WO2024060277A1

WO2024060277A1 - Clamping apparatus, manipulator, and mechanical apparatus

Info

Publication number: WO2024060277A1
Application number: PCT/CN2022/121882
Authority: WO
Inventors: 陈定操; 裴达飞; 蒋孝恩; 王崇林
Original assignee: 台湾积体电路制造股份有限公司; 台积电(中国)有限公司
Priority date: 2022-09-20
Filing date: 2022-09-27
Publication date: 2024-03-28
Also published as: CN218057425U

Abstract

The present application relates to a clamping apparatus, a manipulator, and a mechanical apparatus, which are used for clamping at least one of a wafer box and a wafer boat. The clamping apparatus comprises a carrying member and a clamping assembly. The carrying member has a predetermined length, width, and thickness. The clamping assembly is disposed on the carrying member. The clamping assembly comprises clamping members that are arranged in pairs and are distributed opposite one another in the length direction of the carrying member. Each clamping member is connected to the carrying member. Each clamping member comprises a first clamping portion and a second clamping portion which are intersectingly disposed, the first clamping portion being provided with a first groove recessed in the length direction, and the second clamping portion being provided with a second groove recessed in the thickness direction of the carrying member. The first grooves of the clamping members arranged in pairs are distributed opposite to one another and jointly clamp the wafer box, and the second grooves of the clamping members arranged in pairs are distributed opposite to one another and jointly clamp the wafer boat. The present solution can implement clamping of a wafer box or wafer boat, and improve carrying efficiency.

Description

Clamping devices, robots and mechanical devices

Cross-references to related applications

This application claims the priority of Chinese patent application 202222485704.5, filed on September 20, 2022, entitled “Gripping device, manipulator and mechanical device”, the entire contents of which are incorporated herein by reference.

Technical Field

The present application relates to the field of semiconductor manufacturing technology, and in particular to a clamping device, a manipulator and a mechanical device.

Background technique

In the manufacturing factories of the semiconductor industry, a large number of wafers need to be produced and processed. A large number of wafers are usually placed in wafer boats and then placed in wafer boxes. Therefore, the wafer boxes or wafer boats need to be transported, etc. operate.

In semiconductor manufacturing factories, operators usually carry them manually. In some factories with a high level of automation, robotic arms can be used to automatically transport wafer boxes or wafer boats, thus saving manual labor and improving transport efficiency.

However, the gripping devices on the market are only compatible with one type of gripping wafer box or wafer boat. If they are gripped at the same time, the mechanism needs to be replaced. This not only increases the cost of selecting the mechanism, but also is more time-consuming and labor-intensive, affecting the handling efficiency. Therefore, , a new type of device is urgently needed.

Utility model content

Embodiments of the present application provide a clamping device, a manipulator and a mechanical device, which can complete the clamping of the wafer box or wafer boat and improve the transportation efficiency.

On the one hand, according to embodiments of the present application, a clamping device is proposed for clamping at least one of a wafer box and a wafer boat. The clamping device includes a bearing member and a clamping assembly. The bearing member has a predetermined length and width. and thickness, the clamping component is arranged on the bearing member, the clamping component includes clamping members arranged in pairs and relatively distributed in the length direction of the bearing member, each clamping member is connected to the bearing member, wherein the clamping member includes The first clamping part and the second clamping part are arranged intersectingly. The first clamping part is provided with a first groove that is recessed along the length direction, and the second clamping part is provided with a recessed groove along the thickness direction of the carrier. The second grooves, the first grooves of the clamping members arranged in pairs are relatively distributed and jointly clamp the crystal box, and the second grooves of the clamping members arranged in pairs are relatively distributed and jointly clamp the crystal boat.

According to one aspect of the embodiment of the present application, the clamping components are provided at both ends of the bearing member in the length direction, and the first clamping part and the second clamping part are vertically connected.

