surface of the micropores, and the presence of air inside, it is difficult for the buffer to completely expel the air inside the cavity and completely fill the cavity.
  • the present invention provides a microcavity automatic liquid injection method, system and device to solve the technical problem of difficulty in exhausting air in a microcavity structure proposed in the prior art.
  • the present invention provides a micro-cavity automatic liquid injection method in a first aspect, and the micro-cavity automatic liquid injection method comprises:
  • the carrier including a microcavity structure
  • the vacuum box is further evacuated until the pressure in the vacuum box reaches a second preset vacuum pressure value
  • the vacuum box After maintaining the first preset time, the vacuum box is depressurized to allow the liquid to fill the microcavity structure.
  • the method further includes:
  • evacuating the vacuum box until the pressure in the vacuum box reaches a first preset vacuum pressure value includes:
  • the vacuum box is evacuated using a first evacuation speed
  • further evacuating the vacuum box until the pressure of the vacuum box reaches a second preset vacuum pressure value comprises:
  • the vacuum box is further evacuated using a second evacuation speed, wherein the second evacuation speed is not less than the first evacuation speed;
  • Real-time detection is performed to determine whether the pressure inside the vacuum box reaches a second preset vacuum pressure value: if so, vacuuming is stopped; if not, vacuuming is continued at a second vacuuming speed.
  • injecting the liquid into the carrier includes:
  • the vacuum box is depressurized, including:
  • the vacuum box is further depressurized at a second preset pressure relief speed until the pressure in the vacuum box reaches a fourth preset vacuum pressure value.
  • the first preset pressure relief speed is smaller than the second preset pressure relief speed.
  • the second aspect of the present invention provides a micro-cavity automatic liquid injection system, which is used to implement the above-mentioned micro-cavity automatic liquid injection method.
  • the vacuum box is provided with a carrier, and the micro-cavity automatic liquid injection system comprises:
  • a first vacuum pumping module is configured to evacuate the vacuum box until the pressure in the vacuum box reaches a first preset vacuum pressure value
  • a liquid injection module configured to inject liquid into the carrier after the pressure in the vacuum box reaches a first preset vacuum pressure value
  • a second vacuuming module is configured to further vacuum the vacuum box after the liquid is injected into the carrier until the pressure of the vacuum box reaches a second preset vacuum pressure value
  • a pressure maintaining module configured to maintain the vacuum box at a second preset vacuum pressure value for a first preset time period
  • the pressure relief module is configured to relieve the pressure of the vacuum box after maintaining the first preset time, so that the liquid fills the micro-cavity structure.
  • the microcavity automatic liquid injection system further comprises:
  • An execution module configured to open or close the vacuum box
  • the detection module is used to detect whether the vacuum box is in a closed state, and to evacuate the vacuum box when the vacuum box is in the closed state.
  • the first vacuum module includes:
  • a first vacuuming unit vacuuming the vacuum box at a first vacuuming speed
  • the first detection unit detects in real time whether the pressure inside the vacuum box reaches a first preset vacuum pressure value: if so, vacuuming is stopped; if not, vacuuming is continued at a first vacuuming speed.
  • the second vacuum module includes:
  • a second vacuum pumping unit further evacuates the vacuum box using a second vacuum pumping speed, wherein the second vacuum pumping speed is not less than the first vacuum pumping speed;
  • the second detection unit detects in real time whether the pressure inside the vacuum box reaches a second preset vacuum pressure value: if so, vacuuming is stopped; if not, vacuuming is continued at a second vacuuming speed.
  • the liquid injection module is configured to open or close the liquid injection control valve, so that the liquid injection control valve injects liquid into the vehicle when in an open state.
  • the pressure relief module includes:
  • a first pressure relief unit configured to relieve pressure on the vacuum box at a first preset pressure relief speed until the pressure in the vacuum box reaches a third preset vacuum pressure value
  • the second pressure relief unit is configured to further relieve the pressure of the vacuum box at a second preset pressure relief speed after the pressure in the vacuum box reaches a third preset vacuum pressure value, until the pressure in the vacuum box reaches a fourth preset vacuum pressure value.
  • the third aspect of the present invention provides a micro-cavity automatic liquid injection device, comprising a vacuum box assembly, an operating table assembly, a liquid injection assembly and a control assembly;
  • the vacuum box assembly includes a vacuum box and a driving mechanism.
  • the vacuum box is used to place the carrier and includes a box body and a box door.
  • the driving mechanism is connected to the box door.
  • the carrier includes a micro-cavity structure.
  • An operating table assembly including a vacuum pump assembly, wherein the vacuum pump assembly is connected to a vacuum box;
  • a liquid injection assembly which is controllably connected to the carrier;
  • the control assembly is respectively connected to the vacuum box assembly, the operating table assembly and the liquid injection assembly, and is used to control the driving mechanism to drive the box door to open and close the box body, control the vacuum pump component to evacuate or relieve the pressure of the vacuum box, and control the liquid injection assembly to inject liquid into the carrier.
  • the vacuum pump assembly includes a vacuum pump and a pressure relief valve, and the vacuum pump and the pressure relief valve are both connected to the vacuum box;
  • the control assembly is used to control the vacuum pump to evacuate the vacuum box, and to control the pressure relief valve to relieve the pressure of the vacuum box.
  • the driving mechanism includes a switch signal component, which is connected to the control assembly signal, and the control assembly determines whether the vacuum box is in a closed state or an open state according to the signal sent by the switch signal component.
  • the vacuum box also includes a pressure sensor, which is arranged in the box body, and the control assembly is connected to the pressure sensor signal to determine whether the pressure value inside the vacuum box reaches a preset value.
  • the liquid injection assembly includes a liquid injection control valve and a liquid injection pipeline; the liquid injection pipeline is connected to the vehicle, the liquid injection control valve is arranged on the liquid injection pipeline, and the control assembly is used to open or close the liquid injection control valve so that the liquid injection pipeline injects liquid into the vehicle when the liquid injection control valve is in an open state.
  • the micro-cavity automatic liquid injection device further comprises a frame, the frame comprises a frame body and a protective cover, a protective chamber is formed in the frame body, and the protective cover is movably connected to the frame body to open and close the protective chamber;
  • the vacuum box assembly is arranged in the protection room, and the operating table assembly is connected to the frame body and is located at one side of the protection room.
  • control assembly is integrated into the operating console assembly.
  • the carrier also includes a liquid storage chamber, a liquid flow channel and a gas storage chamber.
  • the liquid storage chamber is used to store the liquid to be filled
  • the microcavity structure is arranged to overlap with at least part of the liquid flow channel
  • the gas storage chamber is used to store gas when the vacuum pump assembly evacuates the vacuum box.
  • the present invention has the following beneficial effects:
  • the vacuum box is evacuated at the first level so that the pressure inside the vacuum box is at the first preset vacuum pressure value, and the liquid is injected under the environment of the carrier at the first preset vacuum pressure value.
  • the vacuum box is evacuated at the second level so that the pressure inside the vacuum box is at the second preset vacuum pressure value and the pressure is maintained for the first preset time, so that the carrier injected with liquid is exhausted under the environment of the second preset vacuum pressure value.
  • the vacuum box is depressurized so that the pressure inside the vacuum box gradually increases, and under the effect of the gradually increasing ambient pressure, the liquid injected into the carrier flows to the microcavity structure to complete the filling.
  • a two-stage vacuum pumping method is adopted to ensure that the carrier is always in a negative pressure environment during the liquid injection process, and the air in the carrier is discharged as much as possible, so that the microcavity structure does not contain air, avoiding the formation of a gas-liquid mixture in the microcavity structure to affect the detection results.
  • FIG1 is a flowchart showing a method for automatically injecting liquid into a microcavity according to some embodiments of the present disclosure
  • FIG2 shows a schematic diagram of a microcavity automatic liquid injection device according to some embodiments of the present disclosure
  • FIG3 shows a schematic diagram of the vacuum box assembly 1 in the micro-cavity automatic liquid injection device in FIG2 ;
  • FIG4 shows a schematic diagram of the operating table assembly 2 in the micro-cavity automatic liquid injection device in FIG2 ;
  • FIG5 shows a partial cross-sectional view of a carrier according to some embodiments of the present disclosure
  • FIG6 shows a block diagram of the connection of the various assemblies of the microcavity automatic liquid injection device in FIG2;
  • FIG7 shows a connection block diagram of a microcavity automatic liquid injection system according to some embodiments of the present disclosure
  • FIG. 8 shows a flowchart of the process of automatically injecting liquid into a microcavity using the automatic injection device for injecting liquid into a microcavity in FIG. 2 .
  • Vacuum box assembly 11. Vacuum box; 111. Box body; 112. Box door; 113. Pressure sensor; 12. Driving mechanism; 121. Switching signal component
  • Liquid injection assembly 31. Liquid injection control valve;
  • Frame 61. Frame body; 62. Protective cover; R. Protective room;
  • First vacuum pumping module 711. First vacuum pumping unit; 712. First detection unit; 72. Liquid injection module; 73. Second vacuum pumping module; 731. Second vacuum pumping unit; 732. Second detection unit; 74. Pressure maintaining module; 75. Pressure relief module; 751. First pressure relief unit; 752. Second pressure relief unit; 76. Execution module; 77. Detection module.
  • Fig. 1 shows a flowchart of the steps of the micro-cavity automatic liquid filling method provided according to some embodiments of the present disclosure.
  • the micro-cavity automatic liquid filling method includes the following steps.
  • Step S11 placing the carrier 5 in the vacuum box 11 , wherein the carrier 5 includes a microcavity structure 54 .
  • a chamber is provided in the vacuum box 11 and a negative pressure environment is formed under the action of a vacuum pump.
  • the carrier 5 can be a detection module loaded with a sequencing chip.
  • the sequencing chip is provided with a plurality of micro-cavities, that is, the carrier 5 includes a micro-cavity structure 54. Placing the carrier 5 in the vacuum box 11 means that the micro-cavity structure 54 is placed in a chamber that can maintain a negative pressure environment.
  • microcavity structure 54 includes a plurality of microcavities with diameters ranging from tens of micrometers to hundreds of micrometers.
