CN213042889U - Load port automatic positioning and feeding device of wafer FOUP automatic loader - Google Patents

Abstract

The utility model discloses a wafer FOUP automatic loader Load port automatic positioning and feeding device, which comprises a box body, a nut seat, a round-head bolt, a workbench, a loading plate, an on-seat sensor, a positioning column, a loading cylinder, a piston rod, a clamping hook, a support, a movable hole, a feeding cylinder, a solenoid valve, a switch button, a V-shaped mounting plate and a mounting hole; the utility model discloses a, add on the loading board and be in the seat sensor and reference column, make wafer box can be correct place on the loading board, thereby the loading to wafer box has carried out the location, make things convenient for personnel to confirm whether wafer box is in the seat or place properly, the complex accuracy between module and the pay-off module of uncapping has been improved, the normal operating of wafer inspection machine has been ensured, the inspection efficiency of wafer has been promoted, add loading cylinder and trip on the loading board, thereby fixed effect has been played to wafer box, the problem of toppling of wafer box among the pay-off process has been avoided, the security of pay-off has been improved, unnecessary wafer loss has been avoided.

Description

Load port automatic positioning and feeding device of wafer FOUP automatic loader

Technical Field

The utility model relates to a wafer inspection machine technical field specifically is a wafer FOUP automatic loader Load port automatic positioning material feeding unit.

Background

A substrate, also called a substrate, on a wafer on which semiconductor transistors or integrated circuits are fabricated is called a wafer because it is a crystalline material whose shape is circular. In the semiconductor manufacturing process, wafers are processed through various different processes, so that the wafers are transported among a plurality of devices, and in order to facilitate transportation and avoid damage to the wafers by external force, a wafer cassette is commonly used in the industry to protect the transportation of the wafers so as to prevent the wafers from being damaged and incapable of subsequent processing.

When the wafer inspection machine inspects the appearance of the wafer, the wafer cassette containing a plurality of wafers needs to be conveyed to the cover opening module through the feeding module for subsequent processing.

However, most of the feeding modules of the conventional wafer inspection machine cannot position the loading of the wafer cassette, and it is often difficult to determine whether the wafer cassette is in place or properly placed, so that the accuracy of matching between the cover opening module and the feeding module is inevitably affected, the normal operation of the wafer inspection machine is hindered, and the wafer inspection efficiency is reduced.

Therefore, it is necessary to design a Load port automatic positioning and feeding device of a wafer FOUP automatic loader.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a wafer FOUP autoloader Load port automatic positioning material feeding unit to solve the problem that provides among the above-mentioned background art.

In order to solve the technical problem, the utility model provides a following technical scheme: a Load port automatic positioning and feeding device of a wafer FOUP automatic loader comprises a box body, a nut seat, a round-head bolt, a workbench, a loading plate, an on-site sensor, a positioning column, a loading cylinder, a piston rod, a clamping hook, a support, a movable hole, a feeding cylinder, an electromagnetic valve, a switch button, a V-shaped mounting plate and a mounting hole, wherein the top of the box body is fixedly connected with the bottom of the workbench through the nut seat and the round-head bolt, one side of the top of the workbench is fixedly hinged with one side of the bottom of the loading plate, two corners and the other side of the bottom of the loading plate are respectively and fixedly mounted with the on-site sensor and the positioning column, the center of the bottom of the loading plate is fixedly mounted with the loading cylinder, the output end of the loading cylinder is fixedly hinged with one end of the piston rod, the other end of the piston rod is fixedly hinged with one end of the clamping hook, two sides, the top of the support is fixedly connected with one side of the bottom of the loading plate; the other end of the clamping hook extends into a movable hole, and the movable hole is formed in one side of the top of the loading plate.

Further, load the adjacent one side fixed mounting of board bottom and have a feeding cylinder, feeding cylinder's output and one side fixed connection of workstation bottom, one corner fixed mounting has solenoid valve and shift knob respectively of workstation bottom, and the equal fixed mounting in both sides of workstation bottom has the V-arrangement mounting panel, the mounting hole has been seted up to the bottom of V-arrangement mounting panel side.

Furthermore, the nut seat is three and is respectively arranged at two corners and one side of the inner wall of the box body, the center of the top of the nut seat is fixedly connected with one end of the round-head bolt in a sleeved mode, the round-head bolt is three and respectively penetrates through the two corners and the other side of the top of the workbench, and the outer edge of the bottom of the other end of the round-head bolt is in contact with the top of the workbench.