According to one aspect of the embodiment of the present application, the first grooves of the clamping members arranged in pairs are symmetrically distributed in the length direction, and the second grooves of the clamping members arranged in pairs are symmetrically distributed in the length direction.

According to one aspect of an embodiment of the present application, the first clamping portion includes a first base, the second clamping portion includes a second base, the first base is connected to the second base, one end of the second base away from the first base is at least partially protruded to form a connecting portion, and the clamping device is connected to the equipment to be installed through the connecting portion.

According to one aspect of the embodiment of the present application, the first clamping part includes a first fixing part, the second clamping part includes a second fixing part, the second fixing part is disposed on the second base body and abuts against the first base body, A fixing part is disposed on the first base body and is spaced apart from the second fixing part. A first groove is formed between the first fixing part and the second fixing part.

According to one aspect of the embodiment of the present application, an end of the second fixing member away from the first base forms a step structure with the second base, and the step structure is a second groove.

According to one aspect of the embodiment of the present application, the connecting part includes a first connecting part and a second connecting part, and the first connecting part and the second connecting part are arranged at intervals in the width direction of the bearing member.

According to one aspect of the embodiment of the present application, the clamping device further includes a measuring piece. The measuring piece is arranged in the first groove and protrudes from the bottom wall of the first groove along the length direction. The measuring piece can be telescopic in the length direction. , the measuring member is configured to detect the pressure of the clamping assembly acting on the crystal box.

In another aspect, an embodiment of the present application provides a manipulator, including the clamping device as described above.

In another aspect, an embodiment of the present application provides a mechanical device, including the robot hand as described above.

Embodiments of the present application provide a clamping device, a manipulator and a mechanical device. By forming a first groove and a second groove in the clamping device, the first groove can be connected with the crystal box to form an opposite crystal box. The clamping device is clamped and connected with the wafer boat through the second groove to form a clamping of the wafer boat. Therefore, during the transportation process, the clamping device can be used to realize both automated transportation of the crystal box and The automated handling of wafer boats is integrated and dual-purpose, which avoids the replacement of the clamping device during the handling process. It is more convenient to use, saves time and effort, improves handling efficiency, saves the operator's labor, and uses one device at the same time. It replaces two devices and saves the purchase cost of the clamping device, which is in line with the interests of the enterprise.

Description of drawings

The features, advantages and technical effects of exemplary embodiments of the present application will be described below with reference to the accompanying drawings.

FIG1 is a schematic structural diagram of a clamping device according to an embodiment of the present application;

Figure 2 is a top view of a clamping device according to an embodiment of the present application;

FIG3 is a front view of a clamping device according to an embodiment of the present application;

Figure 4 is a left side view of a clamping device according to the embodiment of the present application.

Reference signs:

100-clamping device; 10-carrying member; 20-clamping component;

X-length direction; Y-width direction; Z-thickness direction;

1-clamping piece; 11-first clamping part; 12-second clamping part; 13-first groove; 14-second groove; 15-first base body; 16-second base body; 17- Connecting part; 17a-first connecting part; 17b-second connecting part; 18-first fixing part; 19-second fixing part;

2-Measurement piece.

In the drawings, identical components have the same reference numerals. The drawings are not drawn to actual scale.

Detailed ways

Features and exemplary embodiments of various aspects of the application are described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the application. However, it will be apparent to one skilled in the art that the present application may be practiced without some of these specific details. The following description of embodiments is merely intended to provide a better understanding of the present application by illustrating examples of the present application. In the drawings and the following description, at least some well-known structures and techniques are not shown to avoid unnecessarily obscuring the present application; and, the dimensions of some structures may be exaggerated for clarity. Furthermore, the features, structures, or characteristics described below may be combined in any suitable manner in one or more embodiments.