  • Step S12 evacuating the vacuum box 11 until the pressure of the vacuum box 11 reaches a first preset vacuum pressure value.
  • the vacuum box 11 can be evacuated only when the chamber in the vacuum box 11 is isolated from the outside air, so that a negative pressure environment can be formed in the chamber. It should be noted that when the chamber in the vacuum box 11 is isolated from the outside air, the vacuum box 11 is in a closed state.
  • step S11 and step S12 the method further includes:
  • Step S111 closing the vacuum box 11 .
  • Step S112 detecting whether the vacuum box 11 is in a closed state, and evacuating the vacuum box 11 when the vacuum box 11 is in a closed state.
  • closing the vacuum box 11 means that the vacuum box 11 forms a chamber isolated from the outside air, that is, the vacuum box 11 is switched to a closed state.
  • Executing step S111 does not guarantee that the vacuum box 11 is in a closed state. Therefore, in step S112, it is necessary to determine whether the vacuum box 11 is in a closed state. Only when it is confirmed that the vacuum box 11 is in a closed state can the vacuum box 11 be vacuumed. Therefore, step S112 ensures that the vacuum box 11 is in a closed state to avoid invalid vacuuming operations.
  • step S12 can be executed.
  • the pressure in the vacuum box 11 is at a first preset vacuum pressure value through vacuum operation, that is, the carrier 5 is placed in a negative pressure environment of the first preset vacuum pressure value.
  • Step S12 is executed to prepare for the liquid injection operation on the carrier 5.
  • step S12 includes:
  • Step S121 evacuating the vacuum box 11 at a first evacuation speed.
  • Step S122 real-time detection of whether the pressure in the vacuum box 11 reaches a first preset vacuum pressure value; if so, stop vacuuming; if not, continue vacuuming at a first vacuuming speed.
  • step S121 and step S122 are performed to ensure that the carrier 5 is in a negative pressure environment of the first preset vacuum pressure value.
  • Step S13 after the pressure in the vacuum box 11 reaches a first preset vacuum pressure value, injecting liquid into the carrier 5 .
  • This step is a liquid injection step, and the carrier 5 performs a liquid injection operation under the environment of the first preset vacuum pressure value. It can be understood that since the carrier 5 is in a negative pressure environment, the liquid is injected into the carrier 5 under the pressure difference between the external atmospheric pressure and the first preset vacuum pressure value. In this way, the carrier 5 performs a liquid injection operation under a negative pressure environment to minimize the risk of air entering the microcavity structure.
  • step S13 includes:
  • Step S131 opening the injection control valve 31
  • Step S132 injecting liquid into the carrier 5 and continuing for a second preset time
  • Step S133 closing the injection control valve 31.
  • the liquid is injected into the carrier 5 through step S131 to step S133, and opening the injection control valve 31 can open the injection pipeline connected to the carrier 5, so that the liquid can flow into the carrier 5.
  • the volume of the liquid injected into the carrier 5 can be adjusted by controlling the second preset time length of the injection control valve 31.
  • the injection control valve 31 is closed to complete the injection.
  • Step S14 after the liquid is injected into the carrier 5, the vacuum box 11 is further evacuated until the pressure in the vacuum box 11 reaches a second preset pressure value.
  • step S14 is performed to further evacuate the vacuum box 11 under the condition that the pressure in the vacuum box 11 is at the first preset pressure value, so that the pressure in the vacuum box 11 is at the second preset pressure value.
  • the carrier 5 contains air, and in the process of further evacuating the vacuum box 11, the pressure of the vacuum box 11 gradually decreases, and the air contained in the carrier 5 is gradually discharged.
  • the second preset vacuum pressure value is lower than the first preset vacuum pressure value.
  • Vacuum pressure refers to the situation where the absolute pressure is lower than the atmospheric pressure. The larger the absolute value of the vacuum pressure value, the better the vacuum degree.
  • step S14 includes:
  • Step S141 further evacuating the vacuum box 11 using a second evacuation speed, wherein the second evacuation speed is not less than the first evacuation speed;
  • Step S142 real-time detection of whether the pressure inside the vacuum box 11 reaches a second preset vacuum pressure value: if so, stop vacuuming; if not, continue vacuuming at a second vacuuming speed.
  • step S141 and step S142 it is ensured that the pressure in the vacuum box 11 is at the second preset vacuum pressure value.
  • the first preset vacuum pressure value and the second preset time are the decisive factors for adjusting the volume of liquid injected into the carrier 5, and the first vacuum pumping speed directly affects the error between the actual pressure in the vacuum box 11 and the first preset vacuum pressure value.
  • the smaller the first vacuum pumping speed the smaller the error between the actual pressure in the vacuum box 11 and the first preset vacuum pressure value, and thus the higher the accuracy of controlling the volume of injected liquid.
  • the first vacuum pumping speed should be appropriate.
  • the error requirement between the actual pressure in the vacuum box 11 and the second preset vacuum pressure value is not high.
  • the second vacuum pumping speed is not less than the first vacuum pumping speed to avoid the entire vacuum pumping operation time being too long.
  • Step S15 the vacuum box 11 is maintained at a second preset vacuum pressure value for a first preset time.
  • the carrier 5 is maintained at the second preset vacuum pressure value for the first preset time, and the air in the carrier 5 is exhausted as much as possible, and before the liquid is filled into the microcavity structure 54, the microcavity structure 54 is prevented from containing air as much as possible.
  • Step S16 after maintaining the first preset time, the vacuum box 11 is depressurized to allow the liquid to fill the microcavity structure.
  • the vacuum box 11 is depressurized, that is, the vacuum box 11 is connected to the outside air, and the outside air enters the vacuum box 11. It can be understood that during the depressurization process, the pressure in the vacuum box 11 gradually increases, and under the effect of the increasing ambient pressure, the liquid in the carrier 5 flows to the microcavity structure 54 and fills the microcavity structure 54, thus completing the entire liquid injection process.
  • the vacuum box 11 is evacuated at the first level so that the pressure in the vacuum box 11 is at the first preset vacuum pressure value, and liquid injection is performed in an environment where the carrier 5 is at the first preset vacuum pressure value.
  • the vacuum box 11 is evacuated at the second level so that the pressure in the vacuum box 11 is at the second preset vacuum pressure value and the pressure is maintained for the first preset time, so that the carrier 5 injected with liquid is exhausted in an environment of the second preset vacuum pressure value.
  • the vacuum box 11 is depressurized so that the pressure in the vacuum box 11 gradually increases, and under the effect of the gradually increasing ambient pressure, the liquid injected into the carrier 5 flows to the micro-cavity structure 54 to complete the filling.
  • a two-stage vacuum pumping method is adopted to ensure that the carrier 5 is always in a negative pressure environment during the liquid injection process, and the air in the carrier 5 is exhausted as much as possible, so that the microcavity structure does not contain air, thereby avoiding the formation of a gas-liquid mixture in the microcavity structure to affect the detection results.
  • step S16 includes:
  • Step S161 depressurizing the vacuum box 11 at a first preset depressurization speed until the pressure in the vacuum box 11 reaches a third preset vacuum pressure value.
  • Step S162 after the pressure in the vacuum box 11 reaches the third preset vacuum pressure value, the vacuum box 11 is further depressurized at a second preset depressurization speed until the pressure in the vacuum box 11 reaches a fourth preset vacuum pressure value.
  • the vacuum box 11 is depressurized by a two-stage depressurization method.
  • the pressure is released at a first preset depressurization speed, the pressure in the vacuum box 11 gradually increases, and the liquid in the carrier 5 flows to the microcavity structure 54 and fills the microcavity structure 54.
  • the smaller the first preset depressurization speed the slower the pressure change rate in the vacuum box 11, and accordingly, the slower the liquid flow rate in the carrier 5, which is conducive to the fluid being fully filled in the microcavity structure 54.
  • the pressure in the vacuum box 11 reaches the third preset vacuum pressure value, it is determined that the liquid has been completely filled in the microcavity structure 54, and the first stage of depressurization is completed.
  • the second stage of pressure relief is performed at a second preset pressure relief speed. After the pressure in the vacuum box 11 reaches a fourth preset vacuum pressure value, the second stage of pressure relief is determined to be completed. It should be noted that the fourth preset vacuum pressure value is close to atmospheric pressure, which makes it easy to switch the state of the vacuum box 11.
  • the fourth preset vacuum pressure value is greater than the third preset vacuum pressure value, and the second preset pressure relief speed should be as fast as possible to avoid excessive pressure relief time. In actual applications, the second preset pressure relief speed far exceeds the first preset pressure relief speed.
  • the second preset vacuum pressure value reached by the second stage of vacuuming is the smallest.
  • the third preset vacuum pressure value is less than the first preset vacuum pressure value.
  • the third preset vacuum pressure value is between the first preset pressure value and the second preset pressure value.
  • the absolute value of the difference between the third preset vacuum pressure value and the first preset vacuum pressure value is greater than the absolute value of the difference between the third preset vacuum pressure value and the second preset vacuum pressure value.
  • FIG2 shows a schematic diagram of a microcavity automatic liquid injection device provided according to some embodiments of the present disclosure.
  • FIG3 shows a schematic diagram of a vacuum box assembly 1 in the microcavity automatic liquid injection device in FIG2.
  • FIG4 shows a schematic diagram of an operating table assembly 2 in the microcavity automatic liquid injection device in FIG2.
  • FIG6 shows a connection block diagram of each assembly of the microcavity automatic liquid injection device in FIG2. Please refer to FIG2, FIG3 and FIG6.
  • the microcavity automatic liquid injection device includes a vacuum box assembly 1, an operating table assembly 2, a liquid injection assembly 3 and a control assembly 4.
  • the control assembly 4 is respectively connected to the vacuum box assembly 1, the operating table assembly 2 and the liquid injection assembly 3.
  • the microcavity automatic liquid injection device can implement the above-mentioned microcavity automatic liquid injection method.
  • the vacuum box assembly 1 includes a vacuum box 11 and a driving mechanism 12.
  • the vacuum box 11 includes a box body 111 and a box door 112.
  • the driving mechanism 12 is connected to the box door 112.
  • the control assembly 4 is connected to the driving mechanism 12 signal, so that the driving mechanism 12 can be controlled to drive the box door 112 to open and close the box body 111, thereby switching the vacuum box 11 between a closed state and an open state.