Furthermore, the tops of the seat sensor and the positioning column extend out of the top of the loading plate.

Further, the top of the switch button extends out of the top of the workbench.

Compared with the prior art, the utility model discloses the beneficial effect who reaches is: according to the Load port automatic positioning and feeding device of the wafer FOUP automatic loader, the wafer box can be correctly placed on the loading plate by additionally arranging the presence sensor and the positioning column on the loading plate, so that the loading of the wafer box is positioned, a person can conveniently confirm whether the wafer is in the presence or is properly placed, the matching accuracy between the cover opening module and the feeding module is improved, the normal operation of the wafer inspection machine is ensured, and the inspection efficiency of the wafer is improved; the loading cylinder and the clamping hook are additionally arranged on the loading plate, so that the wafer box is fixed, the overturning problem of the wafer box in the feeding process is avoided, the feeding safety is improved, and unnecessary wafer loss is avoided.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 is a schematic perspective view of the present invention;

FIG. 2 is a front view of the overall structure of the present invention;

fig. 3 is a bottom view of the overall structure of the present invention;

in the figure: 1. a box body; 2. a nut seat; 3. a round head bolt; 4. a work table; 5. a loading plate; 6. a presence sensor; 7. a positioning column; 8. a loading cylinder; 9. a piston rod; 10. a hook is clamped; 11. a support; 12. a movable hole; 13. a feeding cylinder; 14. an electromagnetic valve; 15. a switch button; 16. a V-shaped mounting plate; 17. and (7) installing holes.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a technical solution: a Load port automatic positioning and feeding device of a wafer FOUP automatic loader comprises a box body 1, a nut seat 2, a round-head bolt 3, a workbench 4, a loading plate 5, an on-seat sensor 6, a positioning column 7, a loading cylinder 8, a piston rod 9, a clamping hook 10, a support 11, a movable hole 12, a feeding cylinder 13, a solenoid valve 14, a switch button 15, a V-shaped mounting plate 16 and a mounting hole 17, wherein the top of the box body 1 is fixedly connected with the bottom of the workbench 4 through the nut seat 2 and the round-head bolt 3, the three nut seats 2 are respectively arranged at two corners and one side of the inner wall of the box body 1, the center of the top of the nut seat 2 is fixedly sleeved with one end of the round-head bolt 3, the three round-head bolts 3 respectively penetrate through the two corners and the other side of the top of the workbench 4, the outer edge of the bottom of the other end of the round-head bolt 3 is contacted with the top of the workbench 4, one side of the top of the, two corners and the other side of the bottom of the loading plate 5 are respectively and fixedly provided with an on-seat sensor 6 and a positioning column 7, the tops of the on-seat sensor 6 and the positioning column 7 extend out of the top of the loading plate 5, and the on-seat sensor 6 and the positioning column 7 are additionally arranged on the loading plate 5, so that a wafer box can be correctly placed on the loading plate 5, the loading of the wafer box is positioned, whether a wafer is in a seat or is properly placed or not is conveniently confirmed by personnel, the matching accuracy between the cover opening module and the feeding module is improved, the normal operation of a wafer inspection machine is ensured, and the inspection efficiency of the wafer is improved; a loading cylinder 8 is fixedly installed in the center of the bottom of the loading plate 5, the output end of the loading cylinder 8 is fixedly hinged with one end of a piston rod 9, the other end of the piston rod 9 is fixedly hinged with one end of a clamping hook 10, two sides of the middle section of the clamping hook 10 are fixedly hinged with one end of a support 11, and the top of the support 11 is fixedly connected with one side of the bottom of the loading plate 5; the other end of the clamping hook 10 extends into the movable hole 12, the movable hole 12 is formed in one side of the top of the loading plate 5, a feeding cylinder 13 is fixedly mounted on one side adjacent to the bottom of the loading plate 5, the output end of the feeding cylinder 13 is fixedly connected with one side of the bottom of the workbench 4, an electromagnetic valve 14 and a switch button 15 are fixedly mounted at one corner of the bottom of the workbench 4 respectively, the top of the switch button 15 extends out of the top of the workbench 4, V-shaped mounting plates 16 are fixedly mounted on two sides of the bottom of the workbench 4, mounting holes 17 are formed in the bottom ends of the side faces of the V-shaped mounting plates 16, and the loading cylinder 8 and the clamping hook 10 are additionally arranged on the loading plate 5, so that the wafer box is fixed, the overturning problem of the wafer box in the feeding process is avoided, the feeding safety is improved, and unnecessary wafer loss is avoided; when the utility model works, firstly, the box body 1 is arranged at the corresponding position on the wafer inspection machine through the mounting hole 17 on the V-shaped mounting plate 16, then the workbench 4 provided with the loading plate 5 is arranged on the box body 1 through the nut seat 2 and the round head bolt 3, then the correct wafer box is arranged on the loading plate 5 through the positioning column 7, and simultaneously the wafer box is pressed down on the seat sensor 6, thereby confirming that the wafer box is arranged completely, then the loading cylinder 8 is opened through the switch button 15 and the electromagnetic valve 14, the piston rod 9 pushes one end of the clamping hook 10, further the other end of the clamping hook 10 rotates upwards in the movable hole 12 around the support 11, further the wafer box is fixed, loading is completed, finally, the feeding cylinder 13 is opened through the switch button 15 and the electromagnetic valve 14, the output end of the feeding cylinder 13 is enabled to turn over the loading plate 5 when extending, further the cover opening module of the wafer inspection machine is conveyed to the wafer box, therefore, the cover opening module can conveniently perform subsequent processing on the wafer box, the matching accuracy between the cover opening module and the feeding module is improved, the normal operation of the wafer inspection machine is ensured, and the inspection efficiency of the wafer is improved.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (5)