The directional words appearing in the following description are the directions shown in the figures, and do not limit the specific structures of the clamping device, manipulator and mechanical device of the present application. In the description of this application, it should also be noted that, unless otherwise clearly stated and limited, the terms "installation" and "connection" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection, or Connected integrally; either directly or indirectly. For those of ordinary skill in the art, the specific meanings of the above terms in this application may be understood based on specific circumstances.

With the gradual popularization and development of electronic products, people's demand for electronic products is increasing. Therefore, for the production of semiconductor raw materials required for electronic products, production efficiency has become an issue that cannot be ignored. How to improve production efficiency has become a major issue for major enterprises. We face common problems and face greater challenges in technological improvement and other directions.

Wafer refers to the silicon wafer used to make silicon semiconductor circuits, and its original material is silicon. High-purity polysilicon is dissolved and mixed with silicon crystal seeds, which are then slowly pulled out to form cylindrical single crystal silicon. After the silicon ingot is ground, polished and sliced, it is formed into silicon wafers, also known as wafers. Domestic wafer production lines are mainly 8-inch and 12-inch.

As raw materials for semiconductor and chip preparation, wafers are mass-produced in existing manufacturing plants. Since their thickness is often no more than 1 mm, a large number of wafers can be arranged and placed in a wafer boat. For example, 25 wafers can be placed in the wafer boat. The wafer is placed in the wafer box and transported.

The applicant found that in manufacturing factories, operators often carry out manual transportation, which increases the workload of operators. In some factories with a higher degree of automation, the transportation is completed by clamping wafer boxes or wafer boats with robotic arms, which reduces the workload. The operator's labor burden is heavy, but the existing clamping device can only clamp one of the crystal box or the wafer boat. If the crystal box or the wafer boat needs to be clamped at the same time, the equipment can only be replaced to complete the clamping, which is not only time-consuming and labor-intensive, but also This reduces the handling efficiency and increases the initial equipment purchase cost. Based on the above problems, the applicant proposed this plan.

In order to better understand the present application, the clamping device, manipulator and mechanical device of the embodiment of the present application will be described in detail below with reference to FIGS. 1 to 4 .

Referring to Figure 1, an embodiment of the present application provides a clamping device 100 for clamping at least one of a wafer box and a wafer boat. The clamping device 100 includes a bearing 10 and a clamping assembly 20. The bearing 10 With a predetermined length, width and thickness, the clamping component 20 is disposed on the bearing 10 . The clamping component 20 includes clamping elements 1 arranged in pairs and relatively distributed in the length direction X of the bearing 10 . Each clamping element 1 is connected to the carrier 10, wherein the clamping member 1 includes a first clamping portion 11 and a second clamping portion 12 arranged to intersect. The first clamping portion 11 is provided with a first recessed portion along the length direction X. Groove 13, the second clamping part 12 is provided with a second groove 14 recessed along the thickness direction Z of the carrier 10, the first grooves 13 of the clamping members 1 arranged in pairs are relatively distributed and jointly clamp the crystal. box, the second grooves 14 of the clamping members 1 arranged in pairs are relatively distributed and jointly clamp the wafer boat.

In this embodiment, the clamping device 100 completes clamping of the wafer box or wafer boat through the mutual cooperation between the clamping components 20, which are jointly arranged on the carrier 10 to form an integral clamping structure.

Optionally, the clamping assembly 20 includes two clamping members 1 arranged opposite each other in the length direction X. Each clamping member 1 can have a right-angled structure. Of course, the angle can also be adjusted according to different structural requirements. It is suitable for different clamping conditions and has better adaptability.

The two clamping members 1 are arranged opposite each other in the length direction Finally, the clamping is completed, which can improve the stability of the clamping and avoid falling off during transportation.

Optionally, a clamping assembly 20 with a suitable spacing may be selected according to the volume size of the wafer box or wafer boat being transported, so as to avoid the clamping assembly 20 being too small to accommodate the wafer box or wafer boat, or being too large to cause unstable clamping.