  • step S11 the driving mechanism 12 drives the box door 112 to open the box body 111, so that the vacuum box 11 is in an open state, and the carrier 5 can be placed in the vacuum box 11 only when the vacuum box 11 is in an open state.
  • step S111 the driving mechanism 12 drives the box door 112 to close the box body 111, so that the vacuum box 11 is switched from an open state to a closed state.
  • the driving mechanism 12 is a pneumatic driving mechanism.
  • the driving mechanism 12 uses a cylinder as a power component to drive the box door 112 to open and close the box body 111.
  • the driving mechanism 12 is not limited thereto.
  • the driving mechanism 12 is an oil pressure driving mechanism.
  • the driving mechanism 12 can use an oil cylinder as a power component to drive the box door 112 to open and close the box body.
  • the driving mechanism 12 is an electric driving mechanism.
  • the driving mechanism 12 can use an electric push rod as a power component.
  • the driving mechanism 12 can satisfy the requirement of driving the box door 112 to open and close the box body 111, and no specific limitation is made here.
  • the driving mechanism 12 includes a switch signal component 121, which is signal-connected to the control assembly 4 for sending a switch signal to the control assembly 4, and the control assembly 4 determines the state of the vacuum box 11 according to the switch signal.
  • step S112 the control assembly 4 detects whether the vacuum box 11 is in the closed state according to the switch signal sent by the switch signal component 121 .
  • the drive mechanism 12 is taken as an example of a pneumatic drive mechanism.
  • the drive mechanism 12 includes a cylinder, and magnetic induction switches are provided at both ends of the cylinder barrel of the cylinder.
  • the magnetic induction switch serves as a switch signal component 121.
  • the switch signal component 121 is not limited to this.
  • the switch signal component 121 is a proximity switch disposed on the box body 111. When the box door 112 closes the box body 111, the proximity switch is energized to confirm that the vacuum box 11 is in a closed state; when the box door 112 is away from the box body 111, the proximity switch is de-energized to confirm that the vacuum box 11 is in an open state.
  • the switch signal component 121 is not limited to the above embodiment, and it is sufficient to ensure that the control assembly 4 can determine the state of the vacuum box 11 according to the switch signal sent by the switch signal component 121.
  • the control assembly 4 sends a signal to close the box door 112
  • the drive mechanism 12 has not been fully executed
  • different types of drive mechanisms 12 adopt different response methods.
  • the drive mechanism 12 is a pneumatic drive mechanism
  • the cylinder is used as a power component, and the cylinder action is not in place
  • the drive mechanism 12 is an electric drive mechanism
  • the electric push rod is used as a power component, and the electric push rod has not been fully executed, it is preferred to adopt a response method of allowing the electric push rod to continue to execute the action.
  • the operating table assembly 2 includes a vacuum pump assembly 21 , which is connected to the vacuum box 11 , and the control assembly 4 is connected to the operating table assembly 2 to control the vacuum pump assembly 21 to evacuate or depressurize the vacuum box 11 .
  • the vacuum pump assembly 21 includes a vacuum pump 211 and a pressure relief valve 212.
  • the vacuum pump 211 and the pressure relief valve 212 are both connected to the vacuum box 11, specifically connected to the vacuum box 11 through a gas pipeline (not shown).
  • the control assembly 4 is used to control the vacuum pump 211 to evacuate the vacuum box 11, and to control the pressure relief valve 212 to relieve the pressure of the vacuum box 11.
  • step S12 and step S14 the vacuum box 11 is evacuated by the vacuum pump 211.
  • step S121 and step S141 the vacuum pumping speed of the vacuum pump 211 is controlled to evacuate the vacuum box 11 at the first vacuuming speed or the second vacuuming speed.
  • step S15 the vacuum pump 211 is controlled to stop operating for the first preset time, so that the vacuum box 11 can maintain the second preset vacuum pressure for the first preset time.
  • step S16 the vacuum pump 211 is in a stopped state, and the vacuum box 11 can be depressurized by opening the pressure relief valve 212.
  • the vacuum box 11 can be depressurized at a first preset pressure relief speed or a second preset pressure relief speed by controlling the opening of the pressure relief valve 212.
  • the vacuum box 11 is connected to two pressure relief pipelines, and the pressure relief valve 212 includes a slow pressure relief valve and a fast pressure relief valve.
  • the slow pressure relief valve and the fast pressure relief valve are respectively arranged on the two pressure relief pipelines, and the slow pressure relief valve is configured to relieve pressure at a first preset pressure relief speed in an open state, and the fast pressure relief valve is configured to relieve pressure at a second preset pressure relief speed in an open state, and the pressure relief is performed by switching the pressure relief valve 212 with different pressure relief speeds.
  • the vacuum box 11 further includes a pressure sensor 113, which is disposed in the box body 111, and the control assembly 4 is connected to the pressure sensor 113 by signal, so as to detect the pressure in the vacuum box 11. It can be understood that in step 122, step 142, step S161 and step S162, the pressure sensor 113 is used to detect in real time whether the pressure value in the vacuum box 11 reaches a preset value.
  • the liquid injection assembly 3 includes a liquid injection control valve 31 and a liquid injection pipeline (not shown).
  • the liquid injection pipeline is connected to the carrier 5, the liquid injection control valve 31 is arranged on the liquid injection pipeline, and the control assembly 4 is used to open or close the liquid injection control valve 31, so that the liquid injection pipeline injects liquid into the carrier 5 when the liquid injection control valve 31 is in an open state.
  • steps S131 to S133 are executed by controlling the injection assembly 3 through the control assembly 4.
  • the injection control valve 31 is switched to a closed state to complete the injection of liquid into the carrier 5.
  • control assembly 4 is integrated into the operating table assembly 2.
  • the operating table assembly 2 includes a cabinet, and the control assembly 4 is installed in the cabinet.
  • the control assembly 4 includes a control module and an input module.
  • the input module includes buttons and a touch screen disposed on the cabinet, the buttons include a start button for sending a start signal, and the touch screen can input preset parameters, including a preset vacuum pressure value, a vacuum pumping speed, and a preset pressure relief speed.
  • the control module obtains the start signal, it can send instructions so that the microcavity automatic liquid injection device automatically executes the above method according to the preset parameters to achieve automatic liquid injection.
  • control module includes but is not limited to: a general-purpose processor, a special-purpose processor, a conventional processor, a digital signal processor (DSP), multiple microprocessors, one or more microprocessors associated with a DSP core, a controller, a microcontroller, a single-chip microcomputer, an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) circuit, any other type of integrated circuit (IC) and a state machine, etc.
  • DSP digital signal processor
  • ASIC application-specific integrated circuit
  • FPGA field-programmable gate array
  • the micro-chamber automatic liquid injection device further includes a frame 6, which includes a frame body 61 and a protective cover 62.
  • a protective chamber R is formed in the frame body 61, and the protective cover 62 is movably connected to the frame body 61 to open and close the protective chamber R.
  • the vacuum box assembly 1 is disposed in the protective chamber R, and the operating table assembly 2 is connected to the frame body 61 and is located on one side of the protective chamber R.
  • the frame body 61 is composed of a support frame and a sheet metal cover covering the support frame, and a protection chamber R is formed.
  • the protection cover 62 is movably connected to the frame body 61 through a linear guide mechanism, so that the protection chamber R can be opened and closed. It can be understood that various cables and pipelines between the vacuum box assembly 1 and the operating table assembly 2 can be arranged on the frame 6, and the vacuum box assembly 1 and the operating table assembly 2 are supported and protected by the frame 6, so as to provide a good environment for ensuring the normal operation of the device.
  • the carrier 5 used in the liquid injection process also includes a liquid storage chamber 51, a liquid flow channel 52 and an air storage chamber 53.
  • the liquid storage chamber 51 is connected to the liquid injection pipeline and is used to store the liquid to be filled.
  • the microcavity structure 54 is arranged to overlap with at least part of the liquid flow channel 52, and the air storage chamber 53 is used to store gas when the vacuum pump assembly 21 evacuates the vacuum box 11.
  • Figure 8 shows a flowchart of automatic microcavity liquid injection by the microcavity automatic liquid injection device. The following is a detailed description in combination with Figures 5 and 8 and taking the injection volume of 300ul as an example.
  • the control driving mechanism 12 drives the box door 112 to close the box body 111, so as to switch the vacuum box 11 from an open state to a closed state.
  • the switch signal component 121 sends a switch signal to the control module to determine that the vacuum box 11 is in a closed state.
  • the vacuum pump 211 After determining that the vacuum box 11 is in the closed state, the vacuum pump 211 is turned on and controlled to evacuate the vacuum box 11 at a first evacuation speed.
  • the first evacuation speed is 1.5 m 3 /h.
  • the pressure in the vacuum box 11 is detected in real time by the pressure sensor 113.
  • the vacuum pump 211 is turned off, thus completing the first stage of evacuation.
  • the injection control valve 31 is opened and maintained in the open state for a second preset time, so that the injection time reaches the second preset time, and the liquid is injected into the liquid storage chamber 51.
  • the second preset time is 1ms to 200ms
  • the first preset vacuum pressure value is -5Kpa to -50Kpa
  • the first vacuum pumping speed is 0.1m3 /h to 1.5m3 /h.
  • the first preset vacuum pressure value is -15Kpa
  • the second preset time is 10ms.
  • the first preset vacuum pressure value is larger, the second preset time length is smaller. In other words, under the condition that the injection volume is determined, the first preset vacuum pressure value and the second preset time length are negatively correlated.
  • the vacuum pump 211 is turned on and controlled to further evacuate the vacuum box 11 at the second evacuation speed, and the pressure in the vacuum box 11 is detected in real time by the pressure sensor 113.
  • the vacuum pump 211 is turned off, thus completing the second stage of evacuation.
  • the pressure in the vacuum box 11 is maintained at the second preset vacuum pressure value for the first preset time.
  • the second evacuation speed is 14.4m 3 /h
  • the second preset vacuum pressure value is -98Kpa
  • the first preset time is 60000ms.