1. The utility model provides a wafer FOUP autoloader Load port automatic positioning material feeding unit, includes box (1), nut seat (2), button head bolt (3), workstation (4), loading plate (5), on-the-spot sensor (6), reference column (7), loading cylinder (8), piston rod (9), trip (10), support (11), activity hole (12), feeding cylinder (13), solenoid valve (14), shift knob (15), V-arrangement mounting panel (16) and mounting hole (17), its characterized in that: the top of the box body (1) is fixedly connected with the bottom of a workbench (4) through a nut seat (2) and a round-head bolt (3), one side of the top of the workbench (4) is fixedly hinged with one side of the bottom of a loading plate (5), two corners and the other side of the bottom of the loading plate (5) are respectively and fixedly provided with a seat sensor (6) and a positioning column (7), a loading cylinder (8) is fixedly arranged at the center of the bottom of the loading plate (5), the output end of the loading cylinder (8) is fixedly hinged with one end of a piston rod (9), the other end of the piston rod (9) is fixedly hinged with one end of a clamping hook (10), two sides of the middle section of the clamping hook (10) are fixedly hinged with one end of a support (11), and the top of the support (11) is fixedly connected with one side of the bottom of the loading plate (5); the other end of the clamping hook (10) extends into the movable hole (12), and the movable hole (12) is formed in one side of the top of the loading plate (5).

2. The Load port automatic positioning and feeding device of the wafer FOUP automatic loader of claim 1, wherein: adjacent one side fixed mounting of loading plate (5) bottom has pay-off cylinder (13), one side fixed connection of output and workstation (4) bottom of pay-off cylinder (13), the one corner of workstation (4) bottom fixed mounting respectively has solenoid valve (14) and shift knob (15), and the equal fixed mounting in both sides of workstation (4) bottom has V-arrangement mounting panel (16), mounting hole (17) have been seted up to the bottom of V-arrangement mounting panel (16) side.

3. The Load port automatic positioning and feeding device of the wafer FOUP automatic loader of claim 1, wherein: the nut seat (2) is three and is respectively arranged at two corners and one side of the inner wall of the box body (1), the center of the top of the nut seat (2) is fixedly sleeved with one end of the round-head bolt (3), the round-head bolt (3) is three and respectively penetrates through two corners and the other side of the top of the workbench (4), and the outer edge of the bottom of the other end of the round-head bolt (3) is in contact with the top of the workbench (4).

4. The Load port automatic positioning and feeding device of the wafer FOUP automatic loader of claim 1, wherein: the tops of the seat sensor (6) and the positioning column (7) extend out of the top of the loading plate (5).

5. The Load port automatic positioning and feeding device of the wafer FOUP automatic loader of claim 1, wherein: the top of the switch button (15) extends out of the top of the workbench (4).

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