The two clamping members 1 in the clamping assembly 20 can be connected through the bearing member 10. Alternatively, the bearing member 10 can be a connecting structure such as a connecting plate. This application does not impose any special restrictions on the specific structure of the bearing member 10. The clamping member 10 can be The holding components 20 can form an integral structure and cooperate with each other.

Considering the balance when clamping the crystal box or wafer boat, the clamping parts 1 are arranged in pairs to ensure the clamping balance in the length direction X and avoid the tilt of the crystal box or wafer boat during transportation. .

Optionally, each clamping member 1 can be connected to the load-bearing member 10 through bolts. This application does not specifically limit the specific connection method between the clamping member 1 and the load-bearing member 10 .

The specific structure of each clamping part 1 includes a first clamping part 11 and a second clamping part 12. The first clamping part 11 and the second clamping part 12 are arranged to intersect with each other. The two can be clamped according to the actual Choose the appropriate intersection angle according to the situation.

Optionally, both the first clamping part 11 and the second clamping part 12 are plate-shaped structures, and they can be connected vertically to form a right-angled plate structure as a whole.

Each first clamping part 11 is provided with a first groove 13 recessed along the length direction Two opposite first grooves 13 are respectively engaged with the two ends of the crystal box, thereby fixing the crystal box between the two first grooves 13 to complete the clamping process.

Optionally, the first groove 13 is recessed along the length direction X, and the specific depth of the recess can be determined according to the position of the connecting portion 17 of the crystal box that matches it, as long as the two can snap and fit with each other.

The second groove 14 is located on the second clamping part 12, and the second groove 14 is used to connect and cooperate with the wafer boat to complete the clamping process of the wafer boat.

Optionally, the second groove 14 is recessed along the thickness direction Z, and its purpose is to match the connection columnar part of the wafer boat to form a connection to the wafer boat. The second grooves 14 arranged in pairs can be respectively Match the two connecting pillars of the wafer boat to form a more stable connection.

While the wafer boat is connected to the second groove 14 on the second clamping part 12, the opposite first clamping part 11 can also form a certain enclosure for the wafer boat, thereby further improving the stability of the connection and preventing The wafer boat is deflected or detached.

The clamping device 100 provided by the embodiment of the present application can form a first groove 13 and a second groove 14 in the clamping device 100, so that the first groove 13 can be connected with the crystal box to form a pair of crystals. The cassette is clamped and connected with the wafer boat through the second groove 14 to clamp the wafer boat. Therefore, during the transportation process, the clamping device 100 can be used to realize automatic transportation of the wafer box. It can also realize automatic transportation of the wafer boat. It is integrated and dual-purpose, avoiding the replacement of the clamping device 100 during the transportation process. It is more convenient to use, saves time and effort, improves the transportation efficiency, and saves the labor of the operator. At the same time, Replacing two devices with one device also saves the purchase cost of the clamping device 100, which is in line with the interests of the enterprise.

As an optional embodiment, please refer to FIG. 1 . The clamping components 20 are provided at both ends of the carrier 10 in the length direction X, and the first clamping part 11 and the second clamping part 12 are vertically connected.

In this embodiment, the two clamping members 1 in the clamping assembly 20 are disposed at both ends of the carrier 10 in the length direction Balance during the process to avoid imbalance and tilt.

The first clamping part 11 and the second clamping part 12 in each clamping part 1 are vertically connected to each other, so that the entire clamping part 1 forms a right-angle structure and can adapt to the outer contour structure of the conventional wafer box or wafer boat. , so that the two can adaptively cooperate, and the crystal box or crystal boat can be more stably accommodated between the two clamping parts 1, thus avoiding structural conflicts.

The clamping device 100 provided by the embodiment of the present application maintains the orientation of the wafer box or wafer boat in the length direction X during the clamping process by disposing the clamping components 20 at both ends of the carrier 10 in the length direction X. The balance improves the safety during transportation, and the right-angled structure formed by the vertical connection of the first clamping part 11 and the second clamping part 12 is better suitable for the outer contour of the wafer box or wafer boat and avoids Structural conflicts, with better applicability.