  • the second vacuuming speed is greater than the first vacuuming speed, and the vacuuming is slow first, so that the pressure in the vacuum box 11 slowly reaches the first preset vacuum pressure value to ensure the accuracy of the injected liquid volume. Then the vacuuming is fast, so that the pressure in the vacuum box 11 quickly reaches the second preset vacuum pressure value to avoid the vacuuming operation time being too long.
  • the liquid flow channel 52 when liquid is injected into the liquid storage chamber 51, the liquid flow channel 52 is closed and contains air, and during the second stage of vacuuming, the pressure in the vacuum box 11 gradually decreases, and the air pressure in the liquid flow channel 52 is higher than the pressure in the vacuum box 11, so it can be discharged from the liquid storage chamber 51.
  • the vacuum box 11 is maintained at the second preset vacuum pressure value for the first preset time, so that the residual air in the liquid flow channel 52 is discharged as much as possible.
  • the pressure relief valve 212 is opened, and the pressure relief valve 212 is controlled to relieve the pressure on the vacuum box 11 at a first preset pressure relief speed.
  • the pressure relief valve 212 is controlled to further relieve the pressure on the vacuum box 11 at a second preset pressure relief speed until the pressure in the vacuum box 11 reaches a fourth preset vacuum pressure value.
  • the liquid in the liquid storage chamber 51 flows to the liquid flow channel 52, and flows along the liquid flow channel 52 toward the gas storage chamber 53.
  • the liquid will pass through the micro-cavity structure 54 for filling, and then the remaining air in the liquid flow channel 52 will be compressed into the gas storage chamber 53, thereby avoiding the generation of a gas-liquid mixture in the micro-cavity structure 54.
  • the pressure in the vacuum box 11 is quickly close to the atmospheric pressure.
  • the first pressure relief speed is 0.1m 3 /h
  • the third preset vacuum pressure value is -85Kpa
  • the second pressure relief speed is 1m 3 /h
  • the fourth preset vacuum pressure value is -0.5Kpa.
  • the driving mechanism 12 is controlled to open the vacuum box 11, so that the vacuum box 11 is switched from the closed state to the open state.
  • the fourth preset vacuum pressure value is close to the atmospheric pressure, and the pressure difference between the inside of the vacuum box 11 and the outside atmosphere is not too large, so that the driving mechanism 12 can ensure that the vacuum box 11 can be opened normally.
  • FIG. 7 shows a connection block diagram of a microcavity automatic liquid injection system provided according to some embodiments of the present disclosure as an implementation of the above method.
  • the system corresponds to the method embodiment shown in FIG. 1 , and the system can be specifically applied to various electronic devices.
  • the microcavity automatic liquid injection system includes a first vacuum pumping module 71, a liquid injection module 72, a second vacuum pumping module 73, a pressure holding module 74, and a pressure relief module 75.
  • the first vacuum pumping module 71 is configured to vacuum the vacuum box 11 until the pressure in the vacuum box 11 reaches a first preset vacuum pressure value.
  • the liquid injection module 72 is configured to inject the liquid into the carrier 5 after the pressure in the vacuum box 11 reaches the first preset vacuum pressure value.
  • the second vacuum pumping module 73 is configured to further vacuum the vacuum box 11 after the liquid is injected into the carrier 5 until the pressure of the vacuum box 11 reaches a second preset vacuum pressure value.
  • the pressure holding module 74 is configured to maintain the vacuum box 11 at the second preset vacuum pressure value for a first preset time.
  • the pressure relief module 75 is configured to relieve the pressure of the vacuum box 11 after maintaining the first preset time, so that the liquid is filled in the microcavity structure.
  • the microcavity automatic liquid injection system further includes an execution module 76 and a detection module 77, wherein the execution module 76 is configured to open or close the vacuum box 11.
  • the detection module 77 is configured to detect whether the vacuum box 11 is in a closed state, and to evacuate the vacuum box 11 when the vacuum box 11 is in a closed state.
  • the first vacuuming module 71 includes a first vacuuming unit 711 and a first detection unit 712.
  • the first vacuuming unit 711 uses a first vacuuming speed to vacuumize the vacuum box 11.
  • the first detection unit 712 detects in real time whether the pressure inside the vacuum box 11 reaches a first preset vacuum pressure value: if so, stop vacuuming; if not, continue vacuuming at the first vacuuming speed.
  • the second vacuuming module 73 includes a second vacuuming unit 731 and a second detection unit 732.
  • the second vacuuming unit 731 further vacuumizes the vacuum box 11 using a second vacuuming speed, and the second vacuuming speed is not less than the first vacuuming speed.
  • the second detection unit 732 detects in real time whether the pressure inside the vacuum box 11 reaches a second preset vacuum pressure value: if so, stop vacuuming; if not, continue vacuuming at the second vacuuming speed.
  • the injection module 72 is configured to open or close the injection control valve 31 so that the injection control valve 31 injects liquid into the carrier 5 when in an open state.
  • the pressure relief module 75 includes a first pressure relief unit 751 and a second pressure relief unit 752.
  • the first pressure relief unit 751 is configured to relieve pressure on the vacuum box 11 at a first preset pressure relief speed until the pressure in the vacuum box 11 reaches a third preset vacuum pressure value.
  • the second pressure relief unit 752 is configured to further relieve pressure on the vacuum box 11 at a second preset pressure relief speed after the pressure in the vacuum box 11 reaches the third preset vacuum pressure value until the pressure in the vacuum box 11 reaches a fourth preset vacuum pressure value.
  • each module recorded in the system corresponds to each step in the above method. Therefore, the operations, features and beneficial effects described above for the method are also applicable to the system and the modules contained therein, and will not be repeated here.
  • each square box in the flow chart or block diagram can represent a module, a program segment or a part of a code, and the module, the program segment or a part of the code contains one or more executable instructions for realizing the specified logical function.
  • the functions marked in the square box can also occur in a sequence different from that marked in the accompanying drawings. For example, two square boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved.
  • each square box in the block diagram and/or the flow chart, and the combination of the square boxes in the block diagram and/or the flow chart can be implemented with a dedicated hardware-based system that performs the specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.

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Abstract

一种微腔自动注液方法、系统及装置。微腔自动注液方法包括：将载具置于真空箱（11）中，载具（5）包括微腔结构（54）对真空箱（11）抽真空，直至真空箱（11）内的压力达到第一预设真空压力值；在真空箱（11）内的压力达到第一预设真空压力值后，将液体注入载具（5）中；在液体注入载具（5）中后，对真空箱（11）进一步抽真空，直至真空箱（11）内的压力达到第二预设真空压力值；将真空箱（11）以第二预设真空压力值维持第一预设时长；在维持第一预设时长后，对真空箱（11）泄压，以使液体填充于微腔结构（54）中。采用先后两级抽真空的方法使得载具（5）在注液过程中始终处于负压环境，尽量将载具（5）中的空气排出，避免因在微腔结构（54）中形成气液混合物而影响检测结果。

Description

微腔自动注液方法、系统及装置 技术领域
本发明属于微腔填充技术领域，尤其是一种微腔自动注液方法、系统及装置。
背景技术
纳米孔测序技术的基本工作原理：在充满缓冲液的微腔内，带有纳米级小孔的绝缘薄膜(如磷脂双层膜、人工膜等)将腔体分成2个小室，当电压作用于电解液室，离子或其他小分子物质可穿过小孔，形成稳定的可检测的离子电流。掌握纳米孔的尺寸和表面特性、施加的电压及溶液条件，可检测不同类型的生物分子。一个测序芯片可包含成百上千个微腔，微腔直径几十至几百微米，因液体表面张力及微孔内部表面为疏水性质，且内部存有空气，缓冲液很难完全排除掉腔体内部的空气并完全充满腔体。
发明内容
本发明提供了一种微腔自动注液方法、系统及装置，以解决现有技术中提出的微腔结构中的空气排出困难的技术问题。
为解决上述问题，本发明第一方面提供了一种微腔自动注液方法，该微腔自动注液方法包括：
将载具置于真空箱中，载具包括微腔结构；
对真空箱抽真空，直至真空箱内的压力达到第一预设真空压力值；
在真空箱内的压力达到第一预设真空压力值后，将液体注入载具中；
在液体注入载具中后，对真空箱进一步抽真空，直至真空箱内的压力达 到第二预设真空压力值；
将真空箱以第二预设真空压力值维持第一预设时长；
在维持第一预设时长后，对真空箱泄压，以使液体填充于微腔结构中。
在本发明可选的方案中，在将载具置于真空箱中后、对真空箱抽真空之前，方法还包括：
关闭真空箱；
检测真空箱是否处于关闭状态，在真空箱处于关闭状态下，对真空箱抽真空。
在本发明可选的方案中，对真空箱抽真空，直至真空箱内的压力达到第一预设真空压力值，包括：
采用第一抽真空速度对真空箱抽真空；
实时检测真空箱内的压力是否达到第一预设真空压力值：若是，则停止抽真空；若否，则以第一抽真空速度继续抽真空。
在本发明可选的方案中，对真空箱进一步抽真空，直至真空箱的压力达到第二预设真空压力值，包括：
采用第二抽真空速度对真空箱进一步抽真空，第二抽真空速度不小于第一抽真空速度；
实时检测真空箱内部的压力是否达到第二预设真空压力值：若是，则停止抽真空；若否，则以第二抽真空速度继续抽真空。
在本发明可选的方案中，将液体注入载具中包括：
打开注液控制阀；
将液体注入载具并持续第二预设时长；
关闭注液控制阀。
在本发明可选的方案中，对真空箱泄压，包括：
以第一预设泄压速度对真空箱泄压，直至真空箱内的压力达到第三预设真空压力值；
在真空箱内的压力达到第三预设真空压力值后，以第二预设泄压速度对真空箱进一步泄压，直至真空箱内的压力达到第四预设真空压力值。
在本发明可选的方案中，第一预设泄压速度小于第二预设泄压速度。
本发明第二方面提供了一种微腔自动注液系统，用于实现上述的微腔自动注液方法，真空箱放置有载具，微腔自动注液系统包括：
第一抽真空模块，被配置成对真空箱抽真空，直至真空箱内的压力达到第一预设真空压力值；
注液模块，被配置成在真空箱内的压力达到第一预设真空压力值后，将液体注入载具中；
第二抽真空模块，被配置成在液体注入载具中后对真空箱进一步抽真空，直至真空箱的压力达到第二预设真空压力值；
保压模块，被配置成将真空箱以第二预设真空压力值维持第一预设时长；
泄压模块，被配置成在维持第一预设时长后对真空箱泄压，以使液体填充于微腔结构中。
在本发明可选的方案中，微腔自动注液系统还包括：
执行模块，设置为用于打开或关闭真空箱；
检测模块，用于检测真空箱是否处于关闭状态，在真空箱处于关闭状态下，对真空箱进行抽真空。
在本发明可选的方案中，第一抽真空模块包括：
第一抽真空单元，采用第一抽真空速度对真空箱抽真空；
第一检测单元，实时检测真空箱内部的压力是否达到第一预设真空压力值：若是，则停止抽真空；若否，则以第一抽真空速度继续抽真空。
在本发明可选的方案中，第二抽真空模块包括：
第二抽真空单元，采用第二抽真空速度对真空箱进一步抽真空，第二抽真空速度不小于第一抽真空速度；
第二检测单元，实时检测真空箱内部的压力是否达到第二预设真空压力值：若是，则停止抽真空；若否，则以第二抽真空速度继续抽真空。
在本发明可选的方案中，注液模块设置为用于打开或关闭注液控制阀，以使注液控制阀在打开状态下将液体注入载具中。
在本发明可选的方案中，泄压模块包括：
第一泄压单元，被配置成以第一预设泄压速度对真空箱泄压，直至真空箱内的压力达到第三预设真空压力值；
第二泄压单元，被配置成在真空箱内的压力达到第三预设真空压力值后，以第二预设泄压速度对真空箱进一步泄压，直至真空箱内的压力达到第四预设真空压力值。
本发明第三方面提供了一种微腔自动注液装置，包括真空箱总成、操作台总成、注液总成以及控制总成；
真空箱总成包括真空箱以及驱动机构，真空箱用于放置载具并包括箱体以及箱门，驱动机构连接于箱门，载具包括微腔结构；
操作台总成，包括真空泵组件，真空泵组件连接于真空箱；
注液总成，受控连通于载具；
控制总成，分别与真空箱总成、操作台总成以及注液总成连接，用于控制驱动机构驱动箱门以开合箱体、控制真空泵组件对真空箱抽真空或泄压以及控制注液总成向载具中注入液体。
在本发明可选的方案中，真空泵组件包括真空泵以及泄压阀，真空泵与泄压阀均与真空箱相连；
控制总成用于控制真空泵对真空箱进行抽真空，以及用于控制泄压阀对真空箱泄压。
在本发明可选的方案中，驱动机构包括开关量信号部件，开关量信号部件与控制总成信号连接，控制总成根据开关量信号部件发送的信号以判断真空箱处于关闭状态或打开状态。
在本发明可选的方案中，真空箱还包括压力传感器，压力传感器设置于箱体，控制总成与压力传感器信号连接，以判断真空箱内部的压力值是否达到预设值。
在本发明可选的方案中，注液总成包括注液控制阀和注液管路；注液管路连接于载具，注液控制阀设置于注液管路，控制总成用于打开或关闭注液控制阀，以使注液管路在注液控制阀处于打开状态下向载具中注入液体。
在本发明可选的方案中，微腔自动注液装置还包括机架，机架包括机架主体及防护罩，机架主体内形成有防护室，防护罩活动连接于机架主体以开合防护室；
真空箱总成设置于防护室内，操作台总成连接于机架主体并位于防护室的一侧。