As an optional embodiment, please refer to Figure 1. The first grooves 13 of the clamping members 1 arranged in pairs are symmetrically distributed in the length direction X, and the second grooves 14 of the clamping members 1 arranged in pairs Symmetrically distributed in the length direction X.

Arranging the two first grooves 13 opposite each other in the length direction The manufacturing process of the two first grooves 13 is adopted to facilitate production and processing.

The two second grooves 14 opposite to each other in the length direction The process is also regular and can also simplify the process.

The clamping device 100 provided by the embodiment of the present application further improves the balance stability during the clamping process of the crystal box or the crystal boat by arranging the first groove 13 and the second groove 14 to be symmetrically distributed. It is more suitable for the clamping of crystal boxes or wafer boats with conventional structures. At the same time, the symmetrical structure has higher regularity, which facilitates the production and molding of the clamping device 100, simplifies the processing process, and improves production efficiency.

As an optional embodiment, please refer to FIGS. 1 to 4 . The first clamping part 11 includes a first base 15 and the second clamping part 12 includes a second base 16 . The first base 15 and the second base 16 For connection, one end of the second base body 16 away from the first base body 15 is at least partially protruded to form a connection portion 17 through which the clamping device 100 is connected to the device to be installed.

In this embodiment, the first clamping part 11 includes a first base 15 and the second clamping part 12 includes a second base 16. The first clamping part 11 and the second clamping part 12 are arranged to intersect with each other, specifically the first base. 15 and the second base body 16, thereby forming the entire clamping member 1.

Optionally, the connection between the first base body 15 and the second base body 16 may be an integral connection or a detachable connection through bolt connection. This application does not specifically limit the specific connection method between the structures.

Optionally, one end of the second base body 16 away from the first base body 15 protrudes in the length direction It can be a robot arm.

Connecting parts 17 protrude from the two oppositely arranged second base bodies 16, and the two connecting parts 17 are arranged facing each other. Both connecting parts 17 are detachably connected to the equipment to be installed, which improves the stability of the connection. Optional Ground, the two connecting parts 17 are in different layers to form a staggered distribution, and are adaptively connected to different corresponding tracks.

The clamping device 100 provided in the embodiment of the present application forms a connection with the equipment to be installed by providing the connecting portion 17, which is conducive to connecting the clamping device 100 to the equipment, completing the clamping and transportation of the crystal box or wafer boat, and improving the efficiency of the clamping device 100. The flexibility of the connection of the clamping device 100 is improved.

As an optional embodiment, please continue to refer to FIGS. 1 to 4 , the first clamping part 11 includes a first fixing part 18 , the second clamping part 12 includes a second fixing part 19 , and the second fixing part 19 is provided On the second base 16 and in contact with the first base 15, the first fixing part 18 is provided on the first base 15 and spaced apart from the second fixing part 19, between the first fixing part 18 and the second fixing part 19 The first groove 13 is formed.

In this embodiment, the first groove 13 is specifically formed by a gap between the first fixing part 18 and the second fixing part 19. Optionally, the first fixing part 18 and the second fixing part 19 may be blocks. Like structure, it can be a kind of fixed block connected to the first base body 15 and the second base body 16 respectively.

The second fixing part 19 is connected to the second base body 16 while extending and abutting against the intersecting first base body 15 , and then the first fixing part 18 is connected to the first base body 15 and forms a fixed position with the second fixing part 19 space, so that the space on the first base body 15 forms the first groove 13 .

Optionally, the specific size of the first groove 13 depends on the distance between the first fixing part 18 and the second fixing part 19, and the depth of the first groove 13 depends on the first fixing part 18 and the second fixing part. The thickness of the component 19 ensures that the size can form an effective snap connection with the crystal box.

Optionally, the connection between the first fixing part 18 and the second fixing part 19 and the first base body 15 and the second base body 16 may be an integral connection, or other detachable connection methods such as bolt connection may be used.

The clamping device 100 provided by the embodiment of the present application provides a structural form that forms a first groove 13, through which the first groove 13 can effectively form a snap connection with the crystal box, and at the same time, the first fixing member 18 is used. The structural form of the second fixing member 19 facilitates the adjustment of the size of the first groove 13, improves the diversity of product structures, is better suitable for various types of crystal boxes, and has stronger clamping adaptability.

As an optional embodiment, please refer to FIG. 1 . One end of the second fixing member 19 away from the first base 15 forms a step structure with the second base 16 , and the step structure is the second groove 14 .

Since the second fixing part 19 is disposed on the second base 16, the extension length of the second fixing part 19 in the length direction A step-like step structure is formed between them, and this step structure is the second groove 14 .

Optionally, the specific size of the second groove 14 depends on the thickness of the second fixing part 19 and the length difference between the second fixing part 19 and the second base 16. The specific size of the second groove 14 needs to be considered for connection with it. The size of the wafer boat connection part 17 ensures the matching between the two, and ultimately forms the clamping of the wafer boat.

In order to adapt to the connection with a conventional wafer boat, the second groove 14 may extend along the width direction Y.

The clamping device 100 provided in the embodiment of the present application provides a structural form of a second groove 14. The second groove 14 is used to realize the connection and clamping of the wafer boat. At the same time, the second fixing member 19 is used to connect and clamp the wafer boat. The staggered layer structure of the second base 16 is also conducive to increasing the diversity of the size of the second groove 14 and can be better adapted to different types of wafer boat structures.

As an optional embodiment, please refer to FIGS. 1 to 4 . The connecting part 17 includes a first connecting part 17 a and a second connecting part 17 b. The first connecting part 17 a and the second connecting part 17 b are within the width of the bearing member 10 arranged at intervals in direction Y.

The clamping device 100 provided in the embodiment of the present application can form a connection with the equipment to be installed by providing a first connection part 17a and a second connection part 17b on the second base 16, thereby further improving the stability of the connection. It provides reliable guarantee for the continuous and stable transportation of crystal boxes or crystal boats.

As an optional embodiment, please refer to Figure 2, the clamping device 100 also includes a measuring piece 2, which is arranged in the first groove 13 and protrudes from the bottom wall of the first groove 13 along the length direction X. The measuring piece 2 can be extended and retracted in the length direction X, and the measuring piece 2 is configured to detect the pressure of the clamping assembly 20 on the crystal box.

In this embodiment, by arranging the measuring piece 2 on the bottom wall of the first groove 13, the crystal box can form a compression fit with the measuring piece 2 during the clamping process, thereby detecting whether the crystal box is in the first groove. The degree of snap-in in 13.

Optionally, the measuring piece 2 has a certain telescopic ability. When the crystal box is not clamped, the measuring piece 2 protrudes from the bottom wall of the first groove 13. When the crystal box is clamped, the measuring piece 2 will be moderately squeezed. Pressed into a compressed state.

The measuring piece 2 can be connected to an external testing device, and the connection state of the crystal box in the first groove 13 can be determined by the compression sensing of the measuring piece 2 by the crystal box, and appropriate adjustments can be made according to different conditions.

A clamping device 100 provided in the embodiment of the present application is provided with a measuring piece 2 on the bottom wall of the first groove 13, and the clamping of the crystal box in the first groove 13 is judged by the shrinkage degree of the measuring piece 2. state, the crystal box can be better adjusted to keep it stable in the clamping device 100 .

A robot arm provided in an embodiment of the present application includes the clamping device 100 as described above.

Optionally, the above-mentioned clamping device 100 is installed on a robot hand. After the clamping device 100 clamps the crystal box or wafer boat, the robot hand is used to complete the transportation of the crystal box or wafer boat.