在本发明可选的方案中，控制总成集成于操作台总成中。
在本发明可选的方案中，载具还包括储液腔、液体流道以及储气腔，储液腔用于储存待填充的液体，微腔结构与至少部分液体流道重叠布置，储气腔用于在真空泵组件对真空箱抽真空时储存气体。
与现有技术相比，本发明具有以下有益效果：
在本发明提供的方案中，首先，对真空箱进行第一级抽真空，以使得真空箱内的压力处于第一预设真空压力值，在载具处于第一预设真空压力值的环境下进行注液。接着，对真空箱进行第二级抽真空，以使得真空箱内的压 力处于第二预设真空压力值并保压第一预设时长，使注入有液体的载具在第二预设真空压力值的环境下进行排气。最后，对真空箱进行泄压，使得真空箱内的压力逐渐升高，在环境压力逐渐升高的作用下，使得注入载具中的液体流向微腔结构以完成填充。
可见，在本公开中，采用先后两级抽真空的方法使得载具在注液过程中始终处于负压环境，尽量将载具中的空气排出，使得微腔结构中的不含空气，避免因在微腔结构中形成气液混合物而影响检测结果。
附图说明
为了更清楚地说明本发明具体实施方式或现有技术中的技术方案，下面将对具体实施方式或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图是本发明的一些实施方式，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1出示了根据本公开一些实施例提供的微腔自动注液方法的步骤框图；
图2出示了根据本公开一些实施例提供的微腔自动注液装置的示意图；
图3出示了图2中微腔自动注液装置中的真空箱总成1的示意图；
图4出示了图2中微腔自动注液装置中的操作台总成2的示意图；
图5出示了根据本公开一些实施例提供的载具的局部剖视图；
图6出示了图2中的微腔自动注液装置的各总成的连接框图；
图7出示了根据本公开一些实施例提供的用于微腔自动注液系统的连接框图；
图8出示了通过图2中微腔自动注液装置进行微腔自动注液的流程框图。
以上附图中，各标号所代表的部件列表如下：
1、真空箱总成；11、真空箱；111、箱体；112、箱门；113、压力传感器；12、驱动机构；121、开关量信号部件
2、操作台总成；21、真空泵组件；211、真空泵；212、泄压阀；
3、注液总成；31、注液控制阀；
4、控制总成；
5、载具；51、储液腔；52、液体流道；53、储气腔；54、微腔结构
6、机架；61、机架主体；62、防护罩；R、防护室；
71、第一抽真空模块；711、第一抽真空单元；712、第一检测单元；72、注液模块；73、第二抽真空模块；731、第二抽真空单元；732、第二检测单元；74、保压模块；75、泄压模块；751、第一泄压单元；752、第二泄压单元；76、执行模块；77、检测模块。
具体实施方式
为了使本发明的上述以及其他特征和优点更加清楚，下面结合附图进一步描述本发明。应当理解，本文给出的具体实施例是出于向本领域技术人员解释的目的，仅是示例性的，而非限制性的。
图1出示了根据本公开一些实施例提供的微腔自动注液方法的步骤框图。请参阅图1，该微腔自动注液方法包括以下步骤。
步骤S11，将载具5置于真空箱11中，载具5包括微腔结构54。
在一些实施例中，真空箱11内设有腔室并在抽真空设备的作用下形成负压环境。在实际应用中，载具5可以为装载有测序芯片的检测模组，承前所述，测序芯片设有多个微腔，即载具5包括微腔结构54。将载具5置于真空箱11中，即让微腔结构54处于可以维持负压环境的腔室内。
需要说明的是，上述微腔结构54包括直径为数十微米至数百微米之间的 多个微腔。
步骤S12，对真空箱11抽真空，直至真空箱11的压力达到第一预设真空压力值。
可以理解地，在真空箱11内的腔室与外界空气隔绝的情况下，才能对真空箱11进行抽真空操作，从而才能在腔室内形成负压环境。需要说明的是，在真空箱11内的腔室与外界空气隔绝的情况下，真空箱11处于关闭状态。
因此，在步骤S11与步骤S12之间，该方法还包括：
步骤S111，关闭真空箱11。
步骤S112，检测真空箱11是否处于关闭状态，在真空箱11处于关闭状态下，对真空箱11抽真空。
可以理解地，关闭真空箱11即为让真空箱11形成与外界空气隔绝的腔室，即让真空箱11切换至关闭状态。执行步骤S111并不能保证真空箱11一定处于关闭状态，因此，在步骤S112中还需判断真空箱11是否处于关闭状态，在确认真空箱11处于关闭状态下才能对其进行抽真空作业，因此，通过步骤S112确保真空箱11一定处于关闭状态，避免无效抽真空作业。
承前所述，在确保真空箱11处于关闭状态下，即可执行步骤S12，在步骤S12中，通过抽真空作业，使得真空箱11内的压力处于第一预设真空压力值，即让载具5处于第一预设真空压力值的负压环境下，通过执行步骤S12以为对载具5进行注液操作做准备。
在本公开中，步骤S12包括：
步骤S121，采用第一抽真空速度对真空箱11抽真空。
步骤S122，实时检测真空箱11内的压力是否达到第一预设真空压力值；若是，则停止抽真空；若否，则以第一抽真空速度继续抽真空。
可以理解地，在对载具5进行注液操作之前，通过步骤S121与步骤S122 以确保载具5处于第一预设真空压力值的负压环境。
步骤S13，在真空箱11内的压力达到第一预设真空压力值后，将液体注入载具5中。
该步骤为注液步骤，载具5在第一预设真空压力值的环境下进行注液操作。可以理解地，由于载具5处于负压环境，液体在外界大气压与第一预设真空压力值的压差条件下注入于载具5中，如此，载具5在负压环境下进行注液作业以尽量降低空气进入微腔结构中的风险。
在本公开中，步骤S13包括：
步骤S131，打开注液控制阀31；
步骤S132，将液体注入载具5并持续第二预设时长；
步骤S133，关闭注液控制阀31。
具体地，通过步骤S131至步骤S133完成将液体注入载具5，打开注液控制阀31能够开启与载具5连通的注液管路，使得液体能够流入至载具5中。通过控制注液控制阀31开启第二预设时长即可调节注入载具5中的液体体积。在注入载具5中的液体体积满足检测需求的情况下，关闭注液控制阀31完成注液。
步骤S14，在液体注入载具5中后，对真空箱11进一步抽真空，直至真空箱11内的压力达到第二预设压力值。
具体地，在真空箱11内的压力处于第一预设压力值的条件下完成对载具5进行注液操作后，执行步骤S14，在真空箱11内的压力处于第一预设压力值的条件下以对真空箱11进一步地抽真空，以使得真空箱11内的压力处于第二预设压力值。需要说明的是，载具5内部含有空气，在对真空箱11进一步抽真空的过程中，真空箱11的压力逐渐降低，载具5中含有的空气被逐渐排出。
显然地，第二预设真空压力值低于第一预设真空压力值，真空压力是指绝对压力低于大气压的情况，真空压力值的绝对值越大，表明真空度越好。
在本公开中，步骤S14中包括：
步骤S141，采用第二抽真空速度对真空箱11进一步抽真空，第二抽真空速度不小于第一抽真空速度；
步骤S142，实时检测真空箱11内部的压力是否达到第二预设真空压力值：若是，则停止抽真空；若否，则以第二抽真空速度继续抽真空。
通过步骤S141与步骤S142，以确保真空箱11内的压力处于第二预设真空压力值。承前所述，第一预设真空压力值与第二预设时长是调节注入载具5中液体体积的决定性因素，第一抽真空速度直接影响真空箱11内的实际压力与第一预设真空压力值的误差。可以理解地，第一抽真空速度越小，真空箱11内的实际压力与第一预设真空压力值的误差越小，因而控制注入液体体积的精度越高。当然，如果第一抽真空速度过小，则抽真空作业时长过长，严重影响注液效率，因此，第一抽真空速度要适宜。在具体应用中，真空箱11内的实际压力与第二预设真空压力值的误差要求不高，优选地，第二抽真空速度不小于第一抽真空速度，避免整个抽真空作业时长过长。
步骤S15，将真空箱11以第二预设真空压力值维持第一预设时长。在载具5处于第二预设真空压力值的环境下保持第一预设时长，尽量将载具5中的空气排出，在将液体填充于微腔结构54之前，尽量避免微腔结构54中含有空气。
步骤S16，在维持第一预设时长后，对真空箱11泄压，以使液体填充于微腔结构中。
具体地，对真空箱11泄压即将真空箱11与外界空气连通，外界空气进入真空箱11内。可以理解地，在泄压过程中，真空箱11内的压力逐渐升高， 在环境压力递增的作用下，载具5中的液体流向微腔结构54并填充于微腔结构54中，如此完成整个注液过程。
在本发明提供的微腔自动注液方法中，首先，对真空箱11进行第一级抽真空，以使得真空箱11内的压力处于第一预设真空压力值，在载具5处于第一预设真空压力值的环境下进行注液。接着，对真空箱11进行第二级抽真空，以使得真空箱11内的压力处于第二预设真空压力值并保压第一预设时长，使注入有液体的载具5在第二预设真空压力值的环境下进行排气。最后，对真空箱11进行泄压，使得真空箱11内的压力逐渐升高，在环境压力逐渐升高的作用下，使得注入载具5中的液体流向微腔结构54以完成填充。
可见，在本公开中，采用先后两级抽真空的方法使得载具5在注液过程中始终处于负压环境，尽量将载具5中的空气排出，使得微腔结构中的不含空气，避免因在微腔结构中形成气液混合物而影响检测结果。
在本公开中，步骤S16包括：
步骤S161，以第一预设泄压速度对真空箱11泄压，直至真空箱11内的压力达到第三预设真空压力值。
步骤S162，在真空箱11内的压力达到第三预设真空压力值后，以第二预设泄压速度对真空箱11进一步泄压，直至真空箱11内的压力达到第四预设真空压力值。
在本公开中，对真空箱11泄压采用先后两级泄压的方法，在第一级泄压的过程中，以第一预设泄压速度进行泄压，真空箱11内的压力逐渐升高，载具5中的液体流向微腔结构54并填充于微腔结构54中。可以理解地，第一预设泄压速度越小，真空箱11内的压力变化速率越慢，相应地，载具5中的液体流速越慢，利于流体充分填充于微腔结构54中。在真空箱11内的压力达到第三预设真空压力值时，确定液体已完全填充于微腔结构54中，此时第 一级泄压完成。
在第一级泄压完成后进行第二级泄压，在第二级泄压过程中以第二预设泄压速度进行，在真空箱11内的压力达到第四预设真空压力值后，确定第二级泄压完成。需要说明的是，第四预设真空压力值接近大气压，如此便于切换真空箱11的状态。
可以理解地，在上述中，第四预设真空压力值大于第三预设真空压力值，第二预设泄压速度应尽量快，如此才能避免泄压时长过长。在实际应用中，第二预设泄压速度远超第一预设泄压速度。
可以理解地，在上述抽真空及泄压的过程中，第二级抽真空所达到的第二预设真空压力值最小，在具体应用中，第三预设真空压力值小于第一预设真空压力值，换言之，第三预设真空压力值在第一预设压力值与第二预设压力值之间。在一些优选的实施例中，第三预设真空压力值与第一预设真空压力值之差的绝对值大于第三预设真空压力值与第二预设真空压力值之差的绝对值。
图2出示了根据本公开一些实施例提供的微腔自动注液装置的示意图。图3出示了图2中微腔自动注液装置中的真空箱总成1的示意图。图4出示了图2中微腔自动注液装置中的操作台总成2的示意图。图6出示了图2中的微腔自动注液装置的各总成的连接框图。请参阅图2、图3及图6，该微腔自动注液装置包括真空箱总成1、操作台总成2、注液总成3以及控制总成4，控制总成4分别与真空箱总成1、操作台总成2及注液总成3连接，该微腔自动注液装置能够实现上述的微腔自动注液方法。
该真空箱总成1包括真空箱11以及驱动机构12，真空箱11包括箱体111以及箱门112，驱动机构12连接于箱门112，控制总成4与驱动机构12信号连接，因而能够控制驱动机构12驱动箱门112以开合箱体111，从而使得真 空箱11在关闭状态与打开状态之间切换。
可以理解地，在步骤S11中，通过驱动机构12驱动箱门112以打开箱体111，使得真空箱11处于打开状态，在真空箱11处于打开状态下才能够将载具5置于真空箱11内。在步骤S111中，通过驱动机构12驱动箱门112以关闭箱体111，使得真空箱11由打开状态切换至关闭状态。