A mechanical device provided by an embodiment of the present application includes a manipulator as described above.

It should be noted that the above-mentioned manipulator can be applied not only to the semiconductor field, but also to mechanical devices in other technical fields that require transportation. This application does not specifically limit the specific application fields.

The embodiment of the present application provides a clamping device 100, a robot hand and a mechanical device. By forming a first groove 13 and a second groove 14 in the clamping device 100, the first groove 13 can be used to complete the snap connection with the crystal box. , forming a clamping of the crystal box, and completing the clamping with the wafer boat through the second groove 14, forming a clamping of the wafer boat, so that during the transportation process, the clamping device 100 can be used to realize the clamping of the crystal box The automatic transportation can also realize the automatic transportation of the wafer boat. It is integrated and dual-purpose, which avoids the replacement of the clamping device 100 during the transportation process. It is more convenient to use, saves time and effort, improves the transportation efficiency, and saves operators. The labor force is reduced, and one device is used to replace two devices at the same time, which also saves the purchase cost of the clamping device 100, which is in line with the interests of the enterprise.

While the present application has been described with reference to preferred embodiments, various modifications may be made and equivalents may be substituted for components thereof without departing from the scope of the application. In particular, as long as there is no structural conflict, the technical features mentioned in the various embodiments can be combined in any way. The application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

A clamping device for clamping at least one of a wafer box and a wafer boat, wherein the clamping device includes:

A bearing member having a predetermined length, width and thickness;

A clamping assembly is provided on the bearing member. The clamping assembly includes clamping members arranged in pairs and relatively distributed in the length direction of the bearing member. Each of the clamping members is opposite to the bearing member. connect;

Wherein, the clamping member includes a first clamping part and a second clamping part arranged to intersect, the first clamping part is provided with a first groove recessed along the length direction, and the second clamping part The clamping part is provided with a second groove recessed along the thickness direction of the carrier, and the first grooves of the clamping members arranged in pairs are relatively distributed and jointly clamp the crystal box. The second grooves of the clamping member are arranged to be relatively distributed and jointly clamp the wafer boat.
The clamping device according to claim 1, wherein the clamping components are disposed at both ends of the bearing member in the length direction, and the first clamping part is perpendicular to the second clamping part. connect.
The clamping device according to claim 1, wherein the first grooves of the clamping members arranged in pairs are symmetrically distributed in the length direction, and the first grooves of the clamping members arranged in pairs are The second grooves are symmetrically distributed in the length direction.
The clamping device according to claim 1, wherein the first clamping part includes a first base body, the second clamping part includes a second base body, the first base body is connected to the second base body, One end of the second base body away from the first base body is at least partially protruded to form a connection portion, and the clamping device is connected to the device to be installed through the connection portion.
The clamping device according to claim 4, wherein the first clamping part includes a first fixing part, the second clamping part includes a second fixing part, and the second fixing part is disposed on the first fixing part. On the two base bodies and in contact with the first base body, the first fixing parts are arranged on the first base body and are spaced apart from the second fixing parts. The first fixing parts and the second fixing parts are The first groove is formed between the pieces.
The clamping device according to claim 5, wherein an end of the second fixing member away from the first base forms a step structure with the second base, and the step structure is the second groove.
The clamping device according to claim 4, wherein the connecting portion includes a first connecting portion and a second connecting portion, and the first connecting portion and the second connecting portion are spaced apart in the width direction of the carrier. cloth.
The clamping device according to claim 1, wherein the clamping device further includes a measuring piece, the measuring piece is disposed in the first groove and protrudes from the first concave along the length direction. The bottom wall of the groove is provided, the measuring member can expand and contract in the length direction, and the measuring member is configured to detect the pressure of the clamping assembly acting on the crystal box.
A manipulator, which includes the clamping device according to any one of claims 1 to 8.
A mechanical device, including the manipulator according to claim 9.