请参阅图3，在图示实施例中，驱动机构12为气压驱动机构，驱动机构12采用气缸作为动力构件以驱动箱门112开合箱体111。当然，驱动机构12并不局限于此，例如驱动机构12为油压驱动机构，驱动机构12可采用油缸作为动力构件以驱动箱门112开合箱体。例如，驱动机构12为电动驱动机构，驱动机构12可采用电动推杆作为动力构件。驱动机构12能够满足驱动箱门112开合箱体111即可，在此不做具体限制。
在本公开中，驱动机构12包括开关量信号部件121，开关量信号部件121与控制总成4信号连接，以用于向控制总成4发送开关量信号，控制总成4根据开关量信号以判断真空箱11的状态。
可以理解地，在步骤S112中，控制总成4根据开关量信号部件121发送的开关量信号来检测真空箱11是否处于关闭状态。
为了便于理解，请参阅图3，以驱动机构12为气动驱动机构举例说明，驱动机构12包括气缸，气缸的缸筒两端设有磁感应开关，磁感应开关作为开关量信号部件121，靠近箱门112的磁感应开关得电的情况下，箱门112打开箱体111，确认真空箱11处于打开状态；远离箱门112的磁感应开关得电的情况下，箱门112关闭箱体111，确认真空箱11处于关闭状态。
当然，开关量信号部件121并不局限于此，例如，开关量信号部件121为设置于箱体111上的接近开关，在箱门112关闭箱体111的状态下，接近开关得电，确认真空箱11处于关闭状态；在箱门112远离箱体111的状态下， 接近开关失电，确认真空箱11处于打开状态。开关量信号部件121并不局限于上述实施例，保证控制总成4能够根据开关量信号部件121发送的开关量信号确定真空箱11的状态即可。
需要说明的是，在控制总成4发出关闭箱门112的信号后，检测到真空箱11仍处于打开状态的情况下，说明驱动机构12未执行到位，不同类型的驱动机构12采用不同的响应方式。例如，驱动机构12为气动驱动机构的情况下，气缸作为动力构件，气缸动作未到位，优选采用发出异常报警的响应方式，以提醒人工干预。例如，驱动机构12为电动驱动机构的情况下，电动推杆作为动力构件，电动推杆未执行到位，优选采用让电动推杆继续执行动作的响应方式。
在本公开中，操作台总成2包括真空泵组件21，真空泵组件21连接于真空箱11，控制总成4与操作台总成2连接，以控制真空泵组件21对真空箱11抽真空或泄压。
进一步地，真空泵组件21包括真空泵211以及泄压阀212，真空泵211与泄压阀212均与真空箱11相连，具体通过气体管路与真空箱11相连(图示未画出)。控制总成4用于控制真空泵211对真空箱11进行抽真空，以及用于控制泄压阀212对真空箱11进行泄压。
可以理解地，在步骤S12与步骤S14中，通过真空泵211对真空箱11进行抽真空。在步骤S121与步骤S141中，控制真空泵211的抽气速度即可对真空箱11以第一抽真空速度或第二抽真空速度进行抽真空。在步骤S15中，控制真空泵211停止作业第一预设时长，即可使真空箱11以第二预设真空压力维持第一预设时长。
在步骤S16中，真空泵211处于停止作业状态，开启泄压阀212即可对真空箱11进行泄压。对于步骤S161及步骤S162，在一种可选的实施例中， 控制泄压阀212的开度即可让真空箱11以第一预设泄压速度或第二预设泄压速度进行泄压。在另一种可选的实施例中，真空箱11连接有两条泄压管路，泄压阀212包括慢速泄压阀和快速泄压阀，慢速泄压阀与快速泄压阀分别设置于两条泄压管路上，慢速泄压阀被配置成在打开状态下以第一预设泄压速度进行泄压，快速泄压阀被配置成在打开状态下一第二预设泄压速度进行泄压，通过切换不同泄压速度的泄压阀212进行泄压。
在本公开中，真空箱11还包括压力传感器113，压力传感器113设置于箱体111，控制总成4与压力传感器113信号连接，以用于检测真空箱11内的压力。可以理解地，在步骤122、步骤142、步骤S161以及步骤S162中，通过压力传感器113实时检测真空箱11内的压力值是否达到预设值。
在本公开中，注液总成3包括注液控制阀31和注液管路(图示未画出)。注液管路连接于载具5，注液控制阀31设置于注液管路，控制总成4用于打开或关闭注液控制阀31，以使注液管路在注液控制阀31处于打开状态下向载具5注入液体。
可以理解地，步骤S131至步骤S133通过控制总成4控制注液总成3执行，控制总成4控制注液控制阀31处于打开状态并维持第二预设时长后，切换注液控制阀31处于关闭状态，即可完成将液体注入于载具5中。
请参阅图2及图4，在本公开中，控制总成4集成于操作台总成2中。在具体应用中，操作台总成2包括柜体，控制总成4安装于柜体。在一些实施例中，控制总成4包括控制模块、输入模块。
例如，输入模块包括设置于柜体的按钮及触摸显示屏，按钮包括用于发出启动信号的启动按钮，触摸显示屏能够输入预设参数，包括预设真空压力值、抽真空速度以及预设泄压速度。当控制模块获得启动信号后即可发送指令，使得该微腔自动注液装置按照预设参数自动执行上述方法，以实现自动 化注液。
需要说明的是，控制模块包括但不限于：通用处理器、专用处理器、常规处理器、数字信号处理器(DSP)、多个微处理器、与DSP核心关联的一个或多个微处理器、控制器、微控制器、单片机、专用集成电路(ASIC)、现场可编程门阵列(FPGA)电路、其他任何类型的集成电路(IC)以及状态机等。
在本公开中，微腔自动注液装置还包括机架6，机架6包括机架主体61及防护罩62，机架主体61内形成有防护室R，防护罩62活动连接于机架主体61以开合防护室R。真空箱总成1设置于防护室R内，操作台总成2连接于机架主体61并位于防护室R的一侧。
在具体应用中，机架主体61由支撑架以及覆盖于支撑架的钣金覆盖件构成，并形成有防护室R，防护罩62通过直线导轨机构与机架主体61活动连接，从而能够开合防护室R。可以理解地，真空箱总成1与操作台总成2之间的各种线缆及管路均能布置于机架6，通过机架6进行对真空箱总成1与操作台总成2进行支撑防护，为保证装置正常作业提供良好环境。
为了便于理解本公开的技术方案，下面以通过该微腔自动注液装置实现微腔自动注液的过程为例进行说明。请参阅图5，需要补充说明的是，该注液过程中所采用的载具5还包括储液腔51、液体流道52以及储气腔53。储液腔51与注液管路连通，并用于储存待填充的液体，微腔结构54与至少部分液体流道52重叠布置，储气腔53用于在真空泵组件21对真空箱11抽真空时储存气体。图8出示了通过该微腔自动注液装置进行微腔自动注液的流程框图，下面结合图5及图8并以注液体积为300ul为例详细说明。
该装置开机后，系统初始化，真空箱11处于打开状态，此时可打开防护罩62，将载具5置于真空箱11中后关闭防护罩62。当启动按钮被按下时，控制驱动机构12驱动箱门112关闭箱体111，以将真空箱11由打开状态切 换至关闭状态，在驱动机构12动作到位后，开关量信号部件121发送开关量信号给控制模块以确定真空箱11处于关闭状态。
在确定真空箱11处于关闭状态后，开启真空泵211，控制真空泵211以第一抽真空速度对真空箱11进行抽真空，在本实施例中，第一抽真空速度为1.5m 3/h。并且，通过压力传感器113实时检测真空箱11内的压力，当真空箱11内的压力达到第一预设真空压力值后，关闭真空泵211，如此完成第一级抽真空。
接着，开启注液控制阀31并维持打开状态第二预设时长，使得注液时长达到第二预设时长，如此完成将液体注入于储液腔51中。需要说明的是，在具体应用中，第二预设时长为1ms至200ms，第一预设真空压力值为-5Kpa至-50Kpa，第一抽真空速度为0.1m 3/h至1.5m 3/h。在本实施例中，第一预设真空压力值为-15Kpa，第二预设时长为10ms，通过第一预设真空压力值与第二预设时长的配合，即可精确控制注液体积达到300ul。
可以理解地，在注液体积确定的条件下，如果第一预设真空压力值越大，那么第二预设时长越小。换言之，在注液体积确定的条件下，第一预设真空压力值与第二预设时长为负相关关系。
接着，继续开启真空泵211，控制真空泵211以第二抽真空速度对真空箱11进一步抽真空，并通过压力传感器113实时检测真空箱11内的压力，在真空箱11内的压力达到第二预设真空压力值的情况下，关闭真空泵211，如此完成第二级抽真空。完成第二级抽真空后，使得真空箱11内的压力以第二预设真空压力值维持第一预设时长。在本实施例中，第二抽真空速度为14.4m 3/h，第二预设真空压力值为-98Kpa，第一预设时长为60000ms。
可见，在先后两级抽真空的过程中，第二抽真空速度大于第一抽真空速度，先慢抽，以使真空箱11内的压力慢速达到第一预设真空压力值，以保证 注入液体体积的精度。再快抽，以使得真空箱11内的压力快速达到第二预设真空压力值，避免抽真空作业时长过长。
需要说明的是，在储液腔51中注入有液体的情况下，液体流道52封闭且其中含有空气，在第二级抽真空的过程中，真空箱11内的压力逐渐降低，液体流道52中的气压高于真空箱11内的压力，因此可从储液腔51中排出。将真空箱11以第二预设真空压力值保压第一预设时长，使得液体流道52中残留的空气尽可能排出。
接着，在保压第一预设时长后，开启泄压阀212，控制泄压阀212以第一预设泄压速度对真空箱11进行泄压，当真空箱11内的压力达到第三预设真空压力值时，控制泄压阀212以第二预设泄压速度对真空箱11进一步泄压，直至真空箱11内的压力达到第四预设真空压力值。
在本实施例中，在第一级泄压过程中，随着真空箱11内的压力逐渐提高，在真空箱11内的压力作用下，位于储液腔51中的液体流向液体流道52，并沿着液体流道52朝储气腔53流动，在该过程中，液体会经过微腔结构54以进行填充，其次，液体流道52中残留的空气会被压缩到储气腔53中，从而避免在微腔结构54中产生气液混合物。在第二级泄压过程中，使得真空箱11内的压力快速接近大气压。
在本实施例中，第一泄压速度为0.1m 3/h，第三预设真空压力值为-85Kpa，第二泄压速度为1m 3/h，第四预设真空压力值为-0.5Kpa。可见，在本实施例中，采用先慢泄压、后快泄压的两级泄压方案，慢泄压主要为了使液体流道52中慢速流动，以此达到有效填充微腔结构54的目的，保证填充效果；快泄压主要是为了缩短泄压时长，使得真空箱11内的压力快速接近大气压。
接着，在真空箱11内的压力处于第四预设真空压力值的情况下，控制驱动机构12打开真空箱11，使得真空箱11由关闭状态切换至打开状态。在本 实施例中，第四预设真空压力值接近大气压，真空箱11内部与外界大气的压差不会过大，如此才能保证通过驱动机构12能够正常打开真空箱11。
最后，根据开关量信号部件121发送的信号判断真空箱11是否处于打开状态，在确定真空箱11处于打开状态下，确认整个注液过程完成。
请参阅图7，作为上述方法的实现，图7出示了根据本公开一些实施例提供的用于微腔自动注液系统的连接框图，该系统与图1中所示的方法实施例相对应，该系统具体可应用于各种电子设备中。
请参阅图7，该微腔自动注液系统包括第一抽真空模块71、注液模块72、第二抽真空模块73、保压模块74以及泄压模块75。第一抽真空模块71被配置成对真空箱11抽真空，直至真空箱11内的压力达到第一预设真空压力值。注液模块72被配置成在真空箱11内的压力达到第一预设真空压力值后，将液体注入载具5中。第二抽真空模块73被配置成在液体注入载具5中后对真空箱11进一步抽真空，直至真空箱11的压力达到第二预设真空压力值。保压模块74被配置成将真空箱11以第二预设真空压力值维持第一预设时长。泄压模块75被配置成在维持第一预设时长后对真空箱11泄压，以使液体填充于微腔结构中。
在一些可选的实施例中，该微腔自动注液系统还包括执行模块76以及检测模块77，执行模块76设置为用于打开或关闭真空箱11。检测模块77用于检测真空箱11是否处于关闭状态，在真空箱11处于关闭状态下，对真空箱11进行抽真空。
在一些可选的实施例中，第一抽真空模块71包括第一抽真空单元711与第一检测单元712。第一抽真空单元711采用第一抽真空速度对真空箱11抽真空。第一检测单元712实时检测真空箱11内部的压力是否达到第一预设真空压力值：若是，则停止抽真空；若否，则以第一抽真空速度继续抽真空。
在一些可选的实施例中，第二抽真空模块73包括第二抽真空单元731与第二检测单元732。第二抽真空单元731采用第二抽真空速度对真空箱11进一步抽真空，第二抽真空速度不小于第一抽真空速度。第二检测单元732实时检测真空箱11内部的压力是否达到第二预设真空压力值：若是，则停止抽真空；若否，则以第二抽真空速度继续抽真空。
在一些可选的实施例中，注液模块72设置为用于打开或关闭注液控制阀31，以使注液控制阀31在打开状态下将液体注入载具5中。
在一些可选的实施例中，泄压模块75包括第一泄压单元751与第二泄压单元752。第一泄压单元751被配置成以第一预设泄压速度对真空箱11泄压，直至真空箱11内的压力达到第三预设真空压力值。第二泄压单元752被配置成在真空箱11内的压力达到第三预设真空压力值后，以第二预设泄压速度对真空箱11进一步泄压，直至真空箱11内的压力达到第四预设真空压力值。
可以理解地，该系统中记载的各模块与上述方法中的各步骤相对应。由此，上文针对方法描述的操作、特征以及产生的有益效果同样适用于该系统及其中包含的模块，在此不再赘述。
附图中的流程图和框图，图示了按照本公开各种实施例的系统、方法和计算机程序产品的可能实现的体系架构、功能和操作。在这点上，流程图或框图中的每个方框可以代表一个模块、程序段、或代码的一部分，该模块、程序段、或代码的一部分包含一个或多个用于实现规定的逻辑功能的可执行指令。也应当注意，在有些作为替换的实现中，方框中所标注的功能也可以以不同于附图中所标注的顺序发生。例如，两个接连地表示的方框实际上可以基本并行地执行，它们有时也可以按相反的顺序执行，这依所涉及的功能而定。也要注意的是，框图和/或流程图中的每个方框、 以及框图和/或流程图中的方框的组合，可以用执行规定的功能或操作的专用的基于硬件的系统来实现，或者可以用专用硬件与计算机指令的组合来实现。
需要注意，本公开中提及的“第一”、“第二”等概念仅用于对不同的装置、模块或单元进行区分，并非用于限定这些装置、模块或单元所执行的功能的顺序或者相互依存关系。
尽管上面已经示出和描述了本发明的实施例，可以理解的是，上述实施例是示例性的，不能理解为对本发明的限制，本领域的普通技术人员在本发明的范围内可以对上述实施例进行变化、修改、替换和变型。

Claims (21)

  1. 一种微腔自动注液方法，其特征在于，所述微腔自动注液方法包括：
    将载具置于真空箱中，所述载具包括微腔结构；
    对所述真空箱抽真空，直至所述真空箱内的压力达到第一预设真空压力值；
    在所述真空箱内的压力达到所述第一预设真空压力值后，将液体注入所述载具中；
    在液体注入所述载具中后，对所述真空箱进一步抽真空，直至所述真空箱内的压力达到第二预设真空压力值；
    将所述真空箱以所述第二预设真空压力值维持第一预设时长；
    在维持所述第一预设时长后，对所述真空箱泄压，以使液体填充于所述微腔结构中。
  2. 根据权利要求1所述的微腔自动注液方法，其特征在于，在将载具置于真空箱中后、对所述真空箱抽真空之前，所述方法还包括：
    关闭所述真空箱；
    检测所述真空箱是否处于关闭状态，在所述真空箱处于关闭状态下，对所述真空箱抽真空。
  3. 根据权利要求1所述的微腔自动注液方法，其特征在于，对所述真空箱抽真空，直至所述真空箱内的压力达到第一预设真空压力值，包括：
    采用第一抽真空速度对所述真空箱抽真空；
    实时检测所述真空箱内的压力是否达到第一预设真空压力值：若是，则停止抽真空；若否，则以所述第一抽真空速度继续抽真空。
  4. 根据权利要求3所述的微腔自动注液方法，其特征在于，对所述真空箱进一步抽真空，直至所述真空箱的压力达到第二预设真空压力值，包括：
    采用第二抽真空速度对所述真空箱进一步抽真空，所述第二抽真空速度不小于所述第一抽真空速度；
    实时检测所述真空箱内部的压力是否达到所述第二预设真空压力值：若是，则停止抽真空；若否，则以第二抽真空速度继续抽真空。
  5. 根据权利要求1所述的微腔自动注液方法，其特征在于，将液体注入所述载具中包括：
    打开注液控制阀；
    将液体注入所述载具并持续第二预设时长；
    关闭注液控制阀。
  6. 根据权利要求1所述的微腔自动注液方法，其特征在于，对所述真空箱泄压，包括：
    以第一预设泄压速度对所述真空箱泄压，直至所述真空箱内的压力达到第三预设真空压力值；
    在所述真空箱内的压力达到第三预设真空压力值后，以第二预设泄压速度对所述真空箱进一步泄压，直至所述真空箱内的压力达到第四预设真空压力值。
  7. 根据权利要求6所述的微腔自动注液方法，其特征在于，所述第一预设泄压速度小于所述第二预设泄压速度。
  8. 一种微腔自动注液系统，其特征在于，用于实现上述权利要求1-7中任一项所述的微腔自动注液方法，真空箱放置有载具，所述微腔自动注液系统包括：
    第一抽真空模块，被配置成对所述真空箱抽真空，直至所述真空箱内的压力达到第一预设真空压力值；
    注液模块，被配置成在所述真空箱内的压力达到第一预设真空压力值后，将液体注入所述载具中；
    第二抽真空模块，被配置成在液体注入所述载具中后对所述真空箱进一步抽真空，直至所述真空箱的压力达到第二预设真空压力值；
    保压模块，被配置成将所述真空箱以所述第二预设真空压力值维持第一预设时长；
    泄压模块，被配置成在维持所述第一预设时长后对所述真空箱泄压，以使液体填充于所述微腔结构中。
  9. 根据权利要求8所述的微腔自动注液系统，其特征在于，所述微腔自动注液系统还包括：
    执行模块，设置为用于打开或关闭所述真空箱；
    检测模块，用于检测所述真空箱是否处于关闭状态，在所述真空箱处于关闭状态下，对所述真空箱进行抽真空。
  10. 根据权利要求8所述的微腔自动注液系统，其特征在于，所述第一抽真空模块包括：
    第一抽真空单元，采用第一抽真空速度对所述真空箱抽真空；
    第一检测单元，实时检测所述真空箱内部的压力是否达到第一预设真空压力值：若是，则停止抽真空；若否，则以第一抽真空速度继续抽真空。
  11. 根据权利要求8所述的微腔自动注液系统，其特征在于，所述第二抽真空模块包括：
    第二抽真空单元，采用第二抽真空速度对所述真空箱进一步抽真空，所述第二抽真空速度不小于所述第一抽真空速度；
    第二检测单元，实时检测所述真空箱内部的压力是否达到第二预设真空压力值：若是，则停止抽真空；若否，则以第二抽真空速度继续抽真空。
  12. 根据权利要求8所述的微腔自动注液系统，其特征在于，所述注液模块设置为用于打开或关闭所述注液控制阀，以使所述注液控制阀在打开状态下将液体注入所述载具中。
  13. 根据权利要求8所述的微腔自动注液系统，其特征在于，所述泄压模块包括：
    第一泄压单元，被配置成以第一预设泄压速度对所述真空箱泄压，直至所述真空箱内的压力达到第三预设真空压力值；
    第二泄压单元，被配置成在所述真空箱内的压力达到第三预设真空压力值后，以第二预设泄压速度对所述真空箱进一步泄压，直至所述真空箱内的压力达到第四预设真空压力值。
  14. 一种微腔自动注液装置，其特征在于，包括真空箱总成、操作台总成、注液总成以及控制总成；
    所述真空箱总成包括真空箱以及驱动机构，所述真空箱用于放置载具并包括箱体以及箱门，所述驱动机构连接于所述箱门，所述载具包括微腔结构；
    操作台总成，包括真空泵组件，所述真空泵组件连接于所述真空箱；
    注液总成，受控连通于所述载具；
    控制总成，分别与所述真空箱总成、所述操作台总成以及所述注液总成连接，用于控制所述驱动机构驱动所述箱门以开合所述箱体、控制所述真空泵组件对所述真空箱抽真空或泄压以及控制所述注液总成向载具中注入液体。
  15. 根据权利要求14所述的微腔自动注液装置，其特征在于，
    所述真空泵组件包括真空泵以及泄压阀，所述真空泵与所述泄压阀均与所述真空箱相连；
    所述控制总成用于控制所述真空泵对所述真空箱进行抽真空，以及用于控制所述泄压阀对所述真空箱泄压。
  16. 根据权利要求14所述的微腔自动注液装置，其特征在于，所述驱动机构包括开关量信号部件，所述开关量信号部件与所述控制总成信号连接，所述控制总成根据所述开关量信号部件发送的信号以判断所述真空箱处于关闭状态或打开状态。
  17. 根据权利要求14所述的微腔自动注液装置，其特征在于，所述真空箱还包括压力传感器，所述压力传感器设置于所述箱体，所述控制总成与所述压力传感器信号连接，以判断所述真空箱内部的压力值是否达到预设值。
  18. 根据权利要求14所述的微腔自动注液装置，其特征在于，
    所述注液总成包括注液控制阀和注液管路；
    所述注液管路连接于所述载具，所述注液控制阀设置于所述注液管路，所述控制总成用于打开或关闭所述注液控制阀，以使所述注液管路在所述注液控制阀处于打开状态下向所述载具中注入液体。
  19. 根据权利要求14所述的微腔自动注液装置，其特征在于，所述微腔自动注液装置还包括机架，所述机架包括机架主体及防护罩，所述机架主体内形成有防护室，所述防护罩活动连接于所述机架主体以开合所述防护室；
    所述真空箱总成设置于所述防护室内，所述操作台总成连接于所述机架主体并位于所述防护室的一侧。
  20. 根据权利要求14至19中任一项所述的微腔自动注液装置，其特征在于，所述控制总成集成于所述操作台总成中。
  21. 根据权利要求14所述的微腔自动注液装置，其特征在于，所述载具还包括储液腔、液体流道以及储气腔，所述储液腔用于储存待填充的液体，所述微腔结构与至少部分所述液体流道重叠布置，所述储气腔用于在所述真空泵组件对所述真空箱抽真空时储存气体。
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JPH0735072A (ja) * 1993-07-27 1995-02-03 Matsushita Electron Corp 真空ポンプ制御システム
CN205230853U (zh) * 2015-12-28 2016-05-11 天津力神电池股份有限公司 超级电容器含浸注液工装
US20160290988A1 (en) * 2013-11-27 2016-10-06 Hitachi, Ltd. Current Measuring Device, Current Measuring Method, and Current Measuring Kit
CN111341996A (zh) * 2020-03-12 2020-06-26 瑞浦能源有限公司 真空注液方法
CN111763612A (zh) * 2020-06-10 2020-10-13 宁波大学 一种单细胞基因检测芯片及其制作方法与检测方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0735072A (ja) * 1993-07-27 1995-02-03 Matsushita Electron Corp 真空ポンプ制御システム
US20160290988A1 (en) * 2013-11-27 2016-10-06 Hitachi, Ltd. Current Measuring Device, Current Measuring Method, and Current Measuring Kit
CN205230853U (zh) * 2015-12-28 2016-05-11 天津力神电池股份有限公司 超级电容器含浸注液工装
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CN111763612A (zh) * 2020-06-10 2020-10-13 宁波大学 一种单细胞基因检测芯片及其制作方法与检测方法